444 results about "Vacuum evaporation" patented technology

The utility model belongs to the technical field of vacuum evaporators, and discloses a crystal oscillator probe structure which comprises a crystal oscillator water pipe, a probe assembly is arranged at the bottom of the crystal oscillator water pipe, an installation structure is arranged on the inner wall of the probe assembly, and a driving assembly located outside the probe assembly is arranged at the top of the installation structure. A clamping structure is arranged in the probe assembly, the probe assembly comprises a mounting frame, and a detection head is movably sleeved with the mounting frame. According to the utility model, the detection head and the connecting plate are arranged, the reverse rotating block is rotated, and the whole detection head is limited through the clamping block, so that the screw rod is screwed out of the detection head, and the connecting plate, the protection plate, the limiting frame and the supporting frame are driven to move upwards and a wafer in the limiting frame is driven to move out of the mounting frame through the elastic force of the spring I; therefore, the wafer can be conveniently replaced by an operator, and the replacement efficiency of the wafer is improved.

The invention provides a preparation method of a multilayer film plane window reflector film system, which adopts a vacuum evaporation method, the structure of the film system is G (Hf-SiO2) n (A), a reflecting film takes HfO2 as a high-refractive-index material and takes SiO2 as a low-refractive-index material, and the HfO2 layer is completed by evaporating Hf deposition in an oxygen-containing vacuum environment. According to the method disclosed by the invention, the TOLLING value parameters are captured for multiple times in stages in the coating process, so that the performance of the prepared plane window reflecting mirror can be remarkably improved, the plane window reflecting mirror is closer to a design value, and the method has important application in preparation of a high-performance beam splitting film.

The invention relates to the technical field of organic light-emitting device production process data processing, and provides an organic light-emitting device production process optimization method, which comprises the following steps of: monitoring key parameters in an evaporation cavity in real time, analyzing data in a cleaning treatment process by utilizing a preset statistical algorithm, and optimizing the production process of an organic light-emitting device. And extracting feature data influencing the surface cleanliness and flatness of the substrate. And then, establishing a mathematical model in the vacuum evaporation process, and solving by applying an optimization algorithm to obtain a parameter combination which enables the performance of the device to be optimal. Furthermore, electrical and optical performance and life stability data of the device are collected, and optimization parameters are simulated, calculated and optimized through a data processing model. In the production process, equipment operation data are collected in real time, optimization parameters and real-time data are compared, and the parameters are optimized in real time through a stochastic gradient descent method and stored in a knowledge base. The device performance and the production efficiency are effectively improved, and the production cost is reduced.

The invention provides a novel vacuum evaporator which comprises a vacuumizing system, a carrier rotating system, a light-operated integrated system, a crystal oscillation system, a heating system, a water cooling system and an evaporation system, and the light-operated integrated system and the crystal oscillation system are arranged in a hollow cavity of a first rotating mechanism, so that cooperative work of rotary coating and real-time detection is realized; a detection light path is shortened, and the signal-to-noise ratio is improved; rotation axis detection ensures data representativeness; the top radiation heating and the side wall conduction heating have a synergistic effect, so that the surface temperature difference of the substrate is smaller than + / -1.5 DEG C, the cooling efficiency of the evaporation system is improved by 40% through the water cooling system, the equipment is highly integrated through the modular architecture design, and the space is saved by 30% through the coaxial design of the carrier rotating system and the detection system; a rotating system, a heating system and a detecting system are cooperatively controlled, a dynamic compensation algorithm automatically adjusts the evaporation rate and the carrier rotating speed by comparing light control data with crystal oscillator data in real time, the film thickness control precision is + / -2 nm, and the refractive index deviation is smaller than 0.5%.

