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139 results about "Plasma electron" patented technology

Plasma is a gas, in which the energy of the atoms is so high, that the electrons are separated from the nucleus. Positive ions and electrons exist both together. Plasma is electrically conductive.

Fusion reactor plasma density and temperature diagnosing method based on Thomson scattering weak coherent technique

InactiveCN104185353AReduced Power RequirementsReduction of background stray light requirementsPlasma techniqueRayleigh scatteringPlasma electron
The invention discloses a fusion reactor plasma density and temperature diagnosing method based on the Thomson scattering weak coherent technique. The method comprises the steps that a broadband low-coherency intense light source is set, a bandwidth modulator is set, a beam splitting system is set, a reference arm is used for generating an optical path difference and a frequency shift signal, the light returned from the reference arm and a detection arm interferes and passes through an optical grating to be divided into interference spectrum signals with different wavelengths to be received by an array CCD, the incident light direction, namely the axial scattering intensity distribution is obtained through the Fourier transform, and the plasma electron density axial distribution information is obtained through rayleigh scattering or raman scattering absolute calibration; the thermal motion rate information of electrons is obtained through the Doppler broadening of a spectral line, and then the plasma electron temperature distribution is obtained; the horizontal movement adjustment is carried out on the length of the reference arm to change the optical path difference changing so as to achieve measurement on the great depth plasma with the depth larger than 1 m. The electron temperature and density of the fusion reactor plasma are measured online through the Thomson back scattering optical coherent chromatographic technique.
Owner:中国人民解放军陆军军官学院

Apparatus and method for measuring electron temperature of plasma in gas based on laser induction

The invention relates to an apparatus and a method for measuring the electron temperature of plasma in gas based on laser induction, and relates to an apparatus and a method for measuring the electron temperature of plasma. In prior plasma electron temperature measuring apparatuses and methods, probes are inserted into plasma, such that the status of plasma is influenced; surfaces of probes are easy to be polluted, such that relatively large errors are generated. With the apparatus and the method, the problems can be solved. Laser beams emitted from an emission port of an Nd: YAG laser penetrate through a focusing lens and a first quartz light inlet window, and are converged on an inner central point of an enclosed air chamber. Spectral lines emitted from a second quartz light inlet window pass through a converging lens, and are converged on a spectrum collection terminal of a spectrometer. The observation method comprises the steps that: one, the enclosed air chamber is filled with air; two, plasma are generated by the induction of the laser; three, plasma emission spectra are collected by the spectrometer; four, atomic lines are selected; five, electron temperature is obtained through calculation. The method has characteristics of low measuring error and high precision.
Owner:HARBIN INST OF TECH

Method for measuring plasma electron density by fiber spectrum synergizing discharge current

The invention relates to a method for measuring plasma electron density by fiber spectrum synergizing discharge current, and belongs to the technical field of discharge plasma diagnosis. The method is technically characterized by comprising the following steps: using a micro fiber spectrum measuring path and a discharge current measuring circuit at the same time to acquire real-time parameters of optical radiation spectrum of discharge plasma and discharge current, comprehensively analyzing the parameters through a computer data processing system, and calculating the electron density of the plasma. The micro fiber spectrum measuring path consists of a fiber probe, a conducting fiber and a micro fiber spectrometer, which are connected in turn; the discharge current measuring circuit consists of a current sensor, a current signal amplifier and a data acquisition device, which are connected in turn; and the computer data processing system calculates the electron density of the discharge plasma by using the acquired data according to the gas molecule motion theory. The method has the advantage that the application range of the discharge plasma electron density diagnosed by optical emission spectrometry is expanded to an imbalance state from a local thermal balance state.
Owner:DALIAN MARITIME UNIVERSITY

Plasma sheath ground simulation electromagnetic experiment device and using method

ActiveCN112333909AReal-time diagnosis of electron densityAchieving Continuous Stability ControlPlasma techniquePlasma jetPlasma electron
The invention discloses a plasma sheath ground simulation electromagnetic experiment device and an application method, and the experiment device comprises a plasma generator, a spray pipe and a plasmadiagnosis system; the plasma generator is used for ionizing a neutral gas to generate high-temperature plasma; the spray pipe is used for accelerating the plasma by utilizing an aerodynamic principleand shaping the cross section of the plasma jet flow in a vacuum dark chamber; and the plasma diagnosis system is used for diagnosing the electron density of the plasma jet flow in real time througha non-contact method and feeding back the electron density to a comprehensive controller, and the comprehensive controller compares the actually measured electron density with a preset electron density value, and the power supply output power of the plasma generator is adjusted through feedback to realize continuous and stable control of the electron density of plasma jet. The plasma jet flow generated by the invention is stable and controllable, the electron density range is wide, the collision frequency range is wide, the length is large, the components are pure, and the regulation and control of the non-uniform distribution of the plasma electron density can be realized.
Owner:XIDIAN UNIV

Apparatus for ion beam implantation

This invention discloses an ion implantation apparatus that has an ion source and an ion extraction means for extracting an ion beam therefrom. The ion implantation apparatus further includes an ion beam sweeping-and-deflecting means disposed immediately next to the ion extraction means. The ion implantation apparatus further includes a magnetic analyzer for guiding the ion beam passed through the deflecting-and-sweeping means. The mass analyzer is also used for selecting ions with specific mass-to-charge ratio to pass through a mass slit to project onto a substrate. The sweeping-and-deflecting means is applied to deflect the ion beam to project through the magnetic mass analyzer and the mass slit for sweeping the ion beam over a surface of the substrate to carry out an ion implantation. In a preferred embodiment, the ion implantation apparatus further includes a plasma electron flood system disposed between the mass slit and the substrate for projecting a plurality of electrons to the ion beam for preventing a space-charge and beam dispersion. In another preferred embodiment, the ion beam extraction and projecting system of this invention further includes a divergent ion-beam extracting optics for extracting an ion beam with a small divergent angle for projecting and diverging the ion beam as the ion beam is projected toward the target surface.
Owner:ADVANCED ION BEAM TECHNOLOGY INC

Method for calibrating spectral line self-absorption effect in laser-induced breakdown spectrometry

InactiveCN106770190AAchieve correctionCalibration is straightforward and easyAnalysis by thermal excitationPlasma electronLine width
The invention belongs to the technical field of laser spectroscopy analysis and detection methods, and concretely relates to a method for calibrating a spectral line self-absorption effect in laser-induced breakdown spectrometry. The method is mainly characterized by acquiring a self-absorption coefficient of a spectral line to be analyzed through plasma electron density and line width of the spectral line to be analyzed measured based on a trace element spectrum line so as to calibrate the spectral line self-absorption effect. The method comprises the concrete steps of (1) selecting a trace element spectrum line under the same measurement condition as an optically thin reference line not affected by the self-absorption effect; (2) calculating corresponding plasma electron density through line width of the selected reference line; (3) calculating the self-absorption coefficient of the spectral line to be analyzed through the electron density and the line width of the spectral line to be analyzed, and evaluating a self-absorption degree; (4) calibrating peak intensity and integral intensity of the spectral line to be analyzed through the self-absorption coefficient. By utilizing the method, the plasma spectral line intensity can be conveniently calibrated, the accuracy of spectral data is improved, and quantitative analysis of material compositions is further carried out accurately.
Owner:SHANXI UNIV
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