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566 results about "Incident beam" patented technology

Incident Beam Masks. Beam masks are fitted in the incident beam path to control the axial width of the incident beam, defining the amount (width) of the sample that is irradiated by the incident x-ray beam.

Metasurface structure and method for realizing transverse polarization focusing light splitting

ActiveCN121008346APolarising elementsLight beamPhase shift interferometry
The invention provides a metasurface structure and method for realizing transverse polarization focusing light splitting, and the metasurface structure comprises a substrate and a surface structure which is disposed on the substrate. The surface structure is composed of a plurality of sub-wavelength structure units which are arranged in a concentric circular ring mode. The sub-wavelength structure unit performs polarization-independent focusing of an incident beam through transmission phase regulation and control, and performs polarization-dependent light splitting of the incident beam through geometric phase regulation and control. The point diffraction plate can realize light beam splitting and focusing functions related to polarization, has the advantages of being simple in structure and high in integration level, solves the technical problems that an existing point diffraction plate does not support synchronous phase-shifting interference measurement and the contrast ratio of interference fringes is low, and enables the contrast ratio of the interference fringes of point diffraction interference measurement to be higher, the resolving precision to be higher and the resolving speed to be higher.
Owner:INST OF APPLIED ELECTRONICS CHINA ACAD OF ENG PHYSICS

Laser channel atmospheric turbulence fading real-time compensation device and method based on galvanometer system

The invention discloses a laser channel atmospheric turbulence fading real-time compensation device and method based on a galvanometer system, and the method comprises the steps: enabling an incident light beam to irradiate a transparent PCB integrated with a photodiode array after the incident light beam is focused through a convex lens, obtaining the light intensity distribution of a current light spot through the photodiode array, and transmitting the light intensity distribution to a signal processing unit; the signal processing unit coarsely adjusts the deviation direction of the light spots according to the received light intensity distribution data, and aligns the part with the strongest light intensity in the light spots to the end face of the optical fiber; and based on the roughly adjusted light spot deviation direction, the signal processing unit dynamically adjusts the deflection angle of the galvanometer by using a gradient descent method according to the power measurement value of the receiving coupling module, so that the fine adjustment of the light spot deviation direction is realized, and the receiving coupling power is maximized. The objective of receiving optical power maximization is achieved, optical design, electronic control and algorithm optimization are combined, and atmospheric turbulence compensation with high cost performance is achieved.
Owner:SOUTHEAST UNIV

Film layer strength detection method and related equipment

The invention discloses a film strength detection method and related equipment, and the method comprises the steps: carrying out the multi-angle broadband scanning sampling of the whole process of an incident light beam penetrating through a lens, recording the transmission light intensity, group phase and scattering power, and generating a reference transmission spectrum matrix; applying low-amplitude periodic ultrasonic vibration disturbance to the lens according to the reference matrix, synchronously obtaining a transmission spectrum time change curve, and performing time domain analysis to obtain a stress response characteristic matrix; determining a detection path by integrating the two matrixes, performing incremental load scratch disturbance along the path, recording data of transmission light intensity and scattering power changing along with the load in real time, and forming a critical damage response data set; performing fine grid transmission light scanning on the scratch and the neighborhood, acquiring multi-angle scattering distribution, and constructing optical characteristic distribution data; and performing multi-dimensional analysis on the data, and outputting a result. According to the scheme, early-stage accurate identification and evaluation of microcracks in a lens film layer and interface hidden defects are realized, and the use reliability of the lens is improved.
Owner:GUANGDONG KINGDING OPTICAL TECH CO LTD

Detection method, signal processing assembly and system for length of back drill stub

The invention is suitable for the technical field of optical measurement, and provides a back drill stub length detection method, a signal processing assembly and a system. The method for detecting the length of the back drill stump comprises the steps that the optical path difference between first reflected light and second reflected light is obtained, the first reflected light is reflected light generated by reflecting an incident light beam of a back drill hole to be detected on the surface of a dielectric layer of the back drill hole to be detected, and the second reflected light is reflected light generated by reflecting the incident light beam of the back drill hole to be detected; the second reflected light is reflected light obtained by reflecting a light beam, passing through the dielectric layer, of the incident light beam by the signal layer of the back drilling hole to be detected; and according to the optical path difference and the refractive index of the dielectric layer, determining the stub length of the back drilling hole to be measured. According to the embodiment of the invention, the same incident light beam can be reflected by different layers of the back drilling hole to be detected, the stub length is determined based on the optical path difference between the two reflected light beams, and the detection efficiency is improved.
Owner:HANS CNC SCI & TECH

