727 results about "Incident beam" patented technology

Described herein are methods and systems for measuring polarization states of nonlinearly generated light by a sample illuminated in response to receiving an incident beam having a known polarization state to determine a characteristic of the sample. The system includes an optical ellipsometer configured to be included in-line of a semiconductor fabrication line and generate measured signals proportional to different polarization parameters of second-harmonic light nonlinearly generated light by the sample, allowing determination of a complete polarization state of the second harmonic light using a characteristic of the sample is determined.

The invention provides a metasurface structure and method for realizing transverse polarization focusing light splitting, and the metasurface structure comprises a substrate and a surface structure which is disposed on the substrate. The surface structure is composed of a plurality of sub-wavelength structure units which are arranged in a concentric circular ring mode. The sub-wavelength structure unit performs polarization-independent focusing of an incident beam through transmission phase regulation and control, and performs polarization-dependent light splitting of the incident beam through geometric phase regulation and control. The point diffraction plate can realize light beam splitting and focusing functions related to polarization, has the advantages of being simple in structure and high in integration level, solves the technical problems that an existing point diffraction plate does not support synchronous phase-shifting interference measurement and the contrast ratio of interference fringes is low, and enables the contrast ratio of the interference fringes of point diffraction interference measurement to be higher, the resolving precision to be higher and the resolving speed to be higher.

The invention discloses a laser channel atmospheric turbulence fading real-time compensation device and method based on a galvanometer system, and the method comprises the steps: enabling an incident light beam to irradiate a transparent PCB integrated with a photodiode array after the incident light beam is focused through a convex lens, obtaining the light intensity distribution of a current light spot through the photodiode array, and transmitting the light intensity distribution to a signal processing unit; the signal processing unit coarsely adjusts the deviation direction of the light spots according to the received light intensity distribution data, and aligns the part with the strongest light intensity in the light spots to the end face of the optical fiber; and based on the roughly adjusted light spot deviation direction, the signal processing unit dynamically adjusts the deflection angle of the galvanometer by using a gradient descent method according to the power measurement value of the receiving coupling module, so that the fine adjustment of the light spot deviation direction is realized, and the receiving coupling power is maximized. The objective of receiving optical power maximization is achieved, optical design, electronic control and algorithm optimization are combined, and atmospheric turbulence compensation with high cost performance is achieved.

The invention discloses a film strength detection method and related equipment, and the method comprises the steps: carrying out the multi-angle broadband scanning sampling of the whole process of an incident light beam penetrating through a lens, recording the transmission light intensity, group phase and scattering power, and generating a reference transmission spectrum matrix; applying low-amplitude periodic ultrasonic vibration disturbance to the lens according to the reference matrix, synchronously obtaining a transmission spectrum time change curve, and performing time domain analysis to obtain a stress response characteristic matrix; determining a detection path by integrating the two matrixes, performing incremental load scratch disturbance along the path, recording data of transmission light intensity and scattering power changing along with the load in real time, and forming a critical damage response data set; performing fine grid transmission light scanning on the scratch and the neighborhood, acquiring multi-angle scattering distribution, and constructing optical characteristic distribution data; and performing multi-dimensional analysis on the data, and outputting a result. According to the scheme, early-stage accurate identification and evaluation of microcracks in a lens film layer and interface hidden defects are realized, and the use reliability of the lens is improved.

A metalens used for beam shaping, beam-shaping system and the generating method of the metalens are provided by the present application. The metalens is used to shape an incident beam, and a divergence angle at least in one direction of an outgoing beam obtained by shaping is greater than the divergence angle in the same direction of the incident beam.

The invention is suitable for the technical field of optical measurement, and provides a back drill stub length detection method, a signal processing assembly and a system. The method for detecting the length of the back drill stump comprises the steps that the optical path difference between first reflected light and second reflected light is obtained, the first reflected light is reflected light generated by reflecting an incident light beam of a back drill hole to be detected on the surface of a dielectric layer of the back drill hole to be detected, and the second reflected light is reflected light generated by reflecting the incident light beam of the back drill hole to be detected; the second reflected light is reflected light obtained by reflecting a light beam, passing through the dielectric layer, of the incident light beam by the signal layer of the back drilling hole to be detected; and according to the optical path difference and the refractive index of the dielectric layer, determining the stub length of the back drilling hole to be measured. According to the embodiment of the invention, the same incident light beam can be reflected by different layers of the back drilling hole to be detected, the stub length is determined based on the optical path difference between the two reflected light beams, and the detection efficiency is improved.

