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435 results about "Single-photon avalanche diode" patented technology
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A single-photon avalanche diode (SPAD) is a solid-state photodetector in which a photon-generated carrier (via the internal photoelectric effect) can trigger a short-duration but relatively large avalanche current. This avalanche is created through a mechanism called impact ionization, whereby carriers (electrons and/or holes) are accelerated to high kinetic energies through a large potential gradient (voltage). If the kinetic energy of a carrier is sufficient (as a function of the ionization energy of the bulk material) further carriers are liberated from the atomic lattice. The number of carriers thus increases exponentially from, in some cases, as few as a single carrier. This mechanism was observed and modeled by John Townsend for trace-gas vacuum tubes, becoming known as a Townsend discharge, and later being attributed to solid-state breakdown by K. McAfee. This device is able to detect low-intensity ionizing radiation, including: gamma, X-ray, beta, and alpha-particle radiation along with electromagnetic signals in the UV, Visible and IR (in the optical case this can be down to the single photon level). SPADs are also able to distinguish the arrival times of events (photons) with a timing jitter of a few tens of picoseconds.
Laser ranging device based on FPGA and single photon avalanche diode
The invention provides a laser ranging device based on an FPGA (Field Programmable Gate Array) and a single photon avalanche diode. The device is characterized in that the distance measuring device is composed of a field programmable logic gate array calculation core (1), a quenching circuit (2), a single photon avalanche diode (3), a pulse laser driving circuit (4), a pulse laser (5) and an optical lens system (6), and the field programmable logic gate array calculation core (1) comprises time digital conversion logic (11) and calculation logic (12). Wherein the time-to-digital conversion logic comprises correction algorithm logic (111) and carry chain logic (112). According to the invention, a single photon avalanche diode and a dark counting correction algorithm are combined to solve the problems of low precision, low linearity and short measurement distance of the existing distance measurement device. The method can be used for detecting the distance by laser, and can be widely applied to the fields of automotive electronics, medical treatment, industrial robots, national defense, aerospace and the like.
Owner:TIME VISION TECH (SHANGHAI) CO LTD
Single-photon avalanche diode and single-photon detector
The invention provides a single-photon avalanche diode and a single-photon detector, and relates to the technical field of semiconductor photoelectric detection, and the single-photon avalanche diode comprises a plurality of avalanche diode units. The avalanche diode units are sequentially stacked in the propagation direction of incident light to be detected. Each avalanche diode unit is provided with an electric field control module which is used for independently adjusting the bias electric field of each avalanche diode unit. In the propagation direction of the incident light, the avalanche diode unit of the next stage is used for absorbing the remaining photons which are not absorbed by the avalanche diode unit of the previous stage and generating carriers, so that avalanche current is formed. The light absorption wavelength ranges of adjacent avalanche diode units are at least partially overlapped. The single-photon avalanche diode solves the problem that the existing single-photon avalanche diode cannot balance high detection efficiency and low dark current, and achieves the purpose of improving the detection efficiency of a single-photon detector on the premise of not increasing the dark current.
Owner:MOZI LABORATORY
Depth compensation method of direct time of flight (dTOF) sensor and electronic equipment
PendingCN119959910AImage enhancementImage analysisTime of flight sensorSingle-photon avalanche diode
The invention is suitable for the technical field of computer application, and provides a depth compensation method for a direct time of flight (dTOF) sensor and electronic equipment, and the method comprises the steps: responding to a triggering operation for a camera application, and driving the dTOF sensor to collect original image data; acquiring the current actual driving voltage of a single photon avalanche diode (SPAD) in the dTOF sensor; obtaining the current expected driving voltage of the SPAD; and performing depth compensation on the original image data according to the actual driving voltage and the expected driving voltage to generate a target depth map. Therefore, the depth information offset caused by the adjustment error of the SPAD driving voltage is corrected through the deviation between the actual value and the theoretical value of the SPAD driving voltage, so that the accuracy of the depth information collected by the dTOF sensor is improved, and the distance measurement precision of the dTOF sensor is improved.
