10 results about "Vacuum level" patented technology

This invention provides a MEMS packaging structure, including a first substrate and a second substrate. The second substrate and the first substrate are bonded together at a predetermined distance to seal the bonding area into a closed microvacuum cavity. A microvacuum gauge is disposed inside the closed microvacuum cavity to monitor the vacuum level inside the cavity. By incorporating a microvacuum gauge within the MEMS packaging structure, the vacuum level inside the vacuum cavity where the MEMS sensor is located can be monitored in real time and in situ. This allows for determination of whether the vacuum level inside the cavity is within the range required for normal operation of the MEMS sensor, providing timely early warning and enabling appropriate countermeasures to be taken promptly to ensure the continuous and normal operation of the sensor.

This invention provides a quantum current combined measurement device and method based on high-precision vacuum pressure control. The device includes: a vacuum chamber; a vacuum pump connected to the vacuum chamber; a vacuum pressure control component connected to the vacuum chamber; a high-current measurement component disposed within the high-current chamber; and a low-current measurement component disposed within the vacuum chamber. This invention regulates the vacuum level within the vacuum chamber through the vacuum pressure control component. When measuring extremely weak currents in a single electron stage, the vacuum level is reduced, and the signal is guided and collected by the low-current measurement component, enabling signal ion multiplication detection. When the current increases to the nanoampere level or above, the vacuum level is increased, switching to the high-current measurement component for direct charge collection measurement. This quantum current combined measurement device uses vacuum level as a key control variable, integrating the high sensitivity of the low-current measurement component to weak signals with the high-precision measurement capability of the high-current measurement component to strong signals into a single system.

This utility model relates to a glass vacuum gauge for accurately detecting vacuum levels in an ion implanter, belonging to the field of instrumentation technology. The vacuum gauge includes a housing that is connected to the vacuum chamber of the ion implanter via a sealing assembly. Inside the housing are a base, a tungsten wire, a spiral coil, a probe, and corresponding fixing components. The probe directly senses changes in vacuum levels, while the tungsten wire, acting as a heating element, affects the resistance of the spiral coil. By detecting changes in the spiral coil's resistance, the vacuum level can be accurately calculated. This utility model can accurately and without delay transmit the pressure signal within the vacuum chamber to the monitoring system. Simultaneously, it acts as a physical barrier to isolate the ultra-high vacuum interior from the external atmosphere, preventing gas leakage. It also provides stable electrical insulation and robust mechanical support, making it suitable for vacuum monitoring in critical areas of high-vacuum systems in medium-to-high-energy ion implanters.

This invention relates to the field of metal smelting technology and discloses a method and system for ingot receiving during interrupted EB furnace smelting. The method includes: monitoring the EB furnace smelting process to determine if smelting has been interrupted; increasing the current of the remaining second-part electron guns in response to an interruption in the crystallization zone of the EB furnace; increasing the current of the first-part electron guns based on images captured by a camera in response to troubleshooting the first-part electron guns; monitoring the ingot receiving status in real time; and adjusting the current of the second-part electron guns to the smelting state in response to ingot receiving completion. The solution of this invention monitors the EB furnace smelting process and, when the first-part electron gun is interrupted, increases the current of the second-part electron guns to maintain the ingot temperature and the vacuum level of the EB furnace. After troubleshooting, the current of each electron gun is adjusted to resume the EB furnace smelting process, thereby improving the ingot receiving success rate while ensuring product quality and reducing material waste.

This application relates to a vacuum monitoring structure for monitoring the vacuum level within a vacuum chamber. The vacuum monitoring structure includes: a tube; a flexible sealing membrane connected in a sealed manner to one end of the tube; an observation cover covering the other end of the tube, the observation cover having an extraction port, and the observation cover being partially or entirely made of transparent material, allowing the flexible sealing membrane to be observed from the outside; and a sealing structure for sealing the extraction port. The vacuum chamber includes a chamber wall, the outer surface of the tube is used for a sealed connection with the chamber wall, one end of the tube is disposed within the vacuum chamber, and the observation cover is used for a sealed connection with the chamber wall. This application allows direct observation of the deformation of the flexible sealing membrane through the observation cover, thereby determining the air pressure within the vacuum chamber.

