639 results about "Measurement plane" patented technology

A sensor module for a probe head of a tactile coordinate measuring machine has a frame forming a stationary module base, thereby defining a first measurement plane. A moving part is connected to the frame via webs. Each web has a thick-material web portion arranged between two thin-material web portions, if seen in a cross section perpendicularly to the first measurement plane. The thick-material web portion has a material thickness greater than the corresponding material thickness of the thin-material web portions.

A magnetic field sensor for measuring a direction of a magnetic field in a plane comprises a sensing structure comprising a ring-shaped well, a plurality of contacts of equal size placed at equal distance from each other along the ring-shaped well, and an electronic circuit comprising a plurality of electronic switches associated with the contacts of the sensing structure, a logic block for controlling the electronic switches, at least one current source, a means for measuring a difference between a first voltage and a second voltage, a timing circuit providing a control signal for controlling the logic block and providing a reference signal, wherein the logic block is adapted to close and open the electronic switches under the control of the control signal according to a predetermined scheme such that a predetermined number of contacts of the plurality of contacts form a vertical Hall element that is supplied with current from the at least one current source and that has two contacts connected to the means for measuring, and such that the vertical Hall element is moved in steps along the ring-shaped well, and a means for measuring a phase shift between the reference signal and an output signal of the voltage measuring means.

The devices presented herein are capacitive sensors with single crystal silicon on all key stress points. Isolating trenches are formed by trench and refill forming dielectrically isolated conductive silicon electrodes for drive, sense and guards. For pressure sensing devices according to the invention, the pressure port is opposed to the electrical wire bond pads for ease of packaging. Dual-axis accelerometers measuring in plane acceleration and out of plane acceleration are also described. A third axis in plane is easy to achieve by duplicating and rotating the accelerometer 90 degrees about its out of plane axis Creating resonant structures, angular rate sensors, bolometers, and many other structures are possible with this process technology. Key advantages are hermeticity, vertical vias, vertical and horizontal gap capability, single crystal materials, wafer level packaging, small size, high performance and low cost.

A method for generating hardness information of tissue subject to a varying pressure. The method comprises receiving signals from the tissue from a sensor for measuring the deformation of the tissue in a measuring plane defined by the sensor, which sensor, during a varying pressure exerted on the tissue, is moved along the tissue in a direction transverse to the measuring plane; identifying strain of the tissue from the resulting signals; and relating the strain to elasticity and / or hardness parameters of the tissue. The method may comprise the step of displaying elasticity and / or hardness parameters of a tissue surface or tissue volume part extending practically parallel to the direction of motion of the sensor.

The invention relates to a system calibration method based on depth information. The method includes: firstly utilizing a circular plane target, extracting a feature point sub pixel outline by adopting self-adaptive threshold value edge detection and a multinomial fitting algorithm, and obtaining a central coordinate by using ellipse fitting; working out the optimal solution of a camera parameter by using a least square method according to a nonlinear imaging geometric model with distortion to obtain the pose of the target; at least providing depth information between the surface of an object to be detected and the target plane as the correction item of the camera model for correcting the pose of the measurement plane, and determining parts dimension by using an imaging principle and a point of intersection of a straight line with the parts surface; according to the system calibration method based on depth information, the problem that the dimension measuring system for the large-dimension plane parts is not high in calibration precision, thus being worthy of popularization and application.

The optical assembly of a GDI instrument is configured to deviate or steer stray beams away from the pupil of the instrument's imaging device and / or to suppress stray beams. Stray beam deviation is optimized by selecting particular wedge and / or tilt configurations that achieve the desired stray beam deviation while avoiding or at least minimizing phase offset at the optimum metrology plane. Stray beam suppression can be achieved by providing the diffractive groove profile of the instrument's optical assembly with smooth edges. The resultant profile facilitates effective diffraction order management as well as a reduction in back reflection. The invention is particularly well-suited for use with a GDI instrument in which the optical assembly comprises first and second diffraction gratings. In this case, any average phase offset that remains after setting wedge and / or tilt can be eliminated by inserting a suitable compensating plate between the first and second diffraction gratings or between the second diffraction grating and the object.