Optical detection device

An optical detection device, comprising an objective lens, a bright field illumination unit and a dark field illumination unit. The objective lens is provided with a bright field light channel and a dark field light channel. The bright field illumination unit comprises a bright field beam splitting unit and a bright field light source for providing a bright field incident light beam, wherein the bright field incident light beam is reflected by the bright field beam splitting unit and then enters the bright field light channel. The dark field illumination unit comprises a dark field light source for emitting a dark field incident light beam, a prism module and a dark field beam splitting unit; the prism module and the dark field beam splitting unit are sequentially arranged in the transmission direction of the dark field incident light beam; the prism module is used for converting the dark field incident light beam into a circular light beam, wherein the circular light beam is reflected by the dark field beam splitting unit and then enters the dark field light channel; and the dark field beam splitting unit comprises a circular beam splitter and an aperture formed at the center of the circular beam splitter, wherein the aperture is located on the transmission path of the bright field incident light beam. The present invention more conveniently realizes switching between bright field detection and dark field detection, thereby improving the detection efficiency.
Owner:SUZHOU HUAXING YUANCHUANG TECH CO LTD

Large-view-field high-resolution imaging system based on polarization regulation and control

The invention discloses a large-view-field high-resolution imaging system based on polarization regulation and control, the large-view-field high-resolution imaging system comprises a metasurface system array and a camera along the direction of a light path, and the metasurface system array comprises a plurality of pairs of metasurface systems which are distributed in an array; each pair of metasurface systems comprises a first metasurface system and a second metasurface system; the first metasurface system is used for performing high-resolution imaging and large-view-field imaging on a first polarization light beam and a second polarization light beam of an incident light beam respectively; the second metasurface system is used for performing large-view-field imaging and high-resolution imaging on the first polarization-state light beam and the second polarization-state light beam respectively; the camera is used for acquiring and fusing images formed by different metasurface systems so as to capture a high-resolution central region of interest and surrounding environment information of a wide field of view. The system can efficiently realize higher imaging quality.
Owner:ZHEJIANG UNIV

Single event effect laser simulation system based on Bessel beam shaping

The invention belongs to the technical field of radiation effect and radiation hardening of semiconductor devices and integrated circuits, and particularly relates to a single event effect laser simulation system based on Bessel beam shaping. A Bessel beam shaping and focusing module based on an axon lens is introduced and composed of the axon lens and two lenses, namely a single lens and a focusing lens, a Gaussian beam of an incident beam is shaped into a quasi-Bessel beam, and the quasi-Bessel beam is utilized to irradiate a semiconductor device to be detected. The axial distribution of the light beam is kept unchanged in a range of hundreds of microns, and the focusing breaking through the diffraction limit is realized in the radial distribution, so that the effect closer to the heavy ion charge deposition track is generated. The technology can solve the problem that a multilayer structure device, a thick sensitive region device and a wide forbidden band device are difficult to test through traditional laser simulation, and has important practical value for promoting laser simulation of the single event effect.
Owner:UNIV OF ELECTRONICS SCI & TECH OF CHINA

Gas detection device and method based on 3D printing Helmholtz photoacoustic cell

The invention relates to the technical field of photoacoustic spectrometry, in particular to a gas detection device and method based on a 3D printing Helmholtz photoacoustic cell, and is suitable for the fields with load requirements such as unmanned aerial vehicle-mounted gas monitoring platforms. In order to overcome the problems of large volume, heavy weight, complex structure and low integration level of a photoacoustic gas sensor in the prior art, the lightweight Helmholtz photoacoustic cell structure manufactured based on 3D printing comprises a sound wave generation cavity, a small-diameter connecting pipe and a detection cavity which are integrally formed, an optical reflection unit is integrated in the sound wave generation cavity, and the optical reflection unit is integrated in the detection cavity. Two concave reflectors are arranged to reflect incident light beams for 160 times, a laser, an optical fiber collimator, a pre-amplifier, a lock-in amplification circuit board, a notebook computer and a current temperature control module are arranged outside, and the concentration of gas to be detected is obtained through analysis and processing of the notebook computer.
Owner:SHANXI UNIV

Low-profile beam splitter

A beamsplitter can include a first surface with a diffractive optical element, a second surface normal to the first surface, and a beam splitting surface arranged at an angle to the second surface that is less than 45 degrees. The beamsplitter may be configured to illuminate the entire second surface in response to an input beam at the first surface.
Owner:MAGIC LEAP INC

