545results about How to "Improve heating efficiency" patented technology

A method with associated equipment for feeding two gases into and out of a multi-channel monolithic structure. The two gases will normally be gases with different chemical and/or physical properties. The first gas and the second gas are fed by means of a manifold head into channels for the first and second gases, respectively. The gases are distributed in the monolith in such a way that at least one of the channel walls is a shared or joint wall for both gases. The walls that are joint walls for the two gases will then constitute a contact area between the two gases that is available for mass and/or heat exchange. This means that the gases must be fed into channels that are spread over the entire cross-sectional area of the monolith. The entire contact area or all of the monolith's channel walls are directly used for heat and/or mass transfer between the gases. This means that the channel for one gas will always have the other gas on the other side of its channel walls.

The invention discloses a defrosting method for a heat-pump type air conditioner, which decides whether the defrosting operation mode, namely setting environment determination temperature t<1> and t<2> and three constants a, b and c, is carried out by combination of coil tube temperature T of an outdoor heat exchanger, outdoor temperature T, actual heating time H and set heating time h; under the following conditions, the unit starts the defrosting operation mode: 1. when T is less than or equal to t<1> and more than or equal to t<2>, if the coil tube temperature T of the outdoor heat exchanger meets the condition of T less than a, T plus c and H larger than h in a continuous M minutes, the unit starts to defrost; 2. when T is less than t<2>, if the coil tube temperature T of the outdoor heat exchanger meets the conditions of T less than b, T plus c and H larger than h in a continuous M minutes, the unit starts to defrost. The defrosting method has the advantages of shortening defrosting time, improving defrosting efficiency, leading to thorough defrosting and greatly improving heating efficiency.

The invention provides a method for using polyolefin plastic to prepare micromolecule alkene. According to the method, at first, the polyolefin plastic is cracked, then a liquid/ waxy product obtained through cracking is mixed with selectable liquid petroleum hydrocarbon and water, and the mixture is subjected to microwave pyrolysis to obtain micromolecule alkene. The method specifically comprises the following steps that the polyolefin plastic is conveyed into a moderate cracking device to be cracked, and a gas product a and the liquid/ waxy product b are obtained through gas-liquid separation; the product b is mixed with selectable liquid petroleum hydrocarbon and the water, and the mixture serves as a microwave pyrolysis raw material; and the microwave pyrolysis raw material is mixed with the water, the mixture is conveyed into a microwave pyrolysis device, after microwave pyrolysis is carried out, the mixture is quenched to be 500 DEG C or below, and a cracked product is obtained. According to the method, microwave heating of hydrocarbon raw materials insensitive to microwaves is achieved, the source of the raw material for preparing micromolecule alkene is expanded, by means of the inner heating characteristic of microwave heating, the cracking temperature is increased, the cracking efficiency is improved, and energy consumption is lower than that of a traditional pipe cracking furnace.

A heating device includes a base; a supporter disposed on the base, the supporter has a chamber therein and the chamber being configured for receiving the tobacco cigarette; an electromagnetic induction coil, wound around the supporter and configured for generating an alternative magnetic field in the chamber; at least one first heating element disposed in the chamber; when the tobacco cigarette is disposed in the chamber, the at least one first heating element contacts an outer surface of the tobacco cigarette and is configured for generating a vortex in the alternative magnetic field to heat the tobacco cigarette; and a second heating element disposed on the base; when the tobacco cigarette is disposed in the chamber, the second heating element is inserted into the tobacco cigarette and configured to generate a vortex in the alternative magnetic field to heat the tobacco cigarette.

The invention relates to a restrained induction heating electromagnetic riveting device, comprising a restrained induction heater for quickly heating a rivet head to be formed, wherein the restrained induction heater comprises an induction heating coil connected with a high-frequency current generating power supply, and a plurality of ferrites for restraining a magnetic field are annularly arranged on the induction heating coil; the restrained induction heater also comprises a silicon steel sheet arranged on the outer sides of the induction heating coil and the ferrites for shielding the leaked magnetic field, the restrained induction heater sleeves the tail end of the amplifier of an electromagnetic riveter and is fixedly connected with the shell of the electromagnetic riveter by a support frame, the amplifier moves with respect to the restrained induction heater to form a heated rivet head to be formed; the invention also relates to restrained induction heating electromagnetic riveting method. According to the restrained induction heating electromagnetic riveting device, the rivet is quickly heated by the restrained magnetic field, and meanwhile a composite board is not damaged; the restrained induction heater is reasonably combined with the electromagnetic riveter, so that the restrained induction heating electromagnetic riveting device is high in forming efficiency, simple in technology and applicable to the structure with poor openness.

