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86 results about "Pellicle membrane" patented technology
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Pellicle (biology), a thin layer supporting the cell membrane in various protozoa. Pellicle mirror, a thin plastic membrane which may be used as a beam splitter or protective cover in optical systems.
A mine-used pouring seal and intrinsic safety type image processing camera with display screen and battery
ActiveCN224319429UGet rid of dependenceAvoid monitoring interruptionsImaging processingElectrical battery
The utility model discloses a mine is poured and is sealed and is with display screen and battery's image processing camera of is safe type, including camera housing, the front end both sides symmetry of camera housing are equipped with the casing, the inside rotation -connected of two casing has the film winding drum, and the transparent protective film is wound between two film winding drums, through the cooperation of transparent protective film and replacement mechanism, the problem of secondary pollution, lens scratch caused by traditional cleaning brush is solved thoroughly. The protective film is always accurate to cover the lens area through the double restraint of guide roller and limiting groove on the limiting plate, and the continuous tension of the clockwork box is matched, so that the film body is flat and wrinkle-free, and the light transmission is stable. The integrated display screen and the key can display the shooting image, the equipment state and the parameter in real time, the operator can judge the shooting effect on site without exporting data, and invalid operation is reduced.
Owner:徐州众图智控通信科技有限公司
Tracing label
The utility model relates to the technical field of traceability labels, and discloses a traceability label which comprises a traceability label mechanism, the top side of the traceability label mechanism is fixedly connected with a transparent protective film, the bottom side of the traceability label mechanism is fixedly connected with a protective film, and the left end and the right end of the protective film are both fixedly connected with auxiliary films. The left end of the traceability label mechanism is fixedly connected with a pattern sticker, the right end of the traceability label mechanism is fixedly connected with a two-dimensional code sticker, the middle part of the front end of the traceability label mechanism is fixedly connected with a display assembly, the traceability label mechanism comprises a wear-resistant layer, and the exterior of the wear-resistant layer is fixedly connected with the traceability label mechanism. According to the traceability label mechanism, the auxiliary film can drive the protective film to be taken from the base layer by swinging the auxiliary film, so that the base layer can be quickly adhered to a required position, the step of tearing the protective film is reduced, and then the adhesion efficiency of the traceability label mechanism is improved.
Owner:WEST ANHUI UNIV
Manufacturing method of large-aperture and high-board-thickness plug-in blind hole and PCB (Printed Circuit Board)
PendingCN121751522AConductive pattern formationPrinted circuit secondary treatmentPrinted circuit boardPellicle membrane
The invention discloses a large-aperture and high-board-thickness plug-in blind hole manufacturing method and a PCB, and the manufacturing method comprises the steps: providing a first optical core board and a substrate with a through hole A, enabling the first optical core board to be laminated and fixed on one side of the substrate, machining a through hole B in the first optical core board, and enabling the through hole B and the through hole A to be aligned and communicated to form a blind hole base hole; plating a conducting copper layer on the inner wall of the base hole of the blind hole; sealing one port, back on to the first optical core plate, of the blind hole base hole by using a protective film, and filling the blind hole base hole with resin; removing the protective film after the resin is cured or semi-cured, and laminating and fixing a second optical core plate on one side, back to the first optical core plate, of the substrate; and cutting the resin for multiple times until the conductive copper layer arranged on the inner wall of the blind hole base hole is completely exposed, and cutting the conductive copper layer into a set thickness to obtain the plug-in blind hole. The manufacturing method is reasonable, simple and easy to operate and implement, and the obtained plug-in blind hole has the advantages of being high in size precision, good in structural stability, good in conduction performance and the like.
Owner:KUNSHAN SUHANG CIRCUIT BOARD
Industrial lens protection cover
Owner:SHENZHEN YUNSI VISION CO LTD
Lithography system having three-dimensional scaffold pellicle structure and related methods
A method is provided. The method includes: generating light by a plasma of a light source of a semiconductor processing tool; generating patterned light by a mask assembly, the patterned light including the light reflected by a pattern of the mask assembly; during generating the patterned light, protecting the mask assembly by a pellicle assembly including a pellicle membrane, the pellicle membrane including a nanotube-based scaffold structure having nanotubes bound together by a capping layer; and performing a semiconductor process on a semiconductor wafer by the patterned light.