The technical scheme of the utility model discloses a heat source tower solution concentration maintaining and adding device which comprises a refrigeration compressor, a coil pipe type evaporation heat exchanger, an air cooler, a condenser and a gas-liquid separator which are sequentially connected, and a hot gas bypass electromagnetic valve is arranged between an inlet of the refrigeration compressor and an inlet of the condenser. The coil pipe type evaporation heat exchanger is arranged in the vacuum evaporation tank, and an outlet of the solution tank is sequentially connected with the liquid supplementing electromagnetic valve, the heat recovery plate type heat exchanger and a liquid inlet of the vacuum evaporation tank; a steam outlet of the vacuum evaporation tank is sequentially connected with a condenser and a purified water tank; an air outlet of the vacuum evaporation tank is connected with the purification water tank, the purification water tank is connected with a gas inlet of the vacuum ejector, and a liquid inlet and a mixed liquid outlet of the vacuum ejector are connected with the circulating water tank; an evaporation coil I is arranged in the circulating water tank, and an evaporation coil II is arranged in the purification water tank, so that the integration of low-temperature evaporation of the solution, system liquid supplement and solution recovery is realized, the solution purification efficiency is high, and the energy consumption is low.

The vacuum evaporation equipment comprises a vacuum process chamber, the vacuum process chamber comprises a top cover, a crystal oscillator probe and a rotating mechanism are arranged on the top cover, the rotating mechanism is connected with a film coating umbrella, a plurality of substrates to be coated are arranged on the film coating umbrella, a through opening is formed in the side face of the vacuum process chamber, and a mounting channel is fixed in the through opening; an adjusting structure is arranged in the mounting channel in a penetrating manner, the end part of the adjusting structure is connected with a correction plate structure, the adjusting structure comprises a cylinder body, the cylinder body is connected with a transmission body, the end part of the transmission body is provided with a revolute pair, the rotating mechanism comprises a fixed cylinder, a motor and a sleeve, a rotating cylinder is rotationally arranged in the fixed cylinder, and the top end of the rotating cylinder is sleeved with a gear ring; and the bottom end of the rotating shaft is connected with a gear, the gear is meshed with the gear ring, and the top end of the rotating shaft penetrates through the transmission assembly and is connected with the transmission assembly, and the top end of the rotating shaft is connected with an encoder. The device has the advantages of being good in film coating effect, high in film coating efficiency and controllable in film coating process.

The invention discloses a method for preparing an upper electrode of a gallium arsenide solar cell for a low-cost space, which comprises the following steps of: corroding a gallium arsenide epitaxial wafer taking germanium as a substrate in a mixed acid corrosion solution, removing an oxide layer and pollutants on the surface of the epitaxial wafer, taking out the epitaxial wafer, and cleaning the epitaxial wafer in deionized water; the surface of the active layer of the epitaxial wafer is tightly attached to the metal grid mesh, the epitaxial wafer is put into vacuum evaporation equipment, electrode metal is evaporated layer by layer in an electron beam evaporation mode, and after evaporation is completed, the epitaxial wafer is taken out from the vacuum evaporation equipment when the epitaxial wafer is cooled to 100 DEG C or below; and placing in a vacuum sintering furnace, heating at a constant temperature for a period of time, cooling to below 100 DEG C, and taking out to obtain the space gallium arsenide solar cell top electrode. A traditional photoetching process is replaced by a metal grid mesh, the surface of an active layer of an epitaxial wafer is tightly attached to the metal grid mesh, and then the epitaxial wafer is put into a vacuum coating machine to be subjected to metal evaporation. And the evaporated metal is deposited on the surface of the epitaxial wafer through gaps of the grid mesh to prepare a conductive upper electrode.

The invention belongs to the field of photoelectric device display, and particularly relates to an intrinsic stretchable electroluminescent device and a preparation method and application thereof. The intrinsic stretchable electroluminescent device is composed of an intrinsic stretchable transparent substrate, an intrinsic stretchable transparent anode, an intrinsic stretchable hole injection / transmission layer, an intrinsic stretchable luminescent layer, an intrinsic stretchable electron injection / transmission layer, a metal cathode and liquid metal. Each layer is prepared independently, the liquid metal is deposited on the metal cathode through blade coating, spraying, dispensing printing and the like, and the other layers are deposited into a film through a solution method or a vacuum evaporation method; in the preparation process, the intrinsic tensile property of the device can be realized without special structures (such as wrinkles, island bridges, snakelike, paper-cut and the like), and the method has the advantages of simple process, low cost, wide application range and universality.

