904 results about "Diaphragm valve" patented technology

A weir-type diaphragm valve operable to selectively enable liquid flow between two pipelines while directing a portion of the flowing liquid to an external pipeline. The valve comprising a valve body, comprising a diaphragm chamber with a concave weir having an upper surface with a bottom vertex, and an alarm port for enabling liquid communication between said diaphragm chamber and an exterior of the valve body to which the external pipeline is to be connected.

The utility model discloses a double-butterfly-valve sterile medicine transfer system, and relates to the technical field of pharmacy. Comprising a turnover medicine storage tank, a driving butterfly valve, a driven butterfly valve, a powder storage tank and a sterile liquid medicine storage bag, a discharging port of the turnover medicine storage tank is connected with the driving butterfly valve through a first connecting piece, and the driving butterfly valve is connected with the driven butterfly valve through a second connecting piece; the passive butterfly valve is connected with a feeding port of a powder storage tank through a third connecting piece, a first diaphragm valve is arranged at a discharging port of the powder storage tank, and the discharging port of the powder storage tank is connected with a sterile liquid medicine storage bag; by adopting the design of double butterfly valves, sterile connection is established between the turnover medicine storage tank and the powder storage tank, the reliability of hoop connection is high, the structure is simple, the operation complexity is low, the universality is high, the flexibility is high, and the cost is low.

The invention relates to the technical field of heat dissipation, in particular to a piezoelectric fan which comprises an air blowing assembly and a control assembly, the air blowing assembly comprises fan blades and piezoelectric elements arranged on the fan blades, and the piezoelectric elements are attached to the fan blades and used for driving the fan blades to swing in a reciprocating mode; the one-way valve module is attached to the air blowing assembly and comprises a thin film valve which is opened in a one-way mode in the direction away from the air blowing assembly; a groove is formed in the face, facing the thin film valve, of each fan blade. The grooves are formed in the sides, facing the thin film valve, of the fan blades, on one hand, the amplitude of the fan blades is increased, and therefore the air volume is increased, and on the other hand, the air volume and the air pressure are improved; and through the arrangement of the thin film valve which is opened in the one-way direction away from the blowing assembly, backflow can be effectively restrained, compared with the prior art, the flowing direction of airflow can be effectively controlled, the air outlet amount can be increased, the overall airflow output amount is increased, and therefore the heat dissipation efficiency of the piezoelectric fan is improved.

A diaphragm valve assembly includes a bonnet portion and a body portion affixed together through a clamp structure providing pressure to a perimeter seal through angled inside surface of the clamp and matching angled surfaces of the bonnet and body portions. While the clamp provides load on the perimeter seal, a second level of sealing may be accomplished through an O-ring seal between the bonnet portion and the body portion. An adapter structure may be used to affix conventional bonnet and body portions through a clamp. The adapter structure may be implemented in various forms. A weir of the body portion and a bead of the bonnet portion may be aligned through fold-over or extended tabs of the diaphragm and cushion.

The application relates to the technical field of diaphragm testing, in particular to a diaphragm valve diaphragm service life testing device which comprises a box body and further comprises a first pipeline, a second pipeline, a water pump, an intermediate pipeline, a first testing part and a control part, wherein: one end of the second pipeline is in communication with the upper end of the first pipeline, and the other end of the second pipeline is in communication with the intermediate pipeline; the water pump is connected in series on the second pipeline; the first testing part comprises a testing pipeline, one end of the testing pipeline is in communication with the intermediate pipeline, the other end of the testing pipeline is located in the interior of the box body, the testing pipeline is provided with an opening, a clamping piece is arranged on the periphery of the opening, the clamping piece is used for mounting a diaphragm, a circular ring is arranged on the periphery of the clamping piece, a water-sensitive sensor is arranged in the circular ring, a driving part is arranged above the testing pipeline, the driving part is drivingly connected with a tension sensor, and a connecting rod is arranged at the bottom of the tension sensor. The diaphragm deformation life and the diaphragm rupture life can be simultaneously detected, and the comprehensiveness of diaphragm detection is improved.

