The invention discloses a nano-cavity sensor for efficiently exciting
fluorescence. The nano-cavity sensor comprises a
quartz substrate layer, a micro-lens layer and a
metal film layer which are sequentially arranged from bottom to top, the micro-lens layer is located above the
quartz substrate layer and comprises a plurality of spherical-table-shaped micro-lenses protruding upwards; and the
metal film layer is positioned on the
quartz substrate layer and the micro lens layer, and is provided with through nano holes which are in one-to-one correspondence with the centers of the top planes of the table-shaped micro lenses. When exciting light enters, the spherical table type micro lens can focus a
light beam emitted into the lens cavity from the bottom to the bottom of the
nanopore to form a zero-mode
waveguide effect, and fluorescent substances in the
nanopore are excited through an evanescent field. The spherical table type micro lens modulates the direction of an excitation
light beam, the
light beam is converted into local enhanced excitation from parallel incidence, modulation of excitation photoelectric
magnetic field distribution at the bottom of a
nanopore and in a nanocavity in a solution environment is achieved, and distribution of an
electromagnetic field is described by using a caustics line. According to the device, the excitation efficiency of a light
path system on
fluorescence is remarkably improved.