13119 results about "Forming processes" patented technology

Contamination of a substrate can be prevented or suppressed. A substrate processing apparatus includes a reaction tube having an inner space divided by a barrier wall into a film forming space and a plasma generating space. When a desired film is formed on a substrate placed inside the reaction tube, first and second processing gases are supplied to the reaction tube through nozzles. On the other hand, when a part of the reaction tube constituting the plasma generating space is coated with a film, second and third processing gases are supplied to the plasma generating space through the nozzle.

A film forming apparatus for performing a film forming process by sequentially supplying a plurality of reactant gases to a substrate and supplying a replacement gas includes a mounting table configured to mount thereon a substrate, and a shower head having a flat surface facing the mounting table and a plurality of gas supply opening. An annular protrusion is provided at the shower head to form a gap between the annular protrusion and a top surface of the mounting table. A plurality of gas supply units is provided at a ceiling portion at an upper side of the shower head. Each gas supply unit has gas discharge openings formed along a circumferential direction. The diffusion space is disposed such that an outer periphery of the diffusion space is located at an inner side of an outer periphery of the substrate mounted on the mounting table in a plan view.

A substrate processing apparatus stably and efficiently conducts a film forming process on a substrate to be processed. In the substrate processing apparatus, the substrate to be processed is supported at a position facing a heater portion, and a holding member for holding the substrate is rotated, whereby the temperature distribution of the substrate is kept uniform and a warp of the substrate is suppressed. The inner wall of the processing vessel is covered with a quartz liner which is made of opaque quartz, and thus protected from ultraviolet rays emitted from an ultraviolet light source. The temperature rise of the inner wall caused by heat from the heater portion is suppressed due to the heat insulating effect of the quartz liner. Consequently, the life cycle of the processing vessel can be prolonged.

One or more actuator driven devices on a sheet forming machine receive power and engage in bi-didrectional communications with one or more quality control systems either by having no physically connected cables to transmit the power to the actuators and no physically connected cables used for the bi-directional communications; or contactless power and communication on a power cable; or a cable connected from the power source to the actuators to provide both power and bi-directional communications; or power is provided to the actuators by a cable and the bi-directional communications are wireless.

A method of making a substantially facet-free epitaxial film is disclosed. A substrate having predetermined regions is first provided. An epitaxial film forming process gas and a carrier gas are introduced into a reactor chamber. The epitaxial film forming process gas and the carrier have a flow ratio between 1:1 and 1:200. The epitaxial film is deposited into the predetermined regions of the substrate wherein the substrate has a temperature between about 350° C. and about 900° C. when the epitaxial film is being deposited.

The present invention relates to a method of forming a metal-nitride film onto a surface of an object to be processed in a processing container in which a vacuum can be created. The method of the invention includes: a step of continuously supplying an inert gas into a processing container set at a high film-forming temperature; and a step of intermittently supplying a metal-source gas into the processing container, during the step of continuously supplying the inert gas. During the step of intermittently supplying the metal-source gas, a nitrogen-including reduction gas is supplied into the processing container at the same time that the metal-source gas is supplied, during a supply term of the metal-source gas. The nitrogen-including reduction gas is also supplied into the processing container for a term shorter than a non-supply term of the metal-source gas, during the non-supply term of the metal-source gas. A film thickness of the metal-nitride film formed during the one supply term of the metal-source gas is not more than 60 nm. According to the invention, although the film-forming process is conducted at a relatively high temperature, a metal-nitride film can be deposited whose chlorine density is low, whose resistivity is low, and in which fewer cracks may be generated.

In accordance with an embodiment, a method of decoding an encoded audio bitstream at a decoder includes receiving the audio bitstream, decoding a low band bitstream of the audio bitstream to get low band coefficients in a frequency domain, and copying a plurality of the low band coefficients to a high frequency band location to generate high band coefficients. The method further includes processing the high band coefficients to form processed high band coefficients. Processing includes modifying an energy envelope of the high band coefficients by multiplying modification gains to flatten or smooth the high band coefficients, and applying a received spectral envelope decoded from the received audio bitstream to the high band coefficients. The low band coefficients and the processed high band coefficients are then inverse-transformed to the time domain to obtain a time domain output signal.