The invention belongs to the field of manufacturing of electric appliances of household kitchen and particularly relates to an air fryer. The air fryer is mainly composed of a pot body (1) and an inner container assembly (2), a cavity for containing the inner container assembly (2) is formed in the lower portion of the pot body (1), a pot cover (10) located above the cavity is arranged in the pot body (1), a fan (11) and a heating assembly (12) are arranged on the lower potion of the pot cover (10), the inner container assembly comprises an inner container (20), a frying basket (21) and a shell (22) matched with the external shape of the pot body (1), the inner container (20) is movably arranged on the shell (22), the pot cover (10) is buckled in an opening above the inner container (20) when the inner container assembly (2) is arranged in the pot body (1), the inner container (20) is of a flat bottom structure, a locating seat is arranged in the center of the inner container (20), a flow guide body (3) is movably arranged on the locating seat and comprises an upper fixing seat (30) for containing the frying basket and a lower conical arc face flow guide seat (31), the diameter of the upper end of the conical arc face flow guide seat (31) is smaller than that of the lower end of the conical arc face flow guide seat (31), and an air flow hole (32) is formed in the bottom of the fixing seat (30). The air fryer of the structure is high in heat efficiency.

The invention relates to an electromagnetic sensing heating device and a method thereof. The electromagnetic sensing heating device comprises a microprocessor, a modulation circuit, a driving circuit, an insulated gate bipolar transistor (IGBT) half-bridge circuit, a main oscillation circuit and a synchronizer circuit, wherein the input end of the modulation circuit is connected with an input/output (I/O) port of the output end of the microprocessor, and the output end of the modulation circuit is connected with the driving circuit; the output end of the driving circuit is connected with the control end of the IGBT half-bridge circuit; the output end of the IGBT half-bridge circuit is connected with the control end of the main oscillation circuit; and the input end of the synchronizer circuit is connected with the main oscillation circuit in serial, and the output end of the synchronizer circuit is connected with the driving circuit. The heating efficiency of the heating device is higher than that of a traditional half-bridge circuit. The improved half-bridge circuit is connected with an inversion circuit in serial, so the cost of a full-bridge circuit is greatly reduced. A control strategy combining a constant-power temperature control method and a temperature control method is adopted, so good transient-state performance and good stable performance can be realized, and higher precision and higher reaction sensitivity can be realized.

The invention provides a film slitting machining preventing edge curling and belongs to the mechanical technical field. The film slitting machining preventing edge curling solves the technical problemthat an existing film slitting machine is poor in cutting effect. The film slitting machining preventing edge curling comprises a machine frame. A feeding roller is rotationally arranged on the machine frame. A plurality of extension rollers and adhesion rollers are sequentially and rotationally arranged on one side of the feeding roller. The extension rollers and the adhesion rollers are rotationally arranged on the machine frame. A tensioning structure used for tensioning the film is arranged between the extension rollers and the adhesion rollers. The side, far away from the extension rollers, of the adhesion rollers is further sequentially provided with a cutting mechanism used for film slitting and a coiling mechanism for slit film. A heating roller used for preventing the edges of the film strips from curling and a strip separating block capable of separating adjacent cut film strips in a staggered manner are sequentially arranged between the cutting mechanism and the coiling mechanism. The strip separating block and the heating roller are fixedly arranged on the machine frame. The film slitting machine preventing edge curling has the advantage of being good in slitting effect.

The invention relates to a plasma torch device and a plasma stove. The plasma torch device comprises a torch generator and a first medium management module connected with the torch generator, wherein the torch generator comprises an ignition pipeline; the ignition pipeline comprises a shrinking section, an equal-diameter section jointed with the shrinking section and a diffusion section jointed with the equal-diameter section; a first spray nozzle ring used for spraying plasma medium flow, a central electrode and an upper electrode are arranged on the pipe wall of the ignition pipeline; the first spray nozzle ring is arranged below the shrinking section; the first spray nozzle ring is connected with the output end of the first medium management module; and a plurality of spray holes for spraying plasma medium flow are formed in the first spray nozzle ring; and the first medium management module is used for controlling plasma medium flow to spray out from the spray holes of the first spray nozzle ring. Heating efficiency of the plasma torch device is improved.

