54 results about "Plasma electron" patented technology

The invention belongs to the technical field of laser welding, and discloses a real-time feedback control method and system for laser welding penetration stability, and the method comprises the steps: obtaining plasma electron temperature characteristics in a laser welding process in real time through a spectrum monitoring system, and enabling the plasma electron temperature characteristics to be associated with penetration fluctuation as a core input signal of feedback control. The signal has better real-time performance and more accurate feature extraction capability in real-time feedback control of laser welding by virtue of broadband coverage and multi-dimensional information acquisition capability of the signal in combination with a more efficient data analysis mode. A parallel type self-learning fuzzy neural network controller is used for executing real-time feedback control output of laser welding penetration fluctuation. On a control architecture, a traditional PD controller and a fuzzy neural network are connected in parallel and are respectively used as a PD control module and a fuzzy neural network control module. And the process database is embedded into the forepart structure of the neural network control module in a fuzzy rule form.

The invention discloses a plasma parameter probe-microwave collaborative diagnosis system. The plasma parameter probe-microwave collaborative diagnosis system comprises a diagnosis probe, a reflecting antenna, a vector network analyzer and a computer terminal, according to the method, global and local information of plasma parameters is provided through the diagnosis probe and the reflecting antenna, inversion is performed on S11 data and plasma electron density of a monitoring point where the diagnosis probe is located through the trained neural network model, and plasma density distribution and plasma collision frequency are obtained. Cooperative diagnosis of the plasma is completed, and the density distribution of the plasma and the collision frequency of the plasma can be rapidly and accurately obtained.

The invention provides a method for measuring plasma generated by electro-chemical coupling explosion, which adopts a device for measuring plasma generated by electro-chemical coupling explosion, the device comprises an explosion cavity and an oscilloscope, and a Langmuir three-probe is arranged in the explosion cavity; and the Langmuir three-probe is connected with an oscilloscope. The Langmuir three-probe comprises a probe P1, a probe P2 and a probe P3. The device provided by the invention has the characteristics of being suitable for transient plasma diagnosis based on Langmuir three probes, simple in structure and convenient in data processing, voltage signals measured by a probe circuit are acquired and are converted into plasma electron temperature and density after being analyzed and calculated, and the electron density ne of the plasma is calculated according to the electron density ne of the plasma. Therefore, the plasma generated by the electro-chemical coupling explosion can be measured.

A plasma processing apparatus includes: a plasma process chamber; a substrate support disposed within the plasma process chamber; an antenna disposed above the plasma process chamber; a source RF signal generator configured to generate a source RF signal; a bias signal generator configured to generate a bias signal; an upper electromagnet unit including a plurality of upper annular electromagnets arranged concentrically; a sidewall electromagnet unit including a plurality of sidewall annular electromagnets; an electromagnet excitation circuit configured to supply a current to at least one of the plurality of upper annular electromagnets or the plurality of sidewall annular electromagnets; and a controller configured to adjust the current supplied to at least one of the plurality of upper annular electromagnets or the plurality of sidewall annular electromagnets to control a plasma electron density distribution in the plasma process chamber.

This invention belongs to the field of laser cladding detection technology, specifically relating to a method for extracting and analyzing spectral signal features during the cladding process of PDC drill bits. The method includes: acquiring a real-time plasma spectral sequence of the PDC drill bit cladding process using a fiber optic probe and spectrometer; obtaining spectral line effectiveness weights based on the intensity and signal-to-noise ratio of characteristic spectral lines in the plasma spectral sequence; obtaining elemental fusion state indices based on the spectral line effectiveness weights, the intensity of hard phase spectral lines, and the intensity of binder phase spectral lines; obtaining cladding quality stability based on the elemental fusion state index and plasma electron density fluctuations; and determining cladding defects in the PDC drill bit based on the cladding quality stability. This invention effectively suppresses the interference of strong background noise on the monitoring results by integrating spectral signal-to-noise ratio weights and electron density fluctuation characteristics, thus improving the accuracy of detecting component segregation and thermodynamic instability in the cladding layer.

