226 results about "Diamond-like carbon" patented technology

The invention relates to the technical field of sole processing, in particular to a sole composite processing method, which comprises the following steps: according to the rigidity requirement of an arch support area, preparing high-density slurry in which silicon nitride ceramic powder accounts for 30-40%, forming # imgabs0 # crystal phase through microwave-assisted sintering, and controlling the porosity to be 10-20%; according to the energy rebound requirement of the forefoot buffer area, graphene oxide / carboxymethyl cellulose aerogel powder is added into the slurry until the concentration is 25%, and the porosity is increased to 40-60% by combining the honeycomb porous network design; a nano silicon dioxide reinforcing agent is introduced into a wear-resistant area of the heel to 15%, a diamond-like carbon coating is formed through plasma surface treatment, and the porosity is limited to be 5-15%. According to the invention, silane is encapsulated by adopting polyurea microcapsules, and is released only when the material is damaged, so that dynamic self-repairing is realized, the shoe sole is endowed with dynamic repairing capability, and the service life is prolonged.

To suppress spurious responses and also suppress degradation of main responses.SOLUTION: An elastic wave device 100 includes: a supporting substrate 10; a piezoelectric layer 14 formed on the supporting substrate 10; a pair of comb-shaped electrodes 20 provided on the piezoelectric layer 14; a first insulation layer 11 formed between the supporting substrate 10 and the piezoelectric layer 14, the first insulation layer being made of one of polycrystal or amorphous oxide aluminum and polycrystal or amorphous polysilicon; and a second insulation layer 12 formed between the first insulating layer 11 and the piezoelectric layer 14, the second insulation layer being made of aluminum nitride, silicon nitride, silicon carbide, or diamond-like carbon and having a first surface 60 adjacent to the first insulation layer 11 and a second surface 61 adjacent to the piezoelectric layer 14, and the first surface being rougher than the second surface.SELECTED DRAWING: Figure 1

A turbo machine with a shaft, an impeller arranged on said shaft, and one or more guide vanes configured to guide operating fluid to or from said impeller, wherein the one or at least one of the more guide vanes is movably arranged in the turbo machine and arranged in relation to one or more components of said turbo machine such that said one or at least one of the more guide vanes abuts said one or more components and that said one or at least one of the more guide vanes is movable relative to said one or more components, wherein at least one contact surface between said one or at least one of the more guide vanes and said one or more components comprises a diamond like carbon coating. The invention also relates to a method of manufacturing such turbo machine.

The invention belongs to the technical field of optical glass, and discloses an optical glass structure with a high-hardness scratch-resistant coating, which comprises the following structures: a chemically strengthened glass substrate; the refractive index gradient transition layer is deposited on the surface of the substrate; and the diamond-like carbon-based hard coating covers the surface of the transition layer. The defect is thoroughly overcome through a gradient strengthening system, the diamond-like carbon coating resists invasion of external abrasion particles through a crystal bonding network close to absolute hardness, so that the surface microhardness breaks through the upper limit of a brittle material, the gradient transition layer constructs an elastic buffer strip below the coating, impact stress is dissipated through the porous nano laminated layer, and the hardness of the coating is improved. The cooperation of the two ensures that no visible scratch is generated on the glass surface even if the glass surface is exposed to a high-wear environment for a long time, thereby fundamentally blocking linkage failures such as light path scattering, imaging blurring and dispersion imbalance caused by surface damage, and ensuring that the light transmittance of a precise optical system in the whole life cycle is stabilized at a theoretical extreme value.