Owner:HONOR DEVICE CO LTD
Active quenching and reset schemes for SPAD pixel for low energy per pulse (EPP) and high maximum count rate (MCR)
InactiveUS20250386600A1Photometry electrical circuitsRadiation controlled devicesSingle-photon avalanche diodeControl signal
Disclosed herein is a single photon avalanche diode (SPAD) pixel circuit, including a SPAD having an anode coupled to a negative voltage and a cathode and a cascode transistor having a drain coupled to the cathode of the SPAD, a gate controlled by a cascode control signal, and a source. A readout circuit is coupled to the source of the cascode transistor and configured to detect a voltage change at the source of the cascode transistor and generate a pulse indicating an occurrence of an avalanche event. An active quenching circuit is coupled to the cathode of the SPAD and configured to detect an onset of the avalanche event and pull the cathode of the SPAD to a negative voltage to quench the avalanche event.
Owner:STMICROELECTRONICS (RES & DEV) LTD +1
Single photon avalanche diode array, receiving sensor and laser radar
The invention belongs to the technical field of optical devices, and provides a single photon avalanche diode array, a receiving sensor and a laser radar, at least two SPAD units are arranged in an array, a microlens converges incident light to the corresponding SPAD unit, a back metal grid connects the SPAD unit and a corresponding external electrode, a first dielectric layer is arranged between the microlens and the SPAD unit, and a second dielectric layer is arranged between the microlens and the SPAD unit. The second dielectric layer is arranged between the SPAD units and the front metal wiring layer, and the front metal wiring layer is electrically connected with the corresponding SPAD units through contact metal wires. The deep groove isolation columns are arranged between the adjacent SPAD units, and the metal filling structures are arranged between the deep groove isolation columns and the back metal grids, so that self-excitation photons generated when the SPAD units are excited by incident light can be isolated, the self-excitation photons are prevented from entering the adjacent SPAD units through grid gaps, the probability of photon crosstalk is reduced, and the optical crosstalk of the device is reduced.
Owner:SUTENG INNOVATION TECHNOLOGY CO LTD
Dynamic output bias signal for a single photon avalanche diode (SPAD) based photon detection circuit
An example photon detection circuit, a SPAD sensing device, and a direct time-of-flight detection system comprising a SPAD sensing device configured to operate in a high illumination environments, are provided. The example photon detection circuit includes SPAD circuitry configured to generate a photon detection signal based on a SPAD bias voltage and the number of photons encountering the SPAD. The photon detection circuitry further includes output bias circuitry configured to generate a dynamic output bias signal, wherein the dynamic output bias signal is updated based on the number of photons encountering the SPAD. The example photon detection circuitry further includes output signal circuitry configured to generate a photon detection output signal in an instance in which the photon detection signal exceeds an output signal circuitry threshold, wherein the output signal circuitry threshold is based on the dynamic output bias signal.
Owner:STMICROELECTRONICS INT NV +1
Infrared enhanced single photon avalanche diode device
The infrared-enhanced single-photon avalanche diode device comprises a P + photosensitive region located at the center of the surface of the device, a P-injection region surrounding the outer side of the P + photosensitive region, a deep N well surrounding the outer side of the P-injection region, and a P-type substrate surrounding the outer side of the deep N well; the P + photosensitive region, the P-injection region and the deep N well are flush with the upper surface of the P-type substrate; the P + photosensitive region is used as a photosensitive surface to absorb photons, and a metal anode is led out from the surface to form ohmic contact; a P-type charge layer is embedded in the P-injection region, an N-buried layer is embedded in the deep N well, the N-buried layer is located below the P-type charge layer, and the P-type charge layer and the N-buried layer are located at the central position of the device; and the N buried layer forms a main avalanche region with a deeper depth. According to the invention, the detection efficiency of the silicon-based single-photon avalanche diode in a near-infrared band can be effectively improved.