Confocal microscope objective lens with high optical flux and long working distance

The invention provides a confocal microscope objective lens with high optical flux and long working distance, the confocal microscope objective lens comprises a first lens group and a second lens group which are sequentially arranged along the light transmission direction, the first lens group comprises a first lens, a second lens, a third lens and a fourth lens which are sequentially arranged along the light transmission direction, the first lens is a negative lens, and the second lens is a positive lens. The working distance is prolonged; the combination of the second lens, the third lens and the fourth lens has positive focal power and is used for focusing light, so that the objective lens obtains a larger numerical aperture; the second lens group comprises a sixth lens and a seventh lens which are sequentially arranged in the light transmission direction, and the combination of the sixth lens and the seventh lens has negative focal power and is used for enlarging the aperture of the light beam and reducing the angle of the incident light beam at the same time. According to the scheme, a view field of 12 mm is achieved, the numerical aperture reaches 0.5, the working distance reaches 17.7 mm, and excellent imaging performance is achieved while the large view field, the high resolution and the long working distance are considered.
Owner:HUAZHONG UNIV OF SCI & TECH

Femtosecond laser pulse compression device

The invention provides a femtosecond laser pulse compression device, and relates to the technical field of ultrafast lasers. The polarization state management module, the compression grating group and the tail end reflecting mirror jointly form a multi-pass folding light path; the polarization state management module is configured to guide an incident light beam with an initial polarization state to enter the multi-pass folding light path and execute one-time two-way compression; in response to the light beam which is returned after completing one-time two-way compression and has changed polarization state, guiding the light beam to the inlet of the multi-pass folded light path again so as to execute next-time two-way compression; the multi-pass folded light path and polarization state management module is configured to enable the light beam to automatically circulate for at least one time in the multi-pass folded light path based on the switching of the polarization state of the light beam; the polarization state management module is further configured to respond to the light beam which returns after completing at least one cycle and has the polarization state meeting the preset output condition, guide the light beam out of the multi-pass folding light path and output the light beam as compressed pulses.
Owner:天津凯普林激光科技有限公司

Incident light path guiding device with multiple geometric structures and X-ray diffraction equipment

The invention provides a multi-geometric-structure incident light path guiding device and X-ray diffraction equipment. The device comprises a reflector assembly and a movable slit assembly, the reflector assembly and the movable slit assembly are arranged on an irradiation path of an incident light beam, and a reflecting surface of the reflector assembly is arranged to reflect and adjust the received incident light beam into a focused or parallel light beam geometric structure and face the center of the goniometer; the reflector assembly is provided with a light beam channel. When the target light beam is geometrically a focused or parallel light beam, the movable slit assembly is configured to guide the incident light beam to the reflecting surface, and the reflected incident light beam reaches the center of the goniometer; when the target light beam is geometrically a divergent light beam, the movable slit assembly is configured to guide an incident light beam to pass through the light beam channel and reach the center of the goniometer. The device is simple in structure and flexible in switching, and an independent multi-stage nested translation or rotation compensation structure does not need to be additionally arranged.
Owner:WENZHOU INST OF ADVANCED TECH OF CHINA SCI & TECH

A spatial frequency filtering based diffractive optical element beam shaping method

The application relates to a kind of diffractive optical element beam shaping methods based on spatial frequency filtering, obtain incident light beam, based on the homogenization light beam of preset, obtain corresponding geometric analytical phase distribution;Adjust the homogenization light beam to rectangular flat-top light beam, the phase correction processing of obtained geometric analytical phase;Based on spatial frequency filtering method processing the geometric analytical phase after phase correction, get the light field regulation and control distribution requirement after processing, the light field regulation and control distribution requirement after processing has phase and amplitude regulation and control requirement simultaneously;Design diffractive optical element, make it realize the light field regulation and control distribution requirement required, and utilize the diffractive optical element to realize the incident light beam shaping as the rectangular flat-top light beam.The application can realize the light beam homogenization effect of high uniformity, edge sharp and high diffraction efficiency, and obtain wide application prospect in laser welding, photoetching and biomedical and other aspects.
Owner:WESTLAKE INSTITUTE FOR OPTOELECTRONICS

Light deflection device, transmitting module, laser radar system and electronic equipment

