Provided is a back reflection
electrode with a periodic structure. The back reflection
electrode with the periodic structure comprises a substrate layer, first layer
metal film which plays a role of a template, and second layer
metal film which plays a role in decoration, wherein the two
layers of
metal film are metal Ag film or metal Al film or metal Mo film, and the back reflection
electrode with the periodic structure is formed and has the function of
broadband-spectrum scattering. A manufacturing method of the back reflection electrode with the periodic structure comprises the steps that PS microspheres are assembled through the water bath method,
plasma etching is carried out on the PS microspheres through O2, the template effect of the etched
polystyrene microspheres is used for obtaining the back reflection electrode with the periodic structure and the function of
broadband-spectrum scattering, and the back reflection electrode with the periodic structure serves as a back reflection electrode of a
thin film solar cell. The back reflection electrode with the periodic structure and the manufacturing method of the back reflection electrode with the periodic structure have the advantages that due to the fact that the template effect of the
polystyrene microspheres and the mode that magnetron
sputtering or
evaporation is carried out on the metal film are used, manufacturing of the high-scattering back reflection electrode with the periodic structure is achieved, and when the back reflection electrode with the periodic structure is applied to the
thin film solar cell, the short-circuit
current density and conversion efficiency of the
thin film solar cell are improved.