A planar velocity measurement system (100) is operative to measure all three velocity components of a flowing fluid (106) across an illuminated plane (108) using only a single line of sight. The fluid flow is seeded with small particles which accurately follow the flow field fluctuations. The seeded flow field is illuminated with pulsed laser light source (102) and the positions of the particles in the flow are recorded on CCD cameras (122,124). The in-plane velocities are measured by determining the in-plane particle displacements. The out-of-plane velocity component is determined by measuring the Doppler shift of the light scattered by the particles. Both gas and liquid velocities can be measured, as well as two-phase flows.

The invention provides a three-dimensional shape vision measuring method and system for a large component surface. The system comprises an image acquiring system, a controller, a computer, a three-dimensional optical measuring head, and a plurality of plane targets, wherein the plane targets are distributed around a measured objected; the three-dimensional optical measuring head and the plane targets are connected with the controller and the image acquiring system; the controller and the image acquiring system are connected with the computer; the three-dimensional optical measuring head comprises a grating binocular vision sensor and a wide-field camera, wherein the grating binocular vision sensor is used for measuring the three-dimensional shape of different sub regions of the large component surface; and the wide-field camera is used for measuring the plane targets; the computer uses the plane targets measured by the wide-field camera as medium, so that the three-dimensional shape data of different sub regions is integrated to a global coordinate system. The plane targets are used as medium, marks are not needed to be pasted on the measured object, and the global integrating device is not needed; simultaneously, the positions of the plane targets can be flexibly arranged according to the shape of the measured object without a measuring dead angle.

In an exposure apparatus of a liquid immersion exposure method, a liquid immersion area is formed on the upper surface of a wafer by liquid supplied in a space formed with a projection optical system, and on a moving table holding the wafer, a plurality of encoder heads is placed. Of the plurality of encoder heads, a controller measures positional information of the moving table within an XY plane using an encoder head which is outside a liquid immersion area. This allows a highly precise and stable measurement of positional information of the moving table.

A spectral photometer intended for integration purposes includes a measurement head equipped with illumination arrangement (10) including at least one light source (11) for the illumination at an angle of incidence of 45° of a measured object and located in a measurement plane (M), a pickup arrangement (20) for capturing the measurement light remitted by the measured object at an angle of reflection of essentially 0° relative to the perpendicular to the measurement plane, a spectrometer arrangement (30) including an entry aperture (31) for the spectral splitting of the measurement light captured and fed through the entry aperture, and a photoelectric receiver arrangement (32) exposed to the split measurement light for conversion of the individual spectral components of the measurement light into corresponding electrical signals. It further includes an electronic circuit (100) for control of the light source (11) and forming digital measurement values from the electrical signals produced by the photoelectric receiver arrangement. The light source (11) is constructed as a cosign beamer and located in such a way that its main radiation direction is essentially parallel to the main beam (21) of the remitted measurement light and the mean distance of the light source from the main beam of the remitted measurement light being essentially the same as the distance of the light source (11) from the measurement plane (M). The light source (11) includes a combination of two or more light emitting diodes of different spectral characteristics located in one plane and preferably positioned on a common carrier, whereby the plane is oriented essentially parallel to the measurement plane (M). The spectrometer arrangement (30) includes a pot-shaped spectrometer housing (34) made of plastic with an essentially cylindrical mantle (34a) and a removable cover. A concave diffraction grating (35) is positioned coaxially to the mantle in the spectrometer housing and rests on an annular shoulder (34c) formed on the mantle and preferably shaped complementary to the diffraction grating. The cover (34b)forces the diffraction grating (35) against the annular shoulder (34c) at a predefined force by way of a compression spring (36). The spectrometer housing (34) is with an end opposite the cover positioned on a printed circuit plate (33) including the entry aperture (31) and the photoelectric receiver arrangement (32) and fixed to the printed circuit plate (33) by a clamping spring (37). The pickup arrangement (20) is directly mounted on that side of the printed circuit plate (33) which is opposite the side of the spectrometer housing (34).

