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460 results about "Film making" patented technology

Preparation method and application of high-quality single primitive cell thickness chromium-antimony magnetic film

The invention discloses a preparation method and application of a high-quality single primitive cell thickness chromium-antimony magnetic film, and the method comprises the steps: placing a strontium titanate substrate in a cavity of molecular beam epitaxial growth equipment, and carrying out the degassing and high-temperature annealing of the strontium titanate substrate under an ultra-vacuum condition until regular steps appear on the surface of the strontium titanate substrate; and with a chromium source and an antimony source as evaporation sources, growing the chromium-antimony magnetic thin film on the pretreated substrate by adopting a molecular beam epitaxy growth technology. The thin film prepared by the method has extremely remarkable magnetic anisotropy, the easy magnetization axis of the thin film is in the out-of-plane direction, and the magnetization intensity difference in the in-plane direction and the out-of-plane direction is obvious; in addition, the thin film has ferromagnetism, and the coercive field is gradually reduced along with temperature rise; in addition, the film also has stable magnetic properties, and shows the characteristic that the Curie temperature is higher than room temperature. And meanwhile, the preparation method has the advantages of accurately controlling the layer number of the thin film and realizing high-quality growth, and an ideal magnetic thin film material is provided for development of a new generation of semiconductor devices.
Owner:DALIAN UNIV OF TECH

Method and system for AI script generation and element disassembly based on large language model

The invention discloses an AI script generation and element disassembly method and system based on a large language model, and relates to the technical field of computers. The invention aims to assist script creation and disassembly through an artificial intelligence technology and improve the movie production efficiency. In the aspect of script generation, a user quickly builds a story backbone by inputting key information such as a story brief summary and a story type, a keynote, a structure and the like in combination with inspiration and suggestions provided by a large language model, and the story backbone is gradually perfected into an integrated story. A user can flexibly revise, and efficient man-machine cooperation is achieved. In the aspect of script dismantling, the system automatically dismantles elements such as figures, scenes, props and clothes in a script by utilizing a large language model and preset cue words to form detailed description, removes illegal input and redundant information, and finally outputs a standardized Excel table file, so that efficient management and utilization of a script group are facilitated. Human creation skills and AI intelligent assistance are fused, a new way of reducing cost and improving efficiency is brought to movie production, and intelligent development of the movie and television industry is promoted.
Owner:XIAMEN UNIV

Digitization for ai filmmaking in collaborative networks

This disclosure provides an AI filmmaking workflow including AI-assisted storyboarding, AI animation, and post-production processes for creating films. The workflow provides techniques for reconstructing 3D digital environments and characters, and for virtual camera control. The workflow also provides techniques for capturing 2D live-action performances and extracting visual cues. The AI animation process generates synthetic images and video using prompts that are based on virtual camera control in case of 3D digitization and / or visual cues in case of 2D camera capturing. Further, the workflow provides techniques for compositing with AI assistance, to generate a composited video based on the AI-animated video and inputs resulting from 3D digitization and / or 2D video processing. Advanced post-processing techniques are also provided for generating a complete film based on the composited video. This framework is designed to facilitate creative collaborative networks by using a hybrid digitization approach to enhance consistency, directability, and scalability in AI filmmaking.
Owner:TCL TECHNOLOGY GROUP CORPORATION

Porous metal tube loaded high-entropy alloy hydrogen permeation membrane as well as preparation method and application thereof

PendingCN119913449AMolten spray coatingHigh entropy alloysCarbon resistance
The invention relates to the technical field of hydrogen permeation membranes, in particular to a porous metal tube loaded high-entropy alloy hydrogen permeation membrane as well as a preparation method and application thereof. The preparation method comprises the steps that under the inert atmosphere, molybdenum and copper are subjected to mixed ball milling, then cobalt, chromium, iron and nickel are added for mixed ball milling, molybdenum and copper doped cobalt, chromium, iron and nickel high-entropy alloy powder is obtained, then the molybdenum and copper doped cobalt, chromium, iron and nickel high-entropy alloy powder is sprayed to the surface of a porous metal pipe through a supersonic speed hot spraying film making method, and the porous metal pipe is obtained. And a film layer is formed, and the porous metal tube loaded high-entropy alloy hydrogen permeation film is prepared. The high-entropy alloy hydrogen permeation membrane is high in corrosion resistance and suitable for extracting hydrogen from coke oven gas containing much sulfur / carbon impurity gas, and the problems that a conventional compact metal hydrogen permeation membrane is poor in sulfur / carbon resistance and thermal stability are solved.
Owner:SHANDONG UNIV OF SCI & TECH

