139 results about "Plasma electron" patented technology

Various embodiments of the present invention relate to a plasma electron source apparatus. The apparatus comprises a cathode discharge chamber in which a plasma is generated, an exit hole provided in said cathode discharge chamber from which electrons from the plasma are extracted by an accelerating field provided between said cathode discharge chamber and an anode, at least one plasma confinement device, and a switching mechanism for switching the at least one plasma confinement device between a first value allowing for electron extraction from the plasma and a second value prohibiting electron extraction from the plasma. Associated methods are also provided.

An ionizer for forming a gas-cluster ion beam is disclosed including inlet and outlet ends partially defining an ionization region traversed by a gas-cluster jet and one or more plasma electron source(s) for providing electrons to the ionizing region for ionizing at least a portion of the gas-clusters to form a gas-cluster ion beam. One or more sets of substantially linear rod electrodes may be disposed substantially parallel to and in one or more corresponding partial, substantially cylindrical pattern(s) about the gas-cluster jet axis, wherein some sets are arranged in substantially concentric patterns with differing radii. In certain embodiments, the ionizer includes one or more substantially linear thermionic filaments disposed substantially parallel to the gas-cluster jet axis, heating means, electrical biasing means to judiciously bias sets of the linear rod electrodes with respect to the thermionic filaments to achieve electron repulsion.

An ionizer for forming a gas-cluster ion beam is disclosed including inlet and outlet ends partially defining an ionization region traversed by a gas-cluster jet and one or more plasma electron source(s) for providing electrons to the ionizing region for ionizing at least a portion of the gas-clusters to form a gas-cluster ion beam. One or more sets of substantially linear rod electrodes may be disposed substantially parallel to and in one or more corresponding partial, substantially cylindrical pattern(s) about the gas-cluster jet axis, wherein some sets are arranged in substantially concentric patterns with differing radii. In certain embodiments, the ionizer includes one or more substantially linear thermionic filaments disposed substantially parallel to the gas-cluster jet axis, heating means, electrical biasing means to judiciously bias sets of the linear rod electrodes with respect to the thermionic filaments to achieve electron repulsion.

A system and apparatus for controlled fusion in a field reversed configuration (FRC) magnetic topology and conversion of fusion product energies directly to electric power. Preferably, plasma ions are magnetically confined in the FRC while plasma electrons are electrostatically confined in a deep energy well, created by tuning an externally applied magnetic field. In this configuration, ions and electrons may have adequate density and temperature so that upon collisions they are fused together by the nuclear force, thus forming fusion products that emerge in the form of an annular beam. Energy is removed from the fusion product ions as they spiral past electrodes of an inverse cyclotron converter. Advantageously, the fusion fuel plasmas that can be used with the present confinement and energy conversion system include advanced (aneutronic) fuels.

A system and apparatus for controlled fusion in a field reversed configuration (FRC) magnetic topology and conversion of fusion product energies directly to electric power. Preferably, plasma ions are magnetically confined in the FRC while plasma electrons are electrostatically confined in a deep energy well, created by tuning an externally applied magnetic field. In this configuration, ions and electrons may have adequate density and temperature so that upon collisions they are fused together by the nuclear force, thus forming fusion products that emerge in the form of an annular beam. Energy is removed from the fusion product ions as they spiral past electrodes of an inverse cyclotron converter. Advantageously, the fusion fuel plasmas that can be used with the present confinement and energy conversion system include advanced (aneutronic) fuels.

Various embodiments of the present invention relate to a plasma electron source apparatus. The apparatus comprises a cathode discharge chamber in which a plasma is generated, an exit hole provided in said cathode discharge chamber from which electrons from the plasma are extracted by an accelerating field provided between said cathode discharge chamber and an anode, at least one plasma confinement device, and a switching mechanism for switching the at least one plasma confinement device between a first value allowing for electron extraction from the plasma and a second value prohibiting electron extraction from the plasma. Associated methods are also provided.

