The invention discloses a heavy-load precise micro-
vibration isolation rigidity regulation and control configuration based on a vertical
magnetization space electromagnetic array, and belongs to the technical field of precise
vibration isolation. According to the vertical
magnetization space electromagnetic array, 2n + 1 (n > = 1, n belongs to N +)
layers are arranged in an array mode in the axial direction, a movable magnetic ring array and a fixed magnetic ring array are coaxially nested to construct a single-side high-flux-density
magnetic field, wherein the movable magnetic ring array is composed of vertical
magnetization uniform-section magnetic rings between the adjacent
layers, and the high
negative stiffness characteristic is achieved; and an acceleration
feedback control algorithm is adopted to regulate and control the size and the direction of electrifying current in the coil so as to generate precise and controllable excitation
magnetic flux and dynamically regulate the
negative stiffness value. The vertical magnetization space electromagnetic array and the large-scale air floating micro-vibration
isolator are connected in parallel to support the load platform, so that the local low
dynamic stiffness characteristic can be generated under variable
heavy load, the
vibration isolation inherent frequency is effectively reduced, the vibration isolation
frequency band is expanded to be close to a full
frequency domain, and the vibration isolation efficiency is improved. And an ultra-quiet
working environment is provided for tip instruments and equipment such as an ultra-precise photoetching
machine, a high-resolution
satellite camera and an ultra-precise
machine tool, so that the leap-type improvement of the precision of the precise instruments and equipment is powerfully promoted.