The present invention provides an MBE high-purity source feeding device and feeding method, which include: an MBE growth mechanism, which includes a shell, a
beam source furnace and a first
vacuum pump, and the interior of the shell is a working chamber; a feeding buffer mechanism, which includes a feeding chamber, a transmission component, a heating component and a second
vacuum pump, and the heating component is connected to the feeding chamber; a clamping and transporting mechanism, which includes a flexible adjustment sleeve and a clamping
manipulator, the clamping
manipulator moves through the flexible adjustment sleeve, and the high-purity source to be added enters the
beam source furnace through the clamping
manipulator from the transmission component. The present invention avoids the problem that the MBE
system needs to open the chamber for feeding, thereby greatly reducing the problem of reduced efficiency of the MBE
system due to feeding, and achieving extremely high economic value. In addition, compared with conventional
feeding methods, the present application also has the advantages of simple operation, high safety, wide practical range, high feeding cleanliness and reduced operating costs.