The present invention discloses a portable terahertz solid source interferometer, which includes an interferometer box body, a main optical path platform, a detection and data processing platform, and a plasma detection platform. The three modular platforms of the main optical path platform, the detection and data processing platform, and the plasma detection platform are fixed on the bottom plate of the interferometer box body. The interferometer uses two terahertz solid sources with selectable frequencies as light sources, generates a heterodyne signal through the dual-laser method, and uses the heterodyne interferometer optical path to measure the plasma electron density. This device can solve the problem of convenient measurement of the plasma electron density of most plasma generating devices. By designing the specific structure of the portable terahertz solid source interferometer, a compact, movable, and easy-to-operate system layout is realized, and it is applicable to multiple scenarios and a wide plasma density range, providing a convenient and fast measurement tool for plasma density measurement.

The present invention belongs to the field of plasma electron density measurement and discloses a plasma electron density measurement device and method based on laser wavefront analysis. The device uses a frequency doubling crystal to convert a fundamental frequency laser beam into a coaxial fundamental frequency beam and a second harmonic beam. The two coaxial laser beams produce different wavefront changes when passing through plasma, and these changes are converted into changes in the centroid displacement of a focal light spot through a microlens array. Unlike other measurement methods that require the provision of probe light and reference light, the device does not require a comparison before and after the presence of plasma, and only requires a reference to the difference in the change in the centroid of the focal light spot after two coaxial laser beams of different wavelengths pass through the plasma. The use of the measurement device can eliminate the interference of neutral particles during the experiment and eliminate the difference in laser light in two experiments with and without plasma, thereby achieving synchronous compensation and effectively solving the problem that the reference light path provided in the prior art is easily affected by the environment, thereby limiting the measurement accuracy.

The present invention discloses a plasma electron density measuring device, including a first terahertz solid source, a second terahertz solid source, an interferometer optical path and other devices; the interferometer optical path is used to output the light beam generated by the first solid source to the first detector; it is also used to output the light beam generated by the first solid source to the second detector; the interferometer optical path is used to output the light beam generated by the second solid source to the first detector; it is also used to output the light beam generated by the second solid source to the corner reflector passing through the plasma, so that the second detector receives the light beam returned by the corner reflector; the first detector and the second detector are used to obtain a combined beam signal, so that the device can calculate the plasma electron density according to the combined beam signal. The plasma electron density measuring device provided by the embodiment of the present invention has a compact layout, uses fewer optical devices, does not need to use a large bracket, is easy to design and install on a large plasma experimental device, has stable operation, and has low operation and maintenance costs.

This invention relates to the field of aerospace propulsion technology, and in particular to an oxygen-resistant Hall thruster electric propulsion system, comprising a Hall thruster, a radio frequency neutralizer, a power processing unit, a working propellant storage and supply system, and an integrated electronic control system. This invention establishes an electrical connection between the Hall thruster and the radio frequency neutralizer, directly connecting the collecting electrode to the negative terminal of a high-voltage power supply, eliminating the holding electrode and its independent power supply branch. Simultaneously, it combines a dual-path working propellant supply structure with oxidation-resistant conductive materials for the anode and collecting electrode. This allows the radio frequency neutralizer to rapidly establish a plasma electron source without the need for traditional hot cathode preheating. After the Hall thruster ejects the ion beam, electrons are automatically extracted based on the potential gradient. This not only reduces the complexity of the system's power supply structure and improves the discharge stability and electron compensation capability in low-purity working propellants and oxygen-containing environments, but also enhances the system's oxygen-resistant lifetime and rapid start-up performance in low Earth orbit oxygen-rich environments.

The application discloses a kind of dual-channel wave-absorbing devices based on plasma composite material, it is related to plasma application field, device includes: metal base, first wave-absorbing material layer, plasma array, second wave-absorbing material layer, first isolation protection layer and second isolation protection layer;First wave-absorbing material layer is set on the upper surface of metal base;First wave-absorbing material layer top is equipped with plasma array;The top of plasma array is equipped with second wave-absorbing material layer;First isolation protection layer and second isolation protection layer are set on the two sides of plasma array;Two wave-absorbing material layers and two isolation protection layers constitute cavity structure;Plasma array is set in cavity structure, so that plasma array is in the cavity formed by wave-absorbing material layer, conducive to the generation and maintenance of plasma electron density, to improve wave-absorbing effect and wave-absorbing performance, in addition, using plasma and wave-absorbing material layer combination forms composite dual-channel wave-absorbing structure, greatly improve wave-absorbing performance.