Owner:TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
Pellicle membrane, pellicle, and method of making same
PendingCN121399541APhotomechanical apparatusOriginals for photomechanical treatmentNiobiumMetal silicide
A pellicle membrane for a lithographic apparatus is provided, the pellicle membrane comprising a core comprising a metallic silicon carbonitride. Also described is a pellicle comprising such a pellicle membrane, and a lithographic apparatus comprising such a pellicle membrane or pellicle. A method of making a pellicle membrane is also provided, the method comprising sputtering a metal silicide target and a silicon carbide target in a gas stream comprising nitrogen to form a metal silicon carbonitride core, optionally wherein the metal is selected from one or more of niobium, molybdenum, titanium, tungsten, platinum, cobalt, tantalum, palladium, or vanadium. The use of such pellicle membranes, pellicles, lithographic apparatuses or methods in lithographic methods or apparatuses is also described.
Owner:ASML NETHERLANDS BV
Laser plastic welding apparatus
The application discloses laser plastic welding equipment and belongs to the field of laser welding, and comprises a lower cabinet and an upper cabinet fixed on the lower cabinet, a support and a Z-axis platform are fixed on the lower cabinet, a displacement sensor is fixed on the support, a laser generating part is fixed on one side of a moving part of the Z-axis platform, a rotating part is rotatably connected to the lower cabinet, a jacking part is movably connected in the rotating part, and a jacking unit for jacking up the jacking part is fixed in the lower cabinet; a protective film is arranged below the transparent glass, the protective film can form a flexible buffer layer between the workpiece and the transparent glass, the sharp edges or tiny particles on the surface of the workpiece cannot directly contact the glass, and thus the surface of the transparent glass is protected; even if scratches occur, the replaceable protective film can be replaced, and the transparent glass does not need to be repaired, the cost of the protective film is much lower than that of the transparent glass, production cost is reduced, and the maintenance cycle is shortened.
Owner:SHENZHEN NAISITE AUTOMATION EQUIPMENT CO LTD
Pellicle membrane with improved properties
PendingUS20250362587A1NanotechnologyOriginals for photomechanical treatmentThin membraneConformal coating
A pellicle assembly includes a pellicle membrane with a nanotube layer formed from thick nanotube bundles. The pellicle membrane can be formed with multiple layers and has a combination of long lifetime, high transmittance, low deflection, and small pore size. A conformal coating may applied to an outer surface of the pellicle membrane. The conformal coating protects the pellicle membrane from damage that can occur due to heat and hydrogen plasma created during EUV exposure.
Owner:TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
Optical film structure
The embodiment of the utility model belongs to the technical field of optical films. The utility model further relates to an optical film structure which comprises an optical film assembly, one face of the optical film assembly is provided with a first protective film layer, the other face of the optical film assembly is provided with a second protective film layer, and the second protective film layer and the first protective film layer are matched to be used for protection in the machining process of the optical film assembly. The second protective film layer and the first protective film layer are arranged on the two faces of the optical film assembly respectively, the second protective film layer and the first protective film layer are matched for protection in the machining process of the optical film assembly, the situation that dust, woolen yarn and other impurities adhere to the optical film assembly is reduced, the cleanliness of the optical film assembly is remarkably improved, and the service life of the optical film assembly is prolonged. And the reject ratio of downstream TP 100-grade laminating workshops is greatly reduced, and rework and material waste are greatly reduced.
Owner:TRULY OPTO ELECTRONICS
Pellicle membrane for a lithographic apparatus
A pellicle membrane for a lithographic apparatus, the membrane including uncapped carbon nanotubes. A method of regenerating a pellicle membrane, the method including decomposing a precursor compound and depositing at least some of the products of decomposition onto the pellicle membrane. A method of reducing the etch rate of a pellicle membrane, the method including providing an electric field in the region of the pellicle membrane to redirect ions from the pellicle, or heating elements to desorb radicals from the pellicle, preferably wherein the pellicle membrane is a carbon nanotube pellicle membrane. An assembly for a lithographic apparatus, the assembly including a biased electrode near or including the pellicle membrane or heating means for the pellicle membrane.
