This invention discloses a
cerium-doped InP-based single-
photon avalanche
detector for space communication and its fabrication method. The
detector's epitaxial structure, from bottom to top, includes a substrate, an N-type buffer layer, an
absorption layer, a band
transition layer, an N-type
charge layer, an intrinsic multiplication layer, an intrinsic InP layer, and a
cerium-doped P-type
contact layer. The core innovation lies in the dual
radiation-resistant design of the Ce-doped P-type
contact layer and the Ce-doped modified stacked
passivation film. The fabrication method involves MOCVD epitaxial growth, spin-
coating source
diffusion to prepare the P-type
contact layer, ICP
etching and wet repair, magnetron
sputtering doping, and
electrode fabrication. This invention utilizes Ce's unique
electronic structure to suppress
radiation-induced defects and combines this with an SACM structure to optimize the
electric field distribution, achieving low dark count rate, high detection sensitivity, and excellent
neutron radiation resistance. The process is compatible with existing
semiconductor production lines and is suitable for
wafer-level
mass production, meeting the high-reliability single-
photon detection requirements of
aerospace missions such as space
laser communication and
quantum key distribution.