This invention provides a method for diagnosing parameters of non-uniform plasmas based on the local microwave penetration effect. This method relates to the fields of electromagnetics and plasma diagnostics, and includes a combined diagnosis of the electron density distribution and collision frequency of a plasma profile. The method models the plasma to the left of the peak layer by layer and iteratively optimizes the distribution results. The method also uses the maximum reflection coefficient amplitude slope to derive the plasma electron density peak. For the plasma to the right of the peak, the method models multiple distribution models, determining the model using the attenuation coefficient. Furthermore, the method uses the maximum reflection coefficient amplitude to diagnose the collision frequency. This method addresses the problem of diagnosing parameters of non-uniform plasma profiles.

The application discloses a plasma electron temperature two-dimensional distribution multi-time point diagnosis method and device based on an X-ray waveband sheet array, equipment and a medium, and comprises the following steps: acquiring two X-ray coded images under the same time signal; reconstructing the X-ray coded images through a coded image reconstruction algorithm to obtain a high-resolution X-ray intensity image corresponding to each X-ray coded image; constructing a corresponding relationship between the intensity ratio and the electron temperature of the two high-resolution X-ray intensity images at the same position based on the working principle of a multi-channel filter sheet method; determining the electron temperature two-dimensional distribution information at the time point according to a plurality of corresponding relationships, and expanding the electron temperature two-dimensional distribution multi-time point data. The application belongs to the field of plasma electron temperature diagnosis. The application can improve the light collection efficiency and the spatial resolution.

The application discloses a kind of plasma electron sponge nanochannel composite membranes and preparation method and application thereof, the composite membrane includes a layer of self-assembled arrangement plasma electron sponge film and a layer of membrane material with large pore structure, part of the pore in the self-assembled arrangement plasma electron sponge film and part of the large pore in the membrane material with large pore structure are communicated correspondingly, and electron sponge refers to polyoxometalates (POMs). The application first uses plasma electron sponge nanomaterial as functional material to make nanochannel composite membrane, and plasma electron sponge has excellent and stable performance, mild preparation condition, simple operation and green environmental protection. In addition, the plasma electron sponge nanochannel composite membrane prepared by the application can be used as ion selective membrane in salinity gradient energy conversion, and has the advantages of excellent and stable performance, high conversion power and green environmental protection.

The invention discloses a laser-induced breakdown spectroscopy analysis method and device based on parameter matching. The method comprises the following steps: acquiring a plurality of characteristic spectra; calculating the plurality of characteristic spectrums to obtain a plurality of plasma temperatures and a plurality of plasma electron densities corresponding to the calibration sample, and calculating to obtain a plasma temperature relative standard deviation and a plasma electron density relative standard deviation corresponding to the calibration sample; screening the plurality of plasma temperatures and the plurality of plasma electron densities to enable the corresponding relative standard deviations to meet preset conditions, and obtaining a screened plasma temperature subset and a screened plasma electron density subset; constructing characteristic spectrums corresponding to the screened subsets into characteristic spectrum subsets; and constructing a target characteristic calibration model based on the characteristic spectrum subset, wherein the target characteristic calibration model is used for calibrating a plurality of characteristic spectrums corresponding to the to-be-detected sample with unknown target characteristics. Therefore, the accuracy and precision of quantitative analysis on the sample can be improved.

The present invention relates to a magnetic filter plasma source device for simulating the ionospheric environment. The device includes a vacuum chamber, and a filament support electrode, a magnetic field array and a metal baffle arranged in the vacuum chamber; the filament support electrode is used for installing a hot filament; the metal baffle is arranged at the middle position near the outlet of the vacuum chamber in the vacuum chamber; the magnetic field array includes multiple groups, one of which is installed on the metal baffle to form a magnetic filter configuration, and the remaining groups form a multipole magnetic field configuration. Through this device, a plasma with a uniform distribution down to 10 5 cm ‑3 and a thickness of up to 20 cm can be achieved, and the energies of plasma electrons and ions are very close to the real ionospheric environment, which is of great significance for realizing the ground calibration of space ionospheric payloads and the ground simulation research of ionospheric physics.

The invention discloses an adjusting system and method for realizing steady-state billion-degree ion temperature, and relates to the technical field of magnetic confinement nuclear fusion, and the system comprises a central control unit, and a neutral beam injection unit, a central spiral pipe and an air supply unit of which the output ends are connected with plasma in a vacuum chamber. The neutral beam injection unit is used for heating high-energy neutral atoms emitted by the plasma; the central spiral tube is used for generating and controlling plasma current; the gas supply unit is used for conveying working gas into the vacuum chamber; and the central control unit can respectively adjust the neutral beam injection unit, the central spiral pipe and the air supply unit so as to obtain the required steady-state ion temperature. By adjusting the beam energy and power of the neutral beam injection unit, the plasma electron density and the current climbing rate, the plasma has very high heating power density, ion energy transportation is reduced, heating efficiency is improved, and therefore the steady-state ion temperature of hundred million degrees is obtained.