Owner:XIDIAN UNIV
Imaging sensor device using an array of single-photon avalanche diode photodetectors
The invention relates to an Imaging sensor device in a stacked arrangement comprising:a pixel array tier comprising a plurality of pixel segments each having a plurality of pixels for photon detection each providing a digital pixel output;a processing tier comprising a number of processing cores each associated with one of the plurality of pixel segments to receive the pixel outputs of the pixels of the respective pixel segment, wherein the processing cores are each in bidirectional communication with one or more neighboring processing cores,wherein the processing cores are each configured to receive pixel outputs of the pixels of the associated pixel segments and to distribute processing of pixel outputs between the processing core and the at least one of the neighboring processing cores as neighboring processing cores.
Owner:ECOLE POLYTECHNIQUE FEDERALE DE LAUSANNE (EPFL)
Single photon avalanche diodes based time-of-flight sensor for eliminating background light and method thereof
The present invention relates to a single photon avalanche diodes-based time-of-flight sensor (100). The single photon avalanche diodes (SPADs) based time-of-flight (ToF) sensor (100) includes an Nx N single photon avalanche diode (SPAD) photodetector (101), a front-end (FE) unit (103), a pulse shaping (PS) unit (105), a pulse store unit (107), a peak detection unit (109), a digital logic unit (111), a timing processing circuitry unit (113), and memory elements unit (115). Due to integration of multiple units in single photon avalanche diodes (SPADs) based time-of-flight (ToF) sensor (100), the single photon avalanche diodes-based time-of-flight (ToF) sensor (100) accurately measures distance by adequate, suitable, and efficient elimination of background light.
Owner:BHARAT SEMI SYSTEMS PTE LTD
Single photon avalanche diode macropixel
A macropixel is disclosed. The macropixel comprises a plurality of pixels, each pixel comprising a Single Photon Avalanche Diode (SPAD). The macropixel also comprises a memory configured to store: a plurality of counts, each count associated with a pixel of the plurality of pixels; and a plurality of saturation bits, each saturation bit associated with a count of the plurality of counts. The macropixel also comprises saturation detection circuitry configured to gate a recharge of each SPAD based on a state of the respective saturation bit.
Owner:THE UNIV COURT OF THE UNIV OF EDINBURGH
Time-resolved spectral measurement method, device and equipment based on multi-event time-to-digital converter and medium
ActiveCN119574527AIncrease the number of collectionsimprove performanceSpectrum investigationRaman scatteringSingle-photon avalanche diodeAvalanche diode
The invention relates to a time-resolved spectral measurement method, device and equipment based on a multi-event time-to-digital converter, and a medium, and the method comprises the steps: carrying out the histogram statistics of photon signals of different time responses in each column of single-photon avalanche diodes in different laser pulse periods through the multi-event time-to-digital converter, the photon signal distribution of the photon signal of the specific wavelength corresponding to each column of single-photon avalanche diodes in different laser pulse periods is determined; the multi-event time-to-digital converter carries out delay combination on photon signal distribution in different laser pulse periods so as to determine a photon lifetime curve corresponding to the photon signal of the specific wavelength of each column of single-photon avalanche diodes. And integrating the photon lifetime curves corresponding to the photon signals of the specific wavelength of each column of single-photon avalanche diodes so as to construct the time-resolved spectrum of the sample to be detected. According to the invention, counting loss or time error caused by dead time can be reduced.
Owner:JIHUA LAB
Performance simulation method and device, computer equipment and storage medium
PendingCN120930304ADesign optimisation/simulationProbabilistic CADSingle-photon avalanche diodeLidar
The invention provides a performance simulation method and device for an SPAD laser radar, computer equipment and a storage medium, and the method comprises the steps: obtaining the number of photons received by a single photon avalanche diode (SPAD) array, and determining the number of photons received by a single SPAD at a current moment; determining a target avalanche probability of the single SPAD according to the photon number received by the single SPAD and a pre-constructed target mapping relation between the photon number and the avalanche probability; according to the target avalanche probability and the total number of SPAD, calculating the avalanche number probability of avalanche of each SPAD with different numbers, and generating initial avalanche probability distribution of the SPAD array; performing iterative operation by using the initial avalanche probability distribution to obtain target avalanche probability distribution of the SPAD array; according to the target avalanche probability distribution, the range finding performance of the SPAD laser radar is predicted, and the range finding performance of the SPAD laser radar at least comprises the limit detection distance of the SPAD laser radar.