An optical detection device, comprising an objective lens, a bright field illumination unit and a dark field illumination unit. The objective lens is provided with a bright field light channel and a dark field light channel. The bright field illumination unit comprises a bright field beam splitting unit and a bright field light source for providing a bright field incident light beam, wherein the bright field incident light beam is reflected by the bright field beam splitting unit and then enters the bright field light channel. The dark field illumination unit comprises a dark field light source for emitting a dark field incident light beam, a prism module and a dark field beam splitting unit; the prism module and the dark field beam splitting unit are sequentially arranged in the transmission direction of the dark field incident light beam; the prism module is used for converting the dark field incident light beam into a circular light beam, wherein the circular light beam is reflected by the dark field beam splitting unit and then enters the dark field light channel; and the dark field beam splitting unit comprises a circular beam splitter and an aperture formed at the center of the circular beam splitter, wherein the aperture is located on the transmission path of the bright field incident light beam. The present invention more conveniently realizes switching between bright field detection and dark field detection, thereby improving the detection efficiency.

The invention discloses a defect detection method and system, a storage medium and computer equipment, and belongs to the technical field of wafer graph-free defect detection, and the method comprises the steps: obtaining first parameter information of an incident light beam and second parameter information of a wafer to be detected, the first parameter information comprises the incident light wavelength, the incident light intensity and the incident light polarization direction, and the second parameter information comprises the incident light wavelength and the incident light intensity; the second parameter information comprises distribution states of particles of various sizes on the surface of the wafer; a wafer scattered field transmission model is constructed based on the first parameter information and the second parameter information, the wafer scattered field transmission model has the characteristics of multiple channels and multiple modes, the scattered light intensity of particles of different sizes in each channel and each mode can be obtained, and the scattered light intensity distribution result and the polarized light intensity distribution result of the particles of different sizes are determined; selecting a modal combination in a wafer scattered field transmission model according to the size range of the detected particles in combination with the scattered light intensity distribution result and the polarized light intensity distribution result of the particles with various sizes; and determining element parameters required to be selected in the defect detection system based on the modal combination.

The invention provides a non-linear error compensation system and method for a stylus contourgraph sensor, and the system comprises a laser light source, an adjustable diaphragm, a beam splitter prism, a focusing lens and a lever which are sequentially arranged along the transmission direction of a light path. An incident light beam emitted by the laser light source is reflected by the lever to form a reflected light beam; the reflected light beam sequentially passes through the focusing lens and the beam splitter prism and then enters the imaging lens; wherein the lever can deflect in the Z direction; the imaging lens, the narrow-band optical filter and the position sensitive detector are sequentially arranged along the transmission direction of the optical path; the position sensitive detector is used for acquiring the position of the center of the reflection light spot in the Z direction before and after the lever deflects in the Z direction; and the control unit is in signal connection with the position sensitive detector. The position change of the reflected light spot in the Z direction is detected, and the angle change of the lever is calculated, so that nonlinear error measurement and dynamic compensation in the X direction and the Z direction are realized.

The invention discloses a large-view-field high-resolution imaging system based on polarization regulation and control, the large-view-field high-resolution imaging system comprises a metasurface system array and a camera along the direction of a light path, and the metasurface system array comprises a plurality of pairs of metasurface systems which are distributed in an array; each pair of metasurface systems comprises a first metasurface system and a second metasurface system; the first metasurface system is used for performing high-resolution imaging and large-view-field imaging on a first polarization light beam and a second polarization light beam of an incident light beam respectively; the second metasurface system is used for performing large-view-field imaging and high-resolution imaging on the first polarization-state light beam and the second polarization-state light beam respectively; the camera is used for acquiring and fusing images formed by different metasurface systems so as to capture a high-resolution central region of interest and surrounding environment information of a wide field of view. The system can efficiently realize higher imaging quality.