The invention discloses a dust-free environment purification method for biological pharmacy. Comprising the following steps: constructing three layers of metal filter screens, realizing particle interception through a conical micro-column array, an Al2O3 / TiO2 composite ceramic layer and a diamond-like carbon film, fixing lysozyme by adopting a crystal face regulated ZIF-8 crystal, and realizing dual inactivation of microorganisms by combining dielectric barrier discharge of a spiral plasma channel. The electrostatic adsorption HEPA filter paper adopts a BaTiO3-graphene quantum dot composite electret substrate, and a TiO2 / graphene heterojunction catalytic layer is decomposed by a Pt-Co bimetallic nanocluster and a photocatalysis-plasma-ozone-thermocatalysis quadruple oxidation system; and 0.1 mu m organic aerosol triggers graded reverse pulse cleaning based on differential pressure integration and a particle concentration threshold value, and the honeycomb flow guide structure drives a shutter and a gradient density sintering metal flow guide plate through piezoelectric ceramics to maintain laminar flow uniformity. According to the scheme, the limitation of a traditional technology is broken through, the purification efficiency of 0.1 micron particles is improved, and a high-stability solution is provided for a biopharmaceutical clean room.

A method for removing scale that is precipitated from geothermal fluid containing dissolved silica and becomes adherent in a geothermal power plant including: a water supply pump for pumping the geothermal fluid from a production well; a gas-water separator for separating the geothermal fluid into geothermal water and geothermal steam; and a turbine for rotating by being supplied with the geothermal steam separated by the gas-water separator includes: forming a surface of a location in the geothermal power plant contacted by the geothermal fluid from diamond-like carbon in a first region extending from the production well to the turbine; forming at least the surface of the location in the geothermal power plant from at least one selected from diamond-like carbon, polytetrafluoroethylene, and polyvinyl chloride in a region other than the first region; and injecting a scale removing liquid into a flow path including the surface of the location.

A vacuum chuck may include a chuck body formed from silicon carbide. A carbon coating, such as a diamond-like carbon coating, may be deposited on the chuck body. Coating the silicon carbide vacuum chucks with the carbon coatings may control electrostatic discharge events. The carbon coatings may increase the surface resistance of the chuck body and bring the vacuum chucks to within an electrostatic discharge specification which is a tightening specification in the semiconductor industry.

The vacuum brazing process comprises the steps that an alloy substrate and fins are placed in a liquid nitrogen cooling environment to be subjected to graphene deposition treatment, then silver-based brazing filler metal is deposited, pulse airflow is introduced every preset period to disturb brazing filler metal atoms, the alloy substrate and the fins are placed in an alignment clamp, and alignment treatment is conducted on a crystal nucleus substrate and the fins; brazing is controlled to be started in a vacuum brazing furnace, interface bonding of graphene and brazing filler metal is promoted, and an initial brazing assembly is formed; the initial brazing assembly is subjected to annealing treatment, vibration is applied to the initial brazing assembly in the annealing process, and an optimized brazing assembly is obtained; and under the inert atmosphere, a diamond-like carbon film is deposited on the surface of the optimized brazing assembly, and the heat dissipation assembly is obtained. The interface bonding strength and the heat conduction efficiency are remarkably improved, the heat dissipation requirement of a high-power-density electronic device is met, the service life of the device is effectively prolonged, and the working stability of the device is improved.

According to the silicon carbide / diamond multi-layer composite film and the preparation method thereof, a polycrystalline silicon carbide matrix in the multi-layer composite film is a bottom layer, and the multi-layer composite film has high strength, high rigidity, high heat conductivity and oxidation resistance; the components of the gradient SiC-C transition layer gradually change from pure SiC to rich C-SiC and then to diamond-like carbon, and the gradient SiC-C transition layer is used for slowly releasing thermal stress and enhancing binding force; the nanocrystalline diamond is used as the top layer and has high hardness, low friction coefficient, particle scouring resistance and high infrared transmittance; the silicon carbide / diamond multi-layer composite film is obtained through a chemical vapor deposition method, the process is mature, and the silicon carbide / diamond multi-layer composite film has good heat conduction performance and infrared transmittance and is suitable for infrared guidance systems with extremely severe working environments, such as optical materials of fairings, optical windows and the like.