Owner:ZVISION TECH CO LTD
Three-dimensional (3D) compressive sensing based eye tracking
ActiveUS12355216B2Laser detailsUsing optical meansMicroelectromechanical systemsHigh resolution image
A three-dimensional (3D) compressive sensing based eye tracking system using single photon avalanche diode (SPAD) sensors achieves high resolution depth measurement by using low resolution SPAD sensors and active encoded illumination such as two- or three-dimensional fringe patterns, random speckles, random patterns, and / or superimposed patterns projected onto a surface of an eye. The patterns may be projected by high speed illuminators such as a digital micromirror device (DMD) or micro-electromechanical system (MEMS) projector in series changing at the same rate as the SPAD sensor capture rate. A processor may employ compressive sensing techniques to obtain a high resolution image and depth information from the captured images of varying patterns.
Owner:META PLATFORMS TECHNOLOGIES LLC
Data compression circuit and method suitable for single photon avalanche diode array
The invention relates to a data compression circuit and method suitable for a single photon avalanche diode array, and the circuit comprises a pixel array which is provided with M rows and N columns of pixels; the multi-stage compression circuit comprises a plurality of compression cache circuits connected in sequence, each stage of compression cache circuit comprises a plurality of first storage areas used for storing TDC data and address bits used for storing the positions of pixels corresponding to the TDC data in the pixel array, and the multi-stage compression circuit reads the TDC data of the pixel array line by line. And after multi-stage compression, the signals are output to a post-stage circuit. Compared with the prior art, the pixel data in a digital form is greatly compressed, the data transmission quantity is reduced, the data transmission bottleneck problem of a large-scale array is solved, and a key technical support is provided for a high-performance single-photon detection system.
Owner:FUDAN UNIVERSITY
Stacked Silicon Photomultipliers
PendingUS20250318310A1Semiconductor/solid-state device detailsSolid-state devicesSilicon photomultiplierSingle-photon avalanche diode
A semiconductor device may include a plurality of single-photon avalanche diode (SPAD) pixels. The semiconductor device may be a backside device that includes a sensor wafer stacked with an integrated passive component (IPC) wafer. The sensor wafer may include the SPAD pixels in an array across the sensor wafer. The IPC wafer may include active microcells that include quench resistors and dummy microcells that omit or disconnect the quench resistors. The sensor wafer may be bonded to the IPC wafer through hybrid bonding. The regions with active microcells may form active areas of the semiconductor device, while the regions with dummy microcells may form inactive areas. In this way, the active areas and inactive areas of the semiconductor device may be configurable by adjusting the active and dummy microcells of the IPC wafer.
Owner:SEMICON COMPONENTS IND LLC
LIDAR system with improved time-to-digital conversion circuit
The invention relates to a LIDAR system with an improved time-to-digital conversion circuit. A light detection and ranging (LIDAR) system may include a laser and a plurality of single photon avalanche diodes (SPADs) that generate signals in response to laser light reflected from a target scene. The LIDAR system may be a direct time-of-flight system and may also include processing circuitry including a transform circuit, an integration circuit, and a decode circuit. The transformation circuit may transform the signal generated by the SPAD, such as to a lower dimensional space. For example, a transformation circuit may transform the signal into a vector in a two-dimensional complex plane. An integration circuit may combine the transformed signals to form an integrated value, such as by adding a vector. Decoding circuitry may use the integrated value to determine a time-of-flight of the external object.
Owner:SEMICON COMPONENTS IND LLC
SINGLE PHOTON AVALANCHE DIODE, ELECTRONIC DEVICE, AND LiDAR DEVICE
PendingUS20250040263A1Wave based measurement systemsSemiconductor devicesSingle-photon avalanche diodeCharge carrier
Disclosed is a single photon avalanche diode comprises a first well having a first conductivity type, a heavily doped region provided on the first well, a guard ring surrounding the heavily doped region, and a second region formed between the first well and the heavily doped region and configured to multiply charge carriers. The heavily doped region and the guard ring have a second conductivity type different from the first conductivity type. The second region extends onto a boundary between a lower portion of the guard ring and the first well.