Atomic deposition spraying cavity and atomic deposition equipment

The invention relates to the technical field of atomic layer deposition technology, in particular to an atomic deposition spraying cavity and atomic deposition equipment, which comprises an upper cavity cover, a spraying head, a gas homogenizing assembly, a substrate and a lower cavity, the upper cavity cover and the lower cavity can define a spraying cavity, the substrate is arranged on the lower cavity and used for bearing a substrate, and the spraying head is arranged on the upper cavity cover; the gas uniformizing assembly is arranged between the spraying head and the substrate and is provided with a gas dispersing plate, a buffer layer and a uniformizing plate; a plurality of air dispersing holes are uniformly formed in the air dispersing plate in a penetrating manner, and a plurality of turbulent flow bulge structures are uniformly arranged at intervals; the gas dispersing plate, the buffer layer and the uniform plate are laminated from top to bottom to form a three-stage flow field regulation and control system, so that the gas flow uniformity and stability are remarkably improved, and the technical problems that in the prior art, the gas homogenizing effect of a single-layer gas homogenizing plate in a spraying cavity is limited, spraying is often uneven, and a compact film cannot be formed are solved; the thickness uniformity of the prepared film is ensured, and the film preparation quality is improved.
Owner:HANGZHOU ZHONGNENG PHOTOELECTRIC TECH CO LTD

A film composition

A film composition including acid copolymer in a range of 1 to 10%, metallocene Linear low-density polyethylene (LLDPE) in a range of 5 to 15%, low density polyethylene (LDPE) in a range of 5 to 10%, anti-block masterbatch in the range of 0.5 to 1%, high density polyethylene (HDPE) in a range of 20 to 50%, plastomer in a range of 5 to 30% and slip additive in a range of 0.5 to 1%. Also disclosed is a film made from the film composition and to a laminate made from the film.
Owner:HUHTAMAKI INDIA LIMITED

A high-barrier and high-temperature retort packaging film made of a single recyclable PP material

The present invention relates to the technical field of high-temperature resistant cooking packaging materials, and discloses a high-barrier high-temperature resistant cooking packaging film based on a single recyclable PP material. The preparation method of the packaging film is as follows: vinylated phenyl double-clamped structure cage-type polyhedral oligomeric silsesquioxane is first compounded with graphene oxide through π-π stacking interaction and hydrogen bond interaction, and then loaded onto polypropylene resin through free radical coupling reaction and molecular chain intercalation method. Finally, a high-barrier polypropylene-based composite material with high temperature resistance and puncture resistance is obtained by extrusion using a twin-screw extruder; the high-barrier polypropylene-based composite material with high temperature resistance and puncture resistance is used as the intermediate layer raw material of a five-layer co-extruded film made of a single PP material, and a high-barrier high-temperature resistant cooking packaging film based on a single recyclable PP material is prepared by using a five-layer co-extrusion blow molding process. After being cooked at 140 °C for 30 minutes, the film product has no abnormal phenomena such as deformation and peeling, and has excellent barrier properties and puncture resistance.
Owner:SUZHOU ZIJIN PLASTIC

Internet customization and batch production process for covers, file boxes and packaging boxes

The invention discloses an internet customization and batch production technology of covers, file boxes and packaging boxes, and belongs to the field of internet customization and industrial production, and the technology comprises an internet customization platform which is used for achieving verification of user identities, selection of product styles, information input and automatic generation of templates; the identification resource library is used for storing identification information of different industry units, including unit names, logo and the like; the registration management module is used for completing information registration, including unit names, addresses, contacts and the like, of using units; the style customization module is used for a user to select product styles and types and supports personalized template design; according to the method, a user can easily complete customization of voucher covers and file boxes, style selection, information input and one-key generation of printing templates through the Internet platform, tedious processes such as plate feeding and film making of traditional printing are not needed, industrial-grade batch production is achieved, and time and labor cost are greatly saved.
Owner:WENXIN DIGITAL TECH CO LTD