The surface coating method for the piston comprises the following steps: cleaning and drying the piston; placing the piston and the metal target in a vacuum chamber, introducing argon, and controlling the air pressure to be at a first value so as to form a metal layer on the surface of the piston through sputtering; and hydrocarbon type gas is introduced into the vacuum chamber, the air pressure is controlled to be at a second value, and the second value is smaller than the first value, so that a diamond-like carbon layer is deposited on the metal layer. The method is simple and easy to implement and low in cost, the surface hardness of the piston can be improved, the treated piston surface is smooth and compact, a film body is not prone to stripping, and the service life of the piston is prolonged.

The invention discloses a cutter casting method for reducing cutter abrasion and prolonging the service life of a cutter, and belongs to the technical field of cutter casting. In order to solve the problems that a high-carbon high-alloy steel tool is uneven in matrix structure, large in heat treatment residual stress, prone to tipping of a cutting edge, poor in coating interface bonding force and the like, the method comprises the steps that a high-carbon high-alloy steel blank is smelted and then poured, the matrix structure is homogenized through multi-stage heat treatment, and high-dislocation-density martensite is formed; and the cutting edge of the quenched cutter base body is subjected to rounding treatment, and then a titanium nitride bottom layer, a titanium aluminum nitride middle layer and a diamond-like carbon top layer are sequentially deposited to form a multi-layer coating. According to the method, through smelting parameter optimization, multi-stage heat treatment, cutting edge rounding and multi-layer coating structure design, the hardness and toughness of a cutter base body are effectively improved, the bonding strength of the coating is enhanced, and stress concentration and frictional wear in the cutting process are reduced. The method is mainly used in the field of metal cutting machining, can significantly prolong the service life of the cutter, and improves the machining efficiency and quality.

A thermal ablation-resistant, wear-resistant, and friction-reducing coated piston ring, a preparation method thereof and an engine are provided. An outer circumferential surface of a piston ring material matrix includes, from bottom to top, a wear-resistant and friction-reducing layer and a protective layer, and the protective layer is a single nitride layer or a multi-element nitride layer. The piston ring is arranged with the wear-resistant and friction-reducing layer and the protective layer from bottom to top. When the piston ring is installed in the engine, the high-temperature and high-pressure gas flow impacts the piston ring and contacts the protective layer on the surface of the piston ring, while the inner diamond-like carbon coating (DLC) functional layer is completely “encapsulated” and protected by the outer protective layer. The protective layer possesses higher ablation resistance compared to the DLC layer, effectively preventing phase transformation in the internal DLC layer.

A wiring substrate includes a core part including a glass plate and a through-hole conductor penetrating through the glass plate, and a build-up part formed on a surface of the glass plate of the core part and including conductor layers and insulating layers. The build-up part is formed such that the conductor layers include four or more conductor layers and that the insulating layers include four or more insulating layers, the core part includes a land and an adhesive film formed such that the land is formed on the surface of the glass plate and positioned on the through-hole conductor and that the adhesive film includes a diamond-like carbon film and is covering a surface of the land and the surface of the glass plate not covered by the land.

The invention belongs to the field of chip technology, and discloses a packaging method for a chip with a hole, which is characterized by comprising the following steps: first, preparing a composite substrate with a gradient expansion coefficient; second, performing plasma etching on a metallized through hole of a DIP chip to form a micro-nano rough surface, fixing the DIP chip on the composite substrate by a gradient temperature field welding process, and injecting a liquid crystal polymer oriented by a magnetic field at the periphery of the DIP chip to form an anisotropic packaging layer; third, making a BGA pad array on the back of the packaged composite substrate, and constructing a bionic microtexture on the packaging surface by laser etching; and fourth, depositing a diamond-like carbon protective film, a gel layer and a gradient metallized outer layer on the surface of the processed packaging structure in sequence to form a packaging body; the performance of the chip packaging is improved, the thermal management, mechanical performance and protection capability of the chip are optimized, and the reliability and service life of the chip packaging are significantly improved.

