Error measurement system and method for high-precision linear guide rail

Abstract

The invention belongs to the field of geometric accuracy detection, and particularly discloses an error measurement system and method for a high-precision linear guide rail. The system comprises a fixed unit and a mobile unit, wherein the fixed unit is arranged on a fixed plane of a numerical control machine tool and comprises a helium-neon laser, a first beam splitter prism, a second beam splitter prism, a polarization beam splitter prism, a first 1 / 4 wave plate and a first four-quadrant detector; and the mobile unit is arranged on a mobile workbench of the numerical control machine tool andcomprises a pyramid prism. According to the invention, the pyramid prism which is insensitive to angles is adopted to measure the straightness error, so that the crosstalk and the measurement error caused by the angle change can be effectively avoided; meanwhile, the pyramid prism is arranged on the axis or the paraxial line, so that the influence of the Abbe error on the measurement result can beeffectively reduced, and the precision of the straightness measurement is improved; and the six-degree-of-freedom synchronous measurement can be realized by arranging other devices, and each error isdecoupled and separated, so that the accuracy of the measurement result is improved.

Description

technical field [0001] The invention belongs to the field of geometric accuracy detection, and more particularly, relates to an error measurement system and method of a high-precision linear guide rail. Background technique [0002] In the field of ultra-precision machining, the accuracy of the linear guide of the CNC machine tool directly affects the motion accuracy of the CNC machine tool, and the motion accuracy of the CNC machine tool directly determines the machining accuracy. Therefore, accurate error measurement of the linear guide is an important way to ensure the machining accuracy. one. [0003] At present, the error measurement of linear guide rails mainly uses a commercial laser interferometer to measure each error individually. However, this method requires six installation measurements, resulting in complicated measurement process, long time consumption and low measurement accuracy. However, using the grating diffraction method for error measurement, only thre...

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Problems solved by technology

[0003] At present, the error measurement of the linear guideway mainly uses a commercial laser interferometer to measure each error individually, but this method requires six installation measurements, resulting in a complicated measurement process, long time-consuming, and low measurement accuracy.

However, the error measurement using the grating diffraction method can only measure three angle errors, and due to the limitations of the grating diffraction, the measurement range is limited

[0004] Therefore, the use of multiple beams for multi-degree-of-freedom measurement is the main development direction of linear guideway error measurement. CN201510067188 discloses a laser heterodyne interference straightness measurement device and method with six-degree-of-freedom detection. The device uses laser heterodyne interferometry and laser The combination of the spot detection method realizes the simultaneous detection of the six degrees of freedom of the yaw angle, pitch angle, roll angle, horizontal straightness, vertical straightness and straightness position, but the errors measured by the device cannot be effectively Decoupled so there is crosstalk between individual errors

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