158 results about "Diamond-like carbon" patented technology

The invention belongs to the technical field of optical glass, and discloses an optical glass structure with a high-hardness scratch-resistant coating, which comprises the following structures: a chemically strengthened glass substrate; the refractive index gradient transition layer is deposited on the surface of the substrate; and the diamond-like carbon-based hard coating covers the surface of the transition layer. The defect is thoroughly overcome through a gradient strengthening system, the diamond-like carbon coating resists invasion of external abrasion particles through a crystal bonding network close to absolute hardness, so that the surface microhardness breaks through the upper limit of a brittle material, the gradient transition layer constructs an elastic buffer strip below the coating, impact stress is dissipated through the porous nano laminated layer, and the hardness of the coating is improved. The cooperation of the two ensures that no visible scratch is generated on the glass surface even if the glass surface is exposed to a high-wear environment for a long time, thereby fundamentally blocking linkage failures such as light path scattering, imaging blurring and dispersion imbalance caused by surface damage, and ensuring that the light transmittance of a precise optical system in the whole life cycle is stabilized at a theoretical extreme value.

The invention discloses a dust-free environment purification method for biological pharmacy. Comprising the following steps: constructing three layers of metal filter screens, realizing particle interception through a conical micro-column array, an Al2O3 / TiO2 composite ceramic layer and a diamond-like carbon film, fixing lysozyme by adopting a crystal face regulated ZIF-8 crystal, and realizing dual inactivation of microorganisms by combining dielectric barrier discharge of a spiral plasma channel. The electrostatic adsorption HEPA filter paper adopts a BaTiO3-graphene quantum dot composite electret substrate, and a TiO2 / graphene heterojunction catalytic layer is decomposed by a Pt-Co bimetallic nanocluster and a photocatalysis-plasma-ozone-thermocatalysis quadruple oxidation system; and 0.1 mu m organic aerosol triggers graded reverse pulse cleaning based on differential pressure integration and a particle concentration threshold value, and the honeycomb flow guide structure drives a shutter and a gradient density sintering metal flow guide plate through piezoelectric ceramics to maintain laminar flow uniformity. According to the scheme, the limitation of a traditional technology is broken through, the purification efficiency of 0.1 micron particles is improved, and a high-stability solution is provided for a biopharmaceutical clean room.

A vacuum chuck may include a chuck body formed from silicon carbide. A carbon coating, such as a diamond-like carbon coating, may be deposited on the chuck body. Coating the silicon carbide vacuum chucks with the carbon coatings may control electrostatic discharge events. The carbon coatings may increase the surface resistance of the chuck body and bring the vacuum chucks to within an electrostatic discharge specification which is a tightening specification in the semiconductor industry.

The vacuum brazing process comprises the steps that an alloy substrate and fins are placed in a liquid nitrogen cooling environment to be subjected to graphene deposition treatment, then silver-based brazing filler metal is deposited, pulse airflow is introduced every preset period to disturb brazing filler metal atoms, the alloy substrate and the fins are placed in an alignment clamp, and alignment treatment is conducted on a crystal nucleus substrate and the fins; brazing is controlled to be started in a vacuum brazing furnace, interface bonding of graphene and brazing filler metal is promoted, and an initial brazing assembly is formed; the initial brazing assembly is subjected to annealing treatment, vibration is applied to the initial brazing assembly in the annealing process, and an optimized brazing assembly is obtained; and under the inert atmosphere, a diamond-like carbon film is deposited on the surface of the optimized brazing assembly, and the heat dissipation assembly is obtained. The interface bonding strength and the heat conduction efficiency are remarkably improved, the heat dissipation requirement of a high-power-density electronic device is met, the service life of the device is effectively prolonged, and the working stability of the device is improved.