The invention relates to the technical field of electrode coating preparation, in particular to an iridium tantalum coating for a metal electrolysis anode plate and a preparation method. The catalyst comprises the following raw materials: iridium acetylacetonate, 1, 3-propylene glycol, tantalum pentoxide and dimethylplatinum dichloride. According to the method, the grooves are formed in the surface of the metal anode plate, then part of the substrate liquid is coated on the surface of the metal anode plate, so that the substrate liquid permeates into the grooves and forms the substrate film on the surface, the doped film is formed on the substrate film through a vacuum evaporation method, and the doped film is formed on the substrate film through the bonding characteristic of the substrate film and the high adhesiveness provided by the grooves. A substrate film and a doped film are firmly combined on the surface of a metal anode plate, carboxyl functional groups in 1, 3-propylene glycol in residual substrate liquid are cross-linked and matched with dichlorodimethylplatinum, so that the corrosion resistance and the wear resistance of the coating are improved, the binding force of the coating and other materials is improved, and the iridium tantalum coating with strong adhesive force is generated; and the coating is prevented from falling off, so that the corrosion resistance of the anode plate is ensured.

The invention relates to the technical field of electroluminescent devices, in particular to a large-current quantum dot electroluminescent device and a preparation method thereof. The device comprises a substrate, a cathode, an electron transport layer, a quantum dot light-emitting layer, a current focusing layer, a hole transport layer, a hole generation layer and an anode which are tightly stacked in sequence, the current focusing layer is provided with a slit which is used for regulating and controlling the injection path of hole current to the quantum dot light-emitting layer and improving the bearable current density threshold value of the device. The material of the current focusing layer is one or more of lithium fluoride, magnesium fluoride and aluminum oxide; and the hole generation layer is used for efficiently enhancing hole injection. The invention further provides a preparation method for preparing each layered structure through spin coating and vacuum evaporation deposition. The electroluminescent device has the advantages that the hole generation layer and the current aggregation layer are utilized to construct the electroluminescent device capable of realizing large-current driving, the problem that carrier injection in the device under large-current driving is limited is solved, and the current tolerance and the luminous intensity of the device are effectively improved.

The utility model discloses a switching mechanism and a device for hanging a substrate in an evaporation cavity, and relates to the field of vacuum evaporation equipment, the switching mechanism comprises an evaporation machine shell and a sealing cover which is hinged and assembled on the side surface of the evaporation machine shell and plays a role in sealing, a hanging disc is concentrically assembled in the evaporation machine shell, and the hanging disc is positioned at the upper part in the evaporation machine shell. According to the utility model, through the cooperation of the first adsorption suspension part, the second adsorption suspension part and the switching unit, the substrate can be fixed below the first adsorption suspension part for single-side evaporation treatment, and then the substrate is transferred below the second adsorption suspension part under the control of the switching unit; and in the transferring process, the base plate can be turned over, that is, double-sided evaporation treatment can be carried out under the condition that the evaporation machine is not stopped.

The invention discloses a perovskite photovoltaic device and a preparation method and application thereof, and the preparation method of the perovskite photovoltaic device comprises the following steps: dissolving heterocyclic molecules in a solvent, stirring and dissolving to prepare an interface dipole material, spin-coating the interface dipole material on a hole transport layer, and annealing to form an interface dipole layer, a perovskite material is spin-coated through an anti-solvent method and annealed to form a perovskite film, and then an electron transport layer and a metal electrode are subjected to vacuum evaporation to obtain the perovskite photovoltaic device. Wherein the heterocyclic molecules are one or two of pyridine hydriodate, morpholine hydriodate or pyrrole hydriodate. The perovskite photovoltaic device prepared by the invention has high energy conversion efficiency.

The invention relates to a fluoride-free anti-fingerprint agent as well as a preparation method and application thereof. According to the fluoride-free anti-fingerprint agent, polypotent silane based on an isocyanurate ring, polysiloxane with one or more pods at one end and a catalyst are mixed, then a diluent is added, and the mixture is stirred to be uniform, so that the fluoride-free anti-fingerprint agent is obtained. The fluoride-free anti-fingerprint agent has good thermal stability, a fluoride-free anti-fingerprint film with good compactness can be formed in a vacuum evaporation or magnetron sputtering mode, and the fluoride-free anti-fingerprint film is good in film structure, has excellent anti-fingerprint performance and wear resistance and has extremely wide application prospects.