An infrared heating perfusion apparatus for treating diseases features that the medicinal perfusion is indirectly heated by infrared heating tube, the temp measuring probe is used to measure the temp of perfusion, a hung weighing sensor is used to measure the dosage of perfusion, and an industrial control computer and the drivers of electromagntic valve, heater and peristaltic pump are used to control the heating time and circulated flow.

The invention relates to an energy-saving heat supply system for decreasing temperature of heating return water and recovering waste heat of thermal power plant and aims to solve the problems such that waste heat of a cooling column in a power plant cannot be fully utilized, and energy for direct combustion of coal and natural gas is greatly wasted. According to the system, the waste heat of the cooling column in the power plant is recovered, return heat of a heating primary network is borrowed, and energy saving is significantly effective. An absorbing heat pump is driven to work by combustion of coal or natural gas, heat in return water of a primary network of a combined heat and power generation heating pipeline is borrowed, heating area can be effectively enlarged, and the waste heat of the cooling column in the power plant is delivered to an urban heat network place. A temperature difference between supply and return waters is 108 DEG C, along with another temperature difference generated by electric power, and overall heating temperature difference is up to 160-180 DEG C. Delivery efficiency of a pipeline network is greatly improved, great significance to continuously increasing urban energy conservation is achieved, and related cyclic energy consumption of the primary network is decreased to less than one fourth of the original consumption.

A flameless cooking apparatus for use with liquid fuels and for indoor or outdoor use under field operations. The burner exhibits low CO and hydrocarbon emissions and meets standards for burner thermal efficiency when used with JP-8 fuel. The apparatus employs a catalytic burner having among its parts (i) a combustion catalyst; (ii) a conductive surface, e.g., cooking surface; and (iii) in between the catalyst and the conductive surface and in direct physical contact with both surfaces, a heat spreader for conductively transferring heat of combustion from the catalyst to the conductive surface. Also claimed are a method of heat flux and a method of cooking.

In a substrate processing apparatus, a phosphoric acid aqueous solution is supplied to a processor, and a liquid collection from the processor is concurrently performed. Further, a silicon concentration is adjusted, to supply an adjusted processing liquid to the processor. Thus, a phosphoric acid aqueous solution film is formed on the substrate. The liquid film is heated by a heating device. The heating device has lamp heaters in a casing made of a silica glass. The phosphoric acid aqueous solution on the substrate is irradiated with infrared rays. A nitrogen gas flowing in a gas passage formed in the casing is discharged towards a position outside an outer periphery of the substrate.

The embodiment of the invention provides a heating control method and device for an air conditioner system and the air conditioner system. The method includes the steps that the temperature of a compressor cylinder block and the temperature of the outdoor environment are obtained; an air conditioner system running instruction input by a user is received, wherein the air conditioner system running instruction includes a booting instruction or a standby instruction; and the output power of an electromagnetic heating device is determined according to the air conditioner system running instruction, the temperature of the air compressor cylinder block and the temperature of the outdoor environment, the control instruction is sent to the electromagnetic heating device, and therefore the electromagnetic heating device works according to the output power. By means of the heating control method and device for the air conditioner system and the air conditioner system in the embodiment, the booting waiting time spent after a power source of the air conditioner system is turned on can be shortened, and under the electrified standby condition (without the booting demand) and on the premise that the temperature of an oil groove of a compressor is ensured, the purpose of saving the standby power consumption is achieved.

The invention provides a steam generator with the changeable hole areas in the height direction. The steam generator comprises a box, an electric heating pipe and a steam outlet. The electric heating pipe is arranged in the box. The electric heating pipe comprises an outer pipe body and an electric heater arranged in the outer pipe body. The electric heating pipe is arranged in the vertical direction. Holes are formed in the lower portion of the outer pipe body. The upper portion of the electric heating pipe is connected with the steam outlet. The multiple rows of holes are formed in the height direction, multiple holes are formed in each row, and the sums of the areas of the holes in each row are gradually reduced in the height direction. The steam generator of a novel structure is designed, through the hole area changes in the height direction, dryness of the electric heating pipe is reduced, and meanwhile the heating efficiency is improved.

There is an accurate pressure-controlling electric rice cooker, which contains an inner pot inside pot body crust, and the inner pot is connected with electric plate, and there is a resilient seal ring between the inner pot and pot cover. Between the crust and the inner pot there is a middle pot; between the crust and the middle pot there is a heat-insulating layer. The electric rice cooker has a pressure switch, which contains an air duct or air channel connected with inner pot chamber. The other end of the air duct or air channel is communicated with a pressure membrane case, in which there are movable membranes that are joined with push rod. On the other side of the push rod there is a movable contact spring, which connects with an unmovable contact spring, and both the two contact springs couple with main controlling electric of electric rice cooker separately. This invention has simple and reasonable structure, its pressure controlling is accurate, safety degree is high, and after cooking it can exhaust quickly and safely, discharge pressure in blocked style, and its heat insulation effect is good, heat conductivity is high and is energy saving.

