The present invention relates to a
laser differential
confocal tomography focusing method and device, and relates to the technical field of
optical imaging and detection. The method uses a rear pupilto block half of a measurement beam, uses a spectroscopic differential
confocal detection
system to detect the unblocked measurement beam, and uses an
absolute zero point of a differential
confocal response curve to achieve high precision tomographic focusing. The method organically combines a
laser differential confocal technique and a
ray tracing technique to establish a
ray tracing and compensation model to eliminate influence among each fixed
focal surface parameters, and achieves fast trigger of focus through data near a linearly fitting
absolute zero point. The method can obtain the differential confocal response curve by using only one
detector, and realizes the tomographic focusing through the
absolute zero point of the differential confocal response curve, greatly simplifies
system structure, in the same time, avoids error introduced by adjustment inaccuracy, and greatly improves precision of focusing. The method will provide a new technical approach to the field of
confocal imaging / detection.