Owner:ASML NETHERLANDS BV
Pellicle pasting device, pellicle pasting method, pellicle transfer printing device, and pellicle transfer printing method
PendingCN121989438AAdhesive processes with surface pretreatmentOriginals for photomechanical treatmentBiomedical engineeringNanotechnology
Owner:LINTEC CORP
Methods for dry printing carbon nanotube membranes
ActiveUS12557609B2Material nanotechnologySemiconductor/solid-state device manufacturingFiberThin membrane
Methods for preparing a nanotube membrane for use in a pellicle membrane using dry printing are disclosed. Nanotube fibers are produced in a reaction vessel and dry sprayed onto a filter to form the nanotube membrane. The thickness of the nanotube membrane can be controlled by moving the reaction vessel and the filter relative to each other, or by further processing to reduce the thickness of the layer deposited onto the filter. This method reduces the number of process steps, reducing overall production time, and can also be used to produce larger membranes. The pellicle membrane can be formed with multiple layers and has a combination of high transmittance, low deflection, and small pore size. A conformal coating may applied to an outer surface of the pellicle membrane to protect the pellicle membrane from damage that can occur due to heat and hydrogen plasma created during EUV exposure.
Owner:TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
Pellicle film, pellicle, exposure original plate, exposure device, and method for manufacturing pellicle film
Provided is a pellicle film, which includes plural carbon nanotubes, in which an average value of linearity parameters represented by the following Formula (1) of the plurality of carbon nanotubes is 0.10 or less:linearity parameter=standard deviation Sa of a width of single tube / average value Aa of the widthFormula (1)wherein, in Formula (1), the single tube indicates one carbon nanotube included in the plural carbon nanotubes, each of the standard deviation Sa and the average value Aa is calculated based on 11 measurement values obtained by measuring a width of the single tube at intervals of 2 nm along a longitudinal direction of the single tube.
Owner:MITSUI CHEMICALS INC
Pellicle and method for extreme ultraviolet lithography
PendingUS20260140437A1Photomechanical apparatusOriginals for photomechanical treatmentBoron carbonitrideThin membrane
A pellicle for protecting a photomask from contaminant particles during photolithography is provided. The pellicle includes a pellicle membrane having a network of boron carbonitride (BCN) nanostructures. The pellicle membrane is attached to a pellicle frame that is mounted to a photomask to be used during photolithography operations.
Owner:TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
Laminated glass and preparation method thereof
The invention discloses laminated glass and a preparation method thereof. According to the preparation method, before an initial pressing process, an antifouling coating is applied to at least part of the area of the surface of one side, in contact with a vacuum rubber ring or a vacuum bag, of pre-laminated glass, and a layer of protective film is formed after drying; the protective film at least completely covers a predetermined area (generally a gluing area and an edge covering area), and the predetermined area requires that the surface energy does not decline after the laminated glass is prepared; the protective film is then completely removed by washing, and the surface of the fresh glass or the black glaze layer of the glass is exposed.
Owner:FUYAO TECH DEV (SUZHOU) CO LTD
Portable indoor environment detection device
ActiveCN224095759Ureduce shockNon-rotating vibration suppressionMaterial resistanceHeat energyPellicle membrane
The utility model relates to the technical field of indoor environment detection, in particular to a portable indoor environment detection device which comprises a machine body shell, a protection plate is installed at the bottom of the machine body shell, a collection port is formed in one side of a protection pad, and a display panel is installed at the upper end of the machine body shell. A protective film is installed at the upper end of the display panel, a damping spring is installed at the bottom of the display panel, a buffer pad is installed at the bottom of the damping spring, and a buffer column is installed in the buffer pad. The damping spring at the bottom of the protection plate stretches out and draws back, the spring firstly generates elastic deformation to absorb most impact energy, meanwhile, the damper in the protection plate stretches out and draws back to convert the impact energy into heat energy, and the spring and the damper act synergistically to reduce the influence of impact on a control panel in the equipment.