The invention discloses a light beam drift automatic compensation device of a high-power laser processing head, and the implementation process of a light beam detection module comprises the following steps: a laser main light beam is firstly divided into transmission light and two beams of reflection light (detection light) by two reflection surfaces of an optical wedge, and the two beams of detection light are respectively converged on a position photoelectric detector and a CMOS (Complementary Metal-Oxide-Semiconductor Transistor) camera through a focusing lens; through data information fusion of the position photoelectric detector and the CMOS camera, light spot shape information obtained by the CMOS camera can be complementary with the high-precision angle measurement capability of the position photoelectric detector, and the measurement precision of light spots in various shapes is improved while high resolution and high response speed of detection are ensured. Whether the incident light beam deflects relative to the incident direction or not is judged according to the angular offset theta, measured by the light beam detection module, of the light beam, and the transmitted light automatically compensates the deflected light beam through the light beam compensation module, so that the emergent light beam and the incident light beam keep the same optical axis and are emergent perpendicular to the incident plane.

The invention belongs to the technical field of radiation effect and radiation hardening of semiconductor devices and integrated circuits, and particularly relates to a single event effect laser simulation system based on Bessel beam shaping. A Bessel beam shaping and focusing module based on an axon lens is introduced and composed of the axon lens and two lenses, namely a single lens and a focusing lens, a Gaussian beam of an incident beam is shaped into a quasi-Bessel beam, and the quasi-Bessel beam is utilized to irradiate a semiconductor device to be detected. The axial distribution of the light beam is kept unchanged in a range of hundreds of microns, and the focusing breaking through the diffraction limit is realized in the radial distribution, so that the effect closer to the heavy ion charge deposition track is generated. The technology can solve the problem that a multilayer structure device, a thick sensitive region device and a wide forbidden band device are difficult to test through traditional laser simulation, and has important practical value for promoting laser simulation of the single event effect.

An example system includes a first steering layer interposed between an electromagnetic (EM) source and an emission lens. The first steering layer includes a triplet lens having a Plano-convex lens, a Plano-concave lens, and an electro-optical (EO) crystal positioned between the lenses. The EO crystal includes transparent electrodes on each side, coupled to the respective lenslet and / or the EO crystal. The system includes the EM source providing an incident EM beam on the first steering layer, and the emission lens emitting a steered EM beam to a target location.

The present invention provides a laser optical module, a laser welding head and a laser welding method, and relates to the field of laser welding. The scheme adopted is: including a collimator, and also including: a beam splitter reflector, the structure of the beam splitter reflector is a regular tetrahedron, the bottom surface of the beam splitter reflector is coaxial with the collimator and perpendicular to the optical axis, and the four inclined surfaces of the beam splitter reflector can reflect the incident light beam into parallel light in four directions; a reflective component, the reflective component can reflect the four beams of parallel light reflected by the beam splitter reflector, and the angle θ of the four beams of parallel light after reflection is the same as that of the vertical direction; a focusing mirror, the focusing mirror can focus the four beams of parallel light reflected by the second reflecting component into four light spots, the centers of the four light spots can be centrally symmetrically distributed, and a wire tube through hole is provided at the center of the focusing mirror. The present invention can make the welding wire evenly heated and melted everywhere, and form a molten pool of regular shape, further improving the welding quality.

The invention relates to the technical field of photoacoustic spectrometry, in particular to a gas detection device and method based on a 3D printing Helmholtz photoacoustic cell, and is suitable for the fields with load requirements such as unmanned aerial vehicle-mounted gas monitoring platforms. In order to overcome the problems of large volume, heavy weight, complex structure and low integration level of a photoacoustic gas sensor in the prior art, the lightweight Helmholtz photoacoustic cell structure manufactured based on 3D printing comprises a sound wave generation cavity, a small-diameter connecting pipe and a detection cavity which are integrally formed, an optical reflection unit is integrated in the sound wave generation cavity, and the optical reflection unit is integrated in the detection cavity. Two concave reflectors are arranged to reflect incident light beams for 160 times, a laser, an optical fiber collimator, a pre-amplifier, a lock-in amplification circuit board, a notebook computer and a current temperature control module are arranged outside, and the concentration of gas to be detected is obtained through analysis and processing of the notebook computer.

