The invention discloses a composite modified material for a
lithium niobate
wafer, and relates to the technical field of nano materials. The material is composed of an anti-
corrosion passivation matrix and a function enhancement component, wherein the anti-
corrosion matrix adopts a
silicon nitride / SiO2 multi-layer composite layer,
atomic layer deposition titanium dioxide and magnetron
sputtering aluminum
oxide to form
cascade protection; the functional layer comprises
lead sulfide nanoparticles and
nano silicon dioxide, and is directionally modified by a
silane coupling agent and a
perfluoropolyether surfactant. During preparation, PbS nano-particles are synthesized by combining a PECVD-ALD-magnetron
sputtering stepped
deposition process (200-150 DEG C) with a solvothermal method, and finally, the PbS nano-particles are formed through
spin coating-annealing (300-400 DEG C). The optical loss of the material under the
wavelength of 1550 nm is smaller than 0.2 dB / cm, the acid and alkali
corrosion resistance is larger than 240 h, the lead
dissolution rate is smaller than 0.1 ppm, the interface
state density is reduced by 2 orders of magnitude, the contradiction between
lithium niobate
wafer surface degradation, photoelectric property degradation and lead-containing material environment risk is solved, and the material is suitable for 5G optical
waveguide and
quantum integrated device packaging.