Biodegradable composite film with high moisture barrier

A coextruded multi-layer biodegradable composite film was primed either in-line or off-line to form moisture-resistant anchoring structure for EVOH / PHOH barrier coating using primer coating including waterborne polyethyleneimine dispersions and waterborne polyester dispersions. The primed bioplastic composite film was then coated with EVOH / PVOH solution barrier coating. The coated composite film was then metallized through a process of vapor deposition of Aluminum metal in a metallizer chamber. The metallized films made with a process of off-line priming have O2TR in the range of 1.9 to 4.5 cc / m2 / day, and MVTR in the range of 0.1 to 0.4 g / m2 / day; The metallized films made with a process of in-line priming have O2TR in the range of 0.63 to 1.04 cc / m2 / day, and MVTR in the range of 0.027 to 0.075 g / m2 / day.
Owner:TORAY PLASTICS (AMERICA) INC

Flexible conductive film with high substrate adhesion and preparation method and application thereof

The invention discloses a flexible conductive film with high substrate adhesion and a preparation method and application thereof, and belongs to the technical field of flexible conductive films and preparation thereof. The problem of low interface stability between a substrate and a conductive material in a sensing layer of an existing flexible sensor is solved. According to the invention, the uncured PDMS film made of the same material as the PDMS substrate material is firstly spin-coated on the PDMS substrate material, then the conductive material is sprayed on the uncured PDMS film under a heating condition, and the characteristic that the PDMS substrate material and the conductive material can be fused together during heating curing is utilized, so that mechanical mismatch caused by a layering phenomenon between the conductive material and the substrate is eliminated, and the interface stability is improved; and meanwhile, the interface adhesion between the conductive material and the substrate is improved by utilizing an interlocking structure between the sprayed conductive material and the uncured PDMS. The flexible piezoresistive sensor assembled by using the flexible conductive film has good cycling stability, and can monitor human body activities (such as elbow bending, human body gaits and the like) in real time.
Owner:NORTHEAST GASOLINEEUM UNIV

High-barrier composite coating liquid and preparation method thereof

PendingCN119286319AImprove barrier propertiesNo deterioration of barrier propertiesPolyether coatingsPolymer scienceComposite membrane
The invention belongs to the technical field of high polymer materials, and particularly relates to a high-barrier composite coating liquid and a preparation method thereof. Aiming at the problems of poor barrier property and limited application scene of a PE (polyethylene) film in the prior art, the invention provides the high-barrier composite coating liquid and the preparation method thereof, and the high-barrier composite coating liquid comprises the following components in parts by mass: 25-35 parts of deionized water, 45-65 parts of low-polymerization-degree PVA (polyvinyl alcohol) emulsion, 10-25 parts of low-polymerization-degree ethylene maleic anhydride homopolymer and 0.5-2 parts of flow improver. The composite coating liquid provided by the invention is coated on the surface of a PE film, so that the problem of poor barrier property of a PE film made of a single material can be effectively solved, and the PE film can partially replace composite films such as PET / PE, PA / PE, KPET / PE or PET / PA / PE of a three-layer structure, BOPP / PA / PE and the like.
Owner:ZHEJIANG BILI POLYMER TECH CO LTD

Humidity control apparatus and materials

A ventilation port maintains the humidity range within a sealed or partially sealed enclosure maintaining a level of atmospheric moisture such as a greenhouse. The port is comprised of a polymer blend film made of a hydrophilic component serving as the water-absorbing material and substrate component serving as the mechanical backbone. The film is designed to bend and open the port when the humidity within the enclosure exceeds a predetermined level outside the humidity range, allowing for the venting of excess humidity. Once the humidity falls back within the desired range, the film returns to its original state and closes the port. A humidity sensing device is also disclosed including the film with a piezoresistive material layer, electrodes in electrical communication with the layer, and an electrical measurement device to measure resistivity or capacitance. The strain of the layer due to changes in humidity results in changes in its electrical properties, allowing the device to indicate corresponding humidity levels.
Owner:UNIV OF SOUTH FLORIDA

