The invention discloses an electrically-driven composite valve with a back-suction effect in the field of
wafer cleaning, which comprises a
valve seat, a first valve and a second valve, the
valve seat is provided with a through flow channel, the first valve is located at the upstream of the flow channel and used for on-off control, the second valve is located at the downstream of the flow channel, and a cylindrical back-suction chamber is arranged at the flow channel position and used for back-
suction control. The core of the second valve is a
piston type valve element, and the second valve is driven by a driver to axially move in the cavity. According to the valve, traditional pneumatic drive is replaced with
electric drive, after the first valve is closed, the driver drives the
piston type valve element to move by the preset
stroke in the axial direction, the
effective volume of a cavity is increased, negative pressure is formed in a flow channel, liquid
medicine is sucked back, and back
suction control of the preset
stroke is achieved through axial movement of the
piston type valve element; stable execution of the
resorption action is ensured, and the problem of
pollution caused by dripping of liquid
medicine is effectively solved.