The invention relates to the technical field of optical measurement, in particular to a two-dimensional displacement measurement sensor based on a 1.5 D
grating ruler and a scanning plate. The two-dimensional displacement measurement sensor based on the 1.5 D
grating ruler and the scanning plate comprises the
grating ruler and a read head module, through one-dimensional gratings which are orthogonally arranged, Talbot imaging which is orthogonally arranged is achieved, then two-dimensional displacement detection is achieved, the grating structure is simplified, and the production cost is reduced; meanwhile, the photoelectric
detector group adopts a single integrated detection module to realize two-dimensional
signal acquisition and reference zero
signal acquisition, so that the number of components is reduced, and the
power consumption of the sensor is reduced; besides, the photoelectric
detector adopts the Talbot imaging principle, and based on the optical principle characteristic, the photoelectric
detector has the characteristic of large installation tolerance, can be suitable for a high
linear density grating ruler, and can realize nanoscale resolution measurement in cooperation with a high-power interpolation
subdivision processing circuit. Therefore, the application requirements of multi-degree-of-freedom measurement, high precision, small size, low
power consumption and large installation tolerance are met.