Provided is an initial break-in lubricant composition capable of easily and economically reducing the coefficient of friction of a sliding portion. The initial break-in lubricant composition includes an organic dispersion medium and nanocarbon particles in a quantity from 0.1 to 2000 ppm by mass. The nanocarbon particles are preferably particles of one or more nanocarbon material(s) selected from the group consisting of: nanodiamonds, fullerenes, graphene oxide, nanographite, carbon nanotubes, carbon nanofilaments, onion-like carbon, diamond-like carbon, amorphous carbon, carbon black, carbon nanohorns, and carbon nanocoils.

The utility model discloses a kind of shaft structures for fatigue-resistant circuit breaker, including output shaft main body, the output shaft main body outside is provided with reinforcing component, the reinforcing component includes the coating one being arranged in the output shaft main body outside, the coating one is made of Ni60A+WC composite material, the coating one outside is provided with coating two, the coating two is made of diamond-like carbon material, the output shaft main body outside is provided with several reinforcing bands, the reinforcing band is prepared using TiN material, the output shaft main body middle position is provided with through hole, the through hole inside is fixedly connected with support frame, the output shaft main body and support frame are made using 17-4PH stainless steel material, the coating one thickness is 80-120 μm, the utility model is provided with reinforcing component, can greatly improve the overall strength of output shaft main body, effectively avoid the emergence of damage due to use time increase, beneficial to increase the service life of output shaft.

The present invention relates to an electrical machine (1) comprising at least one component (2) with a coating (4) which is an electrically insulating insulation layer and / or a protective layer for protection against mechanical damage, in particular wear, characterized in that the coating (4) comprises a glass-like material or a ceramic material or is formed from a diamond-like carbon.

The method comprises the following steps: forming a diamond-like carbon film on a substrate; and treating the diamond-like carbon film in a vacuum chamber, wherein the treatment comprises the following steps: spraying a silicon dioxide solution on the surface of the diamond-like carbon film, and annealing the diamond-like carbon film. According to the method, the ductility of the diamond-like carbon film can be simply and efficiently improved at low cost, and the high hardness and high wear resistance of the diamond-like carbon film are not damaged, so that the application range of the diamond-like carbon film is expanded.

The invention belongs to the technical field of chains, and particularly relates to a precise chain roller with a smooth surface and abrasion resistance and a preparation method thereof. The invention provides a steel roller which is provided with a DLC final working surface on an excircle mirror surface, an excircle has no texture, and only an inner hole is provided with a micron-sized spiral microgroove. The process is implemented according to the sequence of carburizing / quenching / tempering-shot blasting-fine grinding-superfinishing-vacuum PVD, a diamond-like carbon composite coating is formed on an outer circle, and oil storage and capillary pumping are carried out through control of an outer edge fillet, residual compressive stress and DLC adhesive force and an inner hole microgroove, so that work division of antifriction bearing and oil supply functions is realized. A chain provided with the anti-abrasion precision roller with the smooth surface gives consideration to low friction, low noise and stripping resistance under the boundary lubrication and impact-rolling composite working conditions.

The present disclosure provides a screw rod and a screw rod nut assembly, the screw rod comprising: a screw rod body, the screw rod body comprising a threaded section, an outer surface of the threaded section sequentially provided from inside to outside with: a metal chromium base bonding layer, a tungsten carbide hardness support layer, and a DLC functional layer, the DLC functional layer being a diamond-like carbon coating layer; wherein a total thickness T1 of the metal chromium base bonding layer and the tungsten carbide hardness support layer is not less than 0.5 microns, and a thickness T2 of the DLC functional layer is not less than 1.5 microns. The screw rod nut assembly of the present disclosure comprises the above-mentioned screw rod.