Owner:TRUPIXEL INC
Elastic fiber optic, time-of-flight sensor for long distance landslide monitoring with sub-mm precision
PCT designated stageWO2026010766A1Subsonic/sonic/ultrasonic wave measurementForce measurement by measuring optical property variationTime of flight sensorSingle-photon avalanche diode
Disclosed are systems and methods that employ elastic fiber optic, time-of-flight sensors for long distance landslide monitoring with sub-mm precision. The time-of-flight (ToF) sensor is integrated in conjunction with a single-photon avalanche diode (SPAD). By coupling both the emission source and the detector with a stretchable optical fiber, our inventive systems and methods continuously monitor the length of the stretchable optical fiber by measuring a traveling time of an optical pulse traversing the stretchable optical fiber. A significant, detectable change in the length of the stretchable optical fiber – indicative of ground movement or deformation, triggers an alarm, providing an early warning for potential landslides. As such, systems and methods according to aspects of the present disclosure provide a reliable, sensitive, precise, cost-effective, real-time solution for landslide detection and monitoring – a problem that has plagued the art.
Owner:NEC LABORATORIES AMERICA INC
System for implementing quantum key distribution (QKD) in a data center environment
Systems and methods are described for implementing quantum key distribution (QKD) in a data center environment. An example quantum transmitter includes an on-chip semiconductor laser as a light source to generate photons, quantum state preparation circuitry configured to receive a sequence of bits, map each bit to a quantum state and a measurement basis, and encode the quantum state of each bit onto a corresponding photon to generate a qubit, and a quantum channel interface configured to transmit the qubit to a quantum receiver via a quantum communication channel. An example quantum receiver includes a quantum channel interface to receive qubits, a silicon-based single photon avalanche diode (SPAD) as a photon detector for qubit detection, and quantum state measurement circuitry that is configured to decode the state of each qubit based on a selected measurement basis.
Owner:MELLANOX TECHNOLOGIES LTD(IL)
Avalanche signal reading circuit and single photon avalanche detector
The invention provides an avalanche signal reading circuit and a single photon avalanche detector, which can be applied to the technical field of weak light detection. The readout circuit includes: a gating signal generator configured to generate a gating signal; under the condition that a gating signal is applied to the single photon avalanche diode, an output signal generated by the single photon avalanche diode comprises peak noise with time domain symmetry and an avalanche signal; the beam splitter is configured to receive an output signal of the single photon avalanche diode and perform beam splitting on the output signal to obtain a first beam splitting signal and a second beam splitting signal; the beam splitting signal adjusting module is configured to enable the peak noise carried by the first beam splitting signal and the peak noise carried by the second beam splitting signal to have matched amplitude and relative delay; and the beam combiner is configured to combine the adjusted first beam splitting signal and the adjusted second beam splitting signal so as to obtain an avalanche signal after peak noise suppression.
Owner:UNIV OF SCI & TECH OF CHINA
Single photon avalanche diode and preparation method thereof
PendingCN119451248AReduce dark count ratereduce noiseFinal product manufactureSingle-photon avalanche diodeDark count rate
The invention provides a single photon avalanche diode and a preparation method thereof, the single photon avalanche diode comprises a first type center well region, a second type center well region and a protection ring, the first type center well region comprises a first type center well region body part and a first type center well region extension part, the first type central well region extension part is arranged on one side of the first type central well region body part in the first direction; the second-type central well region is arranged on one side of the first-type central well region body part in the first direction, and the first-type central well region extension part surrounds the second-type central well region; the protection ring surrounds the first type central well region extension part; and the first type central well region body part is in contact with the first type central well region extension part. In the single-photon avalanche diode provided by the invention, the first type central well region extension part can separate the protection ring from the second type central well region, so that the dark count rate of the single-photon avalanche diode is reduced, the noise is reduced, and the performance of the single-photon avalanche diode is improved.
