507 results about "Image-forming optical system" patented technology

The invention discloses a peripheral visual area defocused long-distance imaging optical system, and the system comprises a defocus panel which is located right above an observed object, and comprises a flat plate region and a micro-lens array region; the flat plate area is used for directly transmitting light emitted by an observed object; the micro-lens array area is used for carrying out first imaging on the peripheral area of an observed object to form a real image; the objective lens is positioned right above the defocus panel, and is used for performing first imaging on the observed object to form a virtual image of the observed object, receiving a real image of a peripheral area of the observed object, and performing second imaging to form a virtual image of the peripheral area of the observed object; the eyepiece is located right in front of the human eyes and used for conducting secondary imaging on the observed object, forming an amplified long-distance virtual image in front of the human eyes, receiving a virtual image of the peripheral area of the observed object and forming a real image in front of the peripheral retina in the human eyes. And the purpose of preventing and controlling myopia is better achieved.

An image pickup apparatus includes an image sensor having a plurality of pixels configured to receive light beams passing through a plurality of different pupil partial areas in an imaging optical system including a first optical system and a second optical system arranged in parallel with the first optical system, and a processor configured to acquire, based on a pair of signals from the plurality of pixels, a first defocus amount in a first focus detecting area at a first image height based on a first optical axis of the first optical system and a second defocus amount in a second focus detecting area at a second image height based on a second optical axis of the second optical system, and control the imaging optical system based on an average defocus amount of the first defocus amount and the second defocus amount.

The invention provides an imaging optical system for industrial visual inspection, which is characterized in that a first lens is mainly composed of nine lenses and has focal power, the object side surface of the first lens is a convex surface, and the image side surface of the first lens is a concave surface; the second lens has focal power; the third lens has focal power; the fourth lens has focal power; the fifth lens has positive focal power; the sixth lens has focal power, and the object side surface of the sixth lens is a convex surface; the seventh lens has focal power, and the object side surface of the seventh lens is a concave surface; the eighth lens has focal power; and the ninth lens has positive focal power, the image side surface of the ninth lens is a convex surface, and through the combination design of nine lenses and the reasonable configuration of the refractive power and the surface type of each lens, high-resolution imaging under a compact structure and a large aperture is realized, the aberration correction capability is particularly enhanced, and a relatively high MTF value is ensured in the whole zoom range. Accuracy and reliability of industrial detection are remarkably improved, and the system has the advantages of zooming, low distortion and low cost.

The scanning optical system includes: a deflector; and an imaging optical system having a first scanning lens closer to the deflector and a second scanning lens farther from the deflector. The scanning direction is a direction perpendicular to the rotation axis of the deflector and the optical axis of the imaging optical system, the value obtained by dividing the half value of the scanning width by the maximum value of the deflection angle [theta] is defined as a system focal length f, and the distance from the deflection surface of the deflector to the scanning surface on the optical axis is defined as L, when the distance from the deflection surface to the surface of the second scanning lens farther from the deflector is defined as d, 0.88 < = f / Ld / L < = 0.3 is satisfied, the scanning direction is defined as the Y-axis direction, the y-coordinate of the optical axis is defined as 0, and the y-coordinate of the position of the principal ray of the light flux on the scanning surface is represented by a function of a deflection angle [theta], the y-coordinate of the position of the principal ray of the light flux on the scanning surface is defined as a function of a deflection angle [theta]. The absolute value of the differential function dy / d [theta] of the function increases with the absolute value of the deflection angle [theta], and the differential function dy / d [theta] has a plurality of inflection points in the ranges of-1 < = r < =-0.4 and 0.4 < = r < = 1, respectively, where r is the ratio of the deflection angle to the maximum value of the absolute value of the deflection angle [theta].

An imaging optical system according to the present disclosure includes: an aperture stop; an image-forming optical system that causes an image to be formed toward an imaging plane of an image sensor; and an optical phase modulator that includes a substance having a birefringence index, and gives two pupil functions to the image-forming optical system. The following conditional expressions are satisfied:1≤(2×L×tan(w)+D) / D<1.4  (1)λ / 4*0.75<Re<λ / 4*1.1  (2), whereL: a distance between the aperture stop and the optical phase modulator; D: an aperture diameter (diameter) of the aperture stop; w: a maximum angle of incidence of a principal light ray that enters the aperture stop; λ: a wavelength of light; and Re: phase retardation caused by birefringence of the optical phase modulator.