The present invention relates to preparation process of adhesive-free ZSM type molecular sieve, and aims at solving the problem of adding adhesive causing decrease in effective surface area and limited diffusion. Technologically, the present invention is that adhesive silica in 5-50 wt% and ZSM type molecular sieve powder are made to form mixture, and the mixture is hydrothermally converted inside water solution or steam containing organic amine halide and alkyl diamine into integrated ZSM type molecular sieve. The process of the present invention may be used in the industrial preparation of ZSM type molecular sieve catalyst.

A microwave is radiated into a processing chamber (1) from a planar antenna member of an antenna (7) through a dielectric plate (6). With this, a C₅F₈ gas supplied into the processing chamber (1) from a gas supply member (3) is changed (activated) into a plasma so as to form a fluorine-containing carbon film of a certain thickness on a semiconductor wafer (W). Each time a film forming process of forming a film on one wafer is carried out, a cleaning process and a pre-coating process are carried out. In the cleaning process, the inside of the processing chamber is cleaned with a plasma of an oxygen gas and a hydrogen gas. In the pre-coating process, the C₅F₈ gas is changed into a plasma, and a pre-coat film of fluorine-containing carbon thinner than the fluorine-containing carbon film formed in the film forming process is formed.

An image recording device has: a first recording head which discharges a first ink for a first image forming process; a second recording head which discharges a second ink for a second image forming process; a curing section which cures an ink on a recording medium; and a controller which controls the curing section to cure the first ink on the recording medium, and controls the second recording head to start discharging the second ink after a conversion of the first ink on the recording medium becomes not less than 30%.

A three-dimensional printer, system and method is provided for individually creating three-dimensional structural elements (individually termed fundamental structures) which are sequentially positioned into formation of a shaped object.

The invention discloses a heavy oil hydrogenation catalyst and a preparation method thereof. The heavy oil hydrogenation catalyst comprises a carrier and an active ingredient; the carrier is aluminum oxide, and is prepared from pseudo-boehmite with dry basis content below 50% via moulding; the active ingredient are metals selected form family VIII, Co or Ni, and/or family VI B, Mo or W. The preparation method comprises following steps: preparation of pseudo-boehmite, preparation of the carrier, and loading of the active ingredient. The heavy oil hydrogenation catalyst is capable of maintaining high demetalization, desulphurization, and carbon residue removing activities, simplifying drying process of pseudo-boehmite preparation, avoiding dust pollution caused by moulding process, increasing production efficiency, reducing production energy consumption, and reducing catalyst cost further.

A hearing compensation system comprises an input transducer for converting acoustical information at an input thereof to electrical signals at an output thereof, a differential analog-to-digital converter sampling the electrical signals output from the input transducer at an input thereof and outputting differential signal samples at an output thereof, a digital signal processing circuit having an input connected to the output of the differential analog-to-digital converter and operating on the differential signal samples to form processed differential signal samples at an output thereof, and an output transducer for converting electrical signals at an input thereof to acoustical information at an output thereof, the processed differential signal samples coupled to the input of the output transducer.

The invention discloses a kind of new industry dope. It comprises such materials as 95 - 105 weight shares of Component A, and 1 - 3 weight shares of Component B; thereinto, Component A is made from following weight percents of materials: cementing agent 30-60%, pigment 12 - 30%, filling agent 10 - 30%, auxiliary agent 0.1 - 5%, compound nanometer dispersing agent 5 - 15% and solvent 10 - 25%; Component B is comprised of catalyzed membrane forming agent - nanometer Sb2O3 and mixed organic solvent carriers. The invention firstly brings nanometer Sb2O3 into high temperature heat preservation dope as catalyzer in dope membrane forming process. The dope of the invention has following advantages: it has high temperature heat preservation and heavy anticorrosion performances, and the coat has good acid resistance, alkali resistance, salt mist resistance, oil resistance, chemical reagent resistance, waiting resistance and ultraviolet resistance; it has excellent fire protection and waterproof performance; the clinging strength of smearing membrane is good, membrane forming speed is fast, and performance is stable.

The present invention relates to a starch composite plant capsule and its preparation method. Said method includes the following steps: uniformly mixing starch or starch composite, dispersing it in distilled water, heating for 15-60 min, at 60-95 deg.c to make starch be fully gelatinated, then adding plasticizer, gel, surfactant, opacifier, edible color matter, preservative, ant-oxidant and enhancer, fully and uniformly mixing them, then decompressing and defoaming, and adopting conventional capsule-forming process to make the obtained colloid liquid into the invented starch composite plant hollow capsule, and its capsule-forming temperature is 40-95 deg.C.