According to the silicon carbide / diamond multi-layer composite film and the preparation method thereof, a polycrystalline silicon carbide matrix in the multi-layer composite film is a bottom layer, and the multi-layer composite film has high strength, high rigidity, high heat conductivity and oxidation resistance; the components of the gradient SiC-C transition layer gradually change from pure SiC to rich C-SiC and then to diamond-like carbon, and the gradient SiC-C transition layer is used for slowly releasing thermal stress and enhancing binding force; the nanocrystalline diamond is used as the top layer and has high hardness, low friction coefficient, particle scouring resistance and high infrared transmittance; the silicon carbide / diamond multi-layer composite film is obtained through a chemical vapor deposition method, the process is mature, and the silicon carbide / diamond multi-layer composite film has good heat conduction performance and infrared transmittance and is suitable for infrared guidance systems with extremely severe working environments, such as optical materials of fairings, optical windows and the like.

The invention discloses a cutter casting method for reducing cutter abrasion and prolonging the service life of a cutter, and belongs to the technical field of cutter casting. In order to solve the problems that a high-carbon high-alloy steel tool is uneven in matrix structure, large in heat treatment residual stress, prone to tipping of a cutting edge, poor in coating interface bonding force and the like, the method comprises the steps that a high-carbon high-alloy steel blank is smelted and then poured, the matrix structure is homogenized through multi-stage heat treatment, and high-dislocation-density martensite is formed; and the cutting edge of the quenched cutter base body is subjected to rounding treatment, and then a titanium nitride bottom layer, a titanium aluminum nitride middle layer and a diamond-like carbon top layer are sequentially deposited to form a multi-layer coating. According to the method, through smelting parameter optimization, multi-stage heat treatment, cutting edge rounding and multi-layer coating structure design, the hardness and toughness of a cutter base body are effectively improved, the bonding strength of the coating is enhanced, and stress concentration and frictional wear in the cutting process are reduced. The method is mainly used in the field of metal cutting machining, can significantly prolong the service life of the cutter, and improves the machining efficiency and quality.

A thermal ablation-resistant, wear-resistant, and friction-reducing coated piston ring, a preparation method thereof and an engine are provided. An outer circumferential surface of a piston ring material matrix includes, from bottom to top, a wear-resistant and friction-reducing layer and a protective layer, and the protective layer is a single nitride layer or a multi-element nitride layer. The piston ring is arranged with the wear-resistant and friction-reducing layer and the protective layer from bottom to top. When the piston ring is installed in the engine, the high-temperature and high-pressure gas flow impacts the piston ring and contacts the protective layer on the surface of the piston ring, while the inner diamond-like carbon coating (DLC) functional layer is completely “encapsulated” and protected by the outer protective layer. The protective layer possesses higher ablation resistance compared to the DLC layer, effectively preventing phase transformation in the internal DLC layer.

A wiring substrate includes a core part including a glass plate and a through-hole conductor penetrating through the glass plate, and a build-up part formed on a surface of the glass plate of the core part and including conductor layers and insulating layers. The build-up part is formed such that the conductor layers include four or more conductor layers and that the insulating layers include four or more insulating layers, the core part includes a land and an adhesive film formed such that the land is formed on the surface of the glass plate and positioned on the through-hole conductor and that the adhesive film includes a diamond-like carbon film and is covering a surface of the land and the surface of the glass plate not covered by the land.

The utility model discloses a kind of shaft structures for fatigue-resistant circuit breaker, including output shaft main body, the output shaft main body outside is provided with reinforcing component, the reinforcing component includes the coating one being arranged in the output shaft main body outside, the coating one is made of Ni60A+WC composite material, the coating one outside is provided with coating two, the coating two is made of diamond-like carbon material, the output shaft main body outside is provided with several reinforcing bands, the reinforcing band is prepared using TiN material, the output shaft main body middle position is provided with through hole, the through hole inside is fixedly connected with support frame, the output shaft main body and support frame are made using 17-4PH stainless steel material, the coating one thickness is 80-120 μm, the utility model is provided with reinforcing component, can greatly improve the overall strength of output shaft main body, effectively avoid the emergence of damage due to use time increase, beneficial to increase the service life of output shaft.

