8245results about "Plug valves" patented technology

A substrate processing apparatus includes a processing vessel provided with a stage holding thereon a substrate to be processed and evacuated at an evacuation port, and a source gas supplying system that supplies plural source gases to the processing vessel separately in the form of a laminar flow, wherein the evacuation port has a slit-form shape extending in a direction generally intersecting perpendicularly to a direction of the laminar flow, the evacuation port is engaged with a valve having a valve body formed with a slit-form opening corresponding to the slit-form shape of the evacuation port, the slit-form opening being provided so as to cause a displacement with respect to the evacuation port in a direction generally intersecting perpendicularly to an extending direction of the evacuation port, the valve changing a degree of valve opening thereof via displacement of said slit-form opening.

Methods and apparatus for calibrating a plurality of gas flows in a substrate processing system are provided herein. In some embodiments, a substrate processing system may include a cluster tool comprising a first process chamber and a second process chamber coupled to a central vacuum transfer chamber; a first flow controller to provide a process gas to the first process chamber; a second flow controller to provide the process gas to the second process chamber; a mass flow verifier to verify a flow rate from each of the first and second flow controllers; a first conduit to selectively couple the first flow controller to the mass flow verifier; and a second conduit to selectively couple the second flow controller to the mass flow verifier.

An OLED display and touch screen system includes a substrate; an OLED display including an array of individually addressable OLEDs formed on the substrate; and a touch screen including an OLED laser light emitter formed on the substrate, a light sensor formed on the substrate across the display from the light emitter, and optics located around the display above the light emitter and the light sensor for directing light emitted from the OLED laser light emitter across the display to the light sensor.

This invention provides microfluidic devices that comprise a fluidics layer having microfluidic channels and one or more regulating layers that regulate the movement of fluid in the channels. The microfluidic devices can be used to mix one or more fluids. At least a portion of the fluidics layer can be isolated from the regulating layer, for example in the form of a shelf. Such isolated portions can be used as areas in which the temperature of liquids is controlled. Also provided are instruments including thermal control devices into which the microfluidic device is engaged so that the thermal control device controls temperature in the isolated portion, and a movable magnetic assembly including magnets with shields so that a focused magnetic field can be applied to or withdrawn from the isolated portion or any other portion of the microfluidic device. Also provided are methods of mixing fluids. The methods include stacking a plurality of alternating boluses of different liquids in a microfluidic channel, and moving the stacked boluses through the channel. In another method, the boluses are moved into a diaphragm valve having a volume able to accommodate several boluses, and then pumping the liquids out of the valve.

A subsea actuator and method is disclosed that includes a removable monolithic cap/hydraulic chamber that seals the actuator housing top with seals placed around the monolithic cap, defines a straight hydraulic line and port for control line hydraulic fluid, and provides for fasteners to secure the top of the subsea actuator. The monolithic cap/hydraulic chamber is so limited in metal and machine time that it can be a throw-away maintenance item. A preferably cup-shaped spring lifter is provided in telescoping relationship to the hydraulic chamber. Several short hydraulic fluid passageways are provided in the bottom cup portion of the spring lifter to permit assist hydraulic control fluid into the hydraulic chamber below the piston. The driving stem provides a removable connection to the hydraulic piston from the top of the actuator housing and a quick disconnect permits disconnection of the driving stem from the valve stem. The high tension spring does not need to be removed to perform maintenance, and all wear items and seals are readily accessible. Change or replacement of the stem packing is made from the top of the bonnet to avoid dissasembling the bonnet to valve body connection. The spring chamber within the actuator housing may be increased in size to accommodate a larger spring as necessary for fail-safe operation without changing the size of the hydraulic chamber. All sliding components ride on wear rings to increase the lifetime of reliable subsea operation. The moving components are mounted in a compact, concentric configuration.

The present invention relates to a sterile transfer device for fluids, be they liquids or gases. It is comprised of a body having a bore formed through at least a portion of its interior. Preferably, it is a central bore formed through the entire length of the body. Contained within the bore is a movable plunger. The body has a first and a second end. The first end contains a face designed to be attached to the upstream component. The second end is connected to a downstream component such as a filter, pipeline, sample bag and the like. The plunger has corresponding first and second ends. The first end of the plunger when it the closed position is in alignment with the face of the body which combined form a steamable surface and a sterile barrier against the environment to the rest of the interior of the body, the plunger and downstream components.

A microdevice is provided for controlling fluid flow. The microdevice includes a substantially planar contact surface and a plurality of fluid-transporting features associated therewith. Also included is a substrate having a substantially planar contact surface and a fluid-transporting feature associated therewith. The contact surfaces are positioned in slidable and fluid-tight contact to allow for controllable formation of a plurality of different flow paths upon alignment of the substrate fluid-transporting feature with each cover plate fluid-transporting features in succession. Typically, at least one of the cover plate and substrate is comprised of a biofouling resistant polymer, and the flow paths are of different lengths. Optionally, a plurality of fluid-transporting features is associated with the substrate so that flow paths are formed as a result of a different alignment of the fluid-transporting features.

An airflow control valve for a clean room having a duct section with a damper positioned within the duct. The damper being capable of an adjustment from an open position to a closed position. The opening and closing of the duct is accomplished through a magnetic coupling such that the duct can remain sealed during operation. The airflow control valve includes a sensor for measuring the airflow rate, so that the duct can be adjusted to maintain one or more predetermined flow rate set-points.

An integrated module for extracorporeal blood treatment has a flat-shaped support element which exhibits on an internal face thereof a complex of fluid distribution lines and on an external face thereof a high-flow dialyzer. The support element has a base body which exhibits fixture seatings, each of which houses an axially extended tract of a fluid distribution line. The tract of the fluid distribution line, with respect to adjacent tracts, has an increased diameter due to the presence of a junction collar made of a rigid material. Each fixture seating exhibits two axial locators for positioning the axially extended tract of a fluid distribution line in a fixed position. The locators interact with the junction collar, and the distribution lines can be fixed to the base body by a resilient fixture of the junction collars in the seatings without gluing. The module is configured to be mounted on an apparatus for intensive treatment of renal insufficiency.

Embodiments of the present invention relate to a method and apparatus for rapid delivery of pulses of one or more reactants to a substrate processing chamber. One embodiment of a valve body includes a first inlet, a second inlet, and an outlet. A valve chamber is in fluid communication with the first inlet, the second inlet, and the outlet. A valve seat is formed at least around the first inlet. The valve chamber further includes an annular groove formed around the valve seat coupling the second inlet and the outlet. One embodiment of a pneumatic valve assembly includes a valve body having at least two ports. A valve seat surrounds one of the ports. The pneumatic valve assembly further includes a diaphragm assembly having a diaphragm movable to open and close the one port. A piston housed in a cylinder is coupled to the diaphragm to actuate the diaphragm. An actuation chamber is formed between the cylinder and the piston. In certain embodiments, the internal volume of the actuation chamber is about 3.0 cm³ or less.