Long-stroke two-dimensional nano worktable system with angle compensation function

Abstract

The invention discloses a long-stroke two-dimensional nano worktable system with an angle compensation function. A six-degree-of-freedom micro table designed on the basis of a piezoelectric ceramic actuator and a soft hinge chain carries out comprehensive compensation of linear positioning and angle errors on a long-stroke two-dimensional nano worktable. A driving mode that a stepping motor and a ball screw are combined is adopted, so a long-stroke two-dimensional nano worktable has a large pitching angle, a deflection angle and roll angle errors, and positioning precision is of micron size. The six-degree-of-freedom micro table has nanoscale linear positioning precision and millisecond-level angle positioning precision. The long-stroke two-dimensional nano worktable and the six-degree-of-freedom micro table are combined to form the long-stroke two-dimensional nano worktable system. Under control of a closed-loop control system, the six-degree-of-freedom micro table carries out the comprehensive compensation of the linear positioning errors and the angle errors on the long-stroke two-dimensional nano worktable, so two-dimensional long-stroke nano positioning is achieved.

Description

technical field [0001] The invention relates to the field of large-scale high-precision positioning workbench systems, in particular to a large-stroke two-dimensional nanometer workbench system with an angle compensation function. Background technique [0002] In the measurement system, the table not only needs to have extremely high linear positioning accuracy, but also needs to reduce its movement angle error as much as possible. The angular error of the worktable has a magnifying effect on its positioning error, especially in the measurement system that violates Abbe's principle, the Abbe error caused by the angular error of the worktable and the Abbe arm cannot be ignored. The traditional x-y two-dimensional worktable is mostly composed of two single-axis movable worktables. The imperfection of the guide rail causes the motion table to produce pitch, yaw, and roll motions. If the two worktables are in space at this time If there is a height difference, the positioning ...

AI Technical Summary

Problems solved by technology

However, when measuring, for a test piece with a certain height, the angle error of the worktable will still introduce a non-negligible measurement error, and this error will vary with the shape and placement of the workpiece, making it difficult to compensate

By improving the machining accuracy and assembly accuracy of the guide rail of the worktable, it has a certain effect on reducing the positioning error and angular deviation of the worktable, but under the requirements of large stroke and high precision, the cost is extremely high and it is difficult to achieve

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