Surface morphology measuring device capable of continuous zooming

A technology of surface topography measurement and variable magnification group, which is applied in the direction of measuring devices, optical devices, instruments, etc., can solve the problem of discontinuous magnification change and achieve the effect of not easily losing the target

Active Publication Date: 2016-04-13
长川科技(苏州)有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

If there are different magnification requirements for the field of view during measurement, the objective lens need

Method used

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  • Surface morphology measuring device capable of continuous zooming
  • Surface morphology measuring device capable of continuous zooming
  • Surface morphology measuring device capable of continuous zooming

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Embodiment Construction

[0013] The specific implementation manners of the present invention will be further described in detail below in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0014] Such as figure 1 Shown is a schematic diagram of the structure of the device, including a light source 1, a light collecting mirror system 2, a beam splitting prism 3, an interference objective lens 4, a zoom optical system 6, an imaging optical system 7, an area array CCD camera 8, a micro-movement device 9, a carrier Object table 10 etc. The collecting mirror system 2 and the interference objective lens 4 form an epi-ejection Kohler illumination optical path, forming a uniform light beam to illuminate the workpiece 5; The moving device 9 and the interference objective lens 4 are coaxially arranged in the direction of the reflected light path of the dichroic prism 3...

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Abstract

The invention discloses a surface morphology measuring device capable of continuous zooming. The device comprises a light source, a collecting lens system, a light splitting prism, an interference object lens, a zooming optical system, an imaging optical system, an area array CCD camera, a micro movement device and an objective table, emergent type of the light collecting system is orientated to the light splitting prism, reflection light of the light splitting prism is orientated to the interference object lens, the zooming optical system is arranged coaxially between the light splitting lens and the imaging optical system, and an interference optical path is integrated and connected with an illumination optical path of the light splitting prism. The zooming optical system is a continuous zooming optical system, and comprises a compensation set, a zooming set and a fixed set. Aimed at requirements of different amplification multiplying power, it is only required to adjust the amplification multiplying power M of the zooming optical system instead of replacing the object lens to zooming in/out the view field of measurement, and the amplification multiple can be adjusted continuously. The device is suitable for realizing the surface morphology measurement in the phase difference interferometry or the vertical white light interferometry.

Description

technical field [0001] The invention relates to the technical field of surface topography measurement, in particular to a surface topography measurement device capable of continuously variable magnification. Background technique [0002] In recent years, with the continuous progress and development of precision manufacturing technology, especially in the fields of semiconductor nano-process technology, micro-electro-mechanical systems, nano-composite materials, and ultra-precision machining, non-destructive methods such as optical interference and their devices are used to measure objects The technique of three-dimensional surface topography has been increasingly widely used. Interference microscopy technology is the product of the combination of optical interference technology and microscopic technology. By adding a microscopic magnification system to the interference system, the lateral resolution of the interferogram can be improved, so that it can complete the three-dime...

Claims

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Application Information

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IPC IPC(8): G01B11/24
CPCG01B11/2441
Inventor 夏勇周伟
Owner 长川科技(苏州)有限公司
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