The invention discloses a flatness and parallelism measurement device and a flatness and parallelism measurement method. The flatness and parallelism measurement device comprises a working table. The working table is provided with a lower measurement base and vertical sliding rails located on the two sides of the lower measurement base. An upper measurement base is arranged above the lower measurement base, up-and-down sliding connection is formed by the upper measurement base and the vertical sliding rails, the upper measurement base and the lower measurement base are respectively provided with a plurality of first displacement sensors and a plurality of second displacement sensors, and the first displacement sensors and the second displacement sensors are annularly distributed around the same vertical surrounding center shaft at equal interval. When measurement is carried out, the zero values of the first displacement sensors and the zero values of the second displacement sensors are set through a standard verification block, then the coordinate value of each measured point of a workpiece is measured, a data processing system can conduct fitting to obtain the datum plane of the upper measurement face and the datum plane of the lower measurement face, the flatness error values of the upper measurement face and the lower measurement face of the workpiece can be further calculated, and the parallelism error value of the upper measurement face relative to the lower measurement face can be further calculated. According to the flatness and parallelism measurement device and the flatness and parallelism measurement method, the flatness and the parallelism can be measured at the same time, the measurement procedures are rapid, the measurement accuracy is high, and the flatness and parallelism measurement device and the flatness and parallelism measurement method are suitable for on-line measurement.

The invention discloses a non-contact three-dimensional optical measuring head and a non-contact three-dimensional optical measuring method for in-situ measurement of a numerical control machine, which are characterized in that: the non-contact three-dimensional optical measuring head consists of an image measuring system and a focus positioning system. The non-contact three-dimensional optical measuring method comprises the following steps of: firstly, making a focus judgment on the image measuring system by using an astigmatism method, determining a measuring plane, positioning the non-contact three-dimensional optical measuring head in a Z-axis direction at the same time and acquiring a Z-axis direction positioning value of a surface characteristic point of a workpiece; secondly, performing two-dimensional image measurement on basic geometric elements, of the workpiece, on the measuring plane by using a surface measuring method in image projection measurement to obtain two-dimensional plane coordinate values of the surface characteristic point of the workpiece; and finally, combining the two-dimensional plane coordinate values with the Z-axis direction positioning value to obtain the three-dimensional coordinate values of the surface characteristic point of the workpiece. The non-contact three-dimensional optical measuring head and the non-contact three-dimensional optical measuring method can effectively perform high-precision in-situ measurement of the geometric size of the workpiece processed by the numerical control machine, shorten the manufacturing period of products effectively and guarantee product quality.

A method of obtaining a fugitive emission flux measurement of airborne matter is provided. The method involves measuring the airborne matter along one or more than one measurement plane that spans the fugitive emission using two or more than two measurement beam paths where each of the two or more than two measurement beam paths are parallel to each other, or substantially parallel to each other, and determining a mass per unit length measurement for the measurement plane, determining a representative wind velocity at or near the one or more than one measurement plane, and calculating the fugitive emission flux of the airborne matter in mass per unit time using the mass per unit length determination and representative wind velocity.

The invention discloses a white light interference optical profile meter, comprising a macro / micro two-stage driving and displacement metering device in a vertical direction, white light interference displacement sensors and a universal table, wherein, the white light interference displacement sensors are fixed on the driving and displacement metering device fixed on an upright post, and the upright post is fixed on a vibration isolating table facet on which the universal table is placed. The wide-range three-dimensional optical profile meter based on white light interference and vertical scanning technology realizes rough and fine two-stage driving respectively by a servo motor and piezoelectric ceramic, so as to drive the white light interference displacement sensors to integrally move, adding the servo motor in vertical displacement can enlarge the measurement range, and vertical scanning is accomplished by the piezoelectric ceramic. The measurement of macro / micro displacement is completed by using the same diffraction grating metering system. The profile meter is capable of automatically searching for interference fringes and realizing the three-dimensional profiles of wide-range non-contact measurement planes and curved surfaces, and has the characteristics of high measurement precision, large measurement range, low cost and the like.

The invention discloses a precise plane coordinate correction method in laser radar scanning measurement. The method comprises the following steps of: a, designing and spraying a control sign: arranging control signs along the path in a staggered form on the two sides of a highway; b, selecting a control point for the feature signs formed by two crossed straight lines along the existing road; c, laser radar scanning: determining the laser radar scanning measurement mode; d, measuring a control point, wherein the control point plane measurement adopts GPS (global position system) static positioning measurement, and a net structure is formed; e, controlling sign extraction: accurately extracting the position of the laser radar point cloud data plane of the control sign by use of the information of the laser radar point cloud data; and f, precisely correcting the laser radar point cloud plane coordinate: performing precise plane coordinate processing on the laser data according to the GPS measurement result at the control point and the laser radar point cloud extraction result of the control sign. The method has high precision, low cost and high efficiency, and is easy to implement, simple and convenient to operate and suitable for precise plane coordinate correction in the laser radar scanning measurement for road reconstruction and expansion.