The utility model discloses a low-temperature vacuum evaporation concentration system, which relates to the technical field of chemical equipment and comprises a treatment tank, a cleaning component is arranged in the treatment tank, and a lifting component is arranged at the top end of the cleaning component; the cleaning assembly comprises a top cover, a rotating pipe sleeve is rotationally installed at the top end of the top cover, the bottom end of the rotating pipe sleeve penetrates through the top end of the top cover, the outer surface wall of the rotating pipe sleeve is fixedly sleeved with a first gear, and two telescopic rods are fixedly installed at the bottom end of the first gear; the telescopic ends of the two telescopic rods are fixedly provided with a connecting ring, and the inner wall of the connecting ring is fixedly provided with a cleaning pipe. The cleaning assembly can make the cleaning pipe rotate, impact cleaning can be conducted on the inner wall of the treatment tank from different angles, the lifting assembly can make the cleaning pipe ascend and descend within a certain range, the inner walls, at different heights, of the treatment tank are cleaned, and the cleaning effect on the treatment tank is improved through mutual cooperation of the cleaning assembly and the lifting assembly.

The invention discloses a movable regulation and control type rotating mechanism for a vacuum evaporator, and belongs to the technical field of vacuum evaporators, the movable regulation and control type rotating mechanism comprises a supporting column and a transmission gear mounted in the supporting column, the side edge of the transmission gear is in meshed connection with a linkage gear, the linkage gear is in key connection with a power rod, a positioning sleeve is fixed on the power rod, and the positioning sleeve is in key connection with the linkage gear. And the circumferential direction of the positioning sleeve is connected with a limiting ring through a rotating arm, a clamping ring is embedded in the limiting ring, and the clamping ring is fixed in the vacuum evaporator. According to the movable regulation and control type rotating mechanism for the vacuum evaporator, by arranging the hanging piece capable of being movably adjusted at the bottom, the position of the hanging piece can be conveniently adjusted according to plating pots with different diameters, so that the hanging piece is suitable for installation of the plating pots with different sizes, and meanwhile, the water cooling assembly is arranged in the rotating arm and used for cooling the rotating arm; and the probability of uneven deformation of the rotating frame due to heating is reduced.

The invention discloses a functional current collector capable of improving rate capability and a preparation method thereof, and relates to the technical field of functional current collectors. Nano cellulose is modified, and the modified nano cellulose is added in the process of preparing the high-rate-performance functional current collector, so that the mechanical property of the high-rate-performance functional current collector is enhanced, and the electrical conductivity is improved; aluminum oxide, metal aluminum and aluminum oxide are sequentially deposited in cooperation with vacuum evaporation to serve as insulating materials, an electronic insulating barrier can be provided, short circuit is prevented, chemical stability is kept in the high-temperature and high-pressure environment, and the hardness and abrasion resistance of the film are enhanced; the surface of a high polymer material is generally non-polar and inert and has great difference with the chemical property of metal aluminum, and an aluminum oxide bottoming mode is used for performing interface optimization on a subsequent evaporation aluminum layer, so that the layering risk is reduced; the metal aluminum is an excellent conductor, the resistance of the current collector is remarkably reduced, the requirement of high-rate charging and discharging is met, the aluminum density is low, the weight of the battery can be reduced, and the energy density is improved.