The invention discloses a monocular four-dimensional imaging device and method based on a metasurface. The monocular four-dimensional imaging device comprises an image sensor and an imaging optical system arranged in front of the image sensor. Wherein the imaging optical system comprises a metasurface, the metasurface is designed to simultaneously generate a self-acceleration Airy point spread function with depth-dependent lateral displacement for incident left-hand circularly polarized light and right-hand circularly polarized light, and the self-acceleration Airy point spread function can generate a self-acceleration Airy point spread function with depth-dependent lateral displacement under the condition that a mechanical moving part is not used. Carrying out polarization separation and focusing on the left-hand circularly polarized light and the right-hand circularly polarized light; the image sensor is used for recording a mixed image containing the left-hand circularly polarized light information and the right-hand circularly polarized light information at the same time through single exposure so as to obtain three-dimensional depth and polarization information of the metasurface, namely monocular four-dimensional imaging of the metasurface. The scene perception and understanding capability of a machine is greatly enhanced, and the method has unique advantages in the aspects of target identification, material discrimination, severe environment perception and the like.

An imaging optic (10) for projection lithography serves to image an object field (5), in which a reticulum to be imaged can be arranged, onto an image field (11), in which a substrate to be exposed can be arranged. The imaging optic (10) has a plurality of mirrors (M1 to M8) for guiding imaging light (16) along an imaging beam path from the object field (5) to the image field (11). The image-side numerical aperture of the imaging optic (10) is greater than 0.75. The optical conductivity of the imaging optic (10) is greater than 45 mm. 2 The result is an imaging optic whose usability for a projection exposure system is improved.

The invention relates to the field of industrial visual inspection, and discloses an ultraviolet visible light confocal object image double telecentric imaging optical system which comprises a first lens, a second lens, a first gluing piece, a diaphragm, a second gluing piece, a third lens and a fourth lens which are sequentially arranged from an object plane to an image plane, and an optical axis serves as a rotation center. Wherein the object surface of the first lens is a convex spherical surface, the curvature radius of the first lens is 110.02 mm, the image surface of the first lens is a concave spherical surface, and the curvature radius of the first lens is 65.59 mm; the object surface of the second lens is a concave spherical surface, the curvature radius of the second lens is-200.11 mm, the image surface of the second lens is a convex spherical surface, and the curvature radius of the second lens is-130.80 mm. The system can be suitable for measuring an object with the object distance of 110 mm and an industrial camera with the imaging image surface diameter of 11 mm or below, the aperture of the system is F / 8, the system is also suitable for ultraviolet and visible light environments, it is ensured that lossless and high-contrast imaging can still be achieved in different light source environments, and therefore high-precision and high-reliability surface defect recognition and classification tasks are supported.

Provided is a substrate inspection apparatus which includes a stage to accommodate a substrate, an image sensor disposed on the stage, an objective lens disposed between the image sensor and the stage to project an image of the substrate, an imaging optical system disposed between the objective lens and the image sensor, a first main beam splitter disposed between the imaging optical system and the objective lens, a first illumination light source disposed at one side of the first main beam splitter to provide first illumination light to a first depth of the substrate, and a second illumination light source disposed adjacent to the first illumination light source to provide second illumination light source, which has a wavelength shorter than that of the first illumination light source, to a second depth, which is shallower than the first depth, through the first main beam splitter.

A control apparatus includes one or more memories storing instructions and one or more processors executing the instructions to obtain a movement direction instructed by a user with respect to an image captured to be displayed by an image capturing unit, obtain at least one of a rotation angle by a rotation of the image capturing unit or an image capturing element of the image capturing unit about an optical axis of an imaging optical system or a rotation angle by a rotation of the displayed image about a center of the image, and control a first drive unit that moves a shooting direction of the image capturing unit in a first direction and a second drive unit that moves the shooting direction of the image capturing unit in a second direction that is different from the first direction.

An imaging optics for projection lithography has a plurality of mirrors (M8, M9, M10) for imaging an object field in an object plane into an image field (8) in an image plane (9) with imaging light (3) guided along a beam path between the object field and the image field. A penultimate mirror (M9) in the beam path has no passage opening for the imaging light (3). An aperture (19) is arranged in the beam path between the penultimate mirror (M9) and a last mirror (M10) in the beam path. The aperture (19) defines, at least in sections, an edge contour of a pupil of the imaging optics (7) in the beam path between the penultimate mirror (M9) and the last mirror (M10). The aperture (19) is fixed to a component (M10) of the imaging optics via a fastening element (20) which runs at least in sections along the beam path between the penultimate mirror (M9) and the last mirror (M10).In another embodiment of the imaging optics, the aperture is part of a shell component of the imaging optics surrounding the beam path, or is fixed to a shell component of the imaging optics surrounding the beam path, or to a frame component of the imaging optics, or to the second-to-last mirror in the beam path, or to the last mirror in the beam path. In each case, the resulting imaging optics has a well-defined pupil and is optimized for projection lithography.

