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462results about "Interferometric spectrometry" patented technology

Double-step Fabry-Perot interference snapshot imaging spectrometer

The invention relates to the field of spectral imaging, in particular to a double-step Fabry-Perot interference snapshot imaging spectrometer, which comprises a telescopic system, a micro lens array, a Fabry-Perot array interference system and an area array detector, and is characterized in that the telescopic system is used for collecting a target light field and carrying out view field limitation and collimation on the target light field; the Fabry-Perot array interference system is used for modulating a target light field into an interference light field array, the Fabry-Perot array interference system comprises two step lenses which are orthogonal in the step direction, the highest steps of the two step lenses are tightly attached, and an air gap with the thickness changing in a checkerboard-shaped two-dimensional increasing mode is formed between the two step lenses; the microlens array is used for imaging the interference light field array onto the area array detector through each imaging channel; and the area array detector is used for receiving the transmission image field of the microlens array to obtain an interference image array. The invention has the advantages of small volume, light weight, compact structure, static state, stability, reliability and the like.
Owner:CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI

Ai-assisted label-free optical platform to characterize NANO and micro-vesicles and biological tissues

A platform for characterizing biomolecules, biological tissue sections, viruses, or other particles of interest in a non-invasive, high-throughput, cost-effective, and label-free manner. The platform includes a merged set of imaging modalities including and capable of interferometric microscopy and wide-field or confocal microscopy (such as, for example, a wide-field super-resolution surface enhanced Raman spectroscopy, SERS), although some aspects may be employed with data sets only received from wide-field or confocal microscopy. Related devices, systems, methods, techniques, and variations to the same are also provided.
Owner:THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIV

Self-calibrated spectroscopic and AI-based gas analyzer

Aspects relate to a compact and low-cost gas analyzer that can be used for different types of gas analysis, such as air quality analysis. The gas analyzer can include a light source, a gas cell configured to receive a sample (e.g., a gas under test), a spectral sensor including a spectrometer and a detector, and an artificial intelligence (AI) engine. Light can enter the gas cell and interact with the sample to produce output light that may be measured by the spectral sensor. The resulting spectrum produced by the spectral sensor may be analyzed by the AI engine to produce a result. The gas analyzer further includes a self-calibration component configured to enable calibration of the sample spectrum to compensate for spectral drift of the spectral sensor.
Owner:SI WARE SYSTEMS INC(EG)

Spectrum calibration method for linear view field spectral domain OCT (Optical Coherence Tomography) system

The invention belongs to the field of optical coherence layer imaging, and particularly discloses a spectrum calibration method for a linear field spectral domain OCT (optical coherence tomography) system, which comprises the following steps: acquiring interference signal instantaneous phases corresponding to two optical path differences by adjusting a lifting platform at a sample mirror in the linear field spectral domain OCT system, and subtracting the interference signal instantaneous phases to obtain an instantaneous phase difference; based on the calibration light source, discrete spectral lines are generated on a detector through a sample arm in the shielding line view field spectral domain OCT system, and spectral intensity distribution corresponding to the calibration light source is obtained; calculating the sub-pixel position of the peak value of each spectral line and the instantaneous phase difference corresponding to the sub-pixel position based on the instantaneous phase difference and the spectral intensity distribution corresponding to the calibration light source; and based on the wave number and the instantaneous phase difference corresponding to each spectral line, determining a linear relationship between the instantaneous phase difference and the wave number through linear fitting, and calibrating the corresponding wave number based on the linear relationship. According to the method and the device, the linear field OCT spectrum calibration result with higher precision can be realized.
Owner:HUAZHONG UNIV OF SCI & TECH

Ultrafast space-time light field measurement system

The utility model discloses an ultrafast space-time light field measuring system, which performs dispersion separation on an interference light field generated after superposition of a laser pulse to be measured and a reference pulse, and performs wavelength screening on the interference light field after dispersion separation by using a wavelength screening element to obtain a laser light field with a target wavelength. Acquiring light field complex amplitude information corresponding to the laser light field of the target wavelength; and reconstructing according to the light field complex amplitude information to obtain a light field corresponding to the laser pulse to be measured. According to the system disclosed by the utility model, the delay between the signal light and the reference light in the measured laser pulse does not need to be regulated and controlled, and the ultrafast space-time light field can be reconstructed only by enabling the same-frequency components to interfere in the same spatial position to obtain the interference pattern of each frequency. The system provided by the utility model has the characteristics of convenience in implementation, interference resistance, low background noise, low data volume, high measurement efficiency and high measurement result accuracy.
Owner:SHENZHEN UNIV

