4216results about "Spindle sealings" patented technology

Implementations described herein protect a chamber components from corrosive cleaning gases used at high temperatures. In one embodiment, a chamber component includes at least a bellows that includes a top mounting flange coupled to a bottom mounting flange by a tubular accordion structure. A coating is disposed on an exterior surface of at least the tubular accordion structure. The coating includes of at least one of polytetrafluoroethylene, parylene C, parylene D, diamond-like carbon (DLC), yttria stabilized zirconia, nickel, alumina, or aluminum silicon magnesium yttrium oxygen compound. In one embodiment, the chamber component is a valve having an internal bellows.

A valve assembly including a body having an inlet port, an outlet port, and a valve seat having a passageway. An electrical solenoid assembly moves a valve member upon being energized to control fluid flow between the inlet and the outlet ports. The valve assembly also includes a fluid-tight bellows positioned to apply a force to the valve member, and a pressure balancing passageway connects the inlet port to the bellows. The valve assembly further includes a housing received over the solenoid assembly and having a flange received against the valve body. A seal is positioned between the flange of the housing and the valve body, and a collar is secured in a continuous manner to the valve body over the housing flange, thereby securing the housing to the valve body and applying a sealing force to the seal in a substantially even manner.

Anti-pumping dispense valves, constructed according to principles of this invention, comprise a fluid transport housing having a fluid inlet passage extending into the housing, a fluid outlet passage extending out of the housing, and a fluid transport chamber disposed within the housing. The fluid transport chamber includes an valve seat. An actuator housing is attached to the fluid transport housing and includes an actuator chamber that is in contact with the fluid transport chambers. A diaphragm/poppet assembly is disposed within the fluid transport chamber and comprises a poppet positioned downstream of the seat for placement against the seat to stop fluid flow through the first fluid transport chamber. An actuator is disposed within the actuator chamber for moving the diaphragm/poppet assembly. Dispense valves of this invention operate to provide a slight vacuum within the fluid flow passageway in the valve to retain or pull back into the valve any nondispensed liquid, thereby eliminating and/or greatly reducing the possibility product contamination via unwanted excess liquid dispensement or dried residual liquid dispensement.

In an electromagnetic valve, a valve member is slidably installed in a housing to open and close a valve hole. A moving core is slidably installed in the housing, and a coil generates a magnetomotive force to attract the moving core to one side when it is energized. The valve shaft links a motion of the moving core with a motion of the valve member. A bellows surrounds the valve shaft to form a cylindrical inner space between the valve shaft and itself. The bellows is subjected to both positive and negative pressures to extend and shrink in accordance with the motions of the valve member and the moving core. An inner volume of the inner space increasing and decreasing in accordance with extending and shrinking operations of the cylindrical bellows portion. The opening of the bellows and the valve shaft form a narrow opening passage.

The control valve according to the present invention has a high durability, so that the valve is not easily damaged even in case that the valve is provided in a corrosion gas current path. The valve has a construction such that a diaphragm (4) is contained in the valve body (2), which has a valve chamber (23) between the gas current in path (25) and the gas current out path (26). The diaphragm 4 is urged against an opening (252) formed in the center of the valve seat 231 in the valve chamber (23) to open and close the opening. The valve has a valve control member (5), which has a clamping member (3) to clamp the diaphragm and is made to contact to the diaphragm from outside to open and close the opening. The diaphragm has an urging member (41) made of ceramic, which is fixed to the opening (252) side of the diaphragm so that the resistance to corrosion of the diaphragm is improved.

A dynamic sealing arrangement for preventing leakage of a fluid along a shaft includes multiple seals and pressurized barrier sealant. According to one aspect, at least three seals are arranged along the shaft with pressurized barrier sealant between the first and second seals and a collection area is provided between the second and third seals to collect any leakage that might occur. Collected leakage, if any, is ported to an output port. According to another aspect, a unitary seal block member is provided that supports the dynamic sealing arrangement for the shaft and defines a piston chamber and a drilled passageway connecting the piston chamber and barrier sealant pressurization chamber between two seals. A substantial amount of plumbing is self contained in a single body minimizing the need for additional components or complexity.

In an exhaust gas recirculation valve device, a sealing member 15 supported by a plug 15c is disposed between a portion of a housing 1 on an exhaust gas passage side of a bearing 8, and a valve shaft 7.

A tap attached to one end of a water pipe or a connecting pipe of a water dispenser, and controlling the flow of water or liquid by opening and closing an outlet by the operation of a handle actuated by the leverage, the tap including a body having a shaft with a compression spring, connected to a packing used for opening and closing the outlet, and a lid serving to support a support point when turning or, or off the tap; a push handle mounted on the upper portion of the body and having a shaft connecting boss coupled to the front end of the shaft, a downward rotation stopper, an upward rotation stopper, a push portion, and a race formed on its middle; and an auxiliary handle inserted into the race of the push handle and varying the support point of the push handle according to its two-stage operation, thus controlling the opening/closing of the packing with safety.

