The invention relates to the field of
infrared photoelectric devices, in particular to a planar
indium gallium arsenic avalanche photodiode which comprises a
diffusion layer, an avalanche layer, a
charge layer, a component gradient layer, a light
absorption layer, a buffer layer and a substrate. The
diffusion layer includes a convex
diffusion region and a step diffusion region. The convex diffusion region is located above the step diffusion region. The avalanche layer is located below the step diffusion region. And the
charge layer, the component gradient layer, the light
absorption layer, the buffer layer and the substrate are sequentially arranged below the avalanche layer. The invention also comprises a method. The double-step diffusion
avalanche photodiode has the advantages that the
doping morphology of a traditional double-step diffusion
avalanche photodiode can be modulated, an
electric field is in step distribution with a strong center and a weak edge, the generated
electric field is converged forwards, an effective photosensitive surface is not greatly attenuated, a
protection ring structure can be omitted, the edge breakdown probability is reduced, and the effective duty ratio of the photosensitive surface is improved. Meanwhile, the method is compatible with the prior art, production equipment does not need to be changed, and the method is suitable for manufacturing the planar
indium gallium arsenic avalanche
photodiode.