Laser interferometer and light splitting device

Provided are a laser interferometer capable of reducing the frequency of a signal calculated and processed in a demodulation circuit and reducing the cost of the demodulation circuit, and a spectroscopic device provided with the laser interferometer. A laser interferometer is provided with: an optical modulator that adds a modulation signal to laser light using a resonator element; a light receiving element that detects a change in the intensity of the laser light including the sampled signal and the modulated signal, and outputs a laser reception signal; a signal oscillation unit that generates a reference signal of a first frequency with the vibration element as a source vibration; and a demodulation circuit that demodulates the sampled signal from the laser reception signal on the basis of the reference signal, the demodulation circuit comprising: a DC offset removal unit that removes the offset; a first phase regulator that regulates the phase of the reference signal; a first multiplier that multiplies the laser reception signal by a reference signal; a first filter; a second multiplier multiplying the first multiplication signal by a reference signal; a second filter; and a phase calculator that calculates a phase.
Owner:SEIKO EPSON CORP

Fourier transform spectrum equipment based on phase regulation and control and spectrum detection method

The invention provides Fourier transform spectrum equipment based on phase regulation and control and a spectrum detection method, and relates to the technical field of spectrum measurement. The Fourier transform spectrum equipment comprises a light source module used for providing detection light; the spectroscope is used for splitting the detection light into first scanning light and first reference light; the scanning module is used for introducing phase delay linearly related to the light frequency into the first scanning light to obtain second scanning light, and providing the second scanning light for the sample through the spectroscope; the reference module is used for reflecting the first reference light to obtain second reference light and providing the second reference light for the sample through the spectroscope; the photoelectric detector is used for receiving the second scanning light acted on the sample and the second reference light acted on the sample to obtain a first interference pattern; and the processing module is used for processing the first interference spectrum to obtain a spectrum detection result of the sample.
Owner:TIANJIN UNIV

Method and system for improving resolution of spectral interference system

The invention discloses a spectral interference system resolution improving method and system, and the method comprises the steps: building an ISE-Net end-to-end deep neural network model, enabling the convolution kernel size of an efficient channel attention module of the ISE-Net end-to-end deep neural network model to be adaptively determined according to the number of input channels, and constructing a mapping relation between narrowband and broadband interference signals; and generating an ideal narrowband signal and a double-bandwidth target signal according to a spectral interference physical formula, defining a loss function by minimizing deviation between model output and the target signal, updating parameters and dynamically adjusting a learning rate by using an AdamW optimizer until model loss is converged, and completing data generation and training. An input narrowband signal horizontal axis is converted to a corresponding frequency domain axis, and is subjected to time shifting and intensity scaling preprocessing to adapt to the model. A signal processing flow suitable for a single / multi-layer structure is constructed, a bandwidth expansion signal is obtained through decomposition, expansion and reconstruction, and the resolution of a spectrum interference system is improved. The method has the advantages of high calculation efficiency, high generalization and flexible deployment.
Owner:HUAZHONG UNIV OF SCI & TECH +1

Low-crosstalk channel modulation interference polarization spectrum detection method and system

The invention relates to the technical field of optics, in particular to a low-crosstalk channel modulation interference polarization spectrum detection method and system, and the system comprises a half-field telescopic module, a phase modulation module, an interference modulation module and a detection module. The half-view-field telescope module is used for performing lower half-view-field beam collimation on an input target beam, the target beam is propagated to the phase modulation module in parallel according to a set range, a composite polarization splitting prism group in the phase modulation module performs light splitting operation based on the target beam output by the half-view-field telescope module, and two parallel polarized lights are emitted, independent phase modulation of the two paths of light is ensured; and the interference modulation module is used for performing light splitting modulation according to the two paths of polarized light to ensure that the two paths of modulated polarized light beams interfere with each other and are transmitted to the detection module for imaging. According to the system, the detection precision of a narrow-band polarization spectrum or a polarization spectrum with an obvious narrow-band wave crest and a narrow-band absorption peak is improved, the polarization spectrum detection capability is high, and the application range is wide.
Owner:XI AN JIAOTONG UNIV