A system and apparatus for controlled fusion in a field reversed configuration (FRC) magnetic topology and conversion of fusion product energies directly to electric power. Preferably, plasma ions are magnetically confined in the FRC while plasma electrons are electrostatically confined in a deep energy well, created by tuning an externally applied magnetic field. In this configuration, ions and electrons may have adequate density and temperature so that upon collisions they are fused together by the nuclear force, thus forming fusion products that emerge in the form of an annular beam. Energy is removed from the fusion product ions as they spiral past electrodes of an inverse cyclotron converter. Advantageously, the fusion fuel plasmas that can be used with the present confinement and energy conversion system include advanced (aneutronic) fuels.

A system and apparatus for controlled fusion in a field reversed configuration (FRC) magnetic topology and conversion of fusion product energies directly to electric power. Preferably, plasma ions are magnetically confined in the FRC while plasma electrons are electrostatically confined in a deep energy well, created by tuning an externally applied magnetic field. In this configuration, ions and electrons may have adequate density and temperature so that upon collisions they are fused together by the nuclear force, thus forming fusion products that emerge in the form of an annular beam. Energy is removed from the fusion product ions as they spiral past electrodes of an inverse cyclotron converter. Advantageously, the fusion fuel plasmas that can be used with the present confinement and energy conversion system include advanced (aneutronic) fuels.

A system and apparatus for controlled fusion in a field reversed configuration (FRC) magnetic topology and conversion of fusion product energies directly to electric power. Preferably, plasma ions are magnetically confined in the FRC while plasma electrons are electrostatically confined in a deep energy well, created by tuning an externally applied magnetic field. In this configuration, ions and electrons may have adequate density and temperature so that upon collisions they are fused together by the nuclear force, thus forming fusion products that emerge in the form of an annular beam. Energy is removed from the fusion product ions as they spiral past electrodes of an inverse cyclotron converter. Advantageously, the fusion fuel plasmas that can be used with the present confinement and energy conversion system include advanced (aneutronic) fuels.

A system and apparatus for controlled fusion in a field reversed configuration (FRC) magnetic topology and conversion of fusion product energies directly to electric power. Preferably, plasma ions are magnetically confined in the FRC while plasma electrons are electrostatically confined in a deep energy well, created by tuning an externally applied magnetic field. In this configuration, ions and electrons may have adequate density and temperature so that upon collisions they are fused together by the nuclear force, thus forming fusion products that emerge in the form of an annular beam. Energy is removed from the fusion product ions as they spiral past electrodes of an inverse cyclotron converter. Advantageously, the fusion fuel plasmas that can be used with the present confinement and energy conversion system include advanced (aneutronic) fuels.

An apparatus and method for controlling electron flow within a plasma to produce a controlled electron beam is provided. A plasma is formed between a cathode and an acceleration anode. A control anode is connected to the plasma and to the acceleration anode via a switch. If the switch is open, the ions from the plasma flow to the cathode and plasma electrons flow to the acceleration anode. With the acceleration anode suitably transparent and negatively biased with a DC high voltage source, the electrons flowing from the plasma are accelerated to form an electron beam. If the switch is closed, the ions still flow to the cathode but the electrons flow to the control anode rather than the acceleration anode. Consequently, the electron beam is turned off, but the plasma is unaffected. By controlling the opening and closing of the switch, a controlled pulsed electron beam can be generated.

An apparatus for melting an electrically conductive metallic material comprises an auxiliary ion plasma electron emitter configured to produce a focused electron field including a cross-sectional profile having a first shape. The apparatus further comprises a steering system configured to direct the focused electron field to impinge the focused electron field on at least a portion of the electrically conductive metallic material to at least one of melt or heat any solidified portions of the electrically conductive metallic material, any solid condensate within the electrically conductive metallic material, and / or regions of a solidifying ingot.

The invention discloses a fusion reactor plasma density and temperature diagnosing method based on the Thomson scattering weak coherent technique. The method comprises the steps that a broadband low-coherency intense light source is set, a bandwidth modulator is set, a beam splitting system is set, a reference arm is used for generating an optical path difference and a frequency shift signal, the light returned from the reference arm and a detection arm interferes and passes through an optical grating to be divided into interference spectrum signals with different wavelengths to be received by an array CCD, the incident light direction, namely the axial scattering intensity distribution is obtained through the Fourier transform, and the plasma electron density axial distribution information is obtained through rayleigh scattering or raman scattering absolute calibration; the thermal motion rate information of electrons is obtained through the Doppler broadening of a spectral line, and then the plasma electron temperature distribution is obtained; the horizontal movement adjustment is carried out on the length of the reference arm to change the optical path difference changing so as to achieve measurement on the great depth plasma with the depth larger than 1 m. The electron temperature and density of the fusion reactor plasma are measured online through the Thomson back scattering optical coherent chromatographic technique.