A manifold valve according to the present invention includes a main body (1) and actuators (2, 3) each having a valve body (46, 47). The main body is formed with at least one set of a main flow passage-side valve chamber (17) and a secondary flow passage-side valve chamber (19) which are in communication with each other through a connecting flow passage (11), a branched flow passage (9) communicating with the main flow passage-side valve chamber, a-main flow passage (6) communicating with the main flow passage-side valve chamber through a main flow passage-side communication port (13) opening at a center of a bottom of the main flow passage-side valve chamber, and a secondary flow passage (7) communicating with the secondary flow passage-side valve chamber through a secondary flow passage-side communication port (15) opening at a center of a bottom of the secondary flow passage-side valve chamber. The main flow passage-side communication port and the secondary flow passage-side communication port are opened and closed by valve bodies (46, 47) of the actuators, respectively. Further, the connecting flow passage and the branched flow passage are structured such that bottoms thereof are substantially flush with those of the main flow passage-side valve chamber and the secondary flow passage-side valve chamber.

A valve stem seal assembly includes a retainer and a sealing element disposed within the retainer. The retainer includes a step and one or more installation pads. The sealing element includes a first sealing lip for sealing a valve stem, and a second sealing lip for sealing a chamfer of a valve guide. The step of the retainer exerts a compression force, F, against the second sealing lip to seal the second sealing lip against the chamber of the valve guide. The one or more installation pads exerts a frictional force against the valve guide to prevent movement of said valve stem seal assembly. It is emphasized that this abstract is provided to comply with the rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims. 37 CFR 1.72(b).

An adjustment valve includes a first diaphragm integrally formed from an attachment section engaged with and fixed to the bottom of a rod, a joining section to which a valve body is fixed, a thin film section radially extending from a shoulder section, a thick wall section continuous with the thin film section, and a seal section provided at the peripheral edge of the thick wall section. The second diaphragm has a central hole, and includes an integrally formed thin film section radially extending from a thick wall section at the center hole, and a seal section is provided at the peripheral edge thereof. A diaphragm hold-down member penetrates the central hole at the shoulder section of the rod, causing the second diaphragm to be sandwiched and fixed. The rod is disposed with play in the through-hole in the bottom of the cylinder, and is supported by a spring engaged between a step section of the cylinder and the bottom surface of the shoulder in a state such that radial movement is prevented.

An object is to provide a flow control valve that is capable of reducing or eliminating backlash generated between a male threaded portion and a female threaded portion engaged with the male threaded portion and preventing or eliminating hysteresis in the flow level. The flow control valve includes a body having a fluid inlet and a fluid outlet, a cover attachable to the body, a motor disposed in a space defined by the body and the cover, a valving element connected to a rotary shaft of the motor with a screw member, and an urging member that urges the valving element toward the motor side or toward the side opposite to the motor.

A two piece valve stem seal assembly including first and second generally cylindrical shells, one of which is partially axially nested or inserted within the other. The valve stem seal assembly also includes an engagement portion on the one of the shells for grippingly engaging the outer shell in order to substantially prevent or at least minimize the possibility of axial separation of the shells during subsequent assembly into an engine or other valve-containing device. The assembly may also optionally include a discontinuity on the one of the shells for axially retaining or axially interlocking the shells in order to substantially prevent or at least minimize such possibility of axial separation.

A sanitary diaphragm valve is provided that includes a generally dome shaped diaphragm having a central boss that can be connected to or driven by a valve actuator. The diaphragm includes an outer peripheral edge and a relatively thin web portion that connects the boss to the outer edge. In one embodiment, the web portion is arcuate or dome shaped. The thinner web portion permits the diaphragm to have an extended cycle life and to permit the valve to operate at higher fluid pressures. The diaphragm may be made from a chemically resistant material and optimized to maintain high flexure.

A fluid control system with easy installation in a semiconductor production system etc. and pipe and wiring connections, with reduced pressure loss due to pipe connections, with easy change of arrangement of modules, free from corrosion even using a corrosive fluid for the fluid, and enabling control of the flow rate even with pulsation of the inflowing fluid is provided. The fluid control system of the present invention is characterized by having a flowmeter sensor part having an ultrasonic oscillator generating an ultrasonic wave in a fluid and an ultrasonic oscillator receiving the ultrasonic wave generated from the ultrasonic oscillator and outputting a signal to a flowmeter amplifier and a control valve controlling the state of flow of fluid to a predetermined state by a working pressure, wherein the flowmeter sensor part and the control valve are arranged inside a casing having a fluid inlet and a fluid outlet.

The invention discloses an electronic expansion valve, comprising a drive mechanism, a transmission mechanism, a valve seat and a valve needle component, wherein the valve needle component is provided with a valve needle axially moving along the valve cavity of the electronic expansion valve to control the openness of a valve opening, a valve rod, and an elastic component for reset. The electronic expansion valve is characterized by further comprising a limit structure arranged in the valve cavity and provided with an axial channel, and the valve needle component is provided with a transversal flange; and the limit structure is located above the flange in the case that the valve needle component moves upwards until the valve opening has the maximum openness, and the minimum radial dimension of the axial channel is less than the maximum radial dimension of the flange. The valve needle component of the electronic expansion valve cannot continue to move upwards due to the resisting of the limit structure in case of moving upwards to the position where the valve opening is the largest or slightly higher, and the valve needle component cannot greatly move upwards to compress the elastic component for reset in excess in case of coil detachment and replacement and in the other cases of needing to separate the valve needle component from other components above, thus prolonging the service life of the elastic component.