Owner:SILEAD
Imaging sensor device using array of single photon avalanche diode photodetectors
The invention relates to an imaging sensor device in a stacked arrangement, the imaging sensor device comprising:-a pixel array layer comprising a plurality of pixel segments, each pixel segment having a plurality of pixels for photon detection, each pixel providing a digital pixel output; -a processing layer comprising a plurality of processing cores, each associated with one of the plurality of pixel segments to receive a pixel output of a pixel of a respective pixel segment, where the processing cores are each in bidirectional communication with one or more adjacent processing cores, wherein each of the processing cores is configured to receive a pixel output of a pixel of an associated pixel segment, and to assign processing on the pixel output between the processing core and at least one of the adjacent processing cores as an adjacent processing core.
Owner:ECOLE POLYTECHNIQUE FEDERALE DE LAUSANNE (EPFL)
Single-photon single-pixel imaging method based on average pulse number estimation intensity
The invention discloses a single-photon single-pixel imaging method based on average pulse number estimation intensity. The method comprises the following steps: recording each single-photon event; averaging the recorded pulse number of each single photon event to obtain an average pulse number of different photon numbers; performing intensity estimation by using the average pulse number of different photon numbers to obtain average pulse number estimation intensity, and performing information recovery on the target object to obtain an image of the target object; based on the image of the target object, the imaging quality of the target object is evaluated by calculating different image quality indexes. An image is restored by counting the number of pulses before each photon arrives and averaging. In an experiment, only one single-photon avalanche diode is used as a single-photon detector to obtain photon information, the high efficiency of the method under the low-light condition is proved, and compared with a traditional time correlation single-photon counting imaging method, the method can achieve information recovery of a target object through fewer photons.
Owner:NANCHANG UNIV
Distributed optical fiber temperature sensing system based on photon counting and measurement method
PendingCN121230908AThermometers using physical/chemical changesPhotometry electrical circuitsSingle-photon avalanche diodeOptical attenuator
The invention relates to the technical field of optical fiber sensing, and discloses a distributed optical fiber temperature sensing system based on photon counting and a measurement method, which can remarkably improve the sensing distance, the spatial resolution and the spatial positioning precision. According to the scheme, the method comprises the following steps: aiming at different segments of a sensing optical fiber, controlling the attenuation amount of a variable optical attenuator, and carrying out detection and time-dependent single photon counting on backscattered light from different segments on the sensing optical fiber by utilizing a single photon avalanche diode and a time-dependent single photon counter, and temperature distribution information of the sensing optical fiber is demodulated based on a time correlation single photon counting result.
Owner:CAS QUANTUM NETWORK CO LTD +1
STACKING SINGLE PHOTON AVALANCHE IODS AND HIGH-VOLTAGE DEVICES
PendingDE102024113665A1Wave based measurement systemsSemiconductor/solid-state device detailsSingle-photon avalanche diodeSoftware engineering
A switching logic is provided that includes a first die, a second die, and a third die, stacked vertically. The second die can have a front facing the third die and a back facing the first die. The first die can include a plurality of single-photon avalanche diodes (SPADs). The second die can include a plurality of switches coupled to the cathode terminals of the plurality of SPADs in the first die. The third die can include digital readout logic coupled to the plurality of switches in the second die. The plurality of switches in the second die can be powered by a high voltage and are sometimes referred to as analog high-voltage switches. The digital readout logic in the third die can be powered by a voltage lower than the high voltage used to power the second die.
Owner:SEMICON COMPONENTS IND LLC
Eye movement tracking based on three-dimensional (3D) compressed sensing
PendingCN120129861AUsing optical meansSemiconductor lasersMicroelectromechanical systemsHigh resolution image
A three-dimensional (3D) compressive sensing based eye movement tracking system using a single photon avalanche diode (SPAD) sensor achieves high resolution depth measurements by using a low resolution SPAD sensor and actively coded illumination (e.g., two or three dimensional fringe patterns, random spots, random patterns, and / or overlay patterns) projected onto the surface of the eye. These patterns may be projected by a high speed illuminator, such as a digital micromirror device (DMD) or a micro-electro-mechanical system (MEMS) projector, varying continuously at the same rate as the SPAD sensor acquisition rate. The processor may employ compressed sensing techniques to obtain high resolution images and depth information from the acquired images of the varying patterns.