A system and apparatus for controlled fusion in a field reversed configuration (FRC) magnetic topology and conversion of fusion product energies directly to electric power. Preferably, plasma ions are magnetically confined in the FRC while plasma electrons are electrostatically confined in a deep energy well, created by tuning an externally applied magnetic field. In this configuration, ions and electrons may have adequate density and temperature so that upon collisions they are fused together by the nuclear force, thus forming fusion products that emerge in the form of an annular beam. Energy is removed from the fusion product ions as they spiral past electrodes of an inverse cyclotron converter. Advantageously, the fusion fuel plasmas that can be used with the present confinement and energy conversion system include advanced (aneutronic) fuels.

A plasma electron flood system, comprising a housing configured to contain a gas, and comprising an elongated extraction slit, and a cathode and a plurality of anodes residing therein and wherein the elongated extraction slit is in direct communication with an ion implanter, wherein the cathode emits electrons that are drawn to the plurality of anodes through a potential difference therebetween, wherein the electrons are released through the elongated extraction slit as an electron band for use in neutralizing a ribbon ion beam traveling within the ion implanter.

The invention provides a diagnostic system for non-uniform plasma electron density, including the following parts: a plasma generator, disposed in front of the calibrator; an ultra-wideband antenna, including a receiving antenna and a transmitting antenna disposed on the same side of the plasma generator; a time domain narrow-pulse source, connected to the transmitting antenna; a high-speed sampling digital oscilloscope, connected to the transmitting antenna and the receiving antenna, and used for recording and processing a transmitting signal of the transmitting antenna and a receiving signalof the receiving antenna; and a programmable power supply system, respectively connected to the time domain narrow-pulse source, the high-speed sampling digital oscilloscope and the plasma generator,and used to trigger the time domain narrow-pulse source, control the discharge power of the plasma generator, and record different discharge power states of the plasma to obtain basic plasma parameters under different discharge states. The system provided by the invention has the advantage of simulating a more accurate environment of super-sonic target surface plasma sheath, and having high testefficiency and low test cost.

A system and apparatus for controlled fusion in a field reversed configuration (FRC) magnetic topology and conversion of fusion product energies directly to electric power. Preferably, plasma ions are magnetically confined in the FRC while plasma electrons are electrostatically confined in a deep energy well, created by tuning an externally applied magnetic field. In this configuration, ions and electrons may have adequate density and temperature so that upon collisions they are fused together by the nuclear force, thus forming fusion products that emerge in the form of an annular beam. Energy is removed from the fusion product ions as they spiral past electrodes of an inverse cyclotron converter. Advantageously, the fusion fuel plasmas that can be used with the present confinement and energy conversion system include advanced (aneutronic) fuels.

The present invention relates to a plasma power generation system. A system and device for controlling fusion and direct-to-electricity conversion of fusion product energy in a field reverse configuration (FRC) magnetic topology. Preferably, the plasma ions are magnetically confined in the FRC, while the plasma electrons are electrostatically confined in a deep energy well created by tuning the applied magnetic field. In this configuration, the ions and electrons can be of such density and temperature that upon collision they are fused together by nuclear forces to form fusion products in the form of a ring beam. As the fusion product ions spiral through the electrodes of the inverse cyclotron converter, energy is removed from them. Advantageously, fusion fuel plasmas usable with the present confinement and energy conversion system include advanced (non-neutron) fuels.

There is provided an etching method and a plasma etching apparatus capable of taking a large etching selection ratio and of forming a hole having an appropriate shape. When etching an etching target film 204 by using an organic film 202 having a predetermined pattern as a mask, processing gas is introduced into an airtight processing container 104. There are provided a high frequency power source 122 of 40 MHz and a high frequency power source 128 of 3.2 MHz, by which two different kinds of high frequency powers are applied to a lower electrode 106. The power of each high frequency power is properly combined, thereby executing the etching process by using low plasma electron density Ne and high self-bias voltage Vdc which are generated by high frequency power.