Interferometric Near Infrared Spectroscopy System and Method

An aspect of the disclosure provides an interferometric near infrared spectroscopy, iNIRS, system comprising: a light emitting arrangement comprising: a first light source configured to provide wavelength-swept emission of light through a plurality of different wavelengths in a first wavelength range; a second light source configured to provide wavelength-swept emission of light through a plurality of different wavelengths in a second wavelength range different to the first wavelength range; a common sample delivery channel coupled to each of the first and second light sources to receive light therefrom and to deliver said light towards a subject; and one or more reference channels for receiving reference light from the first light source and / or the second light source; a light detecting arrangement comprising an interferometrie optical detector; wherein the optical detector is coupled to the one or more reference channels for receiving reference light from the first and second light sources; wherein the light detecting arrangement is arranged to be coupled to the subject for the optical detector to receive sample light from the first and second light sources, the sample light comprising light which travelled along the common sample delivery channel; wherein the optical detector is arranged to combine the sample light with the reference light to provide combined light signals comprising one or more components at a beat frequency between sample light and reference light; and wherein the iNIRS system is configured to process the combined light signals for providing imaging and analysis of the subject.
Owner:COMIND TECH LTD

Continuous scanning half-wave sampling system and method for multi-dimensional coherent spectrum

The invention discloses a continuous scanning half-wave sampling system for a multi-dimensional coherent spectrum, which comprises a continuous laser, continuous laser output by the continuous laser and femtosecond laser pulse output by an ultra-short femtosecond laser pulse generation device are combined and then split, and modulation and time delay are respectively carried out; the multi-dimensional coherent femtosecond laser pulse sequence is used for exciting a fluorescence signal generated by a sample and converting the fluorescence signal into a first electric signal, and the obtained continuous laser carrying different modulation frequencies is converted into a second electric signal; and demodulating the second electric signal by taking a total mixing signal obtained by mixing the multiple paths of modulation signals as a reference, and demodulating the first electric signal by using the second electric signal. The invention further discloses a continuous scanning half-wave sampling method for the multi-dimensional coherent spectrum. The half-wave sampling method is utilized to accurately calibrate optical time delay so as to obtain the multi-phase multi-dimensional coherent spectrum. The sampling step length breaks through the limitation of the minimum sampling step length of traditional stepping collection, and the sampling bandwidth is remarkably improved.
Owner:INNOVATION ACAD FOR PRECISION MEASUREMENT SCI & TECH CAS

Dispersion coherent imaging spectrometer with one-dimensional ultra-wide field of view and ultra-high spectral resolution

The invention discloses a one-dimensional ultra-wide field-of-view ultra-high spectral resolution dispersion coherent imaging spectrometer, which belongs to the technical field of spectral imaging, and comprises a first microlens array used for obtaining incident light of a one-dimensional ultra-wide field-of-view in a horizontal plane; the plurality of optical fibers are used for transmitting incident light of a one-dimensional ultra-wide field of view; the second micro lens array is used for collimating incident light from each optical fiber into broadband parallel light beams; the grating beam splitter interferometer is used for dispersing the broadband parallel light beams into a plurality of narrow-band parallel light beams with different propagation directions; the cylindrical lens is used for converging the two paths of coherent light of each narrow-band parallel light beam to a target block of the detector, and converging the narrow-band parallel light beams with different propagation directions to different target blocks respectively; and the detector is used for obtaining a continuous broadband ultra-high resolution spectrum according to the two paths of coherent light received by each target block. According to the invention, a one-dimensional ultra-wide field of view is obtained in a horizontal plane, and ultra-high spectral resolution can be obtained.
Owner:XIDIAN UNIV

Wideband snapshot-type polarization interferometry imaging system and method for detecting breast tumors

