The invention discloses a method and a device based on focusing and leveling of a lenticule array and belongs to the technical field of opto-electrical detection. The invention comprises an emitting part and a receiving part, wherein, the emitting part comprises a
light source, a focusing lens, a pinhole filter, a beam expanding lens, an optimal
entrance pupil device, a lenticule array and a steering mirror; the receiving part comprises a steering mirror, a lenticule array, a focusing lens, a scan mirror of a micro-opto-electro-mechanical-
system (OMEMS), a pinhole filter and a
detector. The invention adopts the optimal
entrance pupil device to control light entrance quantity and then improve measuring
light spot, or the quantity of the imaging point can be controlled by the state of a switch to adapt to different
exposure viewing field; the invention adopts the lenticule array to replace a slit array; the scan mirror of the micro-opto-electro-mechanical-
system (OMEMS) is adopted to replace the
single lens scan; the difference receiving method is adopted and then the requirement for stability of the
light source is decreased and higher measuring accuracy can be acquired.