A beamsplitter can include a first surface with a diffractive optical element, a second surface normal to the first surface, and a beam splitting surface arranged at an angle to the second surface that is less than 45 degrees. The beamsplitter may be configured to illuminate the entire second surface in response to an input beam at the first surface.

The invention provides a time stretching Fourier transform optical frequency comb morphology measurement system and method. The time stretching Fourier transform optical frequency comb morphology measurement system comprises an optical frequency comb OFC, an interferometer module, a dispersion optical fiber module, a signal detection module and a synchronous control module. An optical frequency comb (OFC) provides an incident light beam for the interferometer; the interferometer module obtains an interference signal of the measured object by adjusting the length of the single-mode optical fiber; the dispersion transmission module performs time stretching on the interference signal through a single-mode optical fiber to generate a time domain interference signal; a signal detection module captures the stretched time domain interference signal, and solves the morphology parameters of the measured object through a time-frequency transformation algorithm; the synchronous control module drives the two-dimensional displacement platform bearing the measured object through the motion control card and triggers synchronous acquisition and storage of three-dimensional shape data of the measured object. The method has enough high precision in morphology measurement, and the detection speed of the method can meet the requirements of industrial real-time detection.

The utility model provides a high-resolution spectral confocal measurement device, which includes a light source, a fiber coupler, a spectral confocal lens, a spectral analysis unit and a data processing unit. The spectral confocal lens is arranged between the fiber coupler and the sample to be measured. The spectral confocal lens includes a first lens, a second lens, a third lens, a fourth lens, a fifth lens and a sixth lens arranged in sequence. The first lens is a double concave lens, the second lens is a meniscus lens, the third lens is a plano-convex lens, the fourth lens is a double-cemented lens, the fifth lens is a meniscus lens, and the sixth lens is a meniscus lens. With such an arrangement, the spectral confocal lens is improved from multiple aspects such as expanding the incident light beam, correcting aberrations, reducing spherical aberrations, and correcting coma and chromatic aberration, thereby greatly improving the resolution of the lens. The light source is further connected to the spectral confocal lens through a fiber coupler, so that the entire device has a compact structure and is easy to integrate and install.

The invention provides a confocal microscope objective lens with high optical flux and long working distance, the confocal microscope objective lens comprises a first lens group and a second lens group which are sequentially arranged along the light transmission direction, the first lens group comprises a first lens, a second lens, a third lens and a fourth lens which are sequentially arranged along the light transmission direction, the first lens is a negative lens, and the second lens is a positive lens. The working distance is prolonged; the combination of the second lens, the third lens and the fourth lens has positive focal power and is used for focusing light, so that the objective lens obtains a larger numerical aperture; the second lens group comprises a sixth lens and a seventh lens which are sequentially arranged in the light transmission direction, and the combination of the sixth lens and the seventh lens has negative focal power and is used for enlarging the aperture of the light beam and reducing the angle of the incident light beam at the same time. According to the scheme, a view field of 12 mm is achieved, the numerical aperture reaches 0.5, the working distance reaches 17.7 mm, and excellent imaging performance is achieved while the large view field, the high resolution and the long working distance are considered.

The invention provides a femtosecond laser pulse compression device, and relates to the technical field of ultrafast lasers. The polarization state management module, the compression grating group and the tail end reflecting mirror jointly form a multi-pass folding light path; the polarization state management module is configured to guide an incident light beam with an initial polarization state to enter the multi-pass folding light path and execute one-time two-way compression; in response to the light beam which is returned after completing one-time two-way compression and has changed polarization state, guiding the light beam to the inlet of the multi-pass folded light path again so as to execute next-time two-way compression; the multi-pass folded light path and polarization state management module is configured to enable the light beam to automatically circulate for at least one time in the multi-pass folded light path based on the switching of the polarization state of the light beam; the polarization state management module is further configured to respond to the light beam which returns after completing at least one cycle and has the polarization state meeting the preset output condition, guide the light beam out of the multi-pass folding light path and output the light beam as compressed pulses.

