14 results about "Abbe error" patented technology

The invention discloses an inclination angle type static leveling instrument with Abbe error correction, which comprises a shell, a rotating shaft is rotatably arranged in the shell, a connecting rod is fixed on the rotating shaft, a floating ball is fixed at the front end of the connecting rod, an inclinometer is mounted on the connecting rod, and the inclinometer is used for obtaining a pitch angle alpha and a roll angle beta of the connecting rod. The measured height delta H of the dip angle type static leveling instrument with abbe error correction is calculated by a formula (1). Compared with the prior art, the liquid level change drives the floating ball to cause the dip angle change of the connecting rod, the angle encoder collects the rotation angle p, meanwhile, the inclinometer collects the pitch angle alpha and the roll angle beta of the connecting rod, and then the abbe error is corrected according to a preset algorithm to calculate the absolute height variation. Through the structural design, the pose requirement of the level gauge is reduced, so that the level gauge can adapt to more complex measurement scenes. And secondly, relative height variation measurement is converted into absolute height variation measurement, so that the data reliability is improved.

The application relates to a dynamic performance calibration device and method of a heterodyne laser interferometer signal processing link based on an acousto-optic frequency shifter, and belongs to the technical field of dynamic measurement performance calibration of a heterodyne laser interferometer. The calibration method of the existing heterodyne laser interferometer couples Abbe error, cosine error and data period error caused by non-synchronous measurement due to mechanical installation, and brings the problem that the dynamic measurement performance of the signal processing link of the interferometer is difficult to evaluate. The calibration device comprises a laser assembly, a first measurement light path, a second measurement light path, an AOFS drive and motor controller light path and a phase meter; the laser assembly emits laser into a beam splitter prism assembly, the beam splitter prism assembly divides the incident light into two beams of laser which are respectively injected into the first measurement light path and the second measurement light path, and finally sent to the phase meter to calculate the phase difference. The application is suitable for the equivalent calibration device of the dynamic measurement performance of the signal processing link of the heterodyne laser interferometer under target high-speed motion.

The invention belongs to the technical field of laser interferometer calibration, and discloses a laser interferometer installation error calibration method comprising the following steps: environment preparation: setting temperature, humidity and vibration parameters of a laser interferometer calibration environment; optical element cleaning, wherein absolute ethyl alcohol and lens paper are used for wiping the optical elements, and the optical elements specifically comprise a laser transmitter, a receiver and a reflector; laser wavelength calibration; calibrating the straightness; calculating an Abbe error; cosine error calculation; and calculating a dead stroke error. According to the calibration method for the installation error of the laser interferometer, the measurement precision of the laser interferometer is effectively improved, the measurement result is more stable and accurate, and the strict requirement of a high-precision numerical control machine tool for displacement measurement precision is met; and meanwhile, the method also has good universality and effectiveness in a complex curved surface measurement scene, and the measurement precision of the laser interferometer in a complex application environment can be effectively improved.

The invention relates to the technical field of modeling, and particularly provides an Abbe error modeling method and system for a multi-axis machine tool, a terminal and a storage medium, and the method comprises the steps: constructing a reference coordinate system; analyzing kinematic chain data of the machine tool; analyzing an error coupling relationship between the linear axis and the rotating axis; and constructing an Abbe error model in the reference coordinate system based on the kinematic chain data and the error coupling relationship, wherein the Abbe error model is used for decoupling the Abbe error from the measured geometric error of the motion axis. According to the method, the error coupling relation between the linear shaft and the rotating shaft is analyzed, the Abbe error generated by deviation coupling between the deflection error of the rotating shaft and the linear shaft is considered, the influence effects of the geometric error and the Abbe error on the tool function point are separated, and therefore the overall machining precision of the machine tool is improved.

The invention provides a low-coupling contact type scanning probe device based on a parallel reed group, and belongs to the technical field of precision measurement. The device comprises a measuring head protection device, a three-axis flexible guide mechanism and a displacement detection system. The three-axis flexible guide mechanism adopts three pairs of parallel reed groups which are connected in series through a fixed plate and a translational plate to form an X / Y / Z three-axis independent movement low-coupling guide mechanism, and a gravity balance device spring is combined to counteract the Z-direction self-weight influence, so that the cross coupling error is reduced, and the reset precision and the dynamic response are improved. The displacement detection system is based on a single laser and a bias beam splitter prism, light beams are distributed to a horizontal four-quadrant detector and a vertical four-quadrant detector, three-dimensional displacement signals are captured synchronously, Abbe errors are eliminated, a closed-loop feedback coupling error compensation module is integrated, and residual coupling errors are corrected in real time through a least square method. The problems that an elastic element is prone to fatigue, uneven in rigidity in all directions, poor in dynamic performance and high in cost are solved, and the advantages of being high in precision, long in service life and low in cost are achieved.

