1987 results about "Nano structuring" patented technology

The invention discloses a rigid-flex circuit board slotting process based on a laser depth control technology. The rigid-flex circuit board slotting process comprises the steps that the surface of a rigid layer of a rigid-flex circuit board is pretreated, and a laser sensitive layer is sprayed; cNC depth-controlled milling is adopted to form a grooved rough blank structure on the surface of the pretreated rigid layer; positioning laser is used for scanning, a three-dimensional model is established through collected reflected signals, then layered depth-controlled ablation is conducted, second-power laser is sequentially adopted for fine cutting, third-power laser is sequentially adopted for depth calibration, and a groove body structure is formed; cleaning an interface, scanning a groove bottom area and synchronously introducing low-temperature gas; performing morphology repairing treatment, and generating a periodic micro-nano structure on the groove wall by adopting short pulse laser to form a stress concentration resistant surface; depositing an insulating medium layer, and forming a continuous packaging protection layer on the groove wall and the bottom through a vacuum coating process; the high-precision depth-controlled slotting of the rigid-flex circuit board is realized, and meanwhile, the ultra-low thermal damage and anti-fatigue structure and long-acting environmental stability are realized.

The invention relates to the field of aluminum materials, and provides an automobile corrosion-resistant aluminum material and a preparation method thereof.The automobile corrosion-resistant aluminum material is prepared from cerium oxide loaded aluminum oxide nanorods, scandium / boron nitride nanotubes, zirconium powder, magnesium powder, copper powder, manganese powder, silicon carbide nanoparticles, TiB2 nanoparticles, aluminum powder and stearic acid. Wherein the cerium oxide loaded aluminum oxide nanorod is composed of an aluminum oxide nanorod and cerium oxide nanoparticles loaded on the surface of the aluminum oxide nanorod, and the scandium / boron nitride nanotube is composed of a boron nitride nanotube and a scandium nanolayer uniformly coated on the surface of the boron nitride nanotube. The material is prepared through mechanical ball milling, cold isostatic pressing forming, vacuum sintering and aging treatment, and finally the aluminum-based composite material containing the Al3Sc nano precipitated phase and the boron nitride nanotube reinforced phase is formed. And an Al3Sc precipitated phase and an aluminum matrix form a coherent interface, so that the strength, the corrosion resistance and the wear resistance of the material are improved. Through nanostructure optimization, high performance of the aluminum alloy is achieved, and the aluminum alloy is suitable for the fields of automobiles, aerospace and the like.

The invention belongs to the technical field of micro-nano optics, and discloses an on-chip metasurface and a multi-dimensional multiplexing holographic method based on the on-chip metasurface. Firstly, a unit structure of the on-chip metasurface is constructed, the unit structure comprises a substrate layer, an optical waveguide layer and a nanometer structure layer which are sequentially arranged from bottom to top, and the nanometer structure layer comprises a nanometer brick of a rectangular structure; a plurality of nano bricks with the same size contained in the on-chip metasurface form a nano brick array; and then according to a plurality of set target holographic images, the arrangement of the position and the corner of each nano brick in the nano brick array is obtained by using the combined coding of the circuitous phase and the geometric phase, a final on-chip metasurface is obtained after the arrangement is completed, and the three-dimensional multiplexing holography of the incident angle, the wavelength and the polarization is realized by using the on-chip metasurface. According to the invention, not only is the limitation of incidence in the orthogonal direction overcome, but also the information storage capacity and the information security are remarkably improved.