The invention relates to an apparatus and a method for measuring the electron temperature of plasma in gas based on laser induction, and relates to an apparatus and a method for measuring the electron temperature of plasma. In prior plasma electron temperature measuring apparatuses and methods, probes are inserted into plasma, such that the status of plasma is influenced; surfaces of probes are easy to be polluted, such that relatively large errors are generated. With the apparatus and the method, the problems can be solved. Laser beams emitted from an emission port of an Nd: YAG laser penetrate through a focusing lens and a first quartz light inlet window, and are converged on an inner central point of an enclosed air chamber. Spectral lines emitted from a second quartz light inlet window pass through a converging lens, and are converged on a spectrum collection terminal of a spectrometer. The observation method comprises the steps that: one, the enclosed air chamber is filled with air; two, plasma are generated by the induction of the laser; three, plasma emission spectra are collected by the spectrometer; four, atomic lines are selected; five, electron temperature is obtained through calculation. The method has characteristics of low measuring error and high precision.

An apparatus for measuring plasma electron density precisely measures electron density in plasma even under a low electron density condition or high pressure condition. This plasma electron density measuring apparatus includes a vector network analyzer in a measuring unit, which measures a complex reflection coefficient and determines a frequency characteristic of an imaginary part of the coefficient. A resonance frequency at a point where the imaginary part of the complex reflection coefficient is zero-crossed is read and the electron density is calculated based on the resonance frequency by a measurement control unit.

The invention relates to a method for measuring plasma electron density by fiber spectrum synergizing discharge current, and belongs to the technical field of discharge plasma diagnosis. The method is technically characterized by comprising the following steps: using a micro fiber spectrum measuring path and a discharge current measuring circuit at the same time to acquire real-time parameters of optical radiation spectrum of discharge plasma and discharge current, comprehensively analyzing the parameters through a computer data processing system, and calculating the electron density of the plasma. The micro fiber spectrum measuring path consists of a fiber probe, a conducting fiber and a micro fiber spectrometer, which are connected in turn; the discharge current measuring circuit consists of a current sensor, a current signal amplifier and a data acquisition device, which are connected in turn; and the computer data processing system calculates the electron density of the discharge plasma by using the acquired data according to the gas molecule motion theory. The method has the advantage that the application range of the discharge plasma electron density diagnosed by optical emission spectrometry is expanded to an imbalance state from a local thermal balance state.

A system and apparatus for controlled fusion in a field reversed configuration (FRC) magnetic topology and conversion of fusion product energies directly to electric power. Preferably, plasma ions are magnetically confined in the FRC while plasma electrons are electrostatically confined in a deep energy well, created by tuning an externally applied magnetic field. In this configuration, ions and electrons may have adequate density and temperature so that upon collisions they are fused together by the nuclear force, thus forming fusion products that emerge in the form of an annular beam. Energy is removed from the fusion product ions as they spiral past electrodes of an inverse cyclotron converter. Advantageously, the fusion fuel plasmas that can be used with the present confinement and energy conversion system include advanced (aneutronic) fuels.

The invention discloses a plasma sheath ground simulation electromagnetic experiment device and an application method, and the experiment device comprises a plasma generator, a spray pipe and a plasmadiagnosis system; the plasma generator is used for ionizing a neutral gas to generate high-temperature plasma; the spray pipe is used for accelerating the plasma by utilizing an aerodynamic principleand shaping the cross section of the plasma jet flow in a vacuum dark chamber; and the plasma diagnosis system is used for diagnosing the electron density of the plasma jet flow in real time througha non-contact method and feeding back the electron density to a comprehensive controller, and the comprehensive controller compares the actually measured electron density with a preset electron density value, and the power supply output power of the plasma generator is adjusted through feedback to realize continuous and stable control of the electron density of plasma jet. The plasma jet flow generated by the invention is stable and controllable, the electron density range is wide, the collision frequency range is wide, the length is large, the components are pure, and the regulation and control of the non-uniform distribution of the plasma electron density can be realized.