This invention relates to the field of optical imaging and detection technology, specifically providing a broadband snapshot-type polarization interferometry imaging detection system and method for breast tumors. A broadband light source illuminates a breast tumor tissue sample. The reflected signal light is collected and collimated by a pre-optical system, then sequentially passes through a first and a second ray shaping unit for two shearing and two polarization state transformations, resulting in two beams of linearly polarized light and two beams of circularly polarized light. These beams are imaged by an imaging lens to an area array detector to obtain a polarization interferogram, which is then demodulated to obtain all Stokes parameters of the breast tumor tissue sample. This invention achieves broadband snapshot imaging of breast tumors with all Stokes parameters without using an analyzer, doubling the light throughput compared to traditional polarization imaging instruments using analyzers. Furthermore, this invention has advantages such as compact structure, no moving parts, easy assembly and adjustment, and no need for image registration.
Owner:CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI

Checkerboard Fabry-Perot interference snapshot imaging spectrometer

The invention relates to the field of spectral imaging, in particular to a checkerboard Fabry-Perot interference snapshot imaging spectrometer, which comprises a telescopic system, a micro-lens array, a Fabry-Perot array interference system and an area array detector, and is characterized in that the telescopic system is used for collecting a target light field and carrying out view field limitation and collimation on the target light field; the Fabry-Perot array interference system is used for modulating a target light field into an interference light field array and comprises a parallel flat plate and a checkerboard step mirror, the step height is distributed in a checkerboard-shaped two-dimensional decreasing mode, and an air gap with the thickness changing in a two-dimensional increasing mode is formed between the parallel flat plate and the checkerboard step mirror. The thickness of each area of the air gap corresponds to one optical path difference; the microlens array is used for imaging the interference light field array onto the area array detector through each imaging channel; and the area array detector is used for receiving the transmission image field of the microlens array to obtain an interference image array. The invention has the advantages of small volume, light weight, compact structure, static state, stability, reliability and the like.
Owner:CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI

Measurement device

The present technology pertains to a measurement device capable of suitably measuring the spectrum of a measurement light. A measurement device according to the present technology is provided with: a luminous flux splitting unit for splitting substantially parallel luminous flux into a first luminous flux and a second luminous flux, refracting and emitting the first luminous flux, and emitting the second luminous flux in a direction symmetrical to the emission direction of the first luminous flux on the basis of a first reference plane that includes the traveling direction of the substantially parallel luminous flux, thereby causing the first luminous flux and the second luminous flux to interfere with each other; a light-condensing unit for condensing the first luminous flux and the second luminous flux on a second reference plane that includes the traveling direction of the substantially parallel luminous flux and is orthogonal to the first reference plane; a sensor unit for detecting interference light between the first luminous flux and the second luminous flux; and a calculation unit for calculating the spectrum of the substantially parallel luminous flux on the basis of a detection result by the sensor unit. The present technology can be applied to, for example, a spectroscopic measurement device.
Owner:SONY SEMICON SOLUTIONS CORP

Non-Invasive Intracranial Pressure Sensing System and Method

An aspect of the disclosure provides a non-invasive intracranial pressure sensing apparatus comprising an interferometric near infrared spectroscopy, iNIRS system, the iNIRS system comprising: a light emitting arrangement comprising: a light source configured to emit light; a sample delivery channel coupled to the light source and arranged to be coupled to the subject's scalp to direct light from the light source towards the subject's brain tissue; and a reference channel coupled to the light source for receiving light therefrom; a light detecting arrangement configured to be coupled to the subject's scalp and the light emitting arrangement, the light detecting arrangement comprising an interferometric optical detector configured to receive: (i) reference light from the reference channel, and (ii) sample light from the subject's brain, the sample light comprising light emitted from the light source; wherein the optical detector is arranged to combine the sample light with the reference light to provide combined light signals comprising one or more components at a beat frequency between sample light and reference light; and wherein the sensing apparatus comprises a controller configured to process data indicative of the combined light signals to determine an indication of intracranial blood pressure for the subject based on at least one property of a pulsatile waveform of one or more identified pulses of blood flow through the subject's brain.
Owner:COMIND TECH LTD

Heterodyne laser interferometer signal processing link dynamic performance calibration device based on acousto-optic frequency shifter and calibration method thereof