The invention discloses an infrared four-waveband composite annular aperture folded imaging optical system, belongs to the technical field of optical catadioptric optical paths, and aims to solve the problem that 1550nm / 1064nm dual-laser and medium-wave / long-wave infrared four-waveband composite detection is difficult to realize at the same time in the conventional annular aperture imaging technology. The system comprises a primary mirror, a secondary mirror, a 1064nm laser spot correction mirror, a 1550nm laser spot correction mirror, a 1064nm laser spectroscope, a 1550nm laser spectroscope, a broadband infrared detector, a 1550nm laser detector and a 1064nm laser detector. And high-performance common-aperture composite detection of 1064nm / 1550nm dual laser and medium-wave / long-wave infrared four wavebands is realized through a multi-stage light splitting mechanism. The limitation that a traditional annular aperture system is single in wave band is broken through, and the all-weather sensing and target recognition capability of the system in a complex environment is remarkably improved.

To provide an imaging optical system that has a small size, a large diameter, and high optical performance.SOLUTION: An imaging optical system has a maximum aperture, and a first transmission and reflection surface, a 1 / 4 wavelength plate, and a second transmission and reflection surface, which are arranged in order from an object side to an image side. Light from the object side passes in order through the first transmission and reflection surface and 1 / 4 wavelength plate, is reflected on the second transmission and reflection surface to the object side, passes through the 1 / 4 wavelength plate, is reflected on the first transmission and reflection surface to the image side, passes in order through the 1 / 4 wavelength plate and second transmission and reflection surface, and is directed to an image surface. The entire optical length, the distance on an optical axis from the first transmission and reflection surface to the image surface, the diameter of the maximum aperture, and the distance on an optical axis from the maximum aperture to the image surface.SELECTED DRAWING: Figure 3

The utility model discloses an object space telecentric imaging optical system and a position alignment device, the object space telecentric imaging optical system comprises an imaging system and an illumination system, the imaging system is provided with an object side and an image side which are oppositely arranged along an optical axis direction; the object space telecentric imaging optical system is composed of a first lens, a second lens, a third lens, a beam splitter prism, a fourth lens, a fifth lens and a sixth lens which are sequentially arranged from the object side to the image side. The illumination system comprises a light source, the light source is arranged corresponding to the beam splitter prism and is used for emitting an illumination light beam, the illumination light beam is reflected by the beam splitter prism and then illuminates the imaging system, through mutual combination of different lenses and reasonable distribution of positive and negative focal power, the magnification factor is increased, distortion is reduced, and high illumination uniformity and low cost are provided.

The invention belongs to the technical field of optical system aberration analysis, and discloses an experimental device for measuring and correcting image distortion of an optical imaging system, which comprises an optical axis testing device and an optical distortion testing platform, and the optical distortion test platform is used for testing optical distortion of the optical imaging system to be tested and integrating optical distortion data with optical axis deviation to obtain an image distortion fitting coefficient and a distortion correction model of the optical imaging system. According to the invention, the image distortion of the optical imaging device can be measured, the image distortion can be corrected, the imaging device can correct the deviation between the optical axis and the center of the target surface when the system is installed and adjusted, the optical distortion of the whole optical system can be corrected, and the method has guiding significance for the application of detecting and identifying the accurate position of a target by using the optical system.

An ophthalmic apparatus includes an objective lens, an illumination optical system, a mounting unit, an imaging optical system, a communication unit, and a controller. The illumination optical system is configured to generate illumination light using light from a light source, and to illuminate a subject's eye with the illumination light through the objective lens. The mounting unit is configured to allow an external device including a sensor to be mounted so that the sensor is arranged on an imaging optical path. The imaging optical system is configured to guide returning light of the illumination light from the subject's eye to the imaging optical path. The communication unit has a communication function with the external device. The controller is configured to control the illumination optical system and to control the sensor through the communication unit to synchronize with control for the illumination optical system.

Disclosed are a laser annealing system and a method of fabricating a semiconductor device using the same. The laser annealing system having multiple laser devices may include a stage, on which a substrate is loaded, a light source generating a plurality of laser beams to be provided to the substrate, an optical delivery system disposed between the light source and the stage and used to deliver the laser beams, a homogenizing system disposed between the optical delivery system and the stage, the homogenizing system including an array lens including a plurality of lens cells which allow the laser beams to pass therethrough and homogenize the laser beams, and an imaging optical system disposed between the homogenizing system and the stage to image the laser beams on the substrate.