Automatic reset type high-sensitivity over-current protector

The utility model relates to the field of over-current protectors, and discloses an automatic reset type high-sensitivity over-current protector which comprises a machine body and two fixing frames, a display is fixedly installed on the surface of the machine body, the upper end and the lower end of the machine body are fixedly connected with connecting wires, and limiting blocks and sealing films are fixedly installed on the inner walls of the fixing frames. A piston is slidably connected to the inner wall of the fixing frame, the size specification of the surface of the piston is in interference fit with the size specification of the inner wall of the fixing frame, and a sliding frame is fixedly mounted at one end of the piston; the fixing frame is installed on the surface of the machine body, the limiting block and the sealing film which are made of rubber materials are installed on the inner wall of the fixing frame, the piston is slidably installed on the inner wall of the fixing frame, and the sliding frame is fixedly connected to one end of the piston, so that the piston is controlled by means of the sliding frame to push air in the fixing frame to the sealing film; therefore, the sealing film and the limiting block are kept in contact with the surface of the connecting line, and external moisture is prevented from entering the connecting position of the machine body and the connecting line.
Owner:CHANGZHOU YUANDA ELECTRONIC TECH CO LTD

Methods of making films from pectin- and protein-containing feedstock and films made thereby

Methods of making films with feedstock comprising biomass. The methods include treating a feedstock comprising biomass with an acidic aqueous solution to yield a solid phase and a liquor, generating a forming fluid with the liquor, and generating a film from the forming fluid. Some versions include comminuting the solid phase to generate a comminuted solid phase and including the comminuted solid phase in the forming fluid. The biomass preferably contains relatively high amounts of pectin and protein. The films can be in the form of standalone films or coatings on substrates such as paper. The films provide oil and grease resistance and air impermeability, among other advantages.
Owner:AUBURN UNIVERSITY

Composite current collector and preparation method thereof

The invention discloses a composite current collector, which comprises a base film made of a polymer material; the conductive layer is arranged on the base film; the conductive layer sequentially comprises a first aluminum layer, an alloy diffusion layer and a second aluminum layer in the direction far away from the base film; the alloy diffusion layer comprises a plurality of inserted metal layers and aluminum plating layers which are alternately stacked; each insertion metal layer comprises at least one plating layer formed by adding elements, and the adding elements comprise at least one of metal elements with the metal diffusivity larger than that of aluminum. According to the invention, the added metals can occupy active sites firstly and inhibit the growth of aluminum crystals, so that intermetallic compounds formed by the metals and aluminum are distributed in a grain boundary or boundary in a spherical and short rod shape, and a large number of dislocations are distributed in a metal structure, thereby improving the bonding strength and tensile strength of a metal coating and improving the corrosion resistance of the coating. And the corrosion resistance can also be improved, and the problems of plating layer layering and falling off when the composite film is pulled or rolled can be solved.
Owner:JIANGYIN NANOPORE INNOVATIVE MATERIALS TECH LTD

Grinding head, grinding equipment and grinding method

ActiveCN119427199AImprove grinding yieldLapping machinesWork carriersWaferStructural engineering
The embodiment of the invention provides a grinding head, grinding equipment and a grinding method, and the grinding head comprises a grinding head support; the first grinding sleeve is borne in the grinding head support, the first grinding sleeve comprises a base film, the base film is suitable for being elastically deformed in the axial direction of the first grinding sleeve, and when the first grinding sleeve is used for grinding, the front face of the base film makes contact with a wafer to be ground; the one or more upright inverted-T-shaped annular air bags are located in the base film and abut against the back face of the base film; the one or more inverted T-shaped annular air bags are located in the base film and abut against the back face of the base film; wherein the upright inverted-T-shaped annular air bags and the inverted inverted-T-shaped annular air bags are alternately arranged on the base film at intervals, and the side walls of the adjacent upright inverted-T-shaped annular air bags and the inverted inverted-T-shaped annular air bags abut against each other. By adopting the grinding head provided by the embodiment of the invention, the wafer grinding yield can be improved.
Owner:ZHEJIANG ICSPROUT SEMICONDUCTOR CO LTD

Adhesive film suitable for packaging Mini / Micro LED display panel

According to the adhesive film suitable for packaging the Mini / Micro LED display panel, through the semi-cured film made of the photo-thermal dual-curing composite glue, the wetting layer is formed by epoxy resin which does not participate in ultraviolet light curing in the adhesive film structure, the wettability of a film material to a substrate is improved, the filling effect of the film material to a cavity in the bottom of a chip is also improved, and the packaging quality of the chip is improved. The adhesive film is special in structure, easy to prepare and use and good in wettability to the Mini / Micro LED substrate, a chip can be embedded into the adhesive layer easily, the chip bottom filling effect is better, reliability is high, and cost is low. The problems that in the traditional adhesive film packaging process, permeability needs to be improved through a high-temperature softening adhesive layer, chip embedding is assisted, chip underfilling is carried out in advance, and reliability testing is difficult to pass are solved.
Owner:GUANGZHOU SILICON CORE NEW MATERIALS CO LTD