This invention discloses an ion implantation apparatus that has an ion source and an ion extraction means for extracting an ion beam therefrom. The ion implantation apparatus further includes an ion beam sweeping-and-deflecting means disposed immediately next to the ion extraction means. The ion implantation apparatus further includes a magnetic analyzer for guiding the ion beam passed through the deflecting-and-sweeping means. The mass analyzer is also used for selecting ions with specific mass-to-charge ratio to pass through a mass slit to project onto a substrate. The sweeping-and-deflecting means is applied to deflect the ion beam to project through the magnetic mass analyzer and the mass slit for sweeping the ion beam over a surface of the substrate to carry out an ion implantation. In a preferred embodiment, the ion implantation apparatus further includes a plasma electron flood system disposed between the mass slit and the substrate for projecting a plurality of electrons to the ion beam for preventing a space-charge and beam dispersion. In another preferred embodiment, the ion beam extraction and projecting system of this invention further includes a divergent ion-beam extracting optics for extracting an ion beam with a small divergent angle for projecting and diverging the ion beam as the ion beam is projected toward the target surface.

The invention provides a rapid calculation method of the radar scattering cross section of a hypersonic speed aircraft. The method comprises that S1) on the basis of distribution characteristic of surrounding plasmas in the moving state of the aircraft, a physical field parameter including the plasma electron density and collision frequency and based on plasma flow field data is extracted; S2) a calculation area is divided according to grids, and on the basis of discrete information, a spectral function distribution model corresponding to a corresponding motion state is obtained; S3) the corresponding radar scattering cross section is solved on the basis of the physical field parameter of plasma flow field data distribution; and S4) different incident angles are set, and the radar scattering cross sections of different azimuths are obtained according to the divided grid information. The method has the advantages of being simple, rapid and equivalent.

The invention discloses a multifunctional focusing device for pulse electron beams which are generated based on a new type desktop laser plasma accelerator, wherein the pulse electron beams have femtosecond level pulse width, ultrahigh intensity and a relatively large peak energy jitter range. The device comprises four combination electromagnets with controllable gradients, a time delay controller and a pulse response fluorescent board electron beam imaging system. According to the device, laser plasma electron beam sources can be focused effectively, and moreover, functions such as energy monitoring, orientation monitoring and multi-beam group energy screening are achieved. The device has the advantages of simple operation, convenience, high efficiency and flexible feedback and can be used for effectively diagnosing and controlling electron beam groups in a laser plasma wakefield acceleration electron mechanism. According to the device, the application of the electron beams to a new generation ultrastrong coherent free electron laser light source is greatly promoted.

An ionized plasma based radiant electromagnetic energy steering or diverting apparatus wherein controlled differences in plasma density and resulting plasma electron density achieve phase shift, reflection or refraction of the controlled radiant electromagnetic energy. Plasma density determination through use of selected plasma control electrode electrical potentials and hence by the waveforms applied to plasma-adjacent electrodes is employed. Plasma controlled radiant electromagnetic energy is thereby usable for inertia free steering of a radar beam or for other applications of radiant electromagnetic energy. Radiant electromagnetic energy control by way of pass-through refraction of the energy and reflection of the energy directly from the plasma and also by reflection involving a reflector element are included. Radio frequency and optical electromagnetic energy wavelengths for the radiant electromagnetic energy are included.

The invention belongs to the technical field of laser spectroscopy analysis and detection methods, and concretely relates to a method for calibrating a spectral line self-absorption effect in laser-induced breakdown spectrometry. The method is mainly characterized by acquiring a self-absorption coefficient of a spectral line to be analyzed through plasma electron density and line width of the spectral line to be analyzed measured based on a trace element spectrum line so as to calibrate the spectral line self-absorption effect. The method comprises the concrete steps of (1) selecting a trace element spectrum line under the same measurement condition as an optically thin reference line not affected by the self-absorption effect; (2) calculating corresponding plasma electron density through line width of the selected reference line; (3) calculating the self-absorption coefficient of the spectral line to be analyzed through the electron density and the line width of the spectral line to be analyzed, and evaluating a self-absorption degree; (4) calibrating peak intensity and integral intensity of the spectral line to be analyzed through the self-absorption coefficient. By utilizing the method, the plasma spectral line intensity can be conveniently calibrated, the accuracy of spectral data is improved, and quantitative analysis of material compositions is further carried out accurately.