Disclosed is a corrosion-resistant diaphragm valve, including a valve cover, a thick film diaphragm sheet clamped and pressed jointly by the valve cover and a supporting block, and a valve seat above which the valve cover is coupled. A first lower opening of the valve cover is embedded with the supporting block to limit a movement space of a pneumatic piston member, and a second lower opening of the supporting block is embedded with a guided diaphragm pressing block, and the diaphragm pressing block is connected to one end of the pneumatic piston member. A straight sealing convex strip extending through a valve head is disposed at a bottom of the thick film diaphragm sheet. A curved runner C-shaped opening is formed in a curved runner structure which is bent upwards in a flattened curve; and the straight sealing convex strip is aligned with and pressed against an arc-shaped dam.

The utility model discloses an anti-loosening sealing diaphragm valve which comprises a valve body, a valve cover, an actuator, a valve cavity, a valve rod, a flow channel, a valve clack and a diaphragm. An inner shell is arranged in the valve cavity, an inner sliding block which is limited in the inner shell and slides in the horizontal direction is arranged in the inner shell, an embedded block is fixedly arranged at the left end of the inner sliding block, an embedded groove is formed in the right end of the valve rod, and when the flow channel is cut off by the valve clack, the embedded groove is just located on the left side of the embedded block. A driving spring for providing driving force for the embedded block to be embedded into the embedded groove is arranged in the inner shell; and an inclined guide contact surface is arranged on the embedded block. The utility model has the following advantages and effects: the inner sliding block can keep moving leftwards under the driving force of the driving spring, and then can push the embedded block to be embedded into the embedded groove of the valve rod, so as to lock the valve rod; longitudinal reciprocating offset of the valve rod is avoided, and the sealing performance of the valve clack is improved.

The invention discloses a low-pressure driven and rotatable pneumatic head diaphragm valve, and belongs to the technical field of diaphragm valves, the low-pressure driven and rotatable pneumatic head diaphragm valve comprises a pneumatic head rotatably mounted on a valve body base, the pneumatic head comprises a pneumatic head base, a pneumatic head body and a gland, a driving air source inlet is formed in the side face of the pneumatic head body, a plurality of pistons are arranged in a cavity of the pneumatic head, and a driving air source is arranged in the driving air source inlet. And elastic pieces are arranged between the gland and the pistons and between the pistons. According to the low-pressure-driven and rotatable pneumatic head diaphragm valve, the driving air source inlet is formed in the side face of the pneumatic head, the pneumatic head can rotate by 360 degrees on the valve body base, and the low-pressure-driven and rotatable pneumatic head diaphragm valve can adapt to various installation occasions for installation and is used for various working conditions; the multiple pistons are arranged in the pneumatic head, the elastic pieces are arranged between the pistons and the gland and between the pistons, when the pneumatic valve is opened, the pressure of the two sets of elastic pieces needs to be resisted at the same time, and therefore the force value of the elastic pieces is increased, the stacked pressure of the elastic pieces is balanced under the condition that the driving pressure is not changed, and valve abrasion is prevented.

The invention discloses a diaphragm valve flow test system and method, and the system comprises a first test assembly and a second test assembly, and a first pressure measurement port of the first test assembly and a second pressure measurement port of the second test assembly are respectively communicated with a to-be-tested valve; a first test pipeline communicated with the first test assembly is provided with a circulation path in a first direction; a second testing pipeline communicated with the second testing assembly is provided with a circulation path in the first direction. The upstream and downstream pressure values of the to-be-tested valve can be accurately detected through the first pressure gauge and the second pressure gauge, and the gas flow value is detected through the flow meter and substituted into a calculation formula to obtain an accurate flow coefficient value; the upstream first testing assembly and the downstream pressure measuring device are arranged at a specific distance according to the pipe diameter of the communicating pipeline, and the accuracy of the pressure value can be effectively ensured through the limitation of the pipe diameter and the distance; the actual temperature value of the fluid in the test system pipeline is monitored through the thermometer, and the influence of the temperature on the test result is effectively reduced.