Scrap edge film recycling device for cement bag film spraying line and using method of waste edge film recycling device

The invention discloses a slitter edge film recovery device for a cement bag lamination line and a use method of the slitter edge film recovery device, and belongs to the field of slitter edge film recovery. Comprising a rack and a winding roller, the output end of the winding roller is correspondingly connected with a winding motor, the two ends of the top of the winding roller are each provided with a cutting knife used for cutting a laminated film, the outer side of the bottom of the winding roller is provided with a circulation mechanism used for collecting a waste edge film, and a distance adjusting mechanism used for adjusting the positions of the cutting knives is arranged over the winding roller; through the arrangement of the spacing adjusting mechanism and the circulation mechanism, the positions of the cutting knife, the first absorption pipe and the second absorption pipe can be adjusted through the spacing adjusting mechanism and the traction assembly according to the actually needed packaging bag size, it is guaranteed that cut waste edge films can be efficiently and accurately collected, and the production efficiency is improved. And the problems that the position of the suction nozzle cannot be adjusted in time according to the film making size change in a traditional system, so that the waste edge film falls off and is polluted, the recovery efficiency is low, and the subsequent treatment cost is increased are solved.
Owner:LONGYAN HONGXIANG IND PACKAGING CO LTD

A roll-to-roll film coating production line, system and method

The present application discloses a roll-to-roll coating film production line, system and method, which relates to the field of coating technology. The production line includes: a base film device, a front protective film coating device, a coating device, a curing device, a heat drying device, and a rear film peeling and coating device; the support film is attached to the back of the base film by electrostatic adhesion; the composite film formed by the base film and the support film enters a sealed atmosphere box; the coating device is arranged in the atmosphere box, and is used to coat the composite film entering the atmosphere box; the curing device performs a curing treatment on the coated composite film, and the composite film after the curing treatment leaves the atmosphere box; the heat drying device is used to perform a heat drying treatment on the composite film after the curing treatment; the rear film peeling and coating device includes a support film stripping roller, a protective film coating roller and a winding roller, and the composite film is stripped of the support film by the support film stripping roller, and then the protective film is electrostatically adsorbed and wound on the winding roller. The device realizes high-precision and stable coating of air-sensitive slurry and non-invasive curing film-making process.
Owner:SHENZHEN INST OF ADVANCED TECH

TPU printable substrate film

The present invention provides a TPU printable substrate film, comprising a first release film layer, a substrate layer, an installation adhesive layer and a second release film layer sequentially laminated; the first release film layer is provided on the substrate layer, the installation adhesive layer is provided underneath the substrate layer, and the second release film layer is provided underneath the installation adhesive layer; wherein a thickness of the first release film layer is 12˜188 μm; a thickness of the substrate layer is 2˜188 μm; a thickness of the installation adhesive layer is 20˜100 μm and a thickness of the second release film layer is 12˜188 μm. The present invention provides a TPU printable substrate film, configured for production and manufacturing of the printable decal films, and the TPU printable substrate films made by spraying coating have very good extension and anti-aging performance.
Owner:QUAD FILM LTD

Portable elevator key film pasting tool

The utility model provides a portable elevator key film pasting tool, and belongs to the technical field of protective film pasting tools. The film pasting tool solves the problem that an existing film pasting tool is poor in stability during film pasting. The two pressing rods are arranged at the position of an accessory of the film outlet in the shell, the extending end of the wound pasting film penetrates through the space between the two pressing rods and extends out of the outlet, when the pasting film is pulled outwards to be output, the film makes contact friction with the pressing rods and can drive the pressing rods to rotate, in this way, the pasting film can be more straightened through the counter-acting force, and the film pasting effect can be better improved. Meanwhile, the two pressing rods can play a role in guiding and stretching the film during film pasting, the pressing rods are used for pressing the extending end of the film during film cutting, the cut part is difficult to rebound, in this way, it can be guaranteed that the part where the film pasting extending end can be reserved after cutting is conducted every time at a film outlet opening, and the stability during film pasting is improved.
Owner:SHANGHAI FUMED TIANJIAN CO LTD