The invention provides a multi-geometric-structure incident light path guiding device and X-ray diffraction equipment. The device comprises a reflector assembly and a movable slit assembly, the reflector assembly and the movable slit assembly are arranged on an irradiation path of an incident light beam, and a reflecting surface of the reflector assembly is arranged to reflect and adjust the received incident light beam into a focused or parallel light beam geometric structure and face the center of the goniometer; the reflector assembly is provided with a light beam channel. When the target light beam is geometrically a focused or parallel light beam, the movable slit assembly is configured to guide the incident light beam to the reflecting surface, and the reflected incident light beam reaches the center of the goniometer; when the target light beam is geometrically a divergent light beam, the movable slit assembly is configured to guide an incident light beam to pass through the light beam channel and reach the center of the goniometer. The device is simple in structure and flexible in switching, and an independent multi-stage nested translation or rotation compensation structure does not need to be additionally arranged.

The application relates to a kind of diffractive optical element beam shaping methods based on spatial frequency filtering, obtain incident light beam, based on the homogenization light beam of preset, obtain corresponding geometric analytical phase distribution;Adjust the homogenization light beam to rectangular flat-top light beam, the phase correction processing of obtained geometric analytical phase;Based on spatial frequency filtering method processing the geometric analytical phase after phase correction, get the light field regulation and control distribution requirement after processing, the light field regulation and control distribution requirement after processing has phase and amplitude regulation and control requirement simultaneously;Design diffractive optical element, make it realize the light field regulation and control distribution requirement required, and utilize the diffractive optical element to realize the incident light beam shaping as the rectangular flat-top light beam.The application can realize the light beam homogenization effect of high uniformity, edge sharp and high diffraction efficiency, and obtain wide application prospect in laser welding, photoetching and biomedical and other aspects.

The invention relates to the technical field of optical design, and discloses a double-beam differential measurement device and method for the polarization sensitivity of a metasurface grating, and the method comprises the steps: dividing a pre-generated light beam into a first light beam and a second light beam through an optical fiber coupler, carrying out the dynamic switching of the polarization state of the second light beam, and obtaining a second incident light beam, adjusting the first light beam based on the second incident light beam to obtain a first incident light beam; enabling the first incident light beam to pass through a first path without the metasurface grating, enabling the second incident light beam to pass through a second path comprising the metasurface grating, and obtaining a first output light beam and a second output light beam; performing time domain difference on the first output light beam and the second output light beam, and calculating to obtain a multi-polarization-state differential signal; correcting the multi-polarization-state differential signal through a preset differential correction mechanism to obtain a corrected differential signal; calculating the polarization sensitivity of the metasurface grating according to the corrected differential signal; according to the invention, the accuracy of the calculated polarization sensitivity of the metasurface grating can be improved.

The invention discloses a light deflection device, a transmitting module, a laser radar system and electronic equipment. The light deflection device comprises a control device, a first light deflection device and a second light deflection device, the second light deflection device comprises a plurality of deflection subareas, and each deflection subarea can independently adjust the deflection angle of the incident light beam; the first light deflection device deflects an incident light beam by a plurality of different first deflection angles, and the incident light beam is incident to a corresponding deflection subarea of the second light deflection device; the currently scanned deflection subarea deflects the incident light beam by a required second deflection angle; the control device controls the deflection subareas to adjust the deflection angle of the light beam, and the deflection angle of at least one deflection subarea which is not scanned currently to the light beam is adjusted after the scanning of the incident light beam in the current deflection period is finished and before the scanning of the incident light beam in the next deflection period is started. By adjusting the deflection partitions which are not scanned, the waiting time of angle switching adjustment is shortened, and the scanning frame rate is improved.

Particle detection systems and methods are disclosed. In one embodiment, a particle detection system comprises an incident beam light source that emits an incident beam, a particle interrogation zone disposed in the path of the incident beam, a photodetector disposed to detect the incident beam after passing through the particle interrogation zone, a pump beam light source for emitting a pump beam, the pump beam being targeted at the particle interrogation zone, wherein the incident beam, the pump beam, and photodetector are arranged such that the photodetector is configured to detect a combination of light from the incident beam, scattered light due to incident beam scattering in the particle interrogation zone, and scattered light due to pump beam scattering in the particle interrogation zone.

