The invention discloses a miniaturized superhigh-temperature water-cooled high-temperature
pressure sensor, which belongs to the technical field of pressure sensors and comprises a lead column, a shell, a conduction beam, a
ceramic circuit board and a pressure-sensitive unit, and the conduction beam, the
ceramic circuit board and the pressure-sensitive unit are arranged in the shell. The shell comprises a
pressure sensing metal diaphragm, a threaded base, a protective sleeve and a packaging bottom cover which are fixedly connected in sequence; the
pressure sensitive beam comprises a conduction beam base, the two sides of the conduction beam base are fixedly connected with a supporting beam base through beam island structures,
pressure sensitive units are arranged on the beam island structures, and a supporting beam is fixedly connected with a threaded base. The
pressure sensing metal diaphragm is fixedly connected with the conduction beam base through the conduction beam; the
voltage-sensitive unit is electrically connected with the
ceramic circuit board; the lead columns penetrate through the packaging bottom cover and the ceramic circuit board and are fixedly connected with the ceramic circuit board. The temperature tolerance of the
pressure sensor is improved, and the defects that a high-temperature
pressure sensor is poor in anti-interference capacity, low in
response frequency, low in measurement sensitivity and the like are overcome.