The invention discloses a treatment method of a DLC film, which comprises the following steps: covering a to-be-protected area on the surface of an original DLC film by using a resin adhesive, the to-be-protected area being other areas on the surface of the original DLC film except the to-be-treated area; after the resin adhesive in the to-be-protected area is cured, the original DLC film is placed in a vacuum chamber; the original DLC film is heated to a preset temperature in the vacuum chamber, and meanwhile an external electric field is applied to the original DLC film; and after a preset time, converting the carbon element in the to-be-treated region into a graphite structure by utilizing the electron migration characteristic of the carbon element. By adopting the technical scheme provided by the invention, part of carbon elements in the DLC film can be converted into a graphite structure, and the method has the advantages of low energy consumption, low cost, short treatment time, simple process and the like.

The utility model discloses an anti-corrosion and wear-resistant bearing, and relates to the technical field of bearings. The bearing comprises an outer ring, an inner ring assembly is arranged in an inner cavity of the outer ring, a retainer is arranged between the inner ring assembly and the outer ring, and a rolling body is arranged in an inner cavity of the retainer; the inner ring assembly comprises a first connecting sleeve, and a second connecting sleeve is clamped in an inner cavity of the first connecting sleeve. According to the sealing design of the inner ring assembly, through the first connecting sleeve, the second connecting sleeve, the sealing ring and the sealing plate which are connected in a clamped mode, external impurities are effectively prevented from invading, a good working environment is built for the interior of the bearing, and a strength foundation is laid for base-layer high-carbon-chromium bearing steel; the carburized bearing steel and martensitic stainless steel of the reinforcing layer are combined to improve the strength and hardness, the chemical nickel-plated phosphorus alloy and the diamond-like carbon coating of the functional layer endow the bearing with excellent corrosion resistance and wear resistance respectively, and the adaptive capacity of the bearing under complex and severe working conditions is comprehensively improved.

The utility model relates to deposition equipment of a decorative diamond-like carbon film with adjustable color, which belongs to the technical field of diamond-like carbon films and comprises a machine body, a machine door is hinged to the right side of the machine body through a hinge, a high-energy ion source is fixed on the inner left side wall of the machine body, and a vacuumizing pipe is fixed on the top of the machine body. A placing assembly for placing a diamond-like carbon film is mounted in the machine body, a fixing assembly for fixing substances needing to be doped is mounted in the machine body, and the fixing assembly comprises two mounting frames fixed to the inner top wall and the inner bottom wall of the machine body respectively. According to the deposition equipment of the color-adjustable decorative diamond-like carbon film, substances for doping can be conveniently and effectively replaced, and the operation is relatively simple and convenient, so that the working efficiency of workers is effectively improved, and the color of the diamond-like carbon film can be adjusted to a target color; and the practicability of the deposition equipment for the color-adjustable decorative diamond-like carbon film is improved.

A method of processing a substrate is provided that includes flowing a deposition gas including a hydrocarbon compound and a dopant compound into a processing volume having a substrate positioned on a substrate support. The processing volume is maintained at a pressure of about 0.5 millitorr to about 10 millitorr. The method includes generating a plasma at the substrate by applying a first RF bias to the substrate support to deposit a doped diamond-like carbon film on the substrate. The doped diamond-like carbon film includes a dopant in an amount from about 5 atomic percent to about 25 atomic percent and a first stress property. The method includes annealing the doped diamond-like carbon film at about 220 DEG C to about 450 DEG C to form an annealed film. The annealed film includes a second stress property. The absolute value of the second stress property is less than or within 10% of the first stress property.

An end effector for a substrate handling device suitable for a semiconductor fabrication tool. The end effector is adapted to support the substrate and is connectable to a robotic arm. The end effector includes: (a) a body having a top surface and a bottom surface; and (b) at least one supporting projection protruding from the top surface of the body for contacting and supporting the substrate. The supporting projection is provided with a diamond-like carbon coating.

