The invention discloses an
absolute calibration method for an interferometer with spherical output
wavefront. An interferometer, a spherical standard lens, a computer-generated hologram and a
plane mirror are included. Firstly, the computer-generated
holography works in a spherical mode a, the computer-generated
holography is placed in and out of focus positions of an interferometer for measurement, and then the computer-generated
holography is rotated by 180 degrees for measurement; after the four steps of measurement are completed, the computer-generated holography works in a spherical mode b, the computer-generated holography is placed in and out of focus positions of the interferometer for measurement, and then the computer-generated holography is rotated by 180 degrees for measurement; then the
plane mirror is placed at the cat
eye position for measurement; according to computer-generated hologram manufacturing error characteristics, through the nine times of measurement, all errors in measurement results are decoupled, computer-generated hologram manufacturing errors including substrate errors, pattern
distortion errors and
etching depth errors are removed, interferometer
system errors are obtained, and
absolute calibration of the interferometer
system errors is completed; the method is ingenious in design, high in precision and high in
engineering application value.