The invention discloses a full-automatic multi-component dispensing dynamic mixing proportion closed-
loop control system, which relates to the technical field of
semiconductor manufacturing, and comprises a multi-component feeding module, a dynamic proportioning execution module, an online detection module, an
intelligent control module, a mixing reaction module, an anti-
pollution module and a
data management module, the device has the advantages that anti-sticking conveying and rapid switching of multi-form raw materials are achieved through a plurality of independent flow channels and inner wall
diamond-like coatings of the multi-component feeding module in cooperation with a flow
channel inlet vibrating screen and an outlet
electromagnetic valve, a double-metering-pump parallel structure and a double-axial-flow type pulse
damper are adopted in the dynamic matching execution module, and the dynamic matching efficiency is improved. And by combining a
nonlinear model prediction controller of the
intelligent control module and BP neural network adaptive compensation, the dynamic adjustment precision of the multi-component
mixing ratio is remarkably improved, the mixing uniformity and purity reach the standard, the product scrapping caused by the ratio error is greatly reduced, and the
photoresist production yield and stability are improved.