The invention relates to a tire inflation and deflation system and a control method, the tire inflation and deflation system comprises a control valve assembly, the control valve assembly comprises a pilot air channel and a public air channel which are connected with an air source, the public air channel communicates with a first relay valve used for controlling inflation and deflation of tires at all wheel positions, and the pilot air channel is connected with a first electromagnetic valve used for controlling the first relay valve to act; the wheel end assembly comprises a rotary oil gas seal device communicated with the first relay valve and a wheel side valve assembly for communicating the rotary oil gas seal device with the tire, and the wheel side valve assembly comprises a normally-closed gas opening diaphragm valve and a self-return one-way throttle valve which are communicated with each other. The control valve assembly is used for communicating an air passage between the tire and the air source during inflation and deflation, so that compressed air of the air source can flow to the tire for inflation; during deflation, the air channel between the tire and the overflow valve is communicated, and the air of the tire is connected with the atmosphere to deflate the tire. And when the inflation and deflation actions are finished, the normally-closed air opening diaphragm valve and the self-return one-way throttle valve are quickly switched off, and the pressure of the tire is maintained.

The invention discloses an integrated dual-drive controlled diaphragm valve, which belongs to the technical field of diaphragm valves, and comprises a valve seat and a control head, the valve seat is in threaded connection with a valve seat cover, a connecting block is mounted in the valve seat cover, stepped holes are formed in the connecting block, a connecting block step is formed between the stepped holes, and a diaphragm pressing block is mounted in the stepped hole; the diaphragm pressing block can abut against the step of the connecting block for limiting, and the control head is detachably connected with the connecting block. According to the integrated dual-drive controlled diaphragm valve, the connecting block step is arranged in the connecting block, so that the diaphragm pressing block can abut against and be limited, and therefore, under the condition that the valve is opened, even if the control head is detached, the diaphragm pressing block cannot be separated from the diaphragm, the diaphragm cannot be excessively deformed and damaged, pipeline leakage is prevented, and the service life of the valve is prolonged. Therefore, the control head can be maintained with gas, the control mode can be replaced by replacing the control head on the basis that the valve is not disassembled, the valve replacement time and the pipeline exhaust time are saved, and the time and labor cost are reduced.

The utility model discloses a diaphragm valve which comprises a valve body, a cover body, a diaphragm, a driving assembly and a pressing block. A non-return piece is integrally arranged on the valve main body and extends upwards on the outer side of the neck part; a limiting bulge is arranged on the skirt part; wherein the non-return piece and / or the limiting protrusion are / is provided with a guide face facilitating movement of the cover body in the locking direction, and when the cover body is combined with the valve body and locked, the diaphragm abuts against the valve body. The limiting protrusion is connected to the non-return piece in a clamped mode so as to limit the cover body to move in the unlocking direction. The non-return piece and the valve main body are integrally arranged, the situation that the non-return piece and the valve main body are not installed in place, and therefore free reverse rotation of the cover body cannot be blocked is avoided, the non-return piece is arranged to be of an upward extending structure, the non-return piece is made to deform more easily, and when the cover body is rotated to enable the cover body and the valve main body to be locked or unlocked, the non-return piece is not prone to deformation. The non-return piece can deform towards the space between the non-return piece and the valve body, and the problem that the whole valve body is replaced due to the fact that the non-return piece is broken is avoided.

The invention relates to a diaphragm valve, and relates to the technical field of valves. The diaphragm valve comprises a valve body, a mounting cavity is formed in the valve body, and a piston assembly and an elastic piece for pushing the piston assembly to move in the mounting cavity are arranged in the mounting cavity; a fluid inlet channel and a fluid outlet channel are formed in the valve body. The fluid inlet channel is communicated with the fluid outlet channel; a diaphragm is arranged between the fluid inlet channel and the fluid outlet channel in the valve body; the piston assembly moves to push the diaphragm to deform so as to block communication between the fluid inlet channel and the fluid outlet channel. A limiting adjusting structure used for adjusting the reset position of the piston assembly is further arranged in the valve body. The CV value of the diaphragm valve can be conveniently and rapidly adjusted, the CV value can be changed according to the requirements of customers, and the requirements of the same product of the customers for different CV values are met.

A fluid-handling cassette comprising a plurality of diaphragm valves and pumps is configured to have its actuation ports located along a thin or narrow edge of the cassette. Actuation channels within the cassette lead from the actuation ports to actuation chambers of the valves and pumps in a space between plates that comprise the cassette. The individual plates have a nominal thickness that is sufficient to provide a rigid ceiling for the actuation channels, but sufficiently thin to minimize the overall thickness of the cassette. The cassette can be plugged into or unplugged from an actuation receptacle or a manifold by its narrow edge. A plurality of such cassettes can be stacked together or spaced apart from each other to form a cassette assembly, providing for a convenient way to install and remove the cassette assembly from its actuation receptacle. The arrangement allows for an improved way of connecting a complex cassette assembly to its associated pressure distribution manifold without the use of a plurality of flexible connecting tubes between the two.