The method comprises the following steps: forming a diamond-like carbon film on a substrate; and treating the diamond-like carbon film in a vacuum chamber, wherein the treatment comprises the following steps: spraying a silicon dioxide solution on the surface of the diamond-like carbon film, and annealing the diamond-like carbon film. According to the method, the ductility of the diamond-like carbon film can be simply and efficiently improved at low cost, and the high hardness and high wear resistance of the diamond-like carbon film are not damaged, so that the application range of the diamond-like carbon film is expanded.

The invention belongs to the technical field of chains, and particularly relates to a precise chain roller with a smooth surface and abrasion resistance and a preparation method thereof. The invention provides a steel roller which is provided with a DLC final working surface on an excircle mirror surface, an excircle has no texture, and only an inner hole is provided with a micron-sized spiral microgroove. The process is implemented according to the sequence of carburizing / quenching / tempering-shot blasting-fine grinding-superfinishing-vacuum PVD, a diamond-like carbon composite coating is formed on an outer circle, and oil storage and capillary pumping are carried out through control of an outer edge fillet, residual compressive stress and DLC adhesive force and an inner hole microgroove, so that work division of antifriction bearing and oil supply functions is realized. A chain provided with the anti-abrasion precision roller with the smooth surface gives consideration to low friction, low noise and stripping resistance under the boundary lubrication and impact-rolling composite working conditions.

The present disclosure provides a screw rod and a screw rod nut assembly, the screw rod comprising: a screw rod body, the screw rod body comprising a threaded section, an outer surface of the threaded section sequentially provided from inside to outside with: a metal chromium base bonding layer, a tungsten carbide hardness support layer, and a DLC functional layer, the DLC functional layer being a diamond-like carbon coating layer; wherein a total thickness T1 of the metal chromium base bonding layer and the tungsten carbide hardness support layer is not less than 0.5 microns, and a thickness T2 of the DLC functional layer is not less than 1.5 microns. The screw rod nut assembly of the present disclosure comprises the above-mentioned screw rod.

The invention discloses a treatment method of a DLC film, which comprises the following steps: covering a to-be-protected area on the surface of an original DLC film by using a resin adhesive, the to-be-protected area being other areas on the surface of the original DLC film except the to-be-treated area; after the resin adhesive in the to-be-protected area is cured, the original DLC film is placed in a vacuum chamber; the original DLC film is heated to a preset temperature in the vacuum chamber, and meanwhile an external electric field is applied to the original DLC film; and after a preset time, converting the carbon element in the to-be-treated region into a graphite structure by utilizing the electron migration characteristic of the carbon element. By adopting the technical scheme provided by the invention, part of carbon elements in the DLC film can be converted into a graphite structure, and the method has the advantages of low energy consumption, low cost, short treatment time, simple process and the like.

The utility model discloses an anti-corrosion and wear-resistant bearing, and relates to the technical field of bearings. The bearing comprises an outer ring, an inner ring assembly is arranged in an inner cavity of the outer ring, a retainer is arranged between the inner ring assembly and the outer ring, and a rolling body is arranged in an inner cavity of the retainer; the inner ring assembly comprises a first connecting sleeve, and a second connecting sleeve is clamped in an inner cavity of the first connecting sleeve. According to the sealing design of the inner ring assembly, through the first connecting sleeve, the second connecting sleeve, the sealing ring and the sealing plate which are connected in a clamped mode, external impurities are effectively prevented from invading, a good working environment is built for the interior of the bearing, and a strength foundation is laid for base-layer high-carbon-chromium bearing steel; the carburized bearing steel and martensitic stainless steel of the reinforcing layer are combined to improve the strength and hardness, the chemical nickel-plated phosphorus alloy and the diamond-like carbon coating of the functional layer endow the bearing with excellent corrosion resistance and wear resistance respectively, and the adaptive capacity of the bearing under complex and severe working conditions is comprehensively improved.

An end effector for a substrate handling device suitable for a semiconductor fabrication tool. The end effector is adapted to support the substrate and is connectable to a robotic arm. The end effector includes: (a) a body having a top surface and a bottom surface; and (b) at least one supporting projection protruding from the top surface of the body for contacting and supporting the substrate. The supporting projection is provided with a diamond-like carbon coating.

