The invention provides a device and method for generating an
extreme ultraviolet tunable monochromatic coherent
light source, the method is characterized by utilizing interacting actions of 800 nm
femtosecond laser and gas to generate ultraharmonics, tuning high order
harmonic energy from the
frequency comb to a specific degree through the macroscopic
phase matching and atoms
phase matching technology, and enabling the high order
harmonic energy to output single high order
harmonic (
monochrome) in a specific degree. Furthermore, the specific high order harmonic can conduct tuning through the phase-matching technique, that is, the output wave length is adjustable. The
extreme ultraviolet tunable monochromatic coherent
light source generated by the device can be used in the fields of high precision detection for micro-nano structures, high precision
holographic imaging and high precision
carving and the like, and can also be used as an injecting source of a
free electron laser, and the application range is extremely broad. And the device has the advantages that
extreme ultraviolet can be output,
monochrome tuning is realized and the coherence is good.