The invention discloses a double-butterfly-valve sterile medicine transfer system and a sterile medicine transfer method, and relates to the technical field of pharmacy. The device comprises a turnover medicine storage tank, a driving butterfly valve, a driven butterfly valve, a powder storage tank and a sterile liquid medicine storage bag, a discharging port of the turnover medicine storage tank is connected with the driving butterfly valve through a first connecting piece, and the driving butterfly valve is connected with the driven butterfly valve through a second connecting piece; the passive butterfly valve is connected with a feeding port of a powder storage tank through a third connecting piece, a first diaphragm valve is arranged at a discharging port of the powder storage tank, and the discharging port of the powder storage tank is connected with a sterile liquid medicine storage bag; by adopting the design of double butterfly valves, sterile connection is established between the turnover medicine storage tank and the powder storage tank, the reliability of hoop connection is high, the structure is simple, the operation complexity is low, the universality is high, the flexibility is high, and the cost is low.

The utility model provides a dental treatment machine for pets, which comprises a mobile phone operating platform for performing dental treatment on the pets, the mobile phone operating platform comprises a plurality of hanger valves and a plurality of mobile phones which are matched with the hanger valves and controlled by the hanger valves, and the dental treatment machine for the pets further comprises a gas circuit and a water circuit, the hanger valve is communicated with the air channel and controls the opening and closing of the air channel; the mobile phone is communicated with the air path and the water path so as to realize air inlet and outlet and water inlet and outlet of the mobile phone; and the gas path and the water path are divided into multiple paths through the same multi-union diaphragm valve and are respectively communicated with the plurality of mobile phones. The water path and the air path are divided into multiple paths by utilizing the multi-connected diaphragm valve, so that the air path and the water path which are divided into multiple paths are respectively connected to a plurality of functional devices, especially a plurality of mobile phones, the control and the operation of the plurality of functional devices are realized, the whole system is very compact in structure and small in size, and the cost is also saved.

The invention discloses a simple leak detection method for a semiconductor device vacuum system, a semiconductor device is internally provided with a control system, and the vacuum system comprises a process gas pipeline, a vacuum cavity, an exhaust pipeline, a vacuum gauge, a pumping resistance valve, a vacuum pump, an MFC, a source bottle, a hand valve, a diaphragm valve, an ALD valve, an N2 pipeline and an O3 pipeline. And the control system is embedded with a logic control program and an algorithm for leak rate testing and performs control and data acquisition on each element of the vacuum system, and a leak rate testing result is displayed through a leak rate testing interface. The data of the vacuum gauge of the equipment is directly read through the control system, and the error of leak rate calculation is reduced.

The utility model discloses a plastic pneumatic diaphragm valve which comprises an upper cover, a lower shell and a valve body, and the lower shell is fixedly arranged on the valve body and fixedly connected with the upper cover through a first clamping assembly. Axial limiting can be achieved through relative rotation during assembly, on one hand, overall assembly of the device is facilitated, spring elasticity borne by the piston can be overcome during assembly and disassembly of the device and the piston, the risk that the upper cover bounces open is avoided, and when a flow channel of the valve body is controlled to be opened and closed, the indicator can adjust the relative position to the upper cover along with movement of the piston, and the safety of the device is improved. And the working condition of the diaphragm piece can be judged by observing the length of the indicator extending out of the upper cover, so that an operator can more accurately and intuitively control the opening and closing states of the valve body.

The utility model relates to a feed liquid atomization device, and belongs to the technical field of cigarette manufacturing. The device comprises a cold compressed air heating steel pipe spirally wound on a steam pipeline, a glass fiber thermal insulation material, a thermal insulation cover shell, a pneumatic diaphragm valve, a PLC (Programmable Logic Controller), a temperature sensor, a cold compressed air supply device and a double-medium nozzle, an inlet of the cold compressed air heating steel pipe is communicated with a cold compressed air supply device, an outlet of the cold compressed air heating steel pipe is communicated with the double-medium nozzle pre-filled with feed liquid through a hot compressed air circulation pipeline, and a compressed air stop valve is arranged on the hot compressed air circulation pipeline; the heat preservation cover shell completely wraps the cold air heating steel pipe, the space between the heat preservation cover shell and the cold air heating steel pipe is filled with glass fiber heat preservation materials, and an inlet of the cold air heating steel pipe and an outlet of the cold air heating steel pipe both extend out of the heat preservation cover shell. The accuracy of the total feeding proportion can be ensured.