The invention discloses a stripe correction method for plasma electron density and spectral line measurement. The method comprises the following steps: reading a stripe to be processed, segmenting a stripe picture into a plurality of narrow strips along a direction vertical to the extending direction of the stripe, identifying the position of each narrow strip, and finding out the position corresponding to each stripe signal in the narrow strips; taking the position of a certain narrow strip as a reference, and solving the position difference of a certain stripe signal of other narrow strips relative to a corresponding stripe in the reference narrow strip; taking the reference narrow strip selected in the step of solving the position difference as a reference, moving a corresponding position along the narrow strip segmentation direction, and taking the moving distance as the position difference solved in the step of solving the position difference; and solving a new position of the stripe in each narrow strip, and finally splicing all the narrow strips together to obtain a corrected image. According to the method, the interference on the stripes caused by other factors can be removed, so that the accuracy of further extracting the physical information from the stripes is ensured.

The invention discloses a physical and data hybrid driven LIBS microelement detection method and system, and belongs to the technical field of spectral analysis. The method comprises the following steps: acquiring the plasma electron temperature and electron density of a target element in LIBS, performing identification, reconstruction and interval spectrum optimization on a specific spectral line, fusing optimized LIBS data, plasma physical parameters, experiment setting parameters, observation conditions and other multi-modal information, and obtaining the target element in the LIBS. A physical mechanism and data driven mixed quantitative model is constructed by utilizing a physical information neural network, Saha-Boltzmann graphical information is embedded, and ResNet-Transform feature extraction and Bootstrap-Dropout uncertainty quantification are combined, so that interference such as LIBS matrix effect, spectral line aliasing and self-absorption is effectively overcome, and the precision, stability and generalization ability of trace element detection are remarkably improved.

The invention discloses a millimeter wave interferometer, which belongs to an instrument in the technical field of electronic signal equipment, and adopts the technical scheme that a millimeter wave signal receiving and transmitting module is provided with two paths of phase-locked loops, and the two paths of phase-locked loops generate two paths of microwave signals through the input of reference clock signals; the two paths of microwave signals are respectively a driving signal of a transmitting channel and a driving signal of a receiving channel local oscillator; the transmission channel driving signal is subjected to power division after frequency multiplication filtering to generate two paths of millimeter wave signals, echoes of the two paths of millimeter wave signals are subjected to frequency mixing with a received local oscillator signal through a coupler, and two paths of intermediate frequency test signals are obtained; after IQ frequency mixing, the signal is transmitted and enters ADC sampling for analog-to-digital conversion, and the change of the density of the object to be tested can be tested through the phase change of the millimeter wave signal. According to the millimeter wave interferometer provided by the invention, the radial distribution of plasma electron density can be accurately tested, and the diagnosis cut-off density of plasma is improved.

The invention belongs to the field of plasma electron density measurement, and discloses a plasma electron density measurement device and method based on optical fiber dispersion interference. A part of an incident laser beam is subjected to frequency multiplication by the first optical fiber dispersion interference assembly, detection light becomes superposed light of a fundamental wave and an original second harmonic wave and penetrates through plasma, and the two waves both meet a characteristic phase shift; in order to obtain an interference light beam, the transmitted fundamental wave is multiplied by the second optical fiber dispersion interference assembly again, and the original second harmonic is kept unchanged; optical signals of two mutually interfered second harmonics are converted into electric signals through a balanced photoelectric detector, differential amplification is carried out on the electric signals, and finally the plasma electron density is obtained according to the electric signal differential amplification result; the influence of disturbance on the two partial waves is the same, so that the device has good stability in measuring the low-density plasma, and mutual compensation can be realized; and the measurement efficiency and effect are ensured.

