Three-dimensional semiconductor memory devices and methods of fabricating the same. The three-dimensional semiconductor devices include an electrode structure with sequentially-stacked electrodes disposed on a substrate, semiconductor patterns penetrating the electrode structure, and memory elements including a first pattern and a second pattern interposed between the semiconductor patterns and the electrode structure, the first pattern vertically extending to cross the electrodes and the second pattern horizontally extending to cross the semiconductor patterns.
A method for forming a dielectric film in a trench on a substrate by plasma-enhanced atomic layer deposition (PEALD) performs one or more process cycles, each process cycle including: (i) feeding a silicon-containing precursor in a pulse; (ii) supplying a hydrogen-containing reactant gas at a flow rate of more than about 30 sccm but less than about 800 sccm in the absence of nitrogen-containing gas; (iii) supplying a noble gas to the reaction space; and (iv) applying RF power in the presence of the reactant gas and the noble gas and in the absence of any precursor in the reaction space, to form a monolayer constituting a dielectric film on a substrate at a growth rate of less than one atomic layer thickness per cycle.
A method of depositing a film with a target conformality on a patterned substrate, includes: depositing a first film on a convex pattern and a bottom surface; and depositing a second film on the first film, thereby forming an integrated film having a target conformality, wherein one of the first and second films is a conformal film which is non-flowable when being deposited and has a conformality of about 80% to about 100%, and the other of the first and second films is a flowable film which is flowable when being deposited.
High tensile stress in a deposited layer such as siliconnitride, may be achieved utilizing one or more techniques, employed alone or in combination. High tensile stress may be achieved by forming a silicon-containing layer on a surface by exposing the surface to a silicon-containing precursor gas in the absence of a plasma, forming silicon nitride by exposing said silicon-containing layer to a nitrogen-containing plasma, and then repeating these steps to increase a thickness of the silicon nitride created thereby. High tensile stress may also be achieved by exposing a surface to a silicon-containing precursor gas in a first nitrogen-containing plasma, treating the material with a second nitrogen-containing plasma, and then repeating these steps to increase a thickness of the silicon nitride formed thereby. In another embodiment, tensile film stress is enhanced by deposition with porogens that are liberated upon subsequent exposure to UV radiation or plasma treatment.
A multi-chippackage (MCP) is provided. The MCP comprises a plurality of stacked semiconductor chips, each including a chip pad and a first insulating layer overlying the chip pad with an opening to expose a portion of the chip pad. Each chip additionally includes a pad redistribution line formed on the first insulating layer and a second insulating layer covering the pad redistribution line. A via hole is formed through the chip, the first insulating layer, a pad redistribution line and the second insulating layer. The MCP further includes a protective layer formed on the bottom of the lowest semiconductor chip. The protective layer includes a conductive pad formed opposite the bottom of the lowest semiconductor chip. A conductive bar extends through the via holes of the stacked semiconductor chips, from the conductive pad, and is electrically connected to the pad redistribution line of the stacked semiconductor chips.
A piezoelectric device for an ink jet print head that has a greater displacement at a low drive voltage. The ink-jet recording head includes a vibration plate, on which is mounted one or more piezoelectric devices that change the volumes of pressure chambers upon application of a voltage. The device is mounted at least on one face of a pressure chamber substrate that is to be filled with ink. Such piezoelectric device includes a second piezoelectric layer having a piezoelectric constant g of a constant value or higher; and a first piezoelectric layer having a dielectric constant of a specific value or higher. Since the piezoelectric constant d of the piezoelectric device correlates with the product of the largest piezoelectric constant g and the largest dielectric device of the piezoelectric devices, a piezoelectric constant d larger than in the conventional case, i.e., having a greater displacement, can be obtained.
In a process involving the formation of an insulating film on a substrate for an electronic device, the insulating film is formed on the substrate surface by carrying out two or more steps for regulating the characteristic of the insulating film involved in the process under the same operation principle. The formation of an insulating film having a high level of cleanness can be realized by carrying out treatment such as cleaning, oxidation, nitriding, and a film thickness reduction while avoiding exposure to the air. Further, carrying out various steps regarding the formation of an insulating film under the same operation principle can realize simplification of the form of an apparatus and can form an insulating film having excellent property with a high efficiency.
A golf club head is provided having an increased sweet spot across its club face. A preferred construction includes a face plate having vertical zone of increased thickness and a central region having a reduced thickness. An upward extension of the vertical zone comprises divergent segments separated by an upper region of reduced thickness. The face plate material is preferably metallic, but in alternative embodiments may be formed of a composite or non-metal material. Methods for manufacturing a golf club head having a face plate with the thicknesses of the present invention include forging and machining techniques. The club head may be a wood-type or iron.
An implantable medical device includes a porous metal foam or foam-like structure having pores defined by metal struts or webs wherein the porous structure has directionally controlled pore characteristics. The pore characteristics controlled include one or more of the metal structure porosity, pore size, pore shape, pore size distribution and strut thickness. The pore characteristics may vary in one or more directions throughout the structure. Preferably the pore characteristics are controlled to match the porous metal structure to various mechanical and biological requirements of different regions of the structure in order to optimize aspects of the implants performance and may vary not only over the surface of the porous structure but through the depth of the porous structure. The thickness of the porous metal structure may also be modified to establish a thickness profile that optimizes mechanical and biological requirements of the implants performance. Acetabular cup embodiments of the invention are described. Various methods of manufacturing implants having directionally controlled pore characteristics are described.