The tempering technology comprises the following steps of preparation before the technology, diaphragm tempering, discharging and inspection, tempering equipment comprises a tempering furnace body, a rotary clamping mechanism is arranged on the inner side of the tempering furnace body and comprises a rotary assembly and a clamping assembly, the rotary assembly comprises a first supporting plate, and the clamping assembly comprises a second supporting plate; a plurality of limiting discs are fixedly installed on the first supporting plate in a circumferential array mode, a driving disc is rotationally connected to the bottoms of the limiting discs, a plurality of hanging bases are arranged between the limiting discs and the driving disc in a circumferential array mode at equal intervals in a rolling mode, hanging columns are fixedly connected to the bottoms of the hanging bases, and a plurality of sets of hanging plates are arranged on the hanging columns in a circumferential array mode; according to the design, by rotating the clamping mechanism, it is guaranteed that intervals exist between the diaphragms, the position of the clamping mechanism in the tempering furnace body can be adjusted to a great extent, a static thermal boundary layer is broken through, the diaphragms can be evenly heated and cooled, and the defect that residual stress is not evenly distributed is overcome.

The utility model relates to a storage tank vacuum flush valve which comprises a connecting base, a vacuum pipe is arranged on the connecting base, the bottom end of the vacuum pipe extends into a water storage tank, a vacuum valve body is arranged on the vacuum pipe, a diaphragm valve connecting seat is arranged in the vacuum valve body, and the interior of the vacuum valve body is divided into an air inlet cavity and a vacuum cavity through the diaphragm valve connecting seat. An air suction pipe is arranged on the outer side wall of the vacuum valve body, one end of the air suction pipe is communicated with the interior of the vacuum cavity, a vacuum pump is arranged at the other end of the air suction pipe, a vacuum diaphragm valve is arranged on the diaphragm valve connecting seat, and accumulation and release of water resources in the storage tank in the vacuum pipe are achieved through the vacuum pump. In the quick release process, sludge at the bottom of the reservoir is flushed. The device has the effect of reducing water resource loss.

The invention relates to the technical field of diaphragm valves, in particular to a valve adjusting mechanism and a diaphragm valve based on the valve adjusting mechanism, the valve adjusting mechanism is installed on the diaphragm valve and comprises a rack, an adjusting device and a driving mechanism, and a positioning piece and a linear driving assembly used for controlling the positioning piece to ascend and descend are movably arranged in the rack; an executing part connected with the diaphragm is arranged in the rack, the adjusting device comprises a coarse adjusting assembly and a fine adjusting assembly, the coarse adjusting assembly and the fine adjusting assembly are both used for controlling the executing part to move, the driving mechanism comprises a rotary driving assembly and a connecting assembly, and the rotary driving assembly is connected with the coarse adjusting assembly and the fine adjusting assembly through the connecting assembly. According to the diaphragm valve, the function of rapidly and accurately adjusting lifting of the executing part is achieved, the executing part drives the diaphragm to be opened and closed, then the flow of the diaphragm valve is accurately adjusted, and the problem that the adjusting precision of an existing diaphragm valve cannot meet the use requirement is solved.

A diaphragm valve for an ultra-pure pipeline comprises a valve deck, an upper valve body and a lower valve body, the upper valve body and the lower valve body are fixedly connected through a bolt, a valve rod, a valve clack, a medium inlet channel and a medium outlet channel are arranged in the lower valve body, a mounting channel is formed in the lower valve body, a plurality of positioning guide grooves which are vertically formed at intervals are formed in the inner wall of the mounting channel, and the positioning guide grooves are communicated with the valve deck. The outer wall of the valve cover is provided with a positioning guide block matched with the positioning guide groove, the bottom of the installation channel extends to be provided with a limiting check ring, the bottom of the valve clack is connected with a cushion membrane piece and a diaphragm piece, the periphery of the cushion membrane piece and the periphery of the diaphragm piece extend to the position between the limiting check ring and the valve cover, and the valve cover is provided with a limiting step. The upper valve body is fixedly connected with the lower valve body in a threaded mode and then abuts against the limiting step, so that the valve deck is fixedly installed in the installation channel, and sealing connection is formed.