The application provides a low coupling contact type scanning probe device based on parallel spring piece groups, and belongs to the technical field of precision measurement. The application comprises a probe protection device, a three-axis flexible guide mechanism and a displacement detection system. The three-axis flexible guide mechanism adopts three pairs of parallel spring piece groups, is connected in series through a fixed plate and a translational plate, forms a low coupling guide mechanism with independent X / Y / Z three-axis movement, combines a gravity balance device spring to offset the influence of Z direction dead weight, reduces cross coupling error, and improves reset accuracy and dynamic response. The displacement detection system is based on a single laser and a biased split light prism, divides the light beam to horizontal and vertical four-quadrant detectors, synchronously captures three-dimensional displacement signals, eliminates Abbe error, and integrates a closed loop feedback coupling error compensation module to correct residual coupling error in real time through a least square method. The application solves the problems of easy fatigue of elastic elements, uneven rigidity in each direction, poor dynamic performance and high cost, and has the advantages of high precision, long service life and low cost.

The application discloses a kind of six-degree-of-freedom error correction three-dimensional motion measurement system and measurement method, including optical air floatation platform, six-degree-of-freedom error correction three-dimensional motion measurement system, two-dimensional motion machine table, reference optical flat, color confocal measurement bridge component, camera measurement bridge component and thin film interference component;Camera measurement bridge frame module in the application acquires the image of concentric circle in the image grid sensor system, the concentric circle image is based on subpixel processing and concentric circle identification to obtain high-precision transverse displacement, based on linear interpolation calculation mode forms two virtual measurement lines in X, Y two directions, the intersection of measurement line is the placement position of color confocal head, the thin film interference component is placed directly below the head, the thin film interference component uses super-precision optical flat as measurement reference, so that the application satisfies three-dimensional zero Abbe error, three-axis zero coupling error, improve the measurement accuracy of three-dimensional motion measurement platform.

The invention belongs to the technical field of machining control, and particularly discloses a three-dimensional five-axis aspheric optical machining control method and system.The method comprises the steps that all motion axes are controlled to return to zero, a base coordinate system is established, a workpiece is clamped, and accurate mapping of the workpiece coordinate system and the base coordinate system is achieved through a measuring head; a program is loaded for five-axis linkage track simulation and collision detection, and over-travel and interference risks are avoided; a program is started after simulation is passed, and the multi-axis motion controller coordinates five-axis linkage in real time and collects the actual position of each axis; deviation is calculated based on the position information, motor output is dynamically adjusted, and Abbe error vectors are superposed to X, Y and Z axis instructions after RTCP compensation in combination with an off-line calibrated Abbe error mapping table and multi-dimensional interpolation during adjustment; the control shaft returns to a safe position after the program is finished. According to the method, the abbe error influence is effectively eliminated, the machining precision and stability are improved, and the high-precision machining requirement of the aspheric optical element is met.

This invention relates to the field of pose measurement and discloses a maskless embedded composite grating target and measurement system for precision linear guide components. The target includes a grating substrate, and within the same physical plane of the grating substrate, a two-dimensional incremental grating and an absolute positioning structure are disposed. The absolute positioning structure is discretely distributed within the two-dimensional incremental grating. No physical mask obstructs the target. In the measurement state, the spot of a single beam of measurement light simultaneously covers at least a portion of the two-dimensional incremental grating and at least one of the absolute positioning structures. The measurement system is implemented based on the target. The beneficial effects of this invention are that it eliminates Abbe error caused by measurement point separation at the physical level, achieving true single-point homogeneous six-degree-of-freedom measurement, and providing a high-precision, fully-degree-of-freedom, and compact in-situ measurement reference for ultra-precision industrial machine tool stages.