Owner:CTRL-LABS CORP
Stacking single-photon avalanche diodes and high voltage devices
PendingJP2025016427AWave based measurement systemsRadiation controlled devicesSingle-photon avalanche diodeHemt circuits
To achieve active pixel quenching and minimize package size while ensuring connection reliability of an array of single-photon avalanche diodes (SPADs) and high voltage switches formed on separate chips or packages.SOLUTION: In SPAD circuitry 100, a second die 104 may have a front side facing a third die 106, and a back side facing a first die 102. The third die has a plurality of SPADs. The second die includes a plurality of switches coupled to cathode terminals 154 of the plurality of SPADs in the third die. The first die includes digital readout logic coupled to the plurality of switches in the second die. The plurality of switches in the second die can be powered using a high voltage and referred to as analog high voltage switches. The digital readout logic in the first die is powered using a voltage that is lower than the high voltage being used to power the second die.SELECTED DRAWING: Figure 4
Owner:SEMICON COMPONENTS IND LLC
Single photon avalanche diode, photoelectric detection device and electronic equipment
The utility model provides a single-photon avalanche diode, a photoelectric detection device and electronic equipment. The single-photon avalanche diode comprises a substrate layer, a first doped region, a second doped region, an isolation region, a first electrode and a second electrode, the first doped region is located above the substrate layer, the second doped region is located above the first doped region, and the net doping type of the first doped region is opposite to that of the second doped region, so that a PN junction is formed between the first doped region and the second doped region, and depletion regions are formed on two sides of an interface of the PN junction; the isolation region is attached to the outer sides of the first doped region and the second doped region in the horizontal direction, and is constructed to at least cover the region between the upper interface of the second doped region and the lower interface of the first doped region in the height direction; the first electrode and the second electrode are configured to apply a reverse bias voltage to the PN junction to form an avalanche region in the depletion region. According to the single-photon avalanche diode, the size of a middle strong longitudinal electric field region cannot be affected when the overall size is reduced.
Owner:SHENZHEN FUSHI TECH CO LTD
Single-photon avalanche diode structure and manufacturing process
An SPAD with a mesa structure has an etch stop layer that allows a first high-precision etch process that forms substrate contact plugs around the mesa to be combined with a second high-precision etch process that forms a metal grid. The etch stop layer is provided with a first elevation adjacent the substrate contact plugs and a second elevation adjacent the metal grid. The second elevation is greater than the first elevation. In a process, holes for the substrate contact plugs and trenches for the metal grid are etched down to the etch stop layer. After a break-through etch, a third etch process deepens the holes and the trenches to their final depths. The metal grid may land on a second etch stop layer that is absent from an area around the substrate contact plugs. This structure and process provide lower cost SPADs with mesa structures.
Owner:TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
Hybrid solid-state lidar with increased signal dynamic range and control method
ActiveUS12566252B1Optical rangefindersElectromagnetic wave reradiationLaser transmitterSingle-photon avalanche diode
The present disclosure provides a hybrid solid-state lidar with an increased signal dynamic range and a control method. The hybrid solid-state lidar includes: a laser transmitter unit, a laser receiver unit, a transmitting mirror, a receiving mirror, and a rotating polygon mirror, where the laser transmitter unit includes multiple power-and-pulse-width-adjustable vertical cavity surface emitting lasers (VCSELs); the laser receiver unit adopts a single photon avalanche diodes (SPADs) array sensor; and the laser transmitter unit performs at least one emission cycle during a single measurement. By dynamically adjusting emission parameters within a single ranging cycle, the present disclosure expands the signal dynamic range in a time coherent single photon counting (TCSPC) process, enhancing measurement precision of the lidar in both long-and short-range ranging.
Owner:PHOTONAI TECH INC