The invention discloses a zero-crossing switched-on detection device of a switch tube in an electromagnetic heating system. The device comprises a current detection circuit for detecting the loop current of a resonant circuit, a pulse detection circuit which processes loop current to output a first pulse signal, a master control unit which is connected to the driving circuit and the pulse detection circuit and comprises a first counter which counts the first pulse signals and increases the switched-on time interval of the switch tube if the counting value of the first counter is larger than a preset value in a preset time such that a driving circuit drives the switch tube to be in zero-crossing switched-on. The zero-crossing switched-on detection device can automatically adjust the switch-on time interval of the switch tube and allow the switch tube to be zero-crossing switched-on, and the energy efficiency of the electromagnetic heating system is improved. The invention also discloses the electromagnetic heating system and a zero-crossing switched-on detection method of the switch tube in the electromagnetic heating system.

The invention provides a method and a device for smelting iron in an arc furnace. The arc furnace part comprises a furnace body, a furnace cover, an electrode, feeding equipment and discharging equipment. The device comprises at least one pair of heating furnaces and at least one pair of heat accumulators, wherein the heating furnaces are connected with the furnace body of the arc furnace through a connector; one end of each of the heat accumulator is connected with the heating furnaces, while the other end is connected with a discharge system, a fan and a gas processing device respectively. In the invention, product gases generated in a smelting and reducing process are fully utilized to combust to heat the heat accumulating bodies in the heat accumulators and the heat is introduced into the furnace body from the heat accumulators through gas cycles, so the heat use is maximized. The device flow is rational and the operation is flexible. The device and the method are applicable to the iron making production by smelting and reducing and also applicable to the smelting process of other metals or other reducing processes of metal oxides by carbon.

The invention discloses a nitrogen protective continuous type brazing furnace. The brazing furnace comprises a rack and a furnace body which is fixed to the rack and internally provided with a furnace chamber; the furnace body is provided with an inlet and an outlet which are used for entering the furnace chamber, nitrogen sealing mechanisms are arranged at the inlet and the outlet, one end of a conveying belt is provided with a feeding mechanism used for jacking a brazed object to the conveying belt, the other end of the conveying belt is sequentially provided with an air cooling region and a water cooling region which are located on the conveying belt, the furnace chamber is internally provided with a pre-heating region and a heating region, and the heating region is provided with a heating nozzle and an air-conveying fan which can blow hot air to the pre-heating region. Compared with the prior art, structures such as a traditional spraying region and a drying region are saved, the mechanical structure is simplified, the heating efficiency inside the furnace is improved by using a recycling fan, by means of the air-conveying fan, the heat of the heating region can be directly blown to the pre-heating region, the energy is saved, an air-cooling then water cooling method is adopted on a cooling segment, cooling water is prevented from leaking into the furnace body, and the brazing efficiency and quality are improved.

The SnAgCuBi lead free solder alloy features in the following weight composition, comprising 0. 1-3. 0% Ag, 0. 1-1. 0% Cu, 0. 1-3. 0% Bi, 0. 01-0. 1% Sb, 0. 01-0. 1% Ni, 0. 005-0. 05% La, 0. 005-0. 05% P, with the rest being Sn. The SnAgCuBi lead free solder alloy does not have any lead, being more environmental protective, with low fuse point, better moisture feature, with anti stretch, flexibility, expansion and creep resistance equal to the tinsel alloy. It is simple in process, low in energy consumption, with the solder alloy even, finer and improved in welding feasibility.

The invention relates to an auxiliary curing method for cold weather concrete by electric heating tapes. The auxiliary curing method is characterized by comprising the following steps of: (1) supporting a mould plate firstly, and paving the electric heating tapes in a cast-in-situ member and fixing the electric heating tapes on steel bars by fixing tapes after the steel bars of the cast-in-situ member are installed and an embedded part is placed and welded; and (2) pouring the concrete after the electric heating tapes are detected to be intact, covering a heat-insulating material on the surface of the cast-in-situ member, electrifying the electric heating tapes after the covering of the heat-insulating material, and heating the concrete to keep the temperature of the concrete at 5-8 DEG C. According to the auxiliary curing method disclosed by the invention, because the self-temperature-control electric heating tapes are uniformly arranged in the concrete member, the concrete can be directly and uniformly heated with high efficiency; the heating mode is from inside to outside, so that the surface heat loss of the member is less, and energy is saved; the auxiliary curing method can be used in any construction site without the influences of the heights and the sizes of buildings; and the construction is simple and safe, and is less prone to electric shock accidents.