The invention provides a surface modified carbon fiber as well as a preparation method and application thereof, and belongs to the technical field of battery materials. Physical or chemical treatment on the surface of the carbon fiber is realized by performing one or more of accurate plasma treatment, chemical etching, coupling agent treatment and nano particle deposition on the surface of the carbon fiber, so that functional groups are introduced or a rough nano structure is formed; a functional layer with a specific functional group and a rough structure which are beneficial to attachment of positive electrode material slurry are formed on the surface of the carbon fiber, and then a stable and well-attached surface modified layer is obtained through heat treatment, so that the surface modified carbon fiber is prepared. According to the method disclosed by the invention, the surface roughness and the functional group richness can be improved on the premise that the mechanical property of the fiber is not obviously damaged, so that the adhesiveness and the electrical property of the positive electrode material slurry are enhanced, and a foundation is laid for the preparation of a carbon fiber positive electrode material and a structure-energy storage integrated composite structure.

The invention discloses a multi-stage micro-nano structure flexible wearable pressure sensor inspired by skin, and a preparation method and application of the multi-stage micro-nano structure flexible wearable pressure sensor. The sensor is composed of a piezoresistive layer, an electrode layer and a packaging layer. The piezoresistive layer takes polydimethylsiloxane (PDMS) as a flexible substrate, a submillimeter-level cylindrical array main structure and a micron-level skin-like spinous secondary microstructure randomly distributed at the top end of the submillimeter-level cylindrical array main structure are constructed through a composite mold, and a nano-level conductive network is formed by adopting an MXene / MWCNT hybrid material through a dispensing process, so that multi-scale stress synergistic response is realized; the electrode layer takes a degradable lignocellulose biological plastic film prepared from bagasse as a base material, and a silver paste interdigital electrode is loaded through a screen printing process; the packaging layer is fully coated with a medical-grade polyurethane (PU) film so as to ensure signal stability. The sensor shows ultrahigh sensitivity, wide detection range and low detection limit through the synergistic effect of the submillimeter-micron-nano multilevel structure, and can be applied to the fields of human motion monitoring, intelligent electronic skin and the like.

The invention discloses a liquid metal enhanced triboelectric material with a bionic surface and a preparation method of the liquid metal enhanced triboelectric material, and belongs to the technical field of triboelectric materials. The preparation method comprises the following steps: mixing an interface stabilizer TEMPO oxidized nanocellulose with a liquid metal gallium-indium alloy to obtain TOCNF (at) LM liquid metal-based micro-nano liquid drops; and doping the obtained TOCNF-coated LM liquid metal-based micro-nano liquid drops into a base material waterborne polyurethane, and constructing a bionic rose petal micro-mastoid process structure by adopting a template method, so as to obtain the liquid metal enhanced triboelectric material with a bionic surface. The composite material with the rose petal micro-nano structure is prepared through bionic design, the micro-mastoid structure of rose petals is successfully re-carved, and the triboelectric property of the waterborne polyurethane is remarkably improved by utilizing TOCNF at LM liquid metal-based micro-nano liquid drops, so that the open-circuit voltage of the prepared composite material reaches 250V, the short-circuit current reaches 8.19 mu A, and the triboelectric property of the waterborne polyurethane is remarkably improved. The short-circuit transfer charge quantity reaches 95nC, and theoretical and practical guidance is provided for the design of a high-performance triboelectric material.

The invention discloses a method for preparing an iron-nickel-molybdenum-based electrocatalyst through combination of electrodeposition and rapid Joule heat and application of the method. The method comprises the steps that S1, a porous nickel substrate is pretreated, and the pretreated porous nickel substrate is obtained; s2, obtaining a nickel salt solution, a molybdenum salt solution and a ferric salt solution; s3, obtaining a mixed solution; s4, putting the mixed solution serving as electrolyte into a dual-electrode electrolytic tank, carrying out electro-deposition treatment by taking the pretreated porous nickel substrate as a cathode and an inert electrode as an anode, and washing and drying to obtain a Fe-Ni-Mo-LDH precursor; and S5, carrying out Joule thermal pyrolysis treatment on the Fe-Ni-Mo-LDH precursor, so as to obtain the iron-nickel-molybdenum based electrocatalyst. The preparation method can effectively regulate and control the size structure of the catalyst, and is suitable for preparing iron-nickel-molybdenum-based electrocatalysts with different substrates and different sizes; and the electrocatalyst has the advantages of uniform and stable nanostructure and high loading capacity. Meanwhile, the preparation method is short in reaction time, high in heating efficiency, high in repeatability and suitable for industrial large-scale production.

