9 results about "White light interferometry" patented technology

This invention discloses a method for obtaining the brittle-plastic transition depth of a two-phase composite material. The method involves using a metallographic microscope to capture a microscopic image of the scratch surface morphology. The locations of the first small pit and the first large pit in the scratch are determined from this image. Then, the distances from these two locations to the scratch incision point are measured using a measuring scale. The three-dimensional morphology of the scratch groove is obtained by photographing it using a white light interferometer. Based on the distances obtained from the measuring scale, the starting point (first small pit) and the ending point (first large pit) of the brittle-plastic transition zone are determined. The cross-sectional profile curve of the scratch at these locations is then captured, and the groove depth is measured. This invention combines the microscopic morphology captured by a microscope with the three-dimensional morphology obtained by white light interferometry to accurately determine the location and depth of the brittle-plastic transition in the material. This avoids interference from defects in the two-phase composite material itself or surface impurities and dust, effectively improving the accuracy of the test results.

The present disclosure relates to a surface profile measurement system and method. The surface profile measurement system comprises a displacement stage for carrying a reference sample and a sample and moving the reference sample and the sample. A white light interferometry module is configured to acquire a sequence of white light interference images at each measurement position on the surface of the sample to extract initial height data of different measurement points at each measurement position. A laser interferometry positioning module is configured to acquire a positioning interference image of the corresponding measurement position while the white light interferometry module acquires the sequence of white light interference images. A host computer is in signal connection with the displacement stage, the laser interferometry positioning module and the white light interferometry module, respectively. The host computer compensates the initial height data corresponding to the corresponding measurement points based on the positional offset of the positioning interference image of each measurement position relative to a reference interference image to obtain the height measurement value of each measurement point on the surface of the sample in the scanning direction, thereby eliminating the defocus error of the displacement stage.

The application discloses a white light interference measuring device and method using a virtual reference surface, which comprises a white light illumination unit for generating illumination required for measurement, a reference light path for constructing a virtual reference surface and generating reference light, a test light path for obtaining test light with surface topography information of a measured object, and an imaging light path for imaging the virtual reference surface and the surface of the measured object to form white light interference fringes. The application can realize high-precision measurement of surface roughness of an object and topography measurement of a large-aperture high-depth object.

This invention discloses a method and system for undersampling fly-scan 3D surface reconstruction based on white light interferometry. The method includes: firstly, acquiring continuous fly-scan undersampling signals; secondly, preprocessing the signals and constructing an effective pixel sample set; and finally, using a position-guided undersampling interferometric reconstruction model to perform height reconstruction, thereby generating a complete 3D surface height map. This invention significantly improves reconstruction accuracy and adaptability to complex surfaces, and can be widely applied in fields such as semiconductor testing, precision optical measurement, and 3D reconstruction of industrial microstructures, especially suitable for complex application scenarios requiring rapid measurement of large-depth samples.

The application provides a white light interferometry system, comprising a probe module, wherein the probe module is provided with a first probe and a second probe; the number of the second probes is multiple, and the multiple second probes are distributed on the circumferential side of the first probe; the first probe is used for emitting first detection light along the axial direction of the first probe and receiving reflected first detection light; the second probe is used for emitting second detection light outward along the radial direction of the second probe and receiving reflected second detection light; the probe module is used for acquiring the brightest peak of interference of the first detection light and the second detection light in one micro scanning process; the first probe is used for acquiring the measuring point information of the side surface of the object or the bottom of the groove; and the second probe is used for acquiring the measuring point information of the side wall of the object or the groove wall. The first probe and the second probe can be used to simultaneously or sequentially measure the top surface, the bottom surface and the 360-degree side wall of the workpiece in one clamping, the measuring efficiency is improved by several times, and the probe, the inclined measuring seat or the workpiece need not be frequently replaced or turned over for multiple times.

The application discloses a white light interference detection and multiplexing system and method with a flying strain resolution order of magnitude, utilizes the feature that the coherence length of white light is small, adjusts the fiber delay parameter, makes the multiple reflection light in the fiber grating group and the first reflection light perform heterodyne interference, realizes the effect of improving the system phase change and sensitivity, simultaneously adds the interferometer, demodulates the low-order interference light result as the reference of the high-order interference light, reduces the overall noise floor of the system, and finally fully utilizes the advantages of the white light spectrum width and the wavelength selectivity of the fiber grating, realizes the multiplexing, high resolution and low cost large-scale array sensing on one or more optical fibers.

This invention provides a method for reconstructing complex surfaces based on white light interferometry data: The method acquires surface topography measurement data of the complex surface to be reconstructed using white light interferometry; constructs a sliding local region centered on each point to be estimated within the measurement area; processes the measurement data within each local region to obtain the height value of the corresponding point to be estimated; and outputs the global reconstruction result of the complex surface after traversing all points to be estimated across the entire region. The process of processing the measurement data within each local region includes the following steps: S1, using MM estimation to perform robust pre-estimation of the measurement data within the current local region; S2, using the absolute value of the residual as input, and through mixing... t Distribution clustering adaptively classifies the measurement data to obtain the retained valid measurement data; S3, repeat S1 to S2 until the outlier removal iteration is completed to obtain the final valid measurement dataset; S4, use weighted Jacobi basis functions to perform local regression to obtain the height value of the point to be estimated.

This invention provides a method to improve the accuracy and efficiency of micro- and nanostructure measurements by resolving the registration accuracy problem between cross-scale data with large differences in lateral resolution (e.g., atomic force microscopy (AFM) and white light interferometry (WLI)). [Solution] The method involves preprocessing the AFM dataset and WLI dataset to identify the reference surface in the measurement data and calibrate the errors of different data sources S1, extracting feature region descriptors using an iterative similarity region algorithm S2, registering the two datasets based on the extracted feature region descriptors using an attention-based registration mechanism S3, fusing the WLI data and AFM data based on the registration results and registering the height reference, then replacing the AFM measurement data with the WLI measurement data in the overlapping portion, and performing smoothing processing by linear interpolation at the edge portions to complete the data fusing S4.

The invention provides a double-pulse white light interference light path based on an annular cavity. The double-pulse white light interference light path can be used for long-distance distributed optical fiber sensing and measurement. The system consists of an optical fiber annular cavity (8), an optical fiber collimator (9) and a movable reflecting mirror (10), wherein the optical fiber annular cavity (8) consists of a wide-spectrum light source (1), an electro-optical modulator (2), a 2 * 2 optical fiber coupler (3), a long-distance sensing optical fiber (4), a photoelectric detector (5), a 2 * 2 optical fiber coupler (6) and an optical fiber (7). In the system, a wide-spectrum light source is converted into pulse white light, so that high-spatial-resolution detection can be realized; the pulse white light is circularly transmitted in the optical fiber annular cavity, and long-distance strain or temperature sensing measurement can be realized by using the white light interference principle. Therefore, the pulse white light interference light path can be widely applied to long-distance optical fiber high spatial resolution sensing and measurement.