The invention discloses an
extreme ultraviolet spectrograph calibration method based on
extreme ultraviolet diffraction, and relates to the technical field of
spectrograph calibration, and the technical scheme is characterized in that a desktop type XUV
light source generation device is used for generating XUV light beams; a
diffraction device is arranged on the propagation path of the XUV
light beam, so that the XUV
light beam is diffracted; taking the FID
spectral line of the
helium atom 2p-1s as an energy reference point, and deducing part of unknown parameters of the
diffraction device and the
spectrometer according to the separation distance of + / -1 level diffraction beams measured at the position corresponding to the energy; in combination with a
Gaussian fitting method, the positions of 0-level light beams and + / -1-level diffraction light beams at other positions on the
detector are obtained, and according to a diffraction formula, energy corresponding to all positions on the XUV
spectrometer is inverted; calibration precision is ensured by correcting
copper mesh placement angle deviation and CCD image angle deviation. According to the invention, XUV light is diffracted by using the
copper net, and global continuous calibration of the energy axis of the
spectrometer is realized by combining with a characteristic
spectral line with a known
wavelength.