This utility model discloses a cavity high vacuum maintaining device, belonging to the technical field of helium leak detection testing equipment. It includes an outer frame, a sealing plate, a first cylinder, a sealing assembly, a connecting frame, and a sealed cavity. The outer frame is located at one end of the connecting frame, and the sealing plate is slidably connected to the outer frame. A sealing assembly is installed on the sealing plate. The first cylinder is installed on the outer wall of the outer frame, with its bottom extending through the upper end of the connecting frame and connecting to the upper part of the sealing plate. The sealed cavity is installed within the connecting frame. This invention solves the problem in existing technologies where the single-layer seal leads to a decrease in vacuum level, interference with helium signals, and affects detection accuracy and reliability. It significantly improves the vacuum cavity's ability to maintain a high vacuum level, providing a performance foundation for high-precision detection technologies such as helium detection that are extremely sensitive to vacuum environments.

This invention discloses a NiTi shape memory alloy with strong crystallographic texture and its preparation method, belonging to the field of NiTi shape memory alloys. The method includes: mounting nearly atomically equal NiTi polycrystalline rods in an electron beam levitation zone melting furnace, evacuating to a target vacuum level; increasing the filament current to a set current, and increasing the electron gun power until a molten zone appears and stabilizes; performing zone melting from bottom to top with the electron gun at a set zone melting rate; and cooling to room temperature after melting to obtain a polycrystalline NiTi shape memory alloy with a [001] orientation texture. This invention employs electron beam levitation zone melting technology, which is simple to operate, has high material utilization, and produces a NiTi alloy with high purity, strong texture, and excellent superelastic recovery performance.

This invention discloses a magnetic liquid level measurement and calibration device and method. The device includes a slide table, a sealed housing, a camera, and a laser displacement sensor. Two sealed housings are arranged opposite each other, each with a magnetic ring at one end. A magnetic liquid ring is placed between the two magnetic rings. The slide table is mounted on a base plate, and both sealed housings are connected to the slide table to allow for adjustable distance between the magnetic rings. The camera is tangentially aligned with the outer surface of the magnetic liquid ring in a certain direction, and the laser displacement sensor is radially aligned with the outer surface of the magnetic liquid ring in the same direction. A vacuum component is connected to the sealed housing to change the vacuum level within it. This invention can correct the liquid level contour line acquired by the laser displacement sensor based on the outer contour boundary image acquired by the camera, and establish a correspondence between the liquid level contour lines acquired by the laser displacement sensor under different curvatures and inclinations and the actual liquid level contour lines of the magnetic liquid.

This invention discloses a space-simulated environment variable-temperature photothermal performance testing device based on steady-state calorimetry: the outer layer of the experimental chamber is a vacuum chamber, and the inner layer is a cryogenic chamber, with gas communication between the vacuum chamber and the cryogenic chamber; before testing, the cryogenic chamber is cooled by a cooling device, and the interior of the experimental chamber is evacuated to a vacuum state by a suction device, so that the interior of the experimental chamber meets the testing environment. A sample installation and adjustment unit is used to install and fix the sample to be tested in the cryogenic chamber. A temperature control unit is used to change the temperature of the sample to be tested. A solar radiation simulation unit is used to simulate sunlight irradiation. When the sample to be tested reaches the preset temperature, the data processing unit records the corresponding vacuum level and the output power of the temperature control unit, and calculates the emissivity of the sample to be tested by combining parameters such as the temperature inside the cryogenic chamber and the radiative area of ​​the sample. This invention achieves continuous and simultaneous measurement of full-spectrum hemispherical infrared emissivity and solar absorptivity from 150K to 450K, with a large temperature range and high measurement accuracy.