The invention relates to diamond rope saw injection heating, which provides electricity for both ends of the mold to keep the metal mold at certain temperature. The injection mold is installed on the operation platform of the injecting machine, with one side having two triggers along the steel cable, with the trigger contacting with the two sections to be injected of the steel cable. The trigger connects with the output end of the transformer. It controls the circuit transformer primary stroke switch and timing relay. The stroke switch closes when the mold closes, heating the part to be injected, with the relay controlling the charging time. The output end of the other transformer connect with the metal injection mold to provide heat to a certain temperature. While connecting electricity, inside and outside of the steel wire keeping the same, to ensure the penetration of plastics to improve the binding strength. It realizes electrical heating and injection with optimal temperature, easy for operation.

The invention discloses a preparing method for a high-temperature resistant metal/ceramic composite heating unit material. The preparing method comprises the following steps that ceramic tape-casting paste is prepared and cast into a plate type ceramic blank in a tape mode; metal paste for silk-screen printing is prepared, and a plate type composite blank is prepared through silk-screen printing; laminating and heat sealing are carried out to obtain a plate type heating unit material blank; low-temperature tape casting and freeze drying are carried out to obtain a composite heating unit material prefabrication body; sintering is carried out to obtain a composite heating unit material; finally the high-temperature resistant metal/ceramic composite heating unit material is obtained through an impregnation method. The preparing method for the high-temperature resistant metal/ceramic composite heating unit material solves the problems that a heating unit material prepared through equipment in the prior art is low in heating efficiency, short in service life and the like, and the material is resistant to high temperature, high in heating efficiency and long in service life, and has wide application prospects in the fields of internal combustion engine air inlet heating manifolds, carburetors, infrared heat sources, igniters, engine glow plugs, solid oxide fuel cells and the like.

The invention provides a spray pyrolysis device with microwave heating and a method for preparing a ternary precursor thereof. The spray pyrolysis device comprises a microwave heating unit and a sintering unit from top to bottom; wherein the cavity of the microwave heating unit is provided with at least one set of microwave generator module. The method comprises the following steps: spraying ionized water into the spray pyrolysis device through an atomizing device, sequentially starting microwave generators of an evaporation zone, a drying zone and a thermal decomposition zone, switching the deionized water to a ternary precursor mixed solution after the temperature of the midpoint in the horizontal direction of each zone reaches a set value, and carrying out spray pyrolysis to obtain theternary precursor powder. By microwave heating for the evaporation zone, the drying zone and the thermal decomposition zone of the spray pyrolysis device, the problems of hollowing and breaking of secondary particles of the precursor prepared by spray pyrolysis are fundamentally solved, and favorable conditions are created for the preparation of the ternary precursor having high tap density, smallspecific surface area and low chloride content.

The invention relates to the technical field of tobacco curing equipment, in particular to a liquefied petroleum gas tobacco curing house. The liquefied petroleum gas tobacco curing house comprises a hot air chamber provided with a heating device, and a tobacco curing chamber provided with a tobacco hanging rack, a circulation flue is formed between the tobacco curing chamber and the hot air chamber through an air inlet and an air return opening, and the heating device is connected with a heat exchange pipe. A first draught fan is arranged at the part, close to the air inlet, of the lower portion of the hot air chamber, and a second draught fan blowing upwards is arranged on the part, opposite to the first draught fan, of the lower portion of the tobacco curing chamber. The tobacco hanging rack comprises vertical rods arranged vertically and transverse rods arranged transversely, and a plurality of clamping parts used for being connected with the transverse rods in a clamping mode are arranged on the vertical rods. The novel tobacco curing house further comprises motors arranged on the lower portions of the vertical rods respectively and transmission rods connected with the motors, and the upper portions of the transmission rods are connected with the bottoms of the vertical rods. The heating device is a liquefied petroleum gas fuel heating device. Liquefied petroleum gas serves as fuel of the liquefied petroleum gas fuel heating device, environmental friendliness and cleanness are achieved, and the liquefied petroleum gas tobacco curing house has the advantages of being clean, sanitary, safe, cheap, high in heating efficiency, convenient to use and the like.