Owner:河南卓远检测有限公司
Building facing and pipeline laying integrated bridge system and method
The invention discloses a building facing and pipeline laying integrated bridge system and method. The building facing and pipeline laying integrated bridge system comprises a load-bearing hoisting module, a pipeline containing module and a decorative surface layer module. Wherein the load-bearing hoisting module provides core support for the whole bridge system and comprises a harness cord hoisting rod and a square steel cross arm; the pipeline containing module is a metal groove box, the metal groove box is used for containing various pipelines in order, a groove is formed in the metal groove box, and square steel cross arms with array type installation holes in multiple faces are arranged in the groove at corresponding distances according to the weight of the pipelines in the bridge through calculation results. And the decorative surface layer module comprises flexible waterproof putty and a tearable plastic protective film. According to the bridge system, a decorated object of the hydroelectric bridge is converted into a part of a decoration base layer, a supporting system of the bridge is built in and hidden through unique structural design, the lower panel of the bridge groove box serves as the decoration base layer, and therefore the bridge system integrating hydroelectric management and decoration is achieved, and the application scene is wide.
Owner:CHINA MCC17 GRP CO LTD
Protective film and preparation method thereof, protective device, protective method and aircraft
The embodiment of the invention discloses a protective film and a preparation method thereof, a protective device, a protective method and an aircraft, the protective film can be arranged on a slat of the aircraft, the protective film is provided with a base body, and a first electrode group and a second electrode group are arranged on the base body to form a base film layer; the first electrodes in the first electrode group are arranged at the two ends of the base body in the first direction at intervals, the second electrodes in the second electrode group are arranged at the two ends of the base body in the second direction at intervals, and the second electrode group is located between the two first electrodes, so that when the slat needs to be subjected to ice prevention, power is supplied to the first electrodes of the first electrode group; the protective film is heated through the two first electrodes, then the slat is heated to prevent ice and remove ice, and when the slat is impacted or impacted by external force to be damaged, power is supplied to the second electrodes of the second electrode group to rebuild damage to cause conductivity change, so that the protective film has dual functions of deicing and damage monitoring; the service life and the use performance of the slat are improved.
Owner:COMMERCIAL AIRCRAFT CORP OF CHINA LTD +2
Novel high-temperature protective film
The utility model discloses a novel high-temperature protective film which is formed by sequentially laminating a high-temperature resistant layer, a framework layer and a base material layer, the framework layer is of a net structure and is arranged between the high-temperature resistant layer and the base material layer, glue is filled between the high-temperature resistant layer and the base material layer, and a plurality of permeation grooves for the glue to permeate are formed in the top surface and the bottom surface of the framework layer. A plurality of permeation holes for glue to permeate are formed in the middle of the framework layer. The framework layer is additionally arranged between the high-temperature-resistant layer and the base material layer and fixed and bonded through glue, the overall strength of the protective film is effectively enhanced, the phenomena of edge curling, bulging, shrinkage and the like of the protective film are reduced, the friction force of the surface of the protective film can be increased through the framework layer, friction between an electronic product and the hand of a client is increased, and the service life of the electronic product is prolonged. And the electronic product is prevented from slipping off.
Owner:HUIZHOU XINGJIALI ELECTRONIC TECHNOLOGY CO LTD
Preparation method of hydrogen-etching-resistant single-walled carbon nanotube composite protective film for extreme ultraviolet lithography mask
The invention relates to the field of preparation of protective films of extreme ultraviolet lithography masks, in particular to a preparation method of a single-walled carbon nanotube composite protective film for a hydrogen-etching-resistant extreme ultraviolet lithography mask. Growing a single-walled carbon nanotube by using a floating catalyst chemical vapor deposition method, and preparing and assembling a single-walled carbon nanotube film by using a vapor filtration deposition method; the surface of the thin film formed by the single-walled carbon nanotube / tube bundle is coated with the hydrogen etching resistant protective layer, so that the hydrogen etching resistant capability of the protective film of the single-walled carbon nanotube base ultraviolet lithography mask plate is improved. Wherein in order to prevent film failure caused by damage to the single-walled carbon nanotubes in the compounding process, the single-walled carbon nanotube film needs to have high crystallinity, and the Raman spectrum G / D ratio of the single-walled carbon nanotube film is gt; 200). The hydrogen plasma etching resistance of the prepared single-walled carbon nanotube composite film is improved by 4-6 times compared with that of an uncompounded single-walled carbon nanotube film, and meanwhile, the single-walled carbon nanotube composite film has 13.5 nm extreme ultraviolet light transmittance exceeding 85%.