A method for recovering boron oxide from dust generated in the ferroboron smelting process belongs to the technical field of boron metallurgy and specifically comprises the following steps: in the ferroboron smelting process, high-temperature tail gas is introduced into a cyclone dust collection system and then is fed into a bag dust collection system to obtain boron-containing dust; the preparation method comprises the following steps: taking hexanediol, isooctanol, isoamyl alcohol and butanol as raw materials to prepare mixed polyol; the method comprises the following steps: mixing boron-containing dust with a composite solvent, and then transferring to a stirring reflux device for leaching under a constant-temperature condition; after the leaching is finished, separating by adopting a vacuum filtration mode to obtain a boron-containing solution and primary residues, washing the obtained primary residues by using butanol to obtain a washing solution and secondary residues, and returning the washing solution to the washing process of the primary residues for recycling; carrying out vacuum evaporation on the boron-containing solution to obtain solid-phase diboron trioxide and a solvent, and carrying out vacuum evaporation and condensation on the solvent to obtain a mixed solvent; the solid-phase diboron trioxide is used as a ferroboron smelting raw material, and the mixed solvent is returned to the selective leaching process for recycling.

The invention relates to a novel Piston manufacturing process, which belongs to the field of filter devices, and specifically comprises the following steps of: S1, providing a substrate and cleaning to prepare for subsequent photoetching; s2, IDT photoresist coating, exposure and development are carried out, and PR glue presents a corresponding interdigital morphology; s3, depositing an IDT metal layer; s4, continuously coating, exposing and developing a second layer of photoresist on the IDT metal layer, and forming a strip-shaped morphology containing a Piston structure at the tail end of an IDT interdigital; step S5, depositing a Piston metal layer; and step S6, a Lift-off process is adopted, and an IDT-Piston projection structure is formed. According to the invention, the Piston metal is evaporated in vacuum, the integration of the IDT-Piston bulge structure is directly realized in the vertical direction, the process flow is simplified, the cost is saved, and the performance of the filter is improved.

The vacuum evaporation device comprises a bottom plate and a vacuum evaporation box, a mounting cylinder is fixed to the inner bottom wall of the vacuum evaporation box, an evaporation source is arranged in the mounting cylinder, the cooling assembly is jointly mounted on the bottom plate and the vacuum evaporation box, and the cooling assembly comprises a liquid storage box, a circulating pump and a cooling pipe. The cooling pipe penetrates through the side wall of the vacuum evaporation box and is fixed, the mounting cylinder is sleeved with the cooling pipe in a spiral shape, the end, away from the circulating pump, of the cooling pipe is fixed and communicated with the side wall of the liquid storage box, the cooling assembly further comprises a refrigerator arranged on the cooling pipe, and when an evaporation source needs to be cooled, a worker starts the circulating pump and the refrigerator; according to the vacuum evaporation device, the cooling liquid in the liquid storage tank is pumped into the cooling pipe and circulated, the cooling liquid in the cooling pipe is cooled by the refrigerator, and the cooling liquid takes away heat dissipated by the mounting cylinder in the process of flowing around the mounting cylinder, so that the evaporation source is rapidly cooled, the cooling efficiency of the evaporation source is improved, and the working efficiency of the vacuum evaporation device is improved.

The invention discloses a preparation method of an easy-to-demold concrete test mold with super-hydrophobic and super-smooth inner wall, and belongs to the field of concrete test molds. The method comprises the following steps of: a, spin-coating negative photoresist, and obtaining a substrate with an inverted trapezoidal micron structure on the inner wall in an ultraviolet lithography manner; b, depositing a metal layer through vacuum evaporation; c, removing the metal layer on the upper surface of the inverted trapezoidal micron structure on the inner wall of the substrate; d, obtaining a micro-nano hierarchical structure on the metal layer; e, spin-coating molten wax, and after cooling, filling the micron-sized pores with solid wax; f, depositing aluminum through vacuum evaporation, and performing anodic oxidation to obtain a porous metal aluminum surface; g, solid wax is discharged, lubricating oil is injected, the whole pores are filled with the lubricating oil, and the super-hydrophobic and super-smooth surface is obtained; and h, splicing the base to obtain the easy-to-demould concrete test mould with super-hydrophobic and super-smooth performance. The cohesiveness of the concrete and the inner wall of the test mold is reduced, so that the concrete is easily separated from the inner wall of the concrete test mold.

The present invention relates to a vacuum evaporator device and system for separation of products, in particular water-based products, by-products and waste, into a non-volatile fraction and a volatile fraction. The vacuum evaporation device comprises a tubular member, heating means for heating at least a part of the outer surface of the tubular member, and a stirrer disposed along at least a part of the interior of the tubular member. The tubular member has first and second closed ends such that a substantially airtight chamber is formed in the interior of the tubular member; the tubular member further comprises: an inlet for the entry of the product, a first outlet for the discharge of the non-volatile fraction and a second outlet for the exit of the volatile fraction.