An imaging optical system includes, in order from an object side to an image side, a first lens group, a second lens group, a third lens group having a positive refractive power, a fourth lens group having a positive refractive power, and a fifth lens group having a negative refractive power, in which, when focusing from an infinite distance object to a close distance object, the first lens group remains stationary with respect to an image surface, the second lens group moves to the object side along an optical axis, the third lens group remains stationary with respect to the image surface, the fourth lens group moves to the object side along the optical axis, and the fifth lens group remains stationary with respect to the image surface, the imaging optical system includes an aperture diaphragm, and the imaging optical system satisfies a predetermined conditional expression.

An imaging optical system includes an imaging lens, and an optical element disposed on an image side of the imaging lens. At least one surface of the optical element is a diffractive surface with a controlled wavelength dispersion characteristic. Predetermined inequalities are satisfied.

An optical member includes aperture regions, a lens device, and an imaging apparatus. A lens device includes: an imaging optical system; a first polarizing part that polarizes at least a part of rays transmitted through the imaging optical system; and a filter unit that is disposed at a pupil position of the imaging optical system or near the pupil position, and includes aperture regions transmitting the rays of the imaging optical system and including a first aperture region and a second aperture region, wavelength selective filters disposed in the first aperture region and the second aperture region and transmitting pieces of light of which at least a part of wavelength ranges are different from each other, and a second polarizing filter including polarizing filters disposed in the first aperture region and the second aperture region and having polarization directions different from each other.

To provide an image-forming optical system that achieves both of a high image-forming performance and miniaturization / reduced weight while having a large aperture ratio, has a light focus lens group, and suppresses bleeding at the time of focusing.SOLUTION: An image-forming optical system consists of a first lens group, a second lens group, a third lens group with positive refractive power, a fourth lens group with positive refractive power, and a fifth lens group with negative refractive power, in order from the object side to the image side, the first lens group is immobile relative to an image surface at the time of focusing from an object at infinity to a near-distance object, the second lens group travels to an object side along a light axis, the third lens group is immobile relative to an image surface, the fourth lens group travels to an object side along the light axis, the fifth lens group is immobile relative to an image surface, an aperture diaphragm is provided between a lens surface in the furthest image side of the second lens group and a lens surface in the furthest object side of the fourth lens group, and a predetermined conditional expression is satisfied.SELECTED DRAWING: Figure 1

The invention discloses an air suspension imaging optical system based on polarized light control and a reflection optical structure. The air suspension imaging optical system comprises an image source assembly; a polarization light splitting module, a polarization state conversion module and a reflection module; linearly polarized light emitted by the image source assembly is sequentially reflected or transmitted by the polarization beam splitting module, enters the polarization state conversion module to change the polarization state, is focused by the reflection module, returns, is converted into linearly polarized light through the polarization state conversion module again, and is transmitted or reflected through the polarization beam splitting assembly. A naked eye visible suspension real image without a physical medium is formed in the imaging area; through the above structure, the image light realizes high-efficiency light path turn-back and direction selection through a polarization control path, high-luminous-efficiency and high-quality aerial imaging is realized, and finally, an aerial real image which is visible to naked eyes and free of a medium is formed at a specific spatial position in the air; the system does not need to depend on a traditional imaging medium, and has the advantages of compact structure, high luminous efficiency utilization rate and good imaging brightness and definition.

An imaging optics for projection lithography has a plurality of mirrors (M9, M10) for imaging an object field in an object plane into an image field in an image plane with imaging light (3) guided along a beam path between these fields. A penultimate mirror (M9) in the beam path has no aperture for the imaging light (3). In the beam path (3 M9M10 ) between the second to last mirror (M9) and the last mirror (M10) in the beam path, an aperture (19) is arranged. This defines the outer edge contour of a pupil of the imaging optics in the beam path (3 M9M10 ) between the penultimate mirror (M9) and the last mirror (M10) at least in a pupil edge contour section, which is simultaneously in the beam path (3 M10W) between the last mirror in the beam path (M10) and the image field. The result is an imaging optic with a well-defined pupil and optimized for projection lithography.