The invention belongs to the technical field of laser cladding detection, and particularly relates to a spectral signal feature extraction and analysis method for a PDC drill bit cladding process, and the method comprises the steps: obtaining a real-time plasma spectrum sequence of the PDC drill bit cladding process through an optical fiber probe and a spectrometer; obtaining a spectral line effectiveness weight according to the intensity and the signal-to-noise ratio of a characteristic spectral line in the plasma spectrum sequence; obtaining an element fusion state index according to the spectral line effectiveness weight, the hard phase spectral line intensity and the binding phase spectral line intensity; the cladding quality stability is obtained according to the element fusion state index and the plasma electron density fluctuation; and performing cladding defect judgment on the PDC drill bit according to the cladding quality stability. According to the method, the spectral signal-to-noise ratio weight and the electron density fluctuation characteristics are fused, so that the interference of strong background noise on a monitoring result is effectively inhibited, and the accuracy of cladding layer component segregation and thermodynamic instability detection is improved.

The utility model relates to a cleaning device for semiconductor wafer production, which is applied to the field of semiconductor wafer production and processing and comprises a plasma cleaning machine body, an L-shaped air inlet hole is formed in the upper end of the plasma cleaning machine body, an exhaust hole is formed in the lower end of the plasma cleaning machine body, and a controller is fixedly embedded in the front end of the plasma cleaning machine body. Supporting seats are fixedly connected to the four corners of the lower end of the plasma cleaning machine body, a cleaning cavity is formed in the front end of the plasma cleaning machine body, a mounting plate is fixedly connected to the front end of the plasma cleaning machine body, a positioning plate is in threaded connection to the front end of the mounting plate, and an electronic rotating disc is fixedly connected to the rear end of the positioning plate. The multiple fixing assemblies are driven by the electronic rotating disc to rotate in the cleaning cavity, so that plasma electron clouds are blown to different positions of the wafer, the wafer processing effect and the surface processing uniformity are improved, meanwhile, the two faces of the wafer can be cleaned, the wafer does not need to be turned over, and the wafer cleaning efficiency is improved.

The present application relates to the technical field of coal quality industrial analysis, and provides a coal quality industrial analysis method based on laser-induced breakdown spectroscopy characteristic peak selection set, comprising the following steps: data acquisition, using laser-induced breakdown experiment to collect coal sample spectrum data; data preprocessing, sequentially completing spectrum continuous radiation removal, local maximum value peak searching, characteristic peak selection, spectrum peak value fitting, and solving electron density and plasma electron temperature; quantitative analysis, taking standard coal sample test results as a training set, and using partial least square regression method to realize quantitative calculation of coal quality industrial analysis components of the sample; the present application can realize coal quality industrial quantitative analysis based on laser-induced breakdown spectroscopy, is suitable for the characteristic peak set of coal quality industrial analysis, and the integrated application of the method can achieve fitting degrees of sample ash content, volatile matter and fixed carbon all above 0.85.

The utility model discloses a laser plasma electron accelerator based on density gradient, which comprises a laser component, the laser component generates a high-intensity tightly-focused femtosecond laser pulse beam, and a sleeve is arranged on the path of the femtosecond laser pulse beam; a gas nozzle and a vacuum pump are arranged at the upper end and the lower end of the sleeve respectively, and an outlet of the gas nozzle is perpendicular to the femtosecond laser pulse beam; and a blade-shaped barrier parallel to the femtosecond laser pulse beam is also arranged in the sleeve close to one side of the gas nozzle. The sleeve is arranged at the outlet of the gas nozzle, so that a gas circulation area can be limited, continuous and stable density gradient distribution gas can be generated, the laser accelerator can always accelerate the same density distribution gas target, and a high-energy electron beam group in a stable state can be stably generated for a long time; the charge quantity of the electron beam bunch in single acceleration is improved, and the operation stability of the laser wake field electron accelerator is improved.

The application discloses a kind of plasma parameter probe-microwave collaborative diagnosis system, it includes diagnostic probe, reflecting antenna, vector network analyzer and computer terminal.The application provides global and local information to plasma parameters by diagnostic probe and reflecting antenna, inverts plasma electron density of S11 data and the monitoring point where diagnostic probe is located by trained neural network model, obtains the density distribution of plasma and plasma collision frequency, completes the collaborative diagnosis to plasma, can quickly and accurately obtain the density distribution of plasma and plasma collision frequency.