The invention discloses a preparation method of a proton exchange membrane water electrolysis hydrogen production membrane electrode, and belongs to the technical field of proton exchange membranes, a catalyst carrier is prepared, S101, a polyimide membrane is inversely fixed in a magnetron sputtering vacuum coating chamber, a cavity cover of the magnetron sputtering vacuum coating chamber is closed, vacuumizing is performed, and a substrate is heated; and S102, argon is introduced into a cavity of the magnetron sputtering vacuum coating chamber, coating is started, the power of the bismuth metal target is set to be 0.2-0.5 kW, and the deposition time is 60-1800 s. In the invention, the physical vapor deposition method is utilized to load the catalyst on the surface of the metal oxide carrier with high specific surface area and ordered nanostructure, so that the exposure of active sites of the catalyst is increased, the dosage of the noble metal catalyst is reduced, and the bonding strength between the catalyst and the carrier is enhanced; the catalyst is not easy to separate from the surface of the carrier, and large-scale slurry agglomeration is avoided.

In an embodiment, a device includes: a first nanostructure; a source / drain region adjoining a first channel region of the first nanostructure, the source / drain region including: a main layer; and a first liner layer between the main layer and the first nanostructure, a carbon concentration of the first liner layer being greater than a carbon concentration of the main layer; an inter-layer dielectric on the source / drain region; and a contact extending through the inter-layer dielectric, the contact connected to the main layer, the contact spaced apart from the first liner layer.

The invention discloses an anode material for adipic acid monoester electrolysis and a preparation method of the anode material, the electrode solves the key problems that a platinum layer is easy to fall off, the catalytic activity is low, the organic matter poisoning resistance is poor and the like of a traditional titanium platinum-plated electrode through multi-scale interface strengthening and nano structure regulation and control; the preparation method comprises the following core steps: constructing a porous ZrO2-TiO2 composite oxide layer on the surface of a titanium substrate by adopting a micro-arc oxidation-hydrothermal composite process, and generating platinum nanoparticles in situ to pre-fill pores, so that the anchoring effect of a platinum layer is remarkably enhanced; depositing a platinum / carbon nano tube (Pt / CNT) composite catalyst layer on the surface of the oxide layer through a pulse-ultrasonic synergistic electroplating technology, wherein the carbon nano tube is used as a conductive framework to inhibit platinum agglomeration; through vacuum annealing and electrochemical activation treatment, the interface bonding force and active site exposure are further optimized; the electrode shows excellent performance in an adipic acid monoester electrolysis system, and efficient electrocatalytic conversion from adipic acid monomethyl ester to dimethyl sebacate is achieved.

An integrated circuit includes a first nanostructure transistor including a plurality of first semiconductor nanostructures over a substrate and a source / drain region in contact with each of the first semiconductor nanostructures. The integrated circuit includes a second nanostructure transistor including a plurality of second semiconductor nanostructures and a second source / drain region in contact with one or more of the second semiconductor nanostructures but not in contact with one or more other second semiconductor nanostructures.

The invention belongs to the field of micro-nano structures, and relates to a preparation method of a nano needle tip split ring 3D structure periodic array. According to the method, after a reflecting layer and a supporting layer are deposited on a silicon substrate, polystyrene nanospheres are self-assembled, the volume of the nanospheres is reduced through reactive ion etching, then two times of inclined magnetron sputtering are carried out, deposited precious metal is etched through a reactive ion etching machine, and the silicon substrate is obtained. And removing the nanosphere mask to obtain the 3D structure periodic array of the nanotip split ring. The method has the characteristics of simple preparation process, good uniformity, high order degree and strong repeatability, and has wide application potential in the fields of SERS (Surface Enhanced Raman Scattering), photoelectric property detection and the like.