Methods, devices and systems facilitate intermittent and / or partial obstruction of a pyloric valve. Devices generally include a support portion for preventing the device from passing through the pyloric valve and a tissue engagement portion for contacting tissue adjacent the pyloric valve to obstruct the valve. Some embodiments also include a positioning member extending from the tissue engagement portion for helping position the device for obstructing the valve. A retaining member may optionally be included on the distal end of the positioning member for further maintaining a position of the device in the stomach. Some embodiments are deliverable into the stomach through the esophagus, either by swallowing or through a delivery tube or catheter. Some embodiments are fully reversible. Some embodiments self-expand within the stomach, while others are inflated or otherwise expanded.
A structure for mounting a flat panel display module constituting a screen display device of a portable computersystem wherein the weight and a thickness of a display device are reduced. For example, the structure for mounting a flat panel display includes a display module having a flat panel display panel, a backlight assembly, and a supporting member for supporting edges of the flat panel display panel and the back light assembly, a rear cover to which the display module is fitted, and a front cover fitted to a frontal edge of the rear cover to cover a frontal edge of the display module. In this structure the supporting member is formed at an inner side of the front cover.
A display device includes a pixel portion in which a pixel is arranged in a matrix, the pixel including an inverted staggered thin film transistor having a combination of at least two kinds of oxidesemiconductorlayers with different amounts of oxygen and having a channel protective layer over a semiconductor layer to be a channel formation region overlapping a gate electrode layer and a pixel electrode layer electrically connected to the inverted staggered thin film transistor. In the periphery of the pixel portion in this display device, a pad portion including a conductive layer made of the same material as the pixel electrode layer is provided. In addition, the conductive layer is electrically connected to a common electrode layer formed on a counter substrate.
The present invention relates to a variable-torque magnetorheologically actuated prosthetic knee which utilizes a plurality of interspersed and alternating rotors and stators to shear magnetorheological fluid in gaps formed therebetween. Advantageously, by operating in the "shear mode" there is substantially no or negligible fluid pressure buildup or change. Moreover, the multiple MR fluid gaps or flux interfaces desirably allow for the production of a large torque at low speed-eliminating the need for a transmission-and also for a wide dynamic torque range. One embodiment of the invention allows the rotors and / or stators to close the gaps therebetween to create a frictional torque component, thereby forming a "hybrid" braking system which provides a total torque or damping which is a combination of viscous torque and frictional torque.
An implantable medical device includes a porous metal foam or foam-like structure having pores defined by metal struts or webs wherein the porous structure has directionally controlled pore characteristics. The pore characteristics controlled include one or more of the metal structure porosity, pore size, pore shape, pore size distribution and strut thickness. The pore characteristics may vary in one or more directions throughout the structure. Preferably the pore characteristics are controlled to match the porous metal structure to various mechanical and biological requirements of different regions of the structure in order to optimize aspects of the implants performance and may vary not only over the surface of the porous structure but through the depth of the porous structure. The thickness of the porous metal structure may also be modified to establish a thickness profile that optimizes mechanical and biological requirements of the implants performance. Acetabular cup embodiments of the invention are described. Various methods of manufacturing implants having directionally controlled pore characteristics are described.
A stent that can be made of self-expandable members and balloon expandable members is described. The members can be held together by a polymer layer, polymer rings or discreet polymer connectors. Methods of making and using the stent are also described.
A doubled-sided PCD or PCBN compact as well as a new multi-layered PCD and PCBN can be produced using high pressure high temperature processes allowing for increased effective thickness of abrasive tools. A polycrystalline compact can include a substrate having a first surface and a second surface which are non-contiguous. Additionally, a first polycrystalline layer can be attached to the first surface of the substrate and a second polycrystalline layer attached to the second surface of the substrate. The first and second polycrystalline layers can include superabrasive particles bonded together by sintering or chemical bonding with an additional metal. Such double-sided PCD and PCBN compacts as well as a new multiple layered PCD and PCBN allow for increased effective thickness of a tool without suffering from non-homogenous results typical of standard PCD and PCBN compacts, regardless of superabrasive particle size. Each polycrystalline layer can include superabrasive particles of varying particle sizes such that the final tool is tailored for specific abrading characteristics. Such doubled-sided and / or multiple layered PCD and PCBN compacts can be incorporated into a wide variety of abrasive tools for use in cutting, milling, grinding, polishing, drilling and other similar abrasive applications.
A system for the internal fixation of a fractured bone of an elbow joint of a patient includes at least one bone plate, each bone plate having a plurality of holes and generally configured to fit an anatomical surface of the fractured bone. The at least one plate is adapted to be customized to the shape of a patient's bone. The system also includes a plurality of fasteners including at least one locking fastener for attaching the bone plate to the bone. At least one of the holes is a threaded hole. Guides for plate benders, drills, and / or K-wires can be pre-assembled to the threaded holes, and the locking fastener can lock into any of the threaded holes after the guides are removed.