The present invention is a focus control device (10) that makes a focal point adjustment by causing a focus lens (26ab) included in an imaging optical system (26a) to move forward or rearward in a direction along an optical axis (O) on the basis of an output signal from an imaging unit (26). The focus control device (10) comprises a processor. The processor detects distance information pertaining to the distance from the leading end of the imaging optical system to an object to be imaged. When the distance information lies within the range of a prescribed distance, the processor performs autofocus control for adjusting the position of the focus lens on the optical axis in accordance with changes in the imaging distance.

An imaging optic (23) serves to image an object field arranged in an object plane, in which a lithography mask can be arranged as the object to be imaged, with imaging light via an imaging beam path into an image field arranged in an image plane, in which a substrate onto which the image is to be formed can be arranged. The imaging optic (23) has at least one correction device (32). This device has a correction element (30) arranged in the imaging beam path, the imaging effect of which varies across the image field. Furthermore, the correction device (32) has a correction element holder (33) and a correction element drive unit (34). The correction element holder (33) is driven by the correction element drive unit (34) during an imaging phase of the imaging optic (23) and can be displaced along a correction element displacement direction (35) extending transversely to the imaging beam path.The result is an imaging optic whose imaging effect is improved to achieve a predetermined imaging result.

The present application provides an optical fiber-typed spectral confocal coherence tomography optical system and an application thereof. The system includes an optical fiber coupler, a broadband light source, a reference component, a sample component and a spectrometer. The reference component is connected to a first output end of the optical fiber coupler, for receiving a light source signal emitted by the optical fiber coupler and controllably forming the light source signal into an interference signal. The sample component is connected to a second output end of the optical fiber coupler, for receiving the light source signal emitted by the optical fiber coupler and forming a spectral confocal signal after the light source signal passes through a sample to be tested. The spectrometer is connected to a third output end of the optical fiber coupler.

The invention provides an imaging optical system suitable for a large aperture ratio telephoto lens which is light in weight and in which chromatic aberration on the axis is well corrected. This imaging optical system is configured from a first lens group (G1), a second lens group (G2), and a third lens group (G3), which are arranged in this order from the object side and have positive refractive power, only the second lens group (G2) moves when focusing from an object at infinity to an object at a close distance, the first lens group (G1) is configured from a group 1a and a group 1b arranged in this order from the object side, and the third lens group (G3) is configured from a group 1b and a group 1b arranged in this order from the object side. The 1b group has a meniscus-shaped negative lens (L1na) having a convex surface facing the object side and a negative lens (L1nb) different from the negative lens (L1na), the negative lens (L1na) being a negative lens located closest to the object side in the first lens group (G1), and the imaging optical system satisfies a predetermined conditional expression.

An imaging optical system wherein the number of lenses is three or four, an aperture stop is located between the lens closest to the object and the lens closest to the image, a single aspheric lens in which radius of curvature of each surface is infinity in the paraxial region and which has a power of the third-order aberration region in the peripheral area is provided at a position not adjacent to the aperture stop, the lens closest to the object is a negative lens or the aspheric lens, at least one positive lens is located closer to the image than the aperture stop,0.18<(∑i=1i=n<semantics definitionURL="">❘<annotation encoding="Mathematica">"\[LeftBracketingBar]"< / annotation>< / semantics>1fi<semantics definitionURL="">❘<annotation encoding="Mathematica">"\[RightBracketingBar]"< / annotation>< / semantics>)·fn<0.9is satisfied, a bundle of rays reaching the maximum image height and a bundle of rays having the principal ray parallel to the optical axis do not intersect with each other within the first lens from the object side, and40⁢°<HFOV<80⁢°is satisfied.

A fundus imaging device has a fixation optical system, an OCT optical system, an imaging optical system, and a controller. The controller is configured to acquire a focus evaluation value based on a slit image formed by slit-shaped illumination light on a two-dimensional imaging element of the imaging optical system in a case where an optical scanner of the imaging optical system deflects in a predetermined direction. The controller is configured to perform diopter correction control of the OCT optical system by driving a first focus adjustment unit of the OCT optical system based on the focus evaluation value.

A Raman spectroscopy apparatus comprises an imaging optical system that transmits light from an object to a spectrograph along an optical path. A scanning device intersects, and is movable with respect to, the optical path. Light is directed onto the scanning device to illuminate the object at a plurality of illumination points. The imaging optical system transmits Raman scattered light emitted from the object at the illumination points to an intermediate image plane, the scanning device being located at the intermediate image plane, and transmits the Raman scattered light from the intermediate image plane to the spectrograph. In comparison with conventional confocal Raman spectroscopy, the apparatus can perform Raman analysis of a sample more quickly, and in comparison with conventional line scan Raman spectroscopy the apparatus can perform Raman analysis more accurately.