The invention provides a method and a
system for detecting
gas concentration in an epitaxial growth reaction cavity,
computer equipment and a storage medium. The method comprises the following steps: acquiring a reflected
light signal, a reference
signal and a reaction cavity environment
signal; carrying out
wavelength calibration and intensity baseline calibration on the reflected
light signal according to the reference
signal, and generating an experimental absorption
spectral line according to the calibrated reflected
light signal; according to the reaction cavity environment signal, fitting the experimental absorption
spectral line and a target absorption
spectral line obtained by querying a preset
database, and performing inversion to obtain concentration information of the gas to be detected. According to the invention, through double calibration of a reference channel, an experimental spectral line and a
database target spectrum are strictly aligned on a frequency scale and an amplitude scale, interference of
linear displacement and baseline fluctuation on fitting is reduced, and quantitative precision is improved; and meanwhile, an environmental condition is introduced as a physical constraint, so that parameter
coupling is weakened, the
identifiability and robustness of inversion are improved, the dependence on pure empirical correction is reduced, and the stability of detection data is improved.