A waste triethylene glycol purification and recycling device relates to the technical field of triethylene glycol purification devices and comprises a triethylene glycol vacuum evaporation tank, a primary condenser, a secondary condenser, a condensation storage tank, a gas-liquid separation tank and a vacuum pump, a steam outlet pipeline A is arranged at the upper end of the triethylene glycol vacuum evaporation tank and communicated with an inlet of the primary condenser, and a steam outlet pipeline B is arranged at the lower end of the steam outlet pipeline A; triethylene glycol steam is condensed into liquid through the first-stage condenser, an outlet of the first-stage condenser is communicated with the condensation storage tank, a steam outlet pipeline B is arranged on the upper portion of the condensation storage tank and communicated with an inlet of the second-stage condenser, and gaseous triethylene glycol steam is condensed into liquid through the second-stage condenser. An outlet of the secondary condenser is communicated with a gas-liquid separation tank; the upper part of the gas-liquid separation tank is communicated with a vacuum pump; the vacuum degree of the triethylene glycol vacuum evaporation tank is 4KPa, and under the vacuum degree, the boiling point of triethylene glycol is lower than 200 DEG C and lower than the theoretical decomposition temperature of 208 DEG C, so that purer triethylene glycol can be obtained and reaches the recycling standard.

This invention proposes an integrated vacuum pumping system for the exterior of a vacuum evaporation machine, comprising a coarse pumping pipe and a fine pumping pipe. A first three-way pipe and the fine pumping pipe are connected by a telescopic motor that drives the valve cover to rise and fall, enabling rapid switching between the coarse and fine pumping lines and avoiding vacuum fluctuations. Under the precise pressure control of the telescopic motor, the valve cover maintains uniform contact pressure on the sealing surface. The transition pipe directly connects the coarse and fine pumping pipes, eliminating flow channel redundancy in traditional multi-valve systems and reducing gas flow resistance. The telescopic motor is linked with a vacuum sensor to automatically switch the pumping mode based on the cavity pressure threshold, avoiding errors caused by manual intervention. The integrated three-way pipe reduces external connecting components, shrinks the equipment size, and lowers manufacturing costs and maintenance complexity.

The crucible for vacuum evaporation comprises a crucible main body and a crucible cover body, the crucible cover body covers the crucible main body, the crucible cover body comprises a left side cover and a right side cover, the left side cover is fixedly connected with the right side cover, and the left side cover and the right side cover are oppositely arranged left and right. A spacing area is arranged between the left side cover and the right side cover and is positioned in the middle of the crucible cover body. The crucible main body is used for placing the to-be-plated material, and the left side cover and the right side cover cover the part of the crucible, so that during heating, the pressure in the crucible is increased, the pressure borne by the to-be-plated material in the crucible is increased, and the evaporation material evaporated in the crucible rushes out of the spacer region and collides with an evaporation target object at a higher acceleration; and the binding force between the evaporation target object and the to-be-plated material is larger.

A vacuum evacuation method to be performed by a cryopump includes: a process of receiving an injection signal of a process gas from a process gas injection device that injects a process gas into a processing chamber; a process of turning on a first heater based on the injection signal to increase a temperature of a first stage part; a process of measuring the temperature of the first stage part; a process of monitoring whether the temperature of the first stage part reaches a predetermined first stage reference temperature; and a process of vacuum-evacuating the process gas when the temperature of the first stage part reaches a predetermined first stage reference temperature.

