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60 results about "Transparent electronics" patented technology

Seed crystal layer-assisting surface texturing zinc oxide transparent conductive film and preparation method thereof

The invention provides a seed crystal layer-assisting surface texturing zinc oxide transparent conductive film and a preparation method thereof. By means of the assistance of a zinc oxide seed crystal layer or a zinc oxide-doped seed crystal layer on a substrate, a nucleating/growing process simultaneously happening in a zinc oxide-doped film deposition process is separated into two independent stages, and then, a highly directional compact seed crystal layer and a texturing film which has a rough surface and rapidly grows by taking the seed crystal layer as an initial crystal nucleus are formed. The high-texturing surface (better optical trapping or optical capturing effect) of the zinc oxide film prepared by the invention, with unique characteristics, is far superior to similar literature reports in transparent electrical conductivity. The seed crystal layer-assisting surface texturing zinc oxide transparent conductive film prepared by the invention is simple and easy to implement, has low manufacturing cost, is suitable for mass production, can be matched with a solar cell preparation process and has a broad application prospect in the field of transparent electronics and novelphotoelectric devices.
Owner:山东中科泰阳光电科技有限公司

Method for preparing high-resistance transparent zinc oxide (ZnO) thin film by utilizing direct current magnetic control sputtering equipment

The invention relates to a method for preparing a high-resistance transparent zinc oxide (ZnO) thin film by utilizing direct current magnetic control sputtering equipment, which is characterized in that based on Zn-rich (or O2-inefficient) zinc oxide-based wide bandgap ceramic material target, direct current magnetic control sputtering is utilized to replace traditional radio frequency magnetic control sputtering to prepare the high-resistance ZnO-based transparent thin film, and the transparent thin film is used for the diffusion barrier layers and the window layers of thin film solar cells. Through regulating technological parameters, the resistivity of the prepared high-resistance ZnO-based transparent thin film can be controlled to be within the range of 104-108omega.cm, and the average transmissivity in visual and near infrared zones is about 90 percent. Compared with the high-resistance ZnO-based thin film prepared a radio frequency magnetic control sputtering method based on a commercial intrinsic ZnO ceramic target, under the condition of same film thickness, the transmissivity, the resistivity and the surface toughness are equivalent to those of the thin film prepared by the method of the invention. The high-resistance transparent zinc oxide (ZnO) thin film has a simple preparation process, low cost and high transparency in the visual and near infrared zones, and can be widely applied to the field of transparent electronics and novel photoelectric devices, especially the thin film solar cells.
Owner:山东中科泰阳光电科技有限公司

Zinc oxide-based wide bandgap ceramic target and preparation method thereof

The invention relates to a zinc oxide-based wide bandgap ceramic target and a preparation method thereof. The preparation method is characterized by comprising the following steps: preparing a ZnO nanometer powder with high sintering activity by adopting a liquid-phase coprecipitation method, and carrying out superhigh-compactness sintering by taking the nanometer powder as a raw material through a unique sintering process at the temperature of being not higher than 900 DEG C to obtain a high-compactness Zn-rich (or O2-inefficient) ZnO target. Based on the Zn-rich (or O2-inefficient) ZnO target, direct current magnetic control sputtering can be utilized to replace traditional radial frequency magnetic control sputtering to prepare a high-resistance ZnO-based transparent thin film, and the high-resistance ZnO-based transparent thin film can be widely applied to the field of transparent electronics and novel photoelectric devices, especially the diffusion barrier layers and the window layers of thin film solar cells. The high-performance ZnO-based ceramic target prepared by the invention has a simple preparation process, low cost, very high transmissivity and suitable resistivity, can be used as a target for preparing the high-performance high-resistance ZnO-based transparent thin film and has a broad application prospect in the field of solar cells and photoelectric devices.
Owner:山东中科泰阳光电科技有限公司

MgxZn1-xO electrically induced resistance change film and preparation method of asymmetrical structure heterojunction thereof

