The invention relates to a method for preparing a high-resistance transparent
zinc oxide (ZnO) thin film by utilizing
direct current magnetic control
sputtering equipment, which is characterized in that based on Zn-rich (or O2-inefficient)
zinc oxide-
based wide bandgap
ceramic material target,
direct current magnetic control
sputtering is utilized to replace traditional
radio frequency magnetic control
sputtering to prepare the high-resistance ZnO-based transparent thin film, and the transparent thin film is used for the
diffusion barrier
layers and the window
layers of thin film solar cells. Through regulating technological parameters, the resistivity of the prepared high-resistance ZnO-based transparent thin film can be controlled to be within the range of 104-108
omega.cm, and the average transmissivity in visual and near
infrared zones is about 90 percent. Compared with the high-resistance ZnO-based thin film prepared a
radio frequency magnetic control sputtering method based on a commercial intrinsic ZnO
ceramic target, under the condition of same film thickness, the transmissivity, the resistivity and the surface
toughness are equivalent to those of the thin film prepared by the method of the invention. The high-resistance transparent
zinc oxide (ZnO) thin film has a simple preparation process, low cost and high transparency in the visual and near
infrared zones, and can be widely applied to the field of
transparent electronics and novel photoelectric devices, especially the thin film solar cells.