The invention provides a lubricating grease-diamond-like carbon film composite lubricating material as well as a preparation method and application thereof, and belongs to the technical field of lubricating materials. The lubricating grease-diamond-like carbon film composite lubricating material comprises a composite diamond-like carbon film and lubricating grease arranged on the surface of the composite diamond-like carbon film. On one hand, the structure of the composite diamond-like carbon film is regulated and controlled, a gradient content structure with the Cr mass content gradually decreased and the amorphous carbon mass content gradually increased is formed in the thickness direction, the binding force of the diamond-like carbon film and a friction pair substrate can be improved, and meanwhile the amorphous carbon content of the friction surface layer is increased; lubricating grease is arranged on the surface of the diamond-like carbon film, additives in the lubricating grease can form a three-dimensional network structure through non-covalent interaction, efficient capture of base oil is achieved, creeping and volatilization of a liquid lubricant are effectively avoided, the service life is long, and pollution is avoided.

The invention discloses a match-grinding-free quick forming process for a valve element and a valve sleeve of a servo valve, and relates to the technical field of servo valve machining and forming. Step 2, material inspection; step 3, surface treatment; step 4, ultrasonic cleaning; step 5, clamping the part; step 6, vacuumizing; seventhly, argon ion bombardment cleaning is conducted; 8, depositing a chromium base layer; 9, depositing a gradient chromium carbide transition layer; 10, depositing a hydrogenated diamond-like carbon top layer; and eleventhly, cooling and discharging are conducted. According to the match-grinding-free quick forming process for the valve element and the valve sleeve of the servo valve, the machining period of a sliding valve assembly can be shortened by 30%, the material cost is reduced by 80%, and the interchangeability of the valve sleeve and the valve element in the sliding valve assembly is achieved.

The invention discloses a cushion block composite layer for a semiconductor, a preparation method and a cushion block, the cushion block composite layer sequentially comprises a composite coating and a surface microstructure from a substrate close to beryllium copper to a position far away from the substrate, and the composite coating sequentially comprises a chromium transition layer, an alpha-diamond-like carbon layer and a self-lubricating layer doped with tungsten disulfide from a position close to the substrate to a position far away from the substrate. Hard metal carbide reinforced phase crystal grains are uniformly distributed in the alpha-diamond-like carbon layer; the surface micro-texture comprises a plurality of pits, and each pit is filled with a nano-particle solid lubricant; through the structure, the cushion block is compatible with the high process temperature, an additional cooling device is not needed, and the interface shear stress of the composite layer is reduced, so that the copper powder falling amount is greatly reduced, the hardness, the wear-resisting life, the wear-resisting particle penetrability and the high recognition accuracy of the cushion block are greatly improved, and the low friction coefficient of the surface is maintained; and the roughness is still kept at a lower level after the lead frame is carried for multiple times.

The rotary joint device includes: a rotary-side joint having a first hole through which liquid is to flow in an axial direction; a fixed-side joint configured to reciprocate in the axial direction of approaching and separating from the rotary-side joint, the fixed-side joint further having a second hole in the axial direction that communicates with the first hole in a state where the fixed-side joint is in contact with the rotary-side joint; an attachment being fixable to another member; a DLC (diamond-like carbon) film provided on an outer peripheral surface of the fixed-side joint; and an elastic member interposed liquid-tight between an inner peripheral surface of the attachment and the DLC film.

The embodiments of this disclosure generally relate to the fabrication of integrated circuits. More specifically, the embodiments described herein provide techniques for depositing nitrogen-doped diamond-like carbon films for patterning applications. In one or more embodiments, a method for processing a substrate includes: flowing a deposition gas containing a hydrocarbon compound and a nitrogen dopant compound into a processing volume of a process chamber on which the substrate is positioned on an electrostatic chuck; and generating plasma at or above the substrate by applying a first RF bias voltage to the electrostatic chuck to deposit a nitrogen-doped diamond-like carbon film on the substrate. The nitrogen-doped diamond-like carbon film has a density greater than 1.5 g / cc and a compressive stress of about -20 MPa to less than -600 MPa.