The invention relates to the technical field of lasers, and discloses a laser wavelength conversion device. Comprises: a polarizing lens; the half-wave plate is arranged on the incident light path of the polarized lens and connected with the electric control system, and the electric control system is used for controlling the half-wave plate to transversely move into the light path or move out of the light path or controlling the angle of the half-wave plate; the frequency doubling light path is communicated with the transmission light path or the reflection light path of the polarized lens; the fundamental frequency light serves as an incident light beam, and when the electric control system controls the half-wave plate not to transversely move into the light path, the fundamental frequency light enters the polarization lens in a vertical line polarization state and is reflected into the first frequency doubling light path, and frequency doubling light with the corresponding wavelength is output; when the electric control system controls the half-wave plate to transversely move into the light path, the polarization state of the fundamental frequency light is changed, the fundamental frequency light enters the polarization lens in a horizontal line polarization state and is transmitted into the next-stage light path, and if a subsequent half-wave plate and the polarization lens are arranged in the next-stage light path, the electric control system further controls the subsequent half-wave plate to transversely move into the light path or adjusts the angle. And outputting the frequency-doubled light with the corresponding wavelength.

The invention discloses a light scanning method, which comprises the following steps of: controlling a plurality of deflection partitions in a light deflection module to receive a plurality of incident light beams with different first deflection angles; the deflection angle of each deflection subarea on the incident light beam can be independently adjusted; controlling the currently scanned deflection subarea to deflect a second deflection angle required by the incident light beam; and controlling at least one deflection partition which is not scanned currently to adjust the deflection angle of the deflection partition to the light beam, so that the deflection angle of the deflection partition to the light beam is adjusted after the deflection partition is scanned by the incident light beam in the current deflection period and before the deflection partition is scanned by the incident light beam in the next deflection period. And adjusting the deflection angle of the incident light beam to be a second deflection angle required by the next deflection period. By adjusting the deflection partitions in the non-scanning state in the light deflection module, the waiting time of angle switching adjustment is reduced, and the scanning frame rate is improved.

The invention provides an integrated polarization encoder, and relates to the technical field of quantum information, and the integrated polarization encoder comprises an optical integrated chip and a micro-optical device. The optical integrated chip comprises an optical switch, four on-chip waveguides and two two-dimensional gratings; each two-dimensional grating comprises two input ends; the four on-chip waveguides are respectively connected with the input ends of the two two-dimensional gratings; the optical switch controls an initial light beam to enter the corresponding input ends of the two two-dimensional gratings through one of the four on-chip waveguides according to control signals at four different moments, and four incident light beams at different moments are obtained respectively; the two two-dimensional gratings diffract four incident light beams at different moments respectively to obtain four quantum states at different moments respectively; the micro-optical device obtains two pairs of quantum states with a polarization included angle of 45 degrees and an orthogonal polarization state based on the quantum states at different moments, so as to meet the coding requirements of four quantum states of the quantum key distribution system.

The invention discloses a light scanning method, which comprises the following steps that: a first light deflection device deflects an incident light beam by a plurality of first deflection angles, and projects the deflected light beam to a polarization expanding device; the polarization expanding device amplifies the deflection angle of the deflected light beam in the corresponding deflection direction by a preset multiple, and projects the expanded light beam to the corresponding position of the second light deflection device; and the second light deflection device deflects the expanded light beam at a preset second deflection angle so as to project a scanning light beam. The light deflection angle can be continuously and finely adjusted within a larger angle range, and the structure of the light deflection device is miniaturized.

This invention relates to a light conductor, comprising a first light-incident surface, a reflective surface corresponding to the first light-incident surface, and a light-emitting surface. The reflective surface extends along a predetermined direction such that at least one segment of the light conductor tapers into a cone shape from one end near the first light-incident surface toward the opposite end. The reflective surface includes multiple reflective stepped surfaces, each inclined at a predetermined angle toward the light-emitting surface. The predetermined angle is set such that, in the operating state of the light conductor, the first light-incident surface receives a first incident light beam, and at least a portion of the first incident light beam is reflected by the multiple reflective stepped surfaces and emitted from the light-emitting surface to form an emitted light beam. Furthermore, the light-emitting area of ​​the emitted light beam on the light-emitting surface is larger than the light-incident area of ​​the first incident light beam on the first light-incident surface. Furthermore, this invention also provides a vehicle lighting module and a vehicle. The light conductor of this invention can achieve a large light-emitting area as required by regulations using fewer light sources.