The application discloses a
shower head and a PECVD device for the PECVD device, and belongs to the technical field of
semiconductor film deposition. The
shower head comprises a top layer, a middle layer and a bottom layer which are sequentially stacked, the size of the middle layer is smaller than that of the top layer and the bottom layer, a concave-convex matching structure is arranged on the opposite surfaces between the top layer and the middle layer, the surface of the concave-convex matching structure is plated with a
nickel-based protective film layer, the middle layer is connected with the top layer through the concave-convex matching structure, and a spring shielding
gasket is arranged between the top layer and the bottom layer and is in contact with the top layer and the bottom layer respectively, so that the top layer and the bottom layer are grounded and conducted. Through the concave-convex matching structure between the top layer and the middle layer and the
nickel-based protective film layer, the application effectively prevents process dust from adhering and corroding the
shower head matrix, improves the sealing performance, and through the spring shielding
gasket, a
radio frequency grounding and conducting path between the top layer and the bottom layer is established, and abnormal
glow discharge possibly generated in the interlayer gap is inhibited.