A printing apparatus is provided and includes: a head that ejects ink onto a medium ; a driver that relatively moves the positions of the head and the medium; a cover member that is positioned on the downstream side from the head in the movement direction of the medium relative to the head, so as to cover at least a portion of the medium; an air blowing fan that sends a drying air flow for drying ink ejected on the medium, into a gap between the medium and the cover member; and a cord type heater that heats at least one of the drying air flow and a preliminary air which is the previous stage of the drying air flow. An air-flow-direction changing wall part is provided so as to change the flow direction of the preliminary air which is the previous stage of the drying air flow, at least once.

The invention discloses a non-combustion type tobacco cigarette smoking device based on electromagnetic induction heating. The device comprises a shell, a smoking nozzle is connected to one end of the shell, a heating tube is arranged in the shell, a tobacco heating cavity used for containing a tobacco product is formed in the heating tube, the heating tube is wrapped with a thermal insulation layer, an electromagnetic induction coil is wound on the thermal insulation layer, a PCB, a switch and a power module which are connected with the electromagnetic induction coil are further arranged in the shell, and the switch extends out of the shell; the smoking nozzle is provided with a smoking hole which is communicated with the tobacco heating cavity, air holes communicated with the tobacco heating cavity are formed in the surface of the shell, and the air holes are located at the end, far away from the smoking nozzle, of the shell. In the using process of the non-combustion type cigarette smoking device, a traditional cigarette or tobacco shred can be placed in the tobacco heating cavity, the heating tube is heated by way of the electromagnetic induction heating, thereby the cigarette or the tobacco shred is heated, generated volatile matters enter the oral cavity through the smoking nozzle, and a user acquires the sense of satisfaction. By means of the non-combustion type cigarette smoking device, physiological needs of people for smoking can be satisfied, and meanwhile harm of 'passive smoking' is reduced.

An inkjet printer head includes a substrate, an insulating layer having a groove and disposed on the substrate, a heating member having a concavely curved upper surface and disposed on an upper portion of the groove, an electrode to make contact with the heating member to apply electric current to the heating member, a chamber layer disposed on the heating member, and a nozzle layer having one or more nozzles and disposed on the chamber layer. According to the inkjet printer head, the heating member has a curved structure to increase a length of the heating member, so that resistance of the heating member can be increased. Thus, the heating member can stably operate regardless of current variation applied thereto, and the printing work can be performed.

The invention relates to the technical field of preparation of high-purity silicon monoxide, in particular, relates to a method and device for preparing high-purity silicon monoxide by a medium-frequency induction heating way, and is characterized in that the preparation method comprises the following steps: 1, preparing raw materials: mixing high-purity silicon with the content of more than 99.5 wt% and silicon dioxide with the content of more than 99.5 wt% according to the weight ratio of 1:1; 2, carrying out medium-frequency induction heating; and 3, cooling to obtain the finished product; when the medium-frequency induction heating temperature is 1200-1600 DEG C, the molar ratio of the raw materials of high-purity silicon and silicon dioxide is adjusted, and the value of x in the product SiOx is a fixed value; but when the medium-frequency induction heating temperature is more than or equal to 1600 DEG C, the value of the molar ratio of the raw materials of high-purity silicon and silicon dioxide is controlled to be 0.88-1.2, and the value of x in the product SiOx is adjustable in a range of 0.89-1.10. Compared with the prior art, the method and the device have the advantages of high heating efficiency and stable equipment; products with different silicon-oxygen ratios are obtained by adjustment of the heating temperature and the ratio of the raw materials.

The invention provides an electrostatic chuck and plasma processing equipment. The electrostatic chuck comprises a chuck used for bearing a processed workpiece and a base, the chuck comprises a chuck body, an electrostatic electrode arranged in the chuck body and a heating unit, and the electrostatic electrode is connected with a direct-current power source and used for fixing the processed workpiece to the chuck in an electrostatic attraction mode. The heating unit is used for heating the processed workpiece. The base is arranged below the chuck body and used for supporting and fixing the chuck body. A heat insulation assembly is arranged between the chuck body and the base and comprises an expansion heat insulation ring and a cooling unit, the expansion heat insulation ring is a closed thin-wall structural member, and the upper end and the lower end of the expansion heat insulation ring are in sealing contact with the chuck body and the base. The cooling unit is used for cooling the expansion heat insulation ring. The electrostatic chuck can thoroughly solve the heat insulation problem of the chuck, and therefore the heating efficiency and heating uniformity of the electrostatic chuck can be improved.