The present invention provides a gate-all-around
transistor device and a method for manufacturing the same. The device comprises: a substrate layer, an insulating layer, a top
semiconductor layer, a first gate, a second gate, a source
electrode, and a drain
electrode. A groove is provided between the insulating layer and the top
semiconductor layer, the first gate is provided within the groove, a pre-
charge layer is provided on the first surface of the insulating layer where the first gate is not provided, and / or a pre-
charge layer is provided on the surface of the
semiconductor boss in contact with the insulating layer. By providing a pre-
charge layer around the first gate between the top semiconductor layer and the insulating layer, the present invention enables the channel switching of the gate-all-around
transistor to be primarily controlled by a gate-all-around, thereby fully leveraging the performance advantages of the gate-all-around
transistor. Simultaneously, nanocrystals are formed by sequential
ion implantation to further reduce the control of the π-type channel on the device. Furthermore, by cleaning the top semiconductor layer above the groove, the influence of the pre-charge layer on the channel
threshold voltage of the gate-all-around is reduced.