The application discloses a six-degree-of-freedom double-probe gear measuring device following the Abbe principle, and belongs to the fields of precise testing technology and instrument and gear non-contact measurement. The measuring device comprises a rack unit, a Y-axis moving unit, a Z-axis moving unit, a double-probe measuring unit and a C-axis rotating and fixing unit. The key components are measured in parallel in a symmetrical distribution form, the left and right tooth surfaces of the gear are synchronously measured, the rotation of the double probe can realize the purpose of adjusting the probe angle which needs to be moved on the guide multiple times in traditional measurement, the Z-axis moving unit is installed on the two sides of the Y-axis moving unit and is used for adjusting the position of the double probe in the tooth width direction, and the grating ruler is coaxially installed on the horizontal extension line of the center of the nut seat of the Y-axis and Z-axis moving units, so that the problems of low measuring efficiency, easy introduction of geometric error and incomplete acquisition of tooth surface data information of the existing gear measuring device are solved, and the influence of the Abbe error on the measuring device is reduced.

The invention discloses a three-coordinate measuring machine volume error modeling method based on the Abbe principle, and aims to improve the CMM measurement precision. Firstly, Abbe arm parameters of the CMM are defined and initialized, and the parameters describe spatial deviation between a measuring point of a probe and a reading head of a grating ruler of each motion axis; secondly, on the basis of a Denavit-Hartenberg (DH) modeling idea, a sequential cascade coordinate system from a workpiece coordinate system to a probe tail end tool coordinate system is established, and a unified kinematic chain topological structure is formed; then, calculating an Abbe error introduced by single-axis motion according to the Abbe principle, and establishing a single-axis error homogeneous transformation matrix containing angle and position deviations in combination with a DH modeling method; and finally, solving the actual position of the probe in a workpiece coordinate system by cascading the error homogeneous transformation matrix of each axis, and finally establishing a CMM volume error model based on the Abbe principle by subtracting the actual position vector from the theoretical position vector.

The invention provides a laser interference device and laser interference equipment, which are used for solving the problem of abbe error during detection of a measuring tool. The laser interference device comprises a light source, a light path assembly and a detector. The light source is used for emitting a detection light beam. The measuring light and the reference light enter from one light-transmitting surface of the light path assembly, and the measuring light and the reference light advance in the light path assembly until the measuring light and the reference light exit from the same light-transmitting surface of the light path assembly; the detector is used for receiving the measuring light and the reference light emitted by the light path assembly; the light path assembly is configured to guide the measuring light to advance on at least two effective measuring light paths, and the two effective measuring light paths are parallel in the measuring length direction of the measured object and are arranged on the two sides of the measured object at equal intervals. According to the invention, the effective measurement light paths are arranged on the two sides of the measured object, so that opposite Abbe errors can be generated and offset mutually.

This invention discloses a tolerance allocation and structural optimization design method for an optical tracking and measurement system based on Abbe error. It establishes a system error propagation model for the optical tracking and measurement system based on Lie group and Lie algebra theory; analytically expresses the macroscopic and microscopic Abbe errors caused by measurement distance and scanning depth; and establishes a system tolerance optimization allocation model by combining sensitivity analysis of each error source with the goal of minimizing the total system cost. For the positioning target, a design criterion for the positioning target radius based on Abbe error constraints is derived. Compared with existing technologies, this invention represents the total error as a vector synthesis of three error vectors in space. The analytical model can not only predict the average level of error but also accurately describe the statistical boundary of error fluctuations, achieving a balance between tolerance allocation and accuracy-cost. It automatically adjusts the accuracy of each component based on the error method effect, achieving minimum cost tolerance allocation, and derives the formula for the minimum target radius under the target accuracy.

The invention discloses a biaxial orthogonal manual adjustment universal platform for lens detection. The biaxial orthogonal manual adjustment universal platform comprises a main shell, an orthogonal deflection assembly and a fine adjustment driving system. The orthogonal deflection assembly is installed on the main shell through an orthogonal bearing, a table top of the orthogonal deflection assembly is used for bearing a to-be-measured lens, and the intersection point of two rotation axes of the orthogonal bearing forms a fixed geometric center point. The fine adjustment driving system comprises two sets of precise fine adjustment screw pairs arranged at a horizontal included angle and a counter-force tension spring, the ball head ends of the screw pairs make tangent contact with the inclined face of a swing block fixed to the lower end of the swing shaft, and the counter-force tension spring provides pre-tightening force to eliminate a transmission gap. By means of the structure, linear feeding of the screw pair is converted into pure rotation motion of the table board around the geometric center point, and double-shaft orthogonal adjustment of pitching and deflection is achieved. The device is compact in structure, is provided with a very small Abbe arm, effectively eliminates Abbe errors, is simple and convenient to operate, is high in adjustment precision, is low in cost, and is especially suitable for small-batch, multi-specification, rapid and high-precision online detection of optical lenses.