The present invention discloses a measuring refractive index device and a method thereof, which belongs to the field of optical detection. The device comprises a plurality of short coherent light sources with different wavelengths, a wavelength division multiplexer, an optical fiber coupler, two optical fiber collimators, a movable reflector, a reflector, a transparent slab, a wavelength-division multiplexer, a plurality of photoelectric receivers, and multistage optical fibers, and all components form a reference optical path and a measuring optical path. Through the cooperation of the reference optical path and the measuring optical path, the location of the cavity formed by the upper and lower surfaces of the tested transparent objects on the reflector and the transparent slab is measured, and with the distance between the reflector and the transparent slab, the thickness of the tested transparent object is obtained. The refractive index of the tested objective is obtained by comparing the optical path difference before and after the tested object is put in as well as the thickness of the tested transparent object. The measuring device provided by the invention is of simple structure, high measuring precision, able to conveniently measure the refractive index of planes and spherical mirrors and dispersion coefficient online with high precision.

An oxygen sensor with a sensitive element comprising a long flat disc-shaped zirconia solid electrolyte matrix, a measuring electrode and a reference electrode formed of platinum, the measuring electrode and reference electrode being constructed at the end of the solid electrolyte matrix On the opposite surface so that they face each other, wherein the surface pole of the measuring electrode is 8 to 18 mm2, and the width w of the sensitive element is 2.0 to 3.5 mm at the end of the solid electrolyte matrix. Oxygen sensors exhibit excellent gas response performance, can be heated rapidly and are small in size.

The invention provides a method for sound field separation by double plane vibration speed measurement and two dimensional space Fourier transform, which is characterized in that a measurement plane S1 and an auxiliary measurement plane S2 parallel therewith and Delta h away therefrom are disposed in the measurement sound field; normal direction particle vibration speed is measured on two planes; wave number domain transfer relationship between normal direction particle vibration speed on two measurement planes is established by the two dimensional space Fourier transform; sound pressure, normal direction particle vibration speed radiated by sound sources on both sides of the two measurement planes is separated according to the transferring relation. The method adopts two dimensional space Fourier transform as the sound field separation algorithm, making computation speed fast, and implementation simple; normal direction particle vibration speed on two measurement plane is used as the input for separation, so that the separated normal direction particle vibration speed has higher accuracy comparing with using sound pressure on two measurement planes as the input. The method can be widely applied for near-field acoustic holographic measurement under internal sound field or noise environment, material reflection coefficient measurement, scattering sound field separation.

The invention provides a method for sound field separation by double plane vibration speed measurement and equivalent source method, which is characterized in that a measurement plane S1 and an auxiliary measurement plane S2 parallel therewith and Delta h therefrom are provided in the measured sound field; normal direction particle vibration speed on the two planes are measured; two imaginary source planes S1* and S2* are provided, and equivalent source are distributed on the imaginary source planes; transfer relationship between the equivalent source and normal direction particle vibration speed on two measurement planes are established; strength of each equivalent source on the imaginary source planes S1* and S2* are determined according to the transfer relationship; sound pressure and normal direction particle vibration speed radiated by sound sources on both sides of the two measurement planes are separated according to strength of equivalent source on two imaginary source plane. The invention adopts equivalent source method as the sound source separation algorithm, which has great computation stability, high computation accuracy, and simple implementation; normal direction vibration speed on two measurement planes are used as input for the separation, therefore vibration speed of the separated normal direction particle has high accuracy. The method is widely applicable near-field acoustic holographic measurement under internal sound field or noise environment, material reflection coefficient measurement, scattering sound field separation.

