The invention discloses a high-precision three-degree-of-freedom attitude adjustment platform for a
spectrometer, which is based on a simplified design of a
Stewart platform and comprises a movable platform, a static platform and a three-degree-of-freedom driving mechanism connected between the movable platform and the static platform. The driving mechanism is composed of three sets of
servo electric cylinders, telescopic rods and
servo motors and is driven by a
ball screw, and posture adjustment of the platform is achieved. According to the platform, a
laser interferometer is adopted as a high-precision sensor, a closed-loop
feedback control system is combined, and submicron displacement measurement and
attitude control are achieved. The platform can achieve translation in the Z-axis direction and rotation around the X axis and the Y axis, the rotation angle can reach + / -15 degrees, and the precision can reach 0.02 mm. According to the invention, the device ensures high precision and stability in a complex
working environment, has the characteristics of stable movement, quick response, easy maintenance and the like, and is suitable for the fields of optical experiments,
spectral analysis and attitude adjustment and error compensation of precise instruments.