The invention discloses a heterodyne laser interferometer signal processing link dynamic performance calibration device based on an acousto-optic frequency shifter and a calibration method of the heterodyne laser interferometer signal processing link dynamic performance calibration device, and relates to the technical field of heterodyne laser interferometer dynamic measurement performance calibration. The calibration result is coupled with the abbe error and cosine error caused by mechanical installation and the like and the data cycle error caused by asynchronous measurement, so that the problem that the dynamic measurement performance of the interferometer in the signal processing link is difficult to evaluate is solved. The calibration device comprises a laser assembly, a first measurement light path, a second measurement light path, an AOFS drive and motor controller light path and a phase meter. The laser assembly emits laser into the beam splitter prism assembly, the beam splitter prism assembly divides incident light into two beams of laser, the two beams of laser enter the first measuring light path and the second measuring light path respectively, and finally the two beams of laser are sent to the phase meter to calculate the phase difference. The device is an equivalent calibration device suitable for dynamic measurement performance of a heterodyne laser interferometer under high-speed movement of a target in a signal processing link.
Owner:HARBIN INST OF TECH

Active hyperspectral imaging and ranging

Systems and methods for remote sensing in a plurality of dimensions simultaneously are provided. The plurality of dimensions include imaging, spectral sensing, and ranging at a range resolution that is orders of magnitude finer than the native time resolution of a detector used in the system.
Owner:THE UNITED STATES OF AMERICA AS REPRESENTED BY THE SECRETARY OF THE NAVY

Optical device and spectroscopic device

An optical device includes: an incident optical system; an analysis optical system; and a length measurement optical system. The incident optical system includes a laser light source, and an incident light dividing element that divides the laser light. The analysis optical system includes a first light dividing element that divides the first divided light and then mixes the light, a first mirror that adds a first modulation signal to the one first divided light by movement and reflection, a second mirror, and a first light receiving element that receives the first divided light including a sample-derived signal and the first modulation signal. The length measurement optical system includes a second light dividing element that divides the second divided light and then mixes the light, an optical feedback unit that feeds back the one second divided light to the second light dividing element, and a second light receiving element that receives the second divided light including a displacement signal generated by the first mirror.
Owner:SEIKO EPSON CORP

Measurement device

UndeterminedJPWO2025115605A1PrismsInterferometric spectrometry
The present technology pertains to a measurement device capable of suitably measuring the spectrum of a measurement light. A measurement device according to the present technology is provided with: a luminous flux splitting unit for splitting substantially parallel luminous flux into a first luminous flux and a second luminous flux, refracting and emitting the first luminous flux, and emitting the second luminous flux in a direction symmetrical to the emission direction of the first luminous flux on the basis of a first reference plane that includes the traveling direction of the substantially parallel luminous flux, thereby causing the first luminous flux and the second luminous flux to interfere with each other; a light-condensing unit for condensing the first luminous flux and the second luminous flux on a second reference plane that includes the traveling direction of the substantially parallel luminous flux and is orthogonal to the first reference plane; a sensor unit for detecting interference light between the first luminous flux and the second luminous flux; and a calculation unit for calculating the spectrum of the substantially parallel luminous flux on the basis of a detection result by the sensor unit. The present technology can be applied to, for example, a spectroscopic measurement device.

Spectrum detector and optical communication equipment

The utility model relates to the technical field of optical communication, in particular to a spectrum detector and optical communication equipment. The spectrum detector comprises a double-fiber collimator used for inputting a detection light signal; the beam splitter prism is positioned on the light emitting side of the double-fiber collimator, and the light incident surface of the beam splitter prism is over against the light emitting side of the double-fiber collimator; the fixed spectroscope is positioned on one side, far away from the double-fiber collimator, of the beam splitter prism; the movable spectroscope is positioned on the reflected light emergent side of the beam splitter prism and can be close to or far away from the beam splitter prism along the light emergent direction of the beam splitter prism; the first photoelectric detector is located on the side, away from the movable spectroscope, of the beam splitter prism; the second photoelectric detector is located on the side, away from the beam splitter prism, of the fixed beam splitter. The volume of the spectrum detector can be effectively reduced.
Owner:O NET COMM (SHENZHEN) LTD

Optical constant measuring device and method for calculating an optical constant

A coherent light source 110 outputs coherent light including high-order harmonics obtained by irradiating short-pulse laser light to a nonlinear medium 4. A spectrometer 130 includes a grating 132 that diffracts the coherent light and an image sensor 134 that measures an image of the diffracted light. In a first state, a first double slit 150 having a pair of apertures spaced apart in a first direction is arranged at a predetermined position between coherent light source 110 and an incident slit of spectrometer 130. In a second state, a second double slit 152 that is a replica of first double slit 150 is arranged at the predetermined position as a replacement of first double slit 150 with a sample held in one aperture. A calculation processing device 200 calculates optical constants of the sample based on interference images measured in the first and second states.
Owner:THE UNIV OF TOKYO

