6 results about "Outgassing" patented technology

A leak and outgassing inspection system according to an embodiment of the present invention comprises: a vacuum transmitter configured to measure the pressure of an insulation space of a double wall of a liquefied gas storage tank; a vacuum pump mounted on a vacuum pipe connected to the insulation space of the double wall of the liquefied gas storage tank, and configured to operate when the pressure of the insulation space measured by the vacuum transmitter rises above a set pressure; and a determination unit analyzing a component of gas sampled during operation of the vacuum pump, and determining whether a cause of an increase in the pressure of the insulation space is any one of a leak or outgassing of the double wall on the basis of an analysis result.

The utility model provides a base and a vapor deposition device. The base comprises a bearing surface, an accommodating cavity, a driving gas conveying pipeline, a gas guide flow channel, a gas collecting groove and an exhaust pipeline, the accommodating cavity is arranged on the bearing surface, and the top surface of the accommodating cavity is opened to place a substrate bearing piece or a substrate; the at least one gas guide flow channel is arranged on the inner bottom surface of the accommodating cavity and comprises a near end part communicated with the driving gas conveying pipeline, so that the driving gas flows towards the tail end part of the gas guide flow channel along the gas guide flow channel; the at least one gas collection tank is arranged in one-to-one correspondence with the gas guide flow channels, the gas collection tank is arranged around the tail end parts of the gas guide flow channels, and at least one first exhaust port is formed in the gas collection tank; the exhaust pipeline is arranged on the base and communicated with the first exhaust ports so that the driving gas entering the exhaust pipeline can be exhausted towards the bottom of the base. The driving gas is exhausted towards the bottom of the base, so that the adverse effect on a process gas flow field above the substrate due to escape of the driving gas is avoided or relieved.

The application discloses a heating path determination method for gas removal of an ultrahigh-temperature inert gas circulation system, and steps are as follows: establishing dynamic state variables of impurity gas in the system, system pumping capacity parameters and safety constraint conditions of refractory alloy during the gas removal process; establishing a coupling relationship between the impurity gas release rate and the system pumping capacity, and determining a main release temperature interval of the impurity gas; analyzing oxidation or oxygen permeation behaviors of the refractory alloy, determining a high-temperature sensitive temperature interval of the refractory alloy, and clarifying dynamic constraint conditions for entering the interval; and combining the main release temperature interval and the high-temperature sensitive temperature interval to determine an allowed trajectory of the system temperature changing with time during the gas removal process. The application combines the state of the impurity gas in the system and the oxidation or oxygen embrittlement risk of the refractory alloy under high-temperature conditions, realizes sufficient removal of the impurity gas in the system, avoids the impurity from entering the high-temperature interval in the high release stage, and thus reduces the risk of significant oxidation or oxygen embrittlement damage of the refractory alloy.

The utility model discloses a kind of gas release measuring devices, including material reaction kettle, carrier gas inlet device, gas outflow device, the first interface is provided on the material reaction kettle, second interface, the carrier gas inlet device is connected with the first interface and provides high-purity carrier gas for material reaction kettle, the gas outflow device is connected with the second interface and gathers the gas released in material reaction kettle.The utility model can simulate the release condition of material volatile organic compound under normal ventilation condition, release gas is collected using passive adsorption principle of adsorption tube, avoid the influence of high temperature and high pressure and other unconventional conditions on the structure and composition of detection material, make the error of measurement result smaller, more close to building engineering material conventional disposal environmental condition, more in line with engineering application, and high-purity inert carrier gas is inhaled, and there is no interference and pollution to the result detection of test material release gas.

The invention discloses a bonding end point judgment method and system based on gas deflation rate monitoring, relates to the technical field of microelectronic manufacturing, semiconductor packaging and MEMS manufacturing, and solves the technical problems that end point judgment mainly depends on indirect methods such as fixed time, specific temperature or pressure / displacement parameters and the like, and judgment is inaccurate. According to the method, a traditional method depending on indirect parameters such as fixed time and temperature is abandoned, end point judgment is carried out by monitoring the intrinsic parameter, namely the deflation rate of the target gas released by the bonding interface in real time, which directly reflects physical and chemical changes of the interface, and the real process of interface fusion and sealing can be sensitively captured; therefore, the strength, the sealing performance and the product yield of the bonding interface are improved, the excellent batch-to-batch consistency is ensured, the composite judgment logic combining the dynamic threshold value condition and the trend stability condition is adopted, intelligent and self-adaptive judgment of the process end point is achieved, and the available process window is widened.

The application discloses a method and device for evaluating the outgassing property of nonmetallic materials, and the method comprises the following steps: placing a sample in a vacuum cavity, vacuumizing the vacuum cavity, heating the sample according to a preset program, keeping the temperature constant after heating, recording the change of the pressure in the vacuum cavity with time in the heating process stage and / or the constant temperature stage to obtain a characteristic pressure-time curve, extracting at least one characteristic parameter for evaluating the outgassing property from the characteristic pressure-time curve, and evaluating the outgassing property of the sample according to the characteristic parameter. The application can quickly, low-cost and defect-relatedly evaluate the outgassing property of nonmetallic materials.