The invention provides a lubricating grease-diamond-like carbon film composite lubricating material as well as a preparation method and application thereof, and belongs to the technical field of lubricating materials. The lubricating grease-diamond-like carbon film composite lubricating material comprises a composite diamond-like carbon film and lubricating grease arranged on the surface of the composite diamond-like carbon film. On one hand, the structure of the composite diamond-like carbon film is regulated and controlled, a gradient content structure with the Cr mass content gradually decreased and the amorphous carbon mass content gradually increased is formed in the thickness direction, the binding force of the diamond-like carbon film and a friction pair substrate can be improved, and meanwhile the amorphous carbon content of the friction surface layer is increased; lubricating grease is arranged on the surface of the diamond-like carbon film, additives in the lubricating grease can form a three-dimensional network structure through non-covalent interaction, efficient capture of base oil is achieved, creeping and volatilization of a liquid lubricant are effectively avoided, the service life is long, and pollution is avoided.

The invention discloses a match-grinding-free quick forming process for a valve element and a valve sleeve of a servo valve, and relates to the technical field of servo valve machining and forming. Step 2, material inspection; step 3, surface treatment; step 4, ultrasonic cleaning; step 5, clamping the part; step 6, vacuumizing; seventhly, argon ion bombardment cleaning is conducted; 8, depositing a chromium base layer; 9, depositing a gradient chromium carbide transition layer; 10, depositing a hydrogenated diamond-like carbon top layer; and eleventhly, cooling and discharging are conducted. According to the match-grinding-free quick forming process for the valve element and the valve sleeve of the servo valve, the machining period of a sliding valve assembly can be shortened by 30%, the material cost is reduced by 80%, and the interchangeability of the valve sleeve and the valve element in the sliding valve assembly is achieved.

The invention discloses a cushion block composite layer for a semiconductor, a preparation method and a cushion block, the cushion block composite layer sequentially comprises a composite coating and a surface microstructure from a substrate close to beryllium copper to a position far away from the substrate, and the composite coating sequentially comprises a chromium transition layer, an alpha-diamond-like carbon layer and a self-lubricating layer doped with tungsten disulfide from a position close to the substrate to a position far away from the substrate. Hard metal carbide reinforced phase crystal grains are uniformly distributed in the alpha-diamond-like carbon layer; the surface micro-texture comprises a plurality of pits, and each pit is filled with a nano-particle solid lubricant; through the structure, the cushion block is compatible with the high process temperature, an additional cooling device is not needed, and the interface shear stress of the composite layer is reduced, so that the copper powder falling amount is greatly reduced, the hardness, the wear-resisting life, the wear-resisting particle penetrability and the high recognition accuracy of the cushion block are greatly improved, and the low friction coefficient of the surface is maintained; and the roughness is still kept at a lower level after the lead frame is carried for multiple times.

The rotary joint device includes: a rotary-side joint having a first hole through which liquid is to flow in an axial direction; a fixed-side joint configured to reciprocate in the axial direction of approaching and separating from the rotary-side joint, the fixed-side joint further having a second hole in the axial direction that communicates with the first hole in a state where the fixed-side joint is in contact with the rotary-side joint; an attachment being fixable to another member; a DLC (diamond-like carbon) film provided on an outer peripheral surface of the fixed-side joint; and an elastic member interposed liquid-tight between an inner peripheral surface of the attachment and the DLC film.

The embodiments of this disclosure generally relate to the fabrication of integrated circuits. More specifically, the embodiments described herein provide techniques for depositing nitrogen-doped diamond-like carbon films for patterning applications. In one or more embodiments, a method for processing a substrate includes: flowing a deposition gas containing a hydrocarbon compound and a nitrogen dopant compound into a processing volume of a process chamber on which the substrate is positioned on an electrostatic chuck; and generating plasma at or above the substrate by applying a first RF bias voltage to the electrostatic chuck to deposit a nitrogen-doped diamond-like carbon film on the substrate. The nitrogen-doped diamond-like carbon film has a density greater than 1.5 g / cc and a compressive stress of about -20 MPa to less than -600 MPa.

