The application provides a reconfigurable
mask and a reconfiguration method. The reconfigurable
mask comprises: a
mask array comprising at least one
light modulation unit; and a driving module connected to each
light modulation unit, the driving module being configured to provide a driving
voltage for each
light modulation unit. The light modulation unit comprises: a light modulation component comprising a
phase modulation layer, the
phase modulation layer being configured to change the phase of incident light based on the input driving
voltage; and an output, the output being configured to output the incident light with the changed phase. Based on the reconfigurable mask, the target
light field pattern can be iteratively learned and optimized based on the back propagation principle of the
light diffraction neural
network model, and the
voltage parameters of the
light diffraction neural
network model can be optimized and configured through the electro-optic
phase modulation technology to generate the driving voltage. In this way, through a modulable mask, the target
light field pattern is taken as the iterative learning target, different
wafer patterns are realized, the reconfigurable mask is multiplexed, and the manufacturing cost is saved.