The invention relates to the technical field of metal wire processing, and discloses a high-performance metal wire plastic coating process for aerospace engineering, which comprises the following steps: carrying out base material type selection on a metal wire, and carrying out surface treatment of precise cleaning, etching and depth gradient activation; a Ti-Cr alloy and graphene-copper composite transition layer is deposited through a magnetron sputtering technology, and a multi-layer coating structure is formed through electrostatic spraying of a base coating, a fluidized bed dipping function layer and high velocity oxy-fuel spraying of a nano composite coating in sequence; the molybdenum-gold composite sealing layer is prepared by adopting an electric arc spraying technology, and is subjected to vacuum ultraviolet curing enhancement, high-temperature gradient annealing, gradient sintering and vacuum curing treatment; and heat radiation on the surface of the coating is enhanced through laser-induced micro-nano structure regulation and silicon nitride film sputtering. Through collaborative optimization of base material treatment, coating construction, function strengthening and quality control, the interface bonding strength, the comprehensive performance and the environmental adaptability of the spaceflight metal wire coating are remarkably improved, and the service life of the spaceflight metal wire coating is remarkably prolonged.

The invention provides a low-coupling flexible self-powered multi-mode sensor and a preparation method and application thereof, and belongs to the technical field of flexible electronic materials. Comprising a temperature sensing layer, a pressure sensing layer and a humidity sensing layer which are stacked in sequence. The temperature sensing layer is made of a PEDOT: PSS / MWCNT composite material and outputs a temperature response signal through resistance change; the pressure sensing layer is formed by combining a PDMS layer with a micro-nano structure and a PET layer, and outputs a pressure response voltage signal based on a triboelectric effect; the humidity sensing layer is composed of PVA / CA composite matrix and EGaIn liquid metal, and humidity response signals are output through hygroscopicity induced resistance change. The sensor realizes simultaneous detection of three physical quantities of temperature, pressure and humidity, has low coupling degree among the sensing units, and can be applied to the fields of robot interaction, wearable health monitoring and environment monitoring.

In an embodiment, a device includes: an isolation region on a substrate; first nanostructures above the isolation region; second nanostructures above the isolation region; a first gate spacer on the first nanostructures; a second gate spacer on the second nanostructures; a dielectric wall between the first gate spacer and the second gate spacer along a first direction in a top-down view, the dielectric wall disposed between the first nanostructures and the second nanostructures along a second direction in the top-down view, the first direction perpendicular to the second direction; and a gate structure around the first nanostructures and around the second nanostructures, a first portion of the gate structure filling a first area between the dielectric wall and the first nanostructures, a second portion of the gate structure filling a second area between the dielectric wall and the second nanostructures.

The invention relates to the technical field of laser micromachining, in particular to a laser ablation titanium alloy numerical simulation method based on a plasma shielding effect. In order to solve the problems that the precision and efficiency of an existing laser processing and manufacturing micro-nano structure are low, the plasma shielding effect is not fully considered in a simulation model and the like, two-dimensional and three-dimensional models are constructed by means of COMSOL Multiphysics software. According to the model, the plasma shielding effect is fully considered, a laser energy transfer equation is corrected, and the molten pool behavior and surface topography forming process is simulated by combining mass, momentum and energy conservation equations. A laser ablation process is accurately simulated by setting a heat source and boundary conditions, applying a level set method, considering various effects and calculating plasma related parameters. And inputting different laser parameters to simulate and analyze the influence on the groove morphology, and comparing an experiment with a simulation result to correct the model. Simulation precision is improved, laser processing parameters can be optimized, cost is reduced, universality is high, theoretical guidance can be provided for laser processing of various metal materials, and the laser processing technology is promoted to be developed in multiple fields.