The present invention relates to the field of sole processing technology, and specifically to a sole composite processing method, comprising: configuring a high-density slurry with a silicon nitride ceramic powder accounting for 30-40% according to the rigidity requirements of the arch support area, forming an #imgabs0# crystal phase by microwave-assisted sintering, and controlling the porosity at 10-20%; adding graphene oxide / carboxymethyl cellulose aerogel powder to the slurry to meet the energy rebound requirements of the forefoot buffer zone to 25%, and combining a honeycomb porous network design to increase the porosity to 40-60%; introducing a nano-silica reinforcing agent to 15% in the heel wear-resistant zone, and forming a diamond-like carbon coating by plasma surface treatment, with a porosity limit of 5-15%. The present invention uses polyurea microcapsules to encapsulate silane, which is released only when the material is damaged, achieving dynamic self-repair, giving the sole dynamic repair ability, and extending its service life.

The present invention relates to a carbon coating method for a rubber roller, in which a DLC (Diamond-Like Carbon) coating is applied to the surface of the rubber roller using an ion source. In order to prevent problems such as surface cracks caused by heat and ultraviolet radiation generated during the plasma-based coating process, the method controls the coating cycle by distributing the coating time and aging time (also referred to as cooling time) into a single unit coating cycle.

The method for processing a plastic substrate according to the present invention includes: cleaning the plastic substrate; sputtering to form a metal film on the plastic substrate; subjecting the plastic substrate to plasma bombardment and etching; and depositing a diamond-like carbon layer on the metal film. This method is simple, efficient, and low-cost, and can form a low-stress diamond-like carbon layer on the plastic substrate, thereby reducing surface stress on the plastic substrate, preventing curling and deformation, and improving its performance.

The invention relates to a design method of a diamond-like carbon wear-resistant coating for a zirconium alloy component of a nuclear reactor, which comprises the following steps: establishing a fretting wear prediction model of the zirconium alloy component in a nuclear reactor environment, and calibrating the model based on experimental data to simulate flow-induced vibration and contact stress distribution; the performance parameters of the diamond-like carbon coating are designed through an optimization algorithm by utilizing model output and combining friction coefficient and wear rate data; based on the design parameters, simulating and optimizing the coating preparation process through a process simulation model, so that the coating is firmly combined with the substrate; and finally, verifying the long-term wear performance of the coating through experiments to finish design verification. Compared with the prior art, through the systematic design process, the fretting wear resistance of the coating is remarkably improved, the problem that zirconium alloy parts are worn due to flow-induced vibration is effectively solved, the service life of the parts is prolonged, and the operation safety of a nuclear reactor is guaranteed.

A method to refurbish electrostatic chucks includes identifying one or more layers on a minimal contact area (MCA) pad affixed to an electrostatic chuck, configuring a laser ablation system to remove the identified layers, ablating the identified layers with a controlled laser beam from the laser ablation system, identifying one or more deposited metals on the electrostatic chuck, and ablating the identified deposited metals with the laser beam. In another aspect, the MCA pad may include a diamond like carbon layer and a Ti-TiN layer. The laser ablation process removes the layers and deposited metals on an electrostatic chuck in a manner that is performed faster, with a lower cost, and without the use of a multistep chemical process compared to conventional chemical stripping methods.