The present application relates to the technical field of organic optoelectronic materials and devices, in particular to a preparation method of white organic light-emitting diodes based on a kind of blue, yellow and other color cMa copper (I) TADF complex with nitrogen heterocyclic carbene-copper-arylamines structure, including three steps: first, synthesis of cMa type copper (I) TADF complex containing blue light emitter and yellow light emitter as representative, obtained by ligand selection, intermediate preparation and purification;Second, construct layered WOLEDs device, from bottom to top in turn for substrate, ITO anode, hole injection layer, hole transport layer, buffer layer, yellow light emitting layer, blue light emitting layer, electron transport layer, electron injection layer and Al cathode;Third, through substrate pretreatment, mbar high vacuum evaporation and nitrogen glove box packaging complete device preparation.The WOLEDs device W1, W2 prepared by the present application has excellent photoelectric performance, the CRI is up to 83, the maximum external quantum efficiency is greater than or equal to 13.3%, has good stability and low cost, and is suitable for lighting and display fields.

Techniques are described herein for using a high-pressure reactor to separate clean water from dirty water without filtration and to extract and concentrate contaminants from dirty water for use as a fuel. In particular, techniques and systems are described for separating water from hydrocarbon contaminates, other BTU-laden compounds, and dissolved minerals, while also boiling water and condensing the resulting steam into distilled water. In addition, system in which the described techniques are performed can be used as a high-pressure pump for moving the separated hydrocarbon contaminates forward into other processes, such as a high-pressure reactor or incinerator.

The application provides a carbon nanotube composite charge generation layer, a preparation method thereof and application of the carbon nanotube composite charge generation layer in a laminated OLED device. The preparation method comprises the following steps: placing a ferrous oxide loaded carbon nanotube composite material in a solvent to obtain a solution, spraying the solution on a substrate surface, drying to obtain a modified base film; placing the modified base film in a magnetic field with a fixed direction and a fixed frequency to obtain a modified base film with oriented arrangement of carbon nanotubes; and preparing the carbon nanotube composite charge generation layer by using a high-vacuum evaporation method. Compared with the prior art, the carbon nanotube material with regular arrangement is obtained, the axial conductivity of the carbon nanotube material is far higher than the radial conductivity, the traditional evaporation process is used, the CGL is prepared on the carbon nanotube layer with regular arrangement by the thermal evaporation method, and therefore the electrical crosstalk (lateral conductivity) of the CGL is reduced, and the performance of the laminated OLED device is improved.

This invention proposes a double-layer sealing door device for an ultra-high vacuum evaporation coating machine, including a processing chamber. A sealing door is provided on the outer side of the processing chamber, and the two are connected by a hinge assembly. A sealing area is provided on the outer end face of the processing chamber, and at least one evacuation hole is opened in this area. An inner sealing ring and an outer sealing ring are arranged sequentially on the inner side of the sealing door. When closed, the inner and outer sealing rings simultaneously press against the sealing area to form an annular vacuum chamber. The evacuation hole is located inside the vacuum chamber and is used to independently evacuate the chamber to form a secondary seal. Through the coordinated design of the inner and outer double sealing rings and the vacuum chamber, a transition vacuum zone is constructed between the sealing door and the processing chamber, making the pressure difference between the inside and outside of the door approach zero, significantly reducing the stress deformation of the sealing rings and extending their service life. At the same time, the double vacuum barrier greatly reduces the leakage rate of the main chamber and improves the sealing reliability.

The present invention relates to the field of vacuum evaporation technology, and specifically to a coating steam vertical gas distribution device and a method of using the same, including a vacuum coating chamber and a gas distribution mechanism, the gas distribution mechanism is a vertical gas distribution mechanism, the upper part of a movable bracket is installed on both sides of the vertical gas distribution mechanism, a coating chamber sealing surface is provided on one side of the vacuum coating chamber connected to the vertical gas distribution mechanism, the vertical gas distribution mechanism is connected to the vacuum coating chamber through a gas distribution chamber flange to form a complete section of vacuum coating process equipment, the side of the vacuum coating chamber is provided with a coating chamber side connection flange, and multiple vacuum coating process equipment sections are connected through the coating chamber side connection flange to form various forms of equipment layout. The vertical gas distribution mechanism of the present invention realizes the change of the vertical upward steam flow form of the horizontal evaporator to the steam flow form that the horizontal evaporator can spray horizontally from side to side, solving the problem that the horizontal evaporator cannot spray sideways and distribute gas uniformly and can be adjusted up and down for the vertical substrate in the evaporation process.