The invention discloses a light deflection device, a transmitting module, a laser radar system and electronic equipment. The light deflection device comprises a control device, a first light deflection device and a second light deflection device, the second light deflection device comprises a plurality of deflection subareas, and each deflection subarea can independently adjust the deflection angle of the incident light beam; the first light deflection device deflects an incident light beam by a plurality of different first deflection angles, and the incident light beam is incident to a corresponding deflection subarea of the second light deflection device; the currently scanned deflection subarea deflects the incident light beam by a required second deflection angle; the control device controls the deflection subareas to adjust the deflection angle of the light beam, and the deflection angle of at least one deflection subarea which is not scanned currently to the light beam is adjusted after the scanning of the incident light beam in the current deflection period is finished and before the scanning of the incident light beam in the next deflection period is started. By adjusting the deflection partitions which are not scanned, the waiting time of angle switching adjustment is shortened, and the scanning frame rate is improved.
Owner:SHENZHEN FUSHI TECH CO LTD

Optical scanning method

The invention discloses a light scanning method, which comprises the following steps of: controlling a plurality of deflection partitions in a light deflection module to receive a plurality of incident light beams with different first deflection angles; the deflection angle of each deflection subarea on the incident light beam can be independently adjusted; controlling the currently scanned deflection subarea to deflect a second deflection angle required by the incident light beam; and controlling at least one deflection partition which is not scanned currently to adjust the deflection angle of the deflection partition to the light beam, so that the deflection angle of the deflection partition to the light beam is adjusted after the deflection partition is scanned by the incident light beam in the current deflection period and before the deflection partition is scanned by the incident light beam in the next deflection period. And adjusting the deflection angle of the incident light beam to be a second deflection angle required by the next deflection period. By adjusting the deflection partitions in the non-scanning state in the light deflection module, the waiting time of angle switching adjustment is reduced, and the scanning frame rate is improved.
Owner:SHENZHEN FUSHI TECH CO LTD

Optical scanning method

The invention discloses a light scanning method, which comprises the following steps that: a first light deflection device deflects an incident light beam by a plurality of first deflection angles, and projects the deflected light beam to a polarization expanding device; the polarization expanding device amplifies the deflection angle of the deflected light beam in the corresponding deflection direction by a preset multiple, and projects the expanded light beam to the corresponding position of the second light deflection device; and the second light deflection device deflects the expanded light beam at a preset second deflection angle so as to project a scanning light beam. The light deflection angle can be continuously and finely adjusted within a larger angle range, and the structure of the light deflection device is miniaturized.
Owner:SHENZHEN FUSHI TECH CO LTD

Optical conductors, automotive lighting modules and vehicles

This invention relates to a light conductor, comprising a first light-incident surface, a reflective surface corresponding to the first light-incident surface, and a light-emitting surface. The reflective surface extends along a predetermined direction such that at least one segment of the light conductor tapers into a cone shape from one end near the first light-incident surface toward the opposite end. The reflective surface includes multiple reflective stepped surfaces, each inclined at a predetermined angle toward the light-emitting surface. The predetermined angle is set such that, in the operating state of the light conductor, the first light-incident surface receives a first incident light beam, and at least a portion of the first incident light beam is reflected by the multiple reflective stepped surfaces and emitted from the light-emitting surface to form an emitted light beam. Furthermore, the light-emitting area of ​​the emitted light beam on the light-emitting surface is larger than the light-incident area of ​​the first incident light beam on the first light-incident surface. Furthermore, this invention also provides a vehicle lighting module and a vehicle. The light conductor of this invention can achieve a large light-emitting area as required by regulations using fewer light sources.
Owner:HASCO VISION TECHNOLOGY CO LTD

System and method for detecting brain abnormalities using backscattered radiation

A method of detecting brain abnormalities in a brain of a patient using backscattered light, the method can include: generating at least one pulsed incident beam of light with at least one light source; directing the at least one pulsed incident beam of light toward a portion of the brain of the patient; applying an RF electromagnetic field toward the portion of the brain of the patient; receiving at least one backscattered beam of light from the portion of the brain of the patient; calculating an insertion loss (IL) and an insertion phase difference (IPD) of the at least one backscattered beam of light; and determining if the patient has a brain abnormality based on the calculated insertion loss and the calculated insertion phase difference.
Owner:GIFTEDNESS & CREATIVITY CO

System and method for synchronously testing diffraction efficiency and field angle of metasurface grating waveguide