The utility model discloses a lithium battery cell pole piece slitting knife, and belongs to the technical field of lithium battery slitting. The lithium battery cell pole piece slitting knife comprises a blade body and a cutting edge structure, the annular cutting edge structure is arranged on the outer ring of the blade body, the surfaces of the blade body and the cutting edge structure are coated with diamond-like carbon coatings, the blade body and the cutting edge structure comprise a main cutting edge and an auxiliary sleeking edge, and the main cutting edge and the auxiliary sleeking edge are in transition connection through an arc. According to the lithium battery cell pole piece slitting knife, the stepped cutting edge design of the main cutting edge and the auxiliary sleeking edge is adopted, segmented cutting is achieved, burrs are reduced, the flatness of a notch is improved, adhesion of a battery cell pole piece material is avoided through the diamond-like carbon coating, it is ensured that the slitting edge is smooth, meanwhile, the miniature heat conduction pipe and the heat dissipation groove are combined for heat dissipation, and the service life of the lithium battery cell pole piece slitting knife is prolonged. Efficient heat dissipation is achieved for the cutting edge structure, convection is enhanced through the heat dissipation micropores, passivation of the cutting edge structure caused by thermal deformation is prevented, and friction heat is reduced through the abrasion-resistant protruding points.

A digital microfluidic (DMF) system based on an electrowetting-on-dielectric mechanism includes a substrate, and at least one dielectric layer comprising diamond-like carbon over the substrate. The DMF system also includes a plurality of electrodes connected to the dielectric layer. A voltage source is selectively couplable to different electrodes of the plurality of electrodes.

The utility model relates to the technical field of diffusion films, and discloses a scratch-resistant wear-resistant quantum dot diffusion film which comprises a protective layer, a transition layer is fixedly connected to the lower end of the protective layer, a diffusion composite layer is fixedly connected to the lower end of the transition layer, and a substrate layer is fixedly connected to the lower end of the diffusion composite layer. According to the utility model, the diamond-like carbon coating on the surface of the protective layer is used for providing protection for the surface of the membrane material and is matched with the substrate layer and the transition layer which are made of enhanced PET (Polyethylene Terephthalate) materials to provide certain absorption for the internal stress or external impact of the structure, so that the aim of providing stable protection for the subsequent use of the membrane material is fulfilled; the subsequent membrane material is prevented from being damaged due to external scraping or impact, so that the service life of the membrane material is prolonged, the subsequent maintenance cost is further reduced, and the overall practicability of the membrane material is improved.

The invention relates to the technical field of functional films, and discloses a composite functional film with high light transmission and UV (ultraviolet) filtering property, which sequentially comprises a base material layer, a bonding layer, a dual-mechanism UV filtering functional layer, a superhard layer and a surface functional layer from bottom to top, the bonding layer is a Cr or Ti layer; the dual-mechanism UV filtering functional layer comprises a disordered multilayer dielectric film and a plasma resonance enhanced absorption layer; the superhard layer is of a three-dimensional interpenetrating network structure formed by a diamond-like carbon phase and hexagonal boron nitride nanosheets; the surface functional layer is a photocatalytic surface functional layer, and the photocatalytic surface functional layer is a TiO2 / SiO2 composite material with a micro-nano hierarchical porous structure. The composite functional film provided by the invention realizes high UV barrier and high light transmission balance, improves the mechanical durability of the film body, and is applicable to multiple scenes.

The heating non-combustion cigarette smoking set comprises a shell cover, a smoking shell, a battery, a controller, a heating piece and a filter, the cross section of the shell cover and the cross section of the smoking shell are rectangular, a rectangular cavity is formed in the smoking shell, the smoking shell is connected with the shell cover at one end of the cavity, an air inlet communicated with the cavity is formed in the shell cover, and an air outlet communicated with the cavity is formed in the shell cover. A cavity is formed in one end of the smoking shell, an air outlet is formed in the other end of the cavity, a filter is installed in the cavity close to the air outlet, heating pieces are laid on the four walls in the cavity and connected with a battery fixed to the outer side of the smoking shell through connecting wires, the smoking shell is sequentially composed of a lining, a shell body and a coating from inside to outside, and the shell body is made of carbon fiber reinforced polyether-ether-ketone materials. The inner lining is embedded in the inner side of the shell and is made of a stainless steel material, the outer side of the shell is coated with the coating, the coating is a diamond-like carbon film, the hardness of the coating is 2000-3000 Hv, the heating piece is made of a graphene carbon nanotube three-dimensional structure composite material, and the heat conductivity coefficient of the heating piece is 25-30 W / mk.