(A2) An extended depth of field (DOF) imaging system (10) is disclosed that has a corresponding extended depth of focus (DOF′) by virtue of its optical system (20) having a select amount of spherical aberration. The imaging system has an image processing unit (54) adapted to process the raw images and perform contrast enhancement to form processed images. The image processing includes restoring the defocused modulation transfer functions (MTFs) using a gain function (G) and the amount of defocus. The imaging system can include an illumination system (60) that illuminates the object being imaged to establish a distance (DH) between the optical system and the object, where distance DH is used in the restoring of the MTF. An iris-recognition (I-R) system based on the enhanced DOF imaging system is also disclosed.; Optical system embodiments for use in the DOF imaging system that can provide select amounts of spherical aberration—and thus select increases in DOF—without increasing the adverse impact of other aberrations on image formation are also disclosed.

A built in beat diffusion lamp body for LED lamp was invented. The purpose of the invention is to solve the difficulties of poor heat conduction and diffusion caused by the small heat diffusion surface of the material of a conventional LED lamp. The lamp body is made of a set of heat diffusion vanes encircling the heat diffusion complex. The vanes and heat diffusion complex are made from Aluminum alloy in a single process of extrusion moulding. The transverse section of the heat diffusion body is volute shaped. The bottom of the heat diffusion complex is fixed to an aluminum board or an aluminum circuit: board by interference fit. The heat generated by the LED elements can be absorbed and diffused by the board, the heat diffusion complex and the surrounding diffusion element. The outward appearance of the heat diffusion lamp body may be shaped into cup, ladder, or cylinder likeness to satisfy the application requirement. The advantages of current invention are: efficient heat absorption, conduction, and diffusion, low cost for manufacturing, and aesthetic appearance.

A semiconductor device fabricating method includes a preparatory process that brings a first source gas containing tungsten atoms into contact with a workpiece and that does not bring a second source gas containing nitrogen atoms into contact with the workpiece, and a film forming process that forms a tungsten nitride film on the workpiece by using the first and the second source gases so as to fabricate a semiconductor device. The semiconductor device fabricating method is capable of preventing the tungsten nitride film from peeling off from a layer underlying the same when the tungsten nitride film is subjected to heat treatment.

A method of manufacture for an end effector assembly is provided. The method includes providing a pair of jaw members. A step of the method includes forming one or more seal plates positionable on one of the pair of jaw members. Etching a dam along a side of the one or more seal plates is a step of the method, wherein the etched dam inhibits the flow of a plastic on the one or more seal plate such that a height of the plastic with respect to the at least one seal plate during an overmolding process may be controlled. The method includes positioning the one or more seal plates on the one of the pair of jaw members; and overmolding the seal plate to one or more of the pair of jaw members.

A wafer processing apparatus (14) has a wafer processing vessel (16). A wafer is mounted on a susceptor (22) included in the wafer processing apparatus. Process gases are supplied to the wafer through a shower head (74) disposed in an upper region within the processing vessel to carry out a predetermined process for processing the wafer. The surfaces of aluminum members (16, 74) employed in the wafer processing apparatus are subjected to an organic mechanical chemical polishing process, a blasting process and an aluminum oxide film forming process in that order. It is difficult for unnecessary films to adhere to the thus treated surfaces and it is difficult for unnecessary films deposited on the thus treated surfaces to come off the surfaces. Consequently, intervals between cleaning operations can be extended and production of particles can be suppressed.

The invention is directed to chalcogenide glasses suitable for use in plastics forming processes. The glasses have the general formula YZ, where Y is Ge, As, Sb or a mixture of two or more of the same; Z is S, Se, Te, or a mixture of two or more of the same; and Y and Z are present in amounts (in atomic/element percent) in the range of Y=15–70% and Z=30–85%. The chalcogenide glasses of the invention have a 10,000 poise temperature of 400° C. and are resistant to crystallization when processed at high shear rates at their 10,000 poise temperature. The glasses can be used to make, among other items, molded telecommunication elements, lenses and infrared sensing devices.