An integrated circuit includes a first nanostructure transistor and a second nanostructure transistor. The first and second nanostructure each include gate electrodes. A backside trench separates the first gate electrode from the second gate electrode. A bulk dielectric material fills the backside trench. A gate cap metal electrically connects the first gate electrode to the second gate electrode.

The invention discloses a multiphase synergistically strengthened copper-titanium alloy, the microstructure of the copper-titanium alloy has the following nano-structures: a cellular structure, a nano laminated structure formed by alternately arranging beta-Cu4Ti phases and alpha-Cu matrix phases, the beta-Cu4Ti phases are lamellar or fibrous beta-Cu4Ti discontinuous precipitated phases, and the alpha-Cu matrix phases are lamellar or fibrous beta-Cu4Ti discontinuous precipitated phases; and the beta '-Cu4Ti continuous precipitated phase is uniformly distributed in the alpha-Cu matrix phase and is in a coherent or semi-coherent relationship with the alpha-Cu matrix phase. The invention further discloses a preparation method of the multiphase synergistically strengthened copper-titanium alloy. On the basis of the comprehensive requirements of the strength and the conductivity of the copper-titanium alloy, the Co element is added to regulate and control the interface energy of the precipitated phase, the distribution of the precipitated phase is optimized, a multi-step process of discontinuous precipitation aging, cold rolling deformation and continuous precipitation aging is combined, and the strength of the copper-titanium alloy is improved through interface strengthening, precipitated phase strengthening and heterostructure induction strengthening effects. And the comprehensive performance superior to that of the copper-titanium alloy prepared in a conventional mode can be achieved.

The invention discloses an SERS (Surface Enhanced Raman Scattering) substrate with a needle-like diagram nanostructure and a preparation method of the SERS substrate, and belongs to the field of nanotechnology and detection. The preparation method of the needle-like Turing nano-structure SERS substrate comprises the following steps: by taking a silver needle as a carrier, carrying out electrochemical etching on the surface of the silver needle to induce to form a Turing nano-structure with fractal topological characteristics, and then inducing to conformally grow a layer of zeolite imidazole framework-8 material as a shell layer by utilizing the nano curvature characteristics of the fractal structure, so as to prepare the needle-like Turing nano-structure SERS substrate. And a composite SERS enhanced platform with an electromagnetic field hot spot aggregation effect and a molecular screening and enriching capability is constructed. The platform has the advantages of high structural uniformity, expandability in manufacturing, synergy of signal enhancement and molecular recognition and the like, remarkably improves the detection sensitivity and the signal reproducibility, and is suitable for trace analysis in a complex sample system, such as related application in the fields of food safety, environmental pollution monitoring, biomedicine and the like.

A semiconductor device includes a photonic die and an optical die. The photonic die includes a grating coupler and an optical device. The optical device is connected to the grating coupler to receive radiation of predetermined wavelength incident on the grating coupler. The optical die is disposed over the photonic die and includes a substrate with optical nanostructures. Positions and shapes of the optical nanostructures are such to perform an optical transformation on the incident radiation of predetermined wavelength when the incident radiation passes through an area of the substrate where the optical nanostructures are located. The optical nanostructures overlie the grating coupler so that the incident radiation of predetermined wavelength crosses the optical die where the optical nanostructures are located before reaching the grating coupler.

A semiconductor structure includes an active region including a semiconductor fin base, a stack of nanostructures over the semiconductor fin base, and an epitaxial feature over the semiconductor fin base and connected to at least one of the nanostructures, the active region extending lengthwise in a first direction. The semiconductor structure further includes a gate structure wrapping around each of the nanostructures, the gate structure extending lengthwise in a second direction perpendicular to the first direction, and a backside butted contact disposed directly under and electrically connected to the epitaxial feature and the gate structure. A portion of the backside butted contact extends into the gate structure and the epitaxial feature.

