The invention discloses a long-
stroke two-dimensional nano worktable
system with an angle compensation function. A six-degree-of-freedom micro table designed on the basis of a piezoelectric
ceramic actuator and a soft hinge chain carries out comprehensive compensation of linear positioning and angle errors on a long-
stroke two-dimensional nano worktable. A
driving mode that a stepping motor and a
ball screw are combined is adopted, so a long-
stroke two-dimensional nano worktable has a large pitching angle, a
deflection angle and roll angle errors, and positioning precision is of
micron size. The six-degree-of-freedom micro table has nanoscale linear positioning precision and
millisecond-level angle positioning precision. The long-stroke two-dimensional nano worktable and the six-degree-of-freedom micro table are combined to form the long-stroke two-dimensional nano worktable
system. Under control of a closed-
loop control system, the six-degree-of-freedom micro table carries out the comprehensive compensation of the linear positioning errors and the angle errors on the long-stroke two-dimensional nano worktable, so two-dimensional long-stroke nano positioning is achieved.