The invention relates to the technical field of metasurface gratings, and discloses a synchronous testing system and method for diffraction efficiency and field angle of metasurface grating waveguide, and the system comprises a light source module which responds to a preset target field angle range, encodes the phase and frequency of a light beam through a composite encoding method, and obtains an incident light beam; the diffraction module is used for dividing the metasurface grating waveguide into a plurality of sub-regions, respectively inputting an incident light beam into each sub-region for diffraction, and collecting a diffracted light beam diffracted by the metasurface grating waveguide in each sub-region; the parameter coupling module is used for performing coupling calculation on a plurality of parameters in the diffracted beams of each sub-region through a parameter coupling method to generate a coupling matrix; the decoupling analysis module decouples the coupling matrix through a preset parameter decoupling model to obtain the diffraction efficiency and the field angle of the metasurface grating waveguide; according to the invention, high-precision synchronous measurement of the diffraction efficiency and the field angle of the metasurface grating waveguide can be realized.
Owner:SICHUAN AFARON OPTOELECTRONICS TECHNOLOGY CO LTD

Indication of frequency-domain compensation factors in reconfigurable intelligent surface-assisted sensing

A first network node may be configured to transmit a configuration of a set of resources for at least one sensing signal. Each of the set of resources is associated with at least one of an incident beam direction angle of a wireless device or a reflection beam direction angle of the wireless device. The wireless device may be configured to receive the configuration of the set of resources for the at least one sensing signal. The wireless device may be configured to transmit an indication of at least one frequency-domain compensation factor for each of the set of resources based on the configuration. The first network node may be configured to transmit the at least one sensing signal based on the configuration of the set of resources. The wireless device may be configured to receive and forward the at least one sensing signal based on the set of resources.
Owner:QUALCOMM INC

Adaptive chromatography grating dispersion correction method and system based on deep learning

The invention is suitable for the technical field of diffractive optics, and provides a self-adaptive chromatography grating dispersion correction method and system based on deep learning, and the method comprises the following steps: enabling an incident light beam to be diffracted through a chromatography grating, and obtaining a multi-stage chromatography diffraction light beam; dispersion angle compensation is carried out on the multi-stage diffraction beams through the plane straight stripe blazed grating; collimating the corrected light beam by using a double-barrel lens group and forming an image space telecentric light path to obtain an image space telecentric light beam; performing spectral beam splitting and aberration pre-correction on an image space telecentric beam through a micro-lens array, and then performing image acquisition to obtain a pre-corrected multi-spectral image; and based on a deep learning algorithm, carrying out real-time fusion processing on the pre-corrected multispectral image, dynamically adjusting the deflection angle of the microlens array, and outputting a chromatic dispersion corrected tomographic microscopic image. According to the method, the axial color difference and the transverse color difference of the chromatography system can be remarkably reduced, and the method is particularly suitable for application scenes needing wide spectrum coverage and high signal-to-noise ratio.
Owner:JILIN CAMPNO OPTOELECTRONICS TECHNOLOGY CO LTD

Multi-channel synchronous polarization imager system

The invention belongs to the technical field of astronomy, and provides a multi-channel synchronous polarization imager system which is used for a night astronomy observation scene. According to the system, through cooperative work of key components such as a relay optical system, a polarization calibration unit rotating wheel, a broadband optical filter, a zero polarization splitting prism, a super achromatic half-wave plate and a polarization splitting prism, celestial body polarization state synchronous measurement in a full view field is completed through one-time exposure. Wherein the relay optical system is responsible for collimation and imaging functions; the polarization calibration unit rotating wheel is used for polarization calibration; the zero-polarization splitting prism divides an incident light beam into a transmission light beam and a reflection light beam; the super achromatic half-wave plate and the polarization splitting prism are used for polarization modulation. The system solves the problem of dispersion effect during broadband measurement, improves the detection capability of a dark and weak target, and is suitable for high-precision synchronous polarization measurement of a large field of view.
Owner:YUNNAN OBSERVATORY CHINESE ACADEMY OF SCIENCES

Living cell observation device, observation system and observation method

According to the living cell observation device, the observation system and the observation method, a light beam generated by an illumination element arranged below a living cell is incident to a pyramid lens array module located above the living cell, the pyramid lens array module reflects the incident light beam at the same direction angle, and the reflected light beam is diffracted into direct light and diffracted light when passing through the living cell; the phase plate causes the direct light and the diffracted light to generate a phase difference, and the direct light and the diffracted light having the phase difference interfere with each other on the imaging element to generate a phase difference image of the living cells. The volume of the observation device is greatly reduced, especially the reduction in the height direction enables the observation device to be easily placed in an existing culture box, real-time and full-life-cycle observation of cells is realized, meanwhile, the pollution of the cells and the change of a culture environment are avoided, and the observation efficiency is improved. The advantages of a current phase difference type microscopic observation system in the aspect of image effects are reserved, and the requirements for precision and stability of a movement mechanism are lowered.
Owner:XINHUIKANG MEDICAL DEVICES (SHANGHAI) CO LTD