An imaging lens assembly module, which defines an optical axis, includes an optical element. The optical element includes a light blocking portion and an anti-reflecting thin film. The light blocking portion is opaque, and the light blocking portion is closer to the optical axis than the other portion of the optical element to the optical axis. The anti-reflecting thin film is disposed at least on a surface of the light blocking portion, and the anti-reflecting thin film includes a nano structure layer and at least one intermediate layer. The nano structure layer has a plurality of ridge-like protrusions which extends non-directionally. The intermediate layer is disposed between the nano structure layer and the optical element.

A semiconductor structure is provided. The semiconductor structure includes a first plurality of nanostructures between a first source / drain feature and a second source / drain feature, a first gate segment surrounding the first plurality of nanostructures, and a wall structure abutting the first gate segment. A first nanostructure in the first plurality of nanostructures includes a bulk portion and a protrusion, and the protrusion protrudes from a first sidewall of the bulk portion toward the wall structure.

The invention relates to full-dielectric adjustable optical tweezers based on a composite phase superlens, and belongs to the technical field of optical tweezers. Two regulation modes of geometric phase and transmission phase are integrated into a dielectric metasurface periodic structure, and a circular lens surface is combined according to a specific mapping and arrangement mode. The super lens can excite two different output electric fields under the input of linearly polarized light due to the regulation and control of a composite phase, and the two electric fields can independently exist under the input of circularly polarized light with opposite chirality. Therefore, by adjusting the polarization type of the incident light source of the super lens, free switching of multiple optical capturing modes of particles in a field can be realized. Compared with the existing optical tweezers, the control mode can be flexibly adjusted on the premise that the structure of the device is not changed, and more diversified particle capturing requirements can be met. The high-flexibility and easy-to-integrate micro-nano structure can provide powerful guarantee for the performance of a compact composite optical capturing device.

The slit coating machining equipment comprises a machining rack, a drying box body and an XY-axis displacement platform, the drying box body and the XY-axis displacement platform are both connected with the machining rack through bolts, a belt type conveying mechanism is assembled in an inner cavity of the drying box body, a pump body is assembled at the output end of the XY-axis displacement platform, and the drying box body is connected with the XY-axis displacement platform through bolts. And the discharge hole of the nozzle is communicated with the nozzle. According to the slit coating processing equipment and the spraying method, coating particles possibly falling from the upper portion can be borne in cooperation with the design of an anti-dripping plate, drying equipment is prevented from being polluted, the maintenance period is prolonged, the surface energy of a base material is enhanced by constructing a micro-nano structure through the nano-imprinting technology introduced in the pretreatment stage, the mechanical anchoring effect is formed between a coating and a substrate, and the coating quality is improved. The pretreatment quality can be accurately controlled through real-time wettability detection, the uniformity of the adhesion force of a subsequent coating layer is ensured, the cracking or wrinkle defect caused by rapid curing is avoided, the continuous operation characteristic of the belt type conveying mechanism allows synchronous curing of batch workpieces, and the productivity scale is improved.

The invention relates to the technical field of wave-absorbing materials, in particular to a preparation method of an MXene-NiO-PPy ternary composite wave-absorbing material. The invention provides a preparation method of an MXene-NiO-PPy ternary composite wave-absorbing material, which comprises the following steps of: etching titanium aluminum carbide powder through a LiF / HCl mixture, and performing ultrasonic stripping to prepare a uniform dispersion of MXene nanosheets; the preparation method comprises the following steps: dispersing MXene nanosheets in a solution of water and absolute ethyl alcohol, and adding a pyrrole monomer and a FeCl3. 6H2O aqueous solution for reaction; after the reaction, washing is performed to obtain a PPy-MXene composite material; the preparation method comprises the following steps: by taking NiCl2. 6H2O as a nickel source and sodium oxalate as a precipitator, preparing NiO nanowires by adopting a hydrothermal method combined with a calcining process; the invention discloses a preparation method of an MXene-NiO-PPy ternary composite wave-absorbing material.According to the method, the MXene-NiO-PPy ternary composite wave-absorbing material with rich heterogeneous interfaces and a porous micro-nano structure is constructed, cooperation of dielectric loss, magnetic loss and interface polarization loss is achieved, and finally the light, efficient and broadband wave-absorbing performance is obtained.

