The present application relates to the technical field of
optical fiber sensor, more particularly, to a kind of
acoustic wave sensor based on micro-nano
fiber evanescent field
coupling and preparation method thereof, the purpose of the present application is to provide
acoustic wave sensor with low cost,
demodulation simple, photoelectric
system compatibility good many aspects of advantages.The
acoustic wave sensor of the present application includes substrate,
transducer diaphragm, thin film modulation layer and bipyramidal micro-nano
fiber;Substrate is provided with through hole,
transducer diaphragm is pasted on the upper surface of substrate;Thin film modulation layer is pasted and fixed on the upper surface of
transducer diaphragm, bipyramidal micro-nano
fiber is fixed on thin film modulation layer, the
waist region of bipyramidal micro-nano fiber is suspended above transducer diaphragm, and the position corresponds with through hole,
coupling modulation space is formed between the
waist region of bipyramidal micro-nano fiber and transducer diaphragm.The present application also provides a kind of method for preparing the acoustic wave sensor.