The invention discloses a
solar cell and a preparation method thereof and a
solar cell module, the
solar cell comprises a
semiconductor substrate, the
semiconductor substrate comprises a first surface and a second surface which are oppositely arranged along the thickness direction of the
semiconductor substrate, the first surface of the semiconductor substrate is sequentially provided with a tunneling
oxide layer, a doped
polycrystalline silicon layer, a first transparent conductive layer and a first
electrode, and the second surface of the semiconductor substrate is provided with a second transparent conductive layer; the second surface of the semiconductor substrate is sequentially provided with an intrinsic
amorphous silicon layer, a doped
amorphous silicon layer, a second transparent conductive layer and a second
electrode, the thickness of the doped
polycrystalline silicon layer is less than 10nm, and the doped
polycrystalline silicon layer is subjected to
hydrogen passivation. The thickness of the ultra-thin doped polycrystalline
silicon layer is smaller than 10 nm, the parasitic absorption problem of the doped polycrystalline
silicon layer can be remarkably reduced, meanwhile, the carrier transmission resistance is reduced, meanwhile, the doped polycrystalline
silicon layer is subjected to
hydrogen passivation, the
passivation effect of the ultra-thin doped polycrystalline silicon layer can be remarkably improved, and the service life of the ultra-thin doped polycrystalline silicon layer is prolonged. The passivation effect of the doped polycrystalline silicon layer does not need to be improved by increasing the thickness of the doped polycrystalline silicon layer.