The invention discloses a self-cleaning composite piezoelectric ceramic membrane as well as a preparation method and application thereof, and belongs to the field of composite ceramic membranes. The technical problem that an existing ceramic membrane separation technology is poor in biomembrane pollution resisting effect is solved. According to the preparation method, the barium titanate ceramic membrane is firstly prepared to serve as the base membrane, then the copper oxide one-dimensional nanostructure is loaded on the piezoelectric ceramic substrate, and the base membrane has a large membrane surface area and can be combined with more catalysts, so that more active sites are provided for catalytic reaction; according to the composite membrane, the hydrophilicity, the anti-pollution performance and the piezoelectric catalysis self-cleaning performance of the membrane are remarkably improved, and pollutants in water can be quickly and effectively separated, so that the flux and the anti-pollution performance of the membrane are improved.

The invention discloses a bionic anti-drag protective film based on a surface micro-nano structure and a preparation method of the bionic anti-drag protective film, and relates to the technical field of anti-drag film preparation. According to the preparation method, the high-strength nitrogen-containing thermoplastic polyurethane film layer with the flame retardant property is prepared, one layer is coated with the hyperbranched polyurethane coating, the drag reduction functional layer with the microstructure is formed through embossing and photo-thermal dual curing, and the hyperbranched polyurethane coating can form a high-density cross-linked network during curing, so that the drag reduction performance is improved; according to the present invention, the hyperbranched polyurethane coating material has characteristics of good mechanical property and good weatherability, the hyperbranched structure can assist in dispersion of shrinkage stress and maintenance of coating surface flatness during heating, and the hyperbranched polyurethane coating material further contains nitrogen rings so as to provide the coating material with certain fire resistance.

A frequency selection surface manufacturing method based on femtosecond laser induced graphene belongs to the technical field of frequency selection surface manufacturing and comprises the following steps: (1) graphene patterning: forming a graphene periodic micro-nano structure on the surface of a flexible substrate through induction by femtosecond laser; (2) a frequency selection unit structure design step: a nested resonance structure is obtained by layering and stacking graphene resonance units with different geometrical shapes, and selective transmission or reflection of multi-band electromagnetic waves is realized; the graphene resonance unit is the graphene periodic micro-nano structure; and (3) a large-area manufacturing step: processing a frequency selection surface with the area larger than 10cm < 2 > by adopting femtosecond laser dynamic scanning and energy regulation and control technologies. According to the invention, the local structure modification of the graphene is induced by femtosecond laser, and the metasurface design is combined, so that the large-area and multi-band frequency selection characteristic is realized.

The invention discloses a light-emitting super-structure surface capable of realizing incoherent fluorescence holography and multi-dimensional super-structure display and a preparation method thereof. The light-emitting super-structure surface is mainly composed of an optical waveguide structure layer, a micro-nano structure layer and a fluorescence emission layer. The optical waveguide structure layer comprises a substrate and a waveguide layer and is responsible for guiding fluorescence propagation; the micro-nano structure layer is located above the waveguide layer, is composed of nano bricks and can regulate and control light; the fluorescence emission layer is arranged above the micro-nano structure layer, contains quantum dots and is excited by the pump light to emit fluorescence. The metasurface can regulate and control the emergent angle, wavefront and emergent intensity of fluorescent light and pump light, the time-space coherence of the fluorescent light is enhanced through the waveguide layer, and phase modulation is carried out by using a method based on a circuitous phase. Based on the super-structure surface, through the steps of fluorescence excitation, coherence enhancement, phase modulation, diffraction calculation, hologram generation, multi-dimensional display and the like, incoherent fluorescence hologram and multi-dimensional super-structure display can be achieved, and the functions of fluorescence nanometer printing and multi-channel holographic display are covered.