Quantum cross-resonator spectrometer

The present disclosure provides a contact-less detection using a cross-cavity device where a small dielectric sample is placed at its center. The optical properties of the sample, such as the Kerr and Faraday rotation, or polarizability, manifest in the coupling between the cavities' electromagnetic modes and in the shift of their resonant frequencies. By calculating the dynamics of what are referred to herein as geometrical photonic states, a measuring protocol is formulated based on the quantum metric that maximizes the Fisher information and isolates the individual components of the complex dielectric function.
Owner:RGT UNIV OF CALIFORNIA +1

F-P spectral imaging system and method

PendingCN121804656AEliminate level aliasingAnti-aliasingRadiation pyrometryInterferometric spectrometryLight energyImage resolution
The invention provides an F-P spectral imaging system and method, and belongs to the technical field of spectral component measurement, and the system comprises a front lens which is used for collecting light energy and converting the light energy into emergent light meeting the limitation of the clear aperture of an F-P interferometer; the annular band optical filter comprises a central area and a plurality of concentric annular areas surrounding the central area, the bandwidth of each area is the same as the free spectral range of the F-P interferometer, and the annular band optical filter is used for eliminating level aliasing in emergent light of the front lens; the F-P interferometer is used for carrying out wavelength selection on emergent light of the annular band optical filter and outputting an interference field; the imaging mirror is used for projecting the interference field to the detector; and the detector is used for converting the projected optical signal into a digital electric signal. The F-P spectral imaging system which can maintain high spectral resolution and also can realize wide spectrum coverage is constructed by introducing the annular band optical filter which is accurately matched with the FSR of the F-P interferometer.
Owner:AEROSPACE INFORMATION RES INST CAS

Systems and methods for screening asymptomatic virus emitters

A method comprising at least one light source configured to generate a light of at least one wavelength and project the light over an optical path, a sample device, the device containing a sample obtained from exhalation of a person, a vortex mask configured to receive the light after the light passes through at least a portion of the sample device, the vortex mask including a series of concentric circles etched in a substrate, the vortex mask configured to provide destructive interference of coherent light received from the at least one light source, a detector configured to detect and measure wavelength intensities from the light in the optical path, the wavelength intensities being impacted by the light passing through the sample, the detector receiving the light that remained after passing through the vortex mask, and a processor configured to provide measurement results based on the wavelength intensities.
Owner:HYPER-SPECTRAL LLC

Linearization of mercury cadmium telluride photodetectors

A method for linearization of photodetector response is provided that includes establishing one or more static calibration coefficients based on a comparison of a test photodetector response to a linear reference photodetector. In some examples, a dynamic calibration coefficient is determined based on an average photodetector signal. In some applications, such as FTIR, a single calibration coefficient is utilized to obtain a linearized ratio.
Owner:THERMO SCI INSTR CO LTD

Extreme ultraviolet spectrograph calibration method based on extreme ultraviolet diffraction

The invention discloses an extreme ultraviolet spectrograph calibration method based on extreme ultraviolet diffraction, and relates to the technical field of spectrograph calibration, and the technical scheme is characterized in that a desktop type XUV light source generation device is used for generating XUV light beams; a diffraction device is arranged on the propagation path of the XUV light beam, so that the XUV light beam is diffracted; taking the FID spectral line of the helium atom 2p-1s as an energy reference point, and deducing part of unknown parameters of the diffraction device and the spectrometer according to the separation distance of + / -1 level diffraction beams measured at the position corresponding to the energy; in combination with a Gaussian fitting method, the positions of 0-level light beams and + / -1-level diffraction light beams at other positions on the detector are obtained, and according to a diffraction formula, energy corresponding to all positions on the XUV spectrometer is inverted; calibration precision is ensured by correcting copper mesh placement angle deviation and CCD image angle deviation. According to the invention, XUV light is diffracted by using the copper net, and global continuous calibration of the energy axis of the spectrometer is realized by combining with a characteristic spectral line with a known wavelength.
Owner:NAT UNIV OF DEFENSE TECH