Light deflection device, transmitting module, laser radar system and electronic equipment

The invention discloses a light deflection device, a transmitting module, a laser radar system and electronic equipment. The light deflection device comprises a collimating device configured to collimate an incident light beam in a first direction and a second direction respectively; the length of the incident light beam in the first direction is smaller than the length of the incident light beam in the second direction, and the collimation degree of the collimation device on the incident light beam in the first direction is higher than the collimation degree of the collimation device on the incident light beam in the second direction; the first light deflection device is configured to deflect the collimated light beam by a plurality of preset first deflection angles in the first direction and project the deflected light beam to the second light deflection device; and a second light deflection device configured to deflect the deflected light beam by a preset second deflection angle. The detection requirements of long distance and large view field range can be met at the same time, and the detection effect is improved at the same time.
Owner:SHENZHEN FUSHI TECH CO LTD

A method for calculating the frequency discrimination slope of a PDH frequency stabilization system

The present application relates to the technical field of laser frequency stabilization, and discloses a method for calculating the frequency discrimination slope of a PDH frequency stabilization system, comprising the following steps: obtaining the waist position and size of an incident light beam, the waist position and size of a resonant cavity, and the loss and reflectivity of the resonant cavity; determining whether the waist position and size of the incident light beam match the resonant cavity; and then calculating the frequency discrimination slope through different formulas according to the matching of the waist position and size of the incident light beam and the waist position and size of the resonant cavity, which is simpler, and the parameters of each formula are easy to obtain, with high calculation efficiency and high accuracy.
Owner:SUN YAT SEN UNIV

Pixel

The utility model relates to a pixel. In various embodiments, the pixel includes a substrate configured to generate one or more carriers in response to an incident light beam; a first vertical gate and a second vertical gate disposed inside the substrate; a first vertical gate input electrically coupled to the first vertical gate and configured to receive a first gate control signal; and a second vertical gate input electrically coupled to the second vertical gate and configured to receive a second gate control signal. In various embodiments, the first vertical gate and the second vertical gate are configured to direct the one or more charge carriers to the first sensing node or the second sensing node using a first gate control signal and a second gate control signal.
Owner:STMICROELECTRONICS INT NV

Far-field simulator and optical test system including same

Disclosed in the present invention are: a far-field simulator that simulates a beam in a form of propagation from a remote point; and an optical test system including same. The far-field simulator comprises: a beam splitter configured to split an incident beam into a first beam and a second beam; a first far-field simulation unit configured to increase the curvature of a wavefront of the first beam passing through the beam splitter to simulate the first beam in a form of propagation from a remote point; and a second far-field simulation unit configured to increase the curvature of a wavefront of the second beam passing through the beam splitter to simulate the second beam in a form of propagation from a remote point, wherein the first beam emitted through the first far-field simulation unit is formed to have a greater diameter than the diameter of the second beam emitted through the second far-field simulation unit.
Owner:TELEPIX CO LTD

A method and system for scatter detection of surface defects of a curved optical element

ActiveCN122217990BPhysical modelDetector geometry
The application provides a curved surface optical element surface defect scattering detection method and system, which comprises the following steps: setting a pre-focusing incident light beam in a detection light path, so that the incident light beam forms a virtual object point behind the curved surface optical element; adjusting the distance from the virtual object point to the vertex of the curved surface to satisfy a conjugate relationship with the distance from the detector to the vertex of the curved surface; discretizing the illuminated local curved surface region into an array of micro surface elements; calculating the projection of the unit vector of the scattered light and the unit vector of the incident light on the local tangent plane of each micro surface element to establish a local spatial frequency mapping relationship; performing surface-detector geometric modeling, micro surface BRDF calculation, radiation transmission and irradiance calculation of the scattered light field, constructing a curved surface scattering physical model and reconstructing the irradiance distribution on the detector target surface; performing total integral scattering processing on the irradiance distribution to identify defects, extracting the power spectral density of the defect region to obtain five frequency domain characteristic values, and inputting the five frequency domain characteristic values into a machine learning classifier for defect classification.
Owner:XIAMEN METROLOGICAL VERIFICATION & TESTING INST +1