79 results about "Abbe error" patented technology

The invention provides a device for adjusting light path and a method thereof. The invention comprises a laser, a light spot detector and a monitor, wherein, the laser is used for generating laser beams irradiated to the light spot detector; the light spot detector is used for receiving the laser beams and then converting the received laser beam information to electrical signals and transmitting the electric signals to the monitor; and the monitor is connected with the light spot detector so as to convert received electrical signals to images. The light path adjusting method based on the device is characterized in coaxial measurement, and compared with traditional methods, the light path adjusting method of the invention is capable of eliminating Abbe error, improves adjustment precision, is easier to operate and is favorable to practically popularize.

The present invention preferably employs non-contact, small-displacement, capacitive sensors (124, 128, 130, 131, 132) to determine Abbe errors due to the pitch (20), yaw (22), or roll (18) of a near linear mechanical stage (56, 58) that are not indicated by an on-axis position indicator, such as a linear scale encoder or laser interferometer. The system is calibrated against a precise reference standard so the corrections depend only on sensing small changes in the sensor readings and not on absolute accuracy of the sensor readings. Although the present invention is preferred for use in split-axis positioning systems (50) with inertially separated stages (56, 58), the invention can be employed in typical split-axis or stacked stage systems to reduce their manufacturing costs.

The invention discloses a method and a device for measuring a free-form surface based on reference plane comparative measurement, and belongs to the technical field of optical precision detection. Themethod uses the high-precision plane flat crystal as a reference plane of an X-Y surface, utilizes the high-precision height measurement sensor and the free-form surface measurement sensor which arecoaxially installed to detect the high-precision plane flat crystal and the surface height information of the measured free-form surface respectively, utilizes the high-precision height measurement sensor to acquire the surface height information of the high-precision plane flat crystal to monitor and compensate the straightness error of an X-direction air-floatation guide rail and a Y-direction air-floatation guide rail, performs dimension reduction error separation on the surface appearance of the free-form surface, and realizes the nanometer precision detection of the appearance of the free-form surface. The method and the device for measuring the free-form surface based on reference plane comparative measurement can realize the detection of the free-form surface, provide high-precisionthree-dimensional linear positioning and scanning measurement, inhibit the influence of the straightness error of the movement of the X-direction guide rail and the Y-direction guide rail on the measurement of the free-form surface, reduce the influence of the Abbe error of the Z axis on the measurement, and realize the large-range and nanometer precision measurement of the free-form surface.

An invention of laser plane coordinate standard device contains three laser interferometry optical paths which measures the horizontal axial coordinate, it characterized in that a set of laser interferometry optical path which measures vertical axial coordinate is added, the interferometry optical path includes a vertical axis, object operating platform is located on the vertical axis and moves along the vertical axis drive by motor, pyramid reflector and survey target are mounted on the operating platform, a rotating prism which deflects the light path from horizontal axial to vertical axial is set on lower of operating platform. The device builds laser plane standard coordinate plane with two sets of mutually perpendicular laser interferometry optical paths, the structure is simple, accuracy of Abbe error compensation is high, measurement precision is high, direct calibration and error evaluation which is based on the coordinate points of large scale portable three-coordinate measuring machine are realized for the first time.

The invention discloses a small-Abbe-error three-dimensional measurement system, which is characterized in that the small-Abbe-error three-dimensional measurement system is arranged in a mechanical transmission unit and comprises an X-direction assembly, a Y-direction assembly and a Z-direction assembly, a Z-direction clamp head used for clamping a sensor is fixedly arranged on a Z-direction slide seat arranged in the Z-direction assembly, and gratings consisting of grating rulers and grating heads respectively comprise an X-direction grating assembly, a Y-direction grating assembly and a Z-direction grating assembly. The small-Abbe-error three-dimensional measurement system has the technical effects of high efficiency, accuracy and simplicity when being applied to the thermal deformation detection, and the Abbe errors can be effectively reduced.

The invention discloses an abbe error compensation method and system based on machine tool positioning precision measurement. The method comprises the steps: arranging a laser interferometer of a measurement device on a machine tool, carrying out the optical debugging, and enabling the laser interferometer to be in a to-be-measured state; recording a measurement program of the numerical control system to enable the program of the numerical control system to be consistent with measurement parameters of the laser interferometer; measuring the positioning error of the machine tool, and generatingan error compensation parameter table; measuring the distance between the emitted light of the laser interferometer and the central axis of the corresponding transmission lead screw, and recording the data as Abbe arm length; and the numerical control system performs superposition operation according to the error compensation parameter table and the abbe error value to generate a compensated positioning error compensation value, and drives the servo motor to perform feeding movement according to the positioning error compensation value to perform error compensation. The method has the advantages that the Abbe error generated in the measurement process is considered, the Abbe error is superimposed on the compensation value to serve as the final positioning precision of the machine tool, and the compensation precision is greatly improved.

The invention discloses a large-stroke high-precision Z-axis worktable with a novel structure. The worktable comprises a base, a first support, a second support, a movable supporting rod, a worktable body and a precise movable positioning table. The first support and the second support are arranged on the base, the movable supporting rod is arranged on the first support in an upward and downward movable mode, the movable supporting rod is fixedly provided with a grating ruler extending vertically, the first support is provided with a grating reading head, the precise movable positioning table is arranged on the second support in an upward and downward movable mode, the lower end of the movable supporting rod is fixedly connected with the precise movable positioning table, and a drive device is arranged on the precise movable positioning table. Due to the fact that the center of the worktable body, the center of the grating ruler, the center of the grating reading head and the center of the precise movable positioning table are located on the same line, zero abbe errors of a system can be achieved theoretically, abbe errors of the system are reduced to the largest extent, and micro-nano measuring and micro-nano processing requirements can be met.