Liquid-based cell automatic slide making machine

The liquid-based cell automatic slide making machine relates to the field of experimental instruments, and solves the problems of the existing slide making machines being expensive in price and consumables, and the low efficiency and poor quality of manual slide making. The present invention comprises: a pipette tip box, a specimen collection bottle box, and a glass slide box arranged on a machine base; two Y-axis motion mechanisms installed on the left and right sides of the upper surface of the machine base; a support frame, the two ends of which are respectively fixed on the two Y-axis motion mechanisms; an X-axis motion mechanism installed on the support frame; a Z-axis motion mechanism installed on the X-axis motion mechanism; a test tube rack rotating drive mechanism installed inside the machine base; a test tube rack fixed on the upper end of the test tube rack rotating drive mechanism and located in the central through hole of the machine base, the outer ring and inner ring of the test tube rack are respectively provided with a plurality of evenly distributed card slots; a centrifuge tube installed in the card slot of the outer ring of the test tube rack; and a test tube installed in the card slot of the inner ring of the test tube rack. The present invention is easy to operate, safe and reliable, energy-saving and environmentally friendly, low in cost, and high in slide making quality and efficiency.
Owner:JILIN WANFANG MEDICAL TECH CO LTD

Polyphosphazene-based long-life room-temperature phosphorescent material and application thereof

The invention discloses a long-life room-temperature phosphorescent material based on polyphosphazene and application thereof. The phosphorescent material is obtained by functionalizing tripolyphosphazene and doping the functionalized phosphor with a polyvinyl alcohol matrix. The functionalized phosphor obtained by functionalization of the tripolyphosphazene comprises THMD, THDD, THMOD or THDOD. The invention also discloses a phosphorescent film prepared from the phosphorescent material. The phosphorescent film shows excellent luminescence performance, high transparency and good processing performance. The film is applied to a flexible electronic device and a fingerprint recording technology, the doped film has extremely high mechanical flexibility and transparency, large-area preparation can be realized without generating cracks, and the application field of an organic long-life room-temperature phosphorescent material is expanded.
Owner:CHONGQING UNIV OF TECH

Machine learning model training with parameter variation in filmmaking

A method trains machine learning models for filmmaking by varying a single camera parameter, capturing shots, and processing these to adjust the Al model. A system includes processors and memory to perform single-parameter variation, capture and process shots, and enhance Al model understanding. A non-transitory computer-readable medium has instructions for configuring a multi-camera environment, varying a camera parameter, and processing shots to improve an Al model.
Owner:FIN BONE LLC

Hot film anemograph

The utility model discloses a hot film anemograph which comprises a detection element, a signal converter and a signal processor. The detection element at least comprises a group of carbon nano tube films, and the carbon nano tube films are thin films made of a carbon nano tube material of which the resistance value changes along with the temperature change; the signal converter amplifies the resistance change signal of the carbon nanotube film output by the detection element to obtain an amplified signal; and the signal processor processes the amplified signal output by the signal converter. According to the hot film anemograph disclosed by the embodiment of the invention, the sensitivity of the hot film anemograph is improved by improving the hot film in the detection element, and a worker can obtain more accurate reference data for calculating the wind speed according to a processing result of an amplified signal.
Owner:FUBO (JINCHENG) TECHNOLOGY INNOVATION CO LTD +1

Method for manufacturing large-width polymer film coverings

PCT designated stageWO2025239788A1Polymer scienceMetallised film
The present invention relates to methods for connecting polymer films made of thermoplastic materials (including foil-laminated and metallized films) and makes it possible to connect such bodies by fusion welding. The present method for manufacturing a large-width film covering makes it possible to obtain a finished product having a width of up to 36 metres, depending on requirements. The method also makes it possible to produce a good-quality and even longitudinal seam over the entire length of a roll of material (up to 100 running metres).
Owner:OBSHCHESTVO S OGRANICHENNOJ OTVETSTVENNOSTYU PO GENEZIS

Thin film manufacturing method and thin film

The present invention relates to a method for manufacturing a thin film, and the thin film includes an adsorption process for adsorbing a high-κ dielectric material onto a substrate by injecting a source gas of the high-κ dielectric material, a deposition process for depositing a thin film of the high-κ dielectric material onto the substrate by injecting a reactant gas that reacts with the source gas, and a crystallization process for crystallizing the high-κ dielectric material using plasma.
Owner:JUSUNG ENG