Owner:INST OF METAL RESEARCH - CHINESE ACAD OF SCI
Optical elements and pellicle membranes for lithographic apparatus
An optical element for a lithographic apparatus is described, the optical element comprising an anchor layer selected to support a top layer having self-terminating growth in an operating lithographic apparatus or plasma-containing environment. A method for manufacturing the optical element is also described, the method comprising depositing a top layer on the anchor layer via exposure to a plasma, preferably an electromagnetically induced plasma. A lithographic apparatus comprising such an optical element is also described.
Owner:ASML NETHERLANDS BV
Pellicle membrane and method of manufacture
A pellicle membrane includes thermally emissive crystals supported by a matrix, wherein the average thickness of the pellicle membrane is greater than the average grain size of the emissive crystals. Also, there is described a pellicle assembly including such a pellicle membrane, and a lithographic apparatus including such a pellicle membrane or pellicle assembly. Also described is a method of manufacturing a pellicle membrane including emissive crystals in a matrix, the method including controlling at least one selected from: the chemical composition of the emissive crystals, morphology of the emissive crystals, and / or annealing conditions to provide a pellicle membrane having a thickness greater than the average grain size of the emissive crystals.
Owner:ASML NETHERLANDS BV
High strength touch screen cover plate
ActiveCN224328409USynthetic resin layered productsGlass/slag layered productsInsulation layerTouchscreen
The utility model discloses a kind of high-strength touch screen cover plate, including cover plate, protective film and transparent adhesive layer, the cover plate is divided into base layer, reinforcing layer and protective layer three-layer composite structure, the inside of the cover plate is provided with scratch-proof layer, first toughened glass layer, heat insulation layer, anti-blue light layer, microcrystalline glass layer, transparent rubber layer and second toughened glass layer, the scratch-proof layer, first toughened glass layer is protective layer, the heat insulation layer, anti-blue light layer, microcrystalline glass layer is reinforcing layer, the transparent rubber layer and second toughened glass layer are base layer, the bottom end outer surface of the cover plate is pasted with transparent adhesive layer, the transparent adhesive layer is silicone adhesive, protective film is pasted on the outer surface of the transparent adhesive layer. Through the above structure, the problem of insufficient strength of existing cover plate, easily damaged can be effectively solved, while ensuring high light transmittance, reduce production cost, to meet the demand of electronic equipment market to high-performance touch screen cover plate.
Owner:ANHUI HONGSHIXIN OPTOELECTRONICS TECH CO LTD
Methods for removing catalyst particles from nanotube films
Methods for removing a catalyst particle from a nanotube film used in a photolithographic patterning process are disclosed. The catalyst particle is identified based on its size in the nanotube film. This identification can be done using an inspection device such as a confocal microscope, which permits comparison of images taken in two or more separate focal planes to determine the size of particles. The catalyst particle is then exposed to a first absorption wavelength using a laser, which is selectively absorbed by the catalyst particle and which heats the catalyst particle to remove the catalyst particle from the nanotube film. Optionally, the catalyst particle-free nanotube film can be further exposed to a second absorption wavelength which is selectively absorbed by the film and promotes repair of the film. The resulting nanotube film can be used in a pellicle membrane.
Owner:TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
Display module, display device and preparation method
The application discloses a display module, a display device and a preparation method. The display module comprises a functional film layer, a cover plate arranged on the display side of the functional film layer, and a side wall protection film located between a positioning film and the side wall of the functional film layer and covering the side wall of the functional film layer. The positioning film is arranged on the cover plate and located on the same side of the functional film layer as the cover plate, and surrounds the side wall of the functional film layer and is arranged at intervals from the side wall of the functional film layer. When the protective glue is applied to the side wall of the functional film layer to form a side wall protection layer through self-flowing of the protective glue, the positioning film can limit the self-flowing range of the protective glue on the cover plate, control the morphology of the side wall protection film, reduce the size fluctuation of the width of the side wall protection film on the cover plate, and make the middle frame design and the frame width of the whole machine not affected by the morphology of the side wall protection film.