The present invention relates to a coaxial common-point diagnostic probe for multi-parameters of magnetic field and plasma characteristics, comprising: a three-dimensional magnetic field measurement module support rod, an inductor coil, a signal transmission cable and a fixing groove for the inductor coil, a plasma metal probe, and an embedded plasma measurement module support rod. The three-dimensional magnetic field measurement module uses a slender rod with a square cross-section as a support, and rectangular grooves are opened on three adjacent side surfaces, and inductors are placed to achieve the measurement of three-dimensional transient magnetic fields. A circular through hole is opened in the center of the square cross-section, and a plasma measurement module with an aluminum oxide shielding layer is embedded to achieve transient measurement of plasma electron temperature, electron density and other characteristics. Since the three-dimensional magnetic field measurement module and the plasma measurement module are in the same spatial position in the axial direction, they can be considered as data collection at the same point and time in space during measurement, reducing the temporal and spatial non-uniformity in the measurement of transient working conditions.

This invention discloses a visible light bremsstrahlung diagnostic device and a method for measuring the electron density profile of fusion plasma. The visible light bremsstrahlung diagnostic device includes a vacuum chamber, an objective lens, an optical fiber, a spectrometer, and a spectral detector. The vacuum chamber is used to generate plasma and has an observation window. The objective lens, optical fiber, spectrometer, and spectral detector are sequentially connected to form an optical diagnostic system for observation. Accordingly, the front end of the objective lens faces the observation window, and the visible light bremsstrahlung of the plasma is observed through the observation window. The method for measuring the electron density profile of fusion plasma includes the following steps: S100 Measurement: Measuring the radiation of the plasma using the visible light bremsstrahlung diagnostic device; S200 Calculation: Calculating the plasma electron density profile using a formula. Compared with existing contact measurement methods, the visible light bremsstrahlung diagnostic device and the method for measuring the electron density profile of fusion plasma provide a non-contact, interference-free measurement method.

The application discloses an element concentration detection method based on laser-induced breakdown spectroscopy, and belongs to the technical field of laser spectrum analysis. The method comprises the following steps: acquiring plasma electron temperature, electron number density and element interference in LIBS of an unknown sample, and then acquiring energy and area of a plasma acoustic spectrum image corresponding to the unknown sample; inputting five features corresponding to the unknown sample into a mapping relationship to obtain a standard spectrum deviation, so as to correct an actual spectrum of a spectrum line to be corrected and obtain a corrected spectrum after elimination of a matrix effect; and finally, substituting the corrected spectrum into a calibration curve to obtain an element concentration after elimination of the influence of the matrix effect. The application summarizes main factors influencing spectral intensity due to the matrix effect, extracts features from LIBS and a plasma acoustic spectrum image, performs fitting and correction on the deviation of each spectrum, and has the advantages of clear physical meaning, no need for pretreatment, no need for complicated parameter adjustment, low cost and small amount of calculation compared with existing methods.

The invention discloses a multifunctional nanofluid hybrid membrane as well as a preparation method and application thereof. The hybrid membrane comprises a layer of self-assembled and arranged plasma electronic sponge membrane and a layer of membrane material with a macroporous structure, plasma nano particles in the plasma electronic sponge membrane are gold nano particles and are connected with ssDNA probes through Au-S bonds, the ssDNA probes comprise a probe 1 and a probe 2, the probe 1 is matched with protein on the surface of tumor-derived extracellular vesicles, and the probe 2 is complementarily paired with miRNAs released by the vesicles; and the electronic sponge is polyacid. The multifunctional nanofluid hybrid membrane disclosed by the invention can integrate capture and quantification of tumor-derived extracellular vesicles and in-situ detection of miRNAs released by the tumor-derived extracellular vesicles, is excellent and stable in performance, realizes multiple detection of tumor-derived extracellular vesicle biomarkers, and provides a new strategy with a wide prospect for efficient clinical diagnosis.

The utility model provides a detector of a polychromator, the polychromator, a plasma diagnosis system and a fusion reaction system.The detector comprises a first circuit board and a second circuit board, the first circuit board is fixedly provided with a photodiode and an amplifying circuit, the second circuit board is fixedly provided with a temperature control circuit, and the photodiode is integrated with a thermistor and a thermoelectric cooler; the output end of the photodiode is connected with the input end of the amplifying circuit; the thermistor and the thermoelectric cooler are electrically connected with the temperature control circuit through wires. By optimizing the circuit layout, the accuracy and stability of signal detection are remarkably improved, the problem that the quality of an amplified electric signal on an amplifying circuit is reduced due to electromagnetic interference and thermal noise is solved, and the accuracy of plasma electron temperature and electron density measurement is improved.