A device (1) for measuring the relative orientation according to at least one degree of freedom for two objects, including a constraint generator (10) suitable for causing a goniometric sensor (40) to move in a plane, having the function of measuring the variation of relative orientation of the two objects in this plane. The goniometric sensor (40) is arranged in a housing (41) that crosses longitudinally the constraint generator (10), which has high flexional stiffness in a first longitudinal plane (β) and a low flexional stiffness in a second longitudinal plane (φ) orthogonal to the first (β) . The sensor measures rotations in a plane and the constraint generator induces a rotation in that plane. With the device (1) a data suit (50) can be made for measuring the movement of limbs of an individual. For example, arranging three devices (10a, 10b, 10c) in series, but capable of measuring angles in orthogonal planes, the rotation can be measured of the arm (76) with respect to a shoulder (75) of an individual.

The invention provides a plane measuring method and a plane measuring device based on the monocular vision. The plane measuring method includes placing a plane target on a measured plane, selecting a fixed point on the plane target for camera calibration, and obtaining necessary parameters for conversion from a world coordinate system to an image coordinate system. Through utilization of a conversion relationship between the world coordinate system and the image coordinate system, obtaining a position coordinate of an object feature point in the world coordinate system, and further obtaining the length value of an object in the world coordinate system.

The simultaneous measuring process of several optical parameters of planar waveguide in planar waveguide technology field includes the following steps: constituting the measuring apparatus, measuring the optical path and echo loss corresponding to the fixed reflector before the measured waveguide insertion, installing the measured waveguide; measuring the optical path and echo loss corresponding to various interfaces after the measured waveguide insertion, calculating the refractive index and thickness of the measured sample, and calculating the insertion loss, absorption loss, reflectivity and diffuse reflection factor of the planar waveguide based on the measured optical path and echo loss of the direct interface reflections and multiple inner reflections between interfaces as well as the multiple reflection relation. The present invention has high measurement precision, simple calculation and other advantages.

The present invention discloses an industrial robot performance measurement method. A laser tracker, a computer and a demonstrator arranged on the robot are provided. The computer is electrically connected with the laser tracker and the demonstrator. The method comprises the following steps: establishing the tool coordinates of the robot; performing coordinate collimation; determining the measurement plane and the test pose of the robot; selecting the pose accuracy as a measurement project; measuring the space position data of a TCP point through the laser tracker; calculating the position accuracy and the pose accuracy; and calculating the output position accuracy and the pose accuracy to generate a test report. The industrial robot performance measurement method can accurately realize the robot performance measurement, and is high in measurement precision, simple to operate and short in measurement time.

The invention discloses a robot tool central point calibration method using a two-dimensional measurement functional tablet. A robot is controlled to enable a TCP to make contact with a measurement area of a calibration tool more than three times in different postures in the calibration process, joint coordinate information of the robot is recorded in the contact process, and the two-dimensional coordinates of the contact points in a measurement plane are output through the two-dimensional position measurement function of the calibration tool; the coordinates of the TCP in a robot tail end tool coordinate system are calculated according to measured joint rotation angle information of the robot and the coordinate data of the contact points on the tablet and in combination with the structural parameters of the robot, and the calibration accuracy is evaluated. According to the calibration method, the TCP of the robot does not need to coincide with the same fixed point multiple times, the point-point coincidence requirement is weakened to point-surface coincidence, and operation is easy. When the TCP of the robot has small deviation, autonomous calibration can be realized.

A nail information detection device includes: a placement surface on which a finger having a nail is placed; an imaging unit which images the nail from one direction and acquires a image data; a moving unit which moves the imaging unit while keeping a distance between a measurement plane which is in contact with a peak position of the nail and parallel to the placement surface and the imaging unit constant; and a control unit configured to detect nail information including a first edge position and a second edge position on a shape of the nail.The control unit aligns a reference point of an imaging range of the imaging unit at the peak position and detects a position on the measurement plane of the nail edge based on the image data as the first edge position; and aligns the reference point at the first edge position and detects a position on the measurement plane of the nail edge based on the image data as the second edge position.

In a method for multi photon excitation of a sample a laser beam is split into at least two coherent partial beams each having a beam axis and a same intensity distribution about its beam axis. The partial beams are directed from different directions towards a common measuring plane running transversely to the beam axes at an inclination angle <1 between the beam axes of the partial beams; and the partial beams are projected onto the measuring plane by means of a common lens system. Thus, an interference pattern formed by the coherent partial beams within the measuring plane provides areas of maximum light intensity adjacent to areas of minimum light intensity.