Owner:BOE TECHNOLOGY GROUP CO LTD +1
Surface protective film coating device for optical glass production
The invention discloses a surface protective film coating device for optical glass production, and relates to the technical field of glass surface treatment.The surface protective film coating device comprises two sealing doors symmetrically and rotationally connected to the two sides of a cavity, and further comprises workpiece frames arranged in the two sealing doors correspondingly, and the workpiece frames comprise cage frames rotationally connected to the interiors of the sealing doors; the two groups of circular holes are correspondingly formed in the upper part and the lower part of the cage frame in an annular array manner; the rotating seats are rotationally matched in the circular holes; the through holes are formed in the rotating seats in a regular triangle array manner; the fastening bolts are in threaded connection with one corners of the rotating seats and are used for locking the angles of the rotating seats; the rotary seat capable of being rotationally adjusted is arranged in the circular hole of the cage frame, so that the distance between the hanging rods is adjusted, the problems that existing equipment is narrow in application range and poor in batch machining flexibility are solved, and the equipment utilization rate and the machining efficiency are remarkably improved.
Owner:HUNAN QUNCE OPTOELECTRONICS TECHNOLOGY CO LTD
266nm thermal protection optical window for extreme ultraviolet (EUV) light source internal detection equipment and preparation method of 266nm thermal protection optical window
The invention provides a 266nm thermal protection optical window for extreme ultraviolet (EUV) light source internal detection equipment and a preparation method of the 266nm thermal protection optical window. The 266nm thermal protection optical window comprises a substrate and a thermal protection film arranged on one side of the substrate, the thermal protection film comprises a metal aluminum film and high and low refractive index dielectric films which are alternately stacked. Through the selection of the high and low refractive index materials, the optical window can have a good thermal protection function when 266nm deep ultraviolet detection equipment works, and can be suitable for a scene with a complex vacuum chamber environment. Furthermore, the heat protection effect of the optical window can be improved by arranging an anti-reflection film formed by alternately stacking high refractive indexes and low refractive indexes on the other side of the substrate. The optical window is obtained through thermal evaporation or sputtering processing after optimization in the prior art, the process is simple, and the optical window is suitable for industrial production.
Owner:ZHEJIANG UNIV
Protective film and protective film assembly
PendingCN121002441ACarbon nanotubesOriginals for photomechanical treatmentCarbon nanotubeTransmittance
A pellicle film (10) having a porous structure, the pellicle film (10) containing carbon nanotubes, the aperture ratio of voids measured on the surface of the porous structure being 30% or less, and the transmittance of light at a wavelength of 550 nm being 50% or more.
Owner:LINTEC CORP
Cold-resistant hard PVC (polyvinyl chloride) reflector
ActiveCN224203450UImprove cold resistanceavoid chippingPrismsSynthetic resin layered productsCold resistancePellicle membrane
The utility model discloses a cold-resistant hard PVC (polyvinyl chloride) reflector, and relates to the technical field of reflectors. Comprising a reflector body, the reflector body comprises a hard PVC board, cold-resistant layers are fixed to the top and the bottom of the hard PVC board respectively, and a gum layer and an anti-sticking layer are sequentially arranged at the bottom of the cold-resistant layer located at the bottom of the hard PVC board from top to bottom; a microprism layer and a protective film are sequentially arranged on the top of the cold-resistant layer located on the top of the hard PVC board from bottom to top. The cold-resistant layers are fixed to the top and the bottom of the hard PVC board and made of polyurethane materials, the cold resistance of the PVC board can be improved through the arrangement of the cold-resistant layers, the PVC board is prevented from being broken due to low-temperature embrittlement, meanwhile, the elastic layer is arranged, the purpose of the elastic layer is that firstly, external impact force can be buffered, and therefore the impact force of the PVC board can be reduced, and the service life of the PVC board can be prolonged. The stability of the whole structure of the PVC reflector is improved, and the hard PVC plate is effectively prevented from being broken and damaged due to stress.
Owner:QUANZHOU DINGFEI REFLECTIVE MATERIAL CO LTD