The invention discloses a MgxZn1-xO electrically induced resistance change film and a preparation method of an asymmetrical structure heterojunction thereof. The preparation method comprises the steps of: using glass plated with ITO (Indium Tin Oxide), AZO and other transparent conductive oxide films as a substrate; dropping prepared MgxZn1-xO sol on the substrate, carrying out spinning-coating and making a wet film, carrying out low-temperature drying treatment; carrying out preheating treatment on the dried film until a MgxZn1-xO film with required thickness is obtained; annealing the MgxZn1-xO to ensure that the film is crystallized; naturally cooling a sample to obtain the MgxZn1-xO electrically induced resistance change film; and preparing a metal top electrode film on the surface of the film by adopting a direct-current magnetron sputtering process to obtain the asymmetrical structure heterojunction of a metal film/MgxZn1-xO/transparent conductive oxide film. The invention has the advantages of capability of realizing large-area film manufacture, low cost, higher high/low resistance ratio and lower setting voltage and resetting voltage and capability of greatly improving anti-fatigue property of the electrically induced resistance change film, and can be applied to the field of transparent electronics.
Owner:GUILIN UNIV OF ELECTRONIC TECH

Gallium-molybdenum-codoped indium tin oxide ceramic target, gallium-molybdenum-codoped indium tin oxide transparent conductive film and preparation method

The invention discloses a gallium-molybdenum-codoped indium tin oxide ceramic target, a gallium-molybdenum-codoped indium tin oxide transparent conductive film and a preparation method. The gallium-molybdenum-codoped indium tin oxide (InSnGaMo) ceramic target is prepared as follows: mixing In2O3 powder, SnO2 powder, Ga2O3 powder and absolute ethyl alcohol, ball milling, pre-combining, ball milling again, pelleting, forming, sintering and annealing; and the gallium-molybdenum-codoped indium tin oxide (InSnGaMo) transparent conductive film is prepared as follows: arranging the gallium-molybdenum-codoped indium tin oxide (InSnGaMo) ceramic target in a pulse laser deposition device for deposition. In the invention, the preparation process is simple, the production is easy, the repeatability is good, and the production cost is lowered. The InSnGaMo ceramic target has the advantages of lower cost, higher relative density, and lower resistivity. The InSnGaMo transparent conductive film has a stable structure under high temperature, extremely low resistivity (less than 10-4Omega cm) and high light transmittance (more than 90%), good electrical and optical properties, and simultaneously has good weak acid corrosion property. The invention has wide application prospect in the transparent electronics field and novel photoelectric device field.
Owner:YANGZHOU UNIV

Method for preparing Mn-Zn oxide electrogenerated resistive thin films and asymmetric light-pervious resistive capacitors thereof

The invention discloses a method for preparing Mn-Zn oxide electrogenerated resistive thin films and asymmetric light-pervious resistive capacitors thereof, which comprises the following steps of: preparing an Mn-Zn oxide electrogenerated resistive thin film by taking glass plated with a transparent conductive oxide thin film as a substrate and using a CSD (chemical solution deposition) technique, and then by using a direct-current magnetron sputtering technique, preparing a metal thin film upper electrode and obtaining a corresponding asymmetric light-pervious resistive capacitor. The method disclosed by the invention has the advantages that (1) the components of the thin film are controlled accurately, and the components are adjusted (doped) easily, so that an effect of large area film making can be achieved, and the cost is low; (2) because a process scheme of multiple spin coating and layered preheating is adopted, the crystallinity can be improved, the internal stress of the thin film can be reduced, and the properties, especially higher high/low resistance ratio and lower setting voltage and reset voltage, of the thin film can be increased; and (3) the prepared thin film is a capacitor with an asymmetric structure, so that the anti-fatigue properties of the electrogenerated resistive thin film can be greatly improved, and the thin film can be applied to the field of transparent electronics.
Owner:GUILIN UNIV OF ELECTRONIC TECH
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