The invention relates to a diaphragm for a diaphragm valve. The diaphragm has a functional region and a fastening portion, which surrounds the functional region. In a relaxed state, the functional region includes a central portion, which protrudes on a wet side of the diaphragm; —a lateral portion, which protrudes on a dry side of the diaphragm, the lateral portion being curved, at least in parts, toward the dry side of the diaphragm; and an intermediate portion, which is arranged between the central portion and the lateral portion and is curved, at least in parts, toward the wet side of the diaphragm.

A pneumatic diaphragm valve service life testing device comprises an air source and a control valve connected with the air source, the control valve is divided into two paths, one path is a control air path, and the other path is a testing air path. The test gas circuit is used for connecting at least one diaphragm valve group, valve bodies of tested pneumatic diaphragm valves in the diaphragm valve group are sequentially connected in series, and the tail end of the valve body of the tested pneumatic diaphragm valve located at the last position is plugged by a plug. The control air path is provided with an electromagnetic valve controlled by the PLC, and an air outlet of the electromagnetic valve is used for being connected with a pneumatic switch air inlet of each tested pneumatic diaphragm valve in the diaphragm valve group. The testing device can test the service life of the pneumatic diaphragm valve in batches, and the testing efficiency is high.

The invention provides a self-adaptive load fluctuation hydrogen production system control method and related equipment, and the method comprises the steps: obtaining the output current of a hydrogen production power supply and the internal and external pressure difference of a hydrogen-oxygen separator in real time, calculating the load change rate of an electrolytic cell according to the output current, and when the load change rate of the electrolytic cell is greater than or equal to a preset threshold value, calculating the load change rate of the electrolytic cell according to the output current; a time delay compensation factor is introduced to calculate the first opening degree of the hydrogen-oxygen side pneumatic diaphragm valve, and feedforward control is conducted on the hydrogen-oxygen side pneumatic diaphragm valve through an executing mechanism so that the hydrogen-oxygen side pneumatic diaphragm valve can meet the first opening degree; otherwise, the pressure difference and the load ratio of the electrolytic cell serve as input of the fuzzy controller, the second opening degree of the hydrogen-oxygen side pneumatic diaphragm valve is calculated according to output of the fuzzy controller, and fuzzy PID control is conducted on the hydrogen-oxygen side pneumatic diaphragm valve through the executing mechanism so that the hydrogen-oxygen side pneumatic diaphragm valve can meet the second opening degree. The control precision of the hydrogen production system can be improved, and stable operation of the hydrogen production system is guaranteed.

The invention discloses a diaphragm valve, and relates to the field of valves, a valve seat defines a first flow channel and a second flow channel, the second flow channel is provided with a first inlet, and the first inlet is communicated with the first flow channel; the diaphragm is arranged on the valve seat and corresponds to the first inlet; the first magnetic part is arranged on the valve seat, the second magnetic part is arranged on the diaphragm, the first magnetic part and the second magnetic part are correspondingly arranged, and magnetic force can be generated between the first magnetic part and the second magnetic part to drive the diaphragm so as to adjust the opening degree of the first inlet. Therefore, the diaphragm corresponds to the first inlet, the first magnetic part is arranged on the valve seat, and the second magnetic part is arranged on the diaphragm, so that the diaphragm can be driven to act through magnetic force generated between the first magnetic part and the second magnetic part, and the opening degree of the first inlet is adjusted; therefore, the diaphragm valve can respond quickly, the pressure and the flow of fluid in the diaphragm valve can be adjusted, the use reliability of the diaphragm valve can be improved, the diaphragm valve is simple in structure, and the production cost and the maintenance cost of the diaphragm valve can be reduced.

The invention discloses a fluid pipeline system diaphragm valve fault self-adaptive identification method, relates to the technical field of diaphragm valves, and solves the problems that signal characteristics are not subjected to fine analysis and are easily interfered by fluctuation of normal working conditions. The method comprises the following steps: acquiring a to-be-determined wave band, comparing the to-be-determined wave band with a preset standard waveform, identifying a to-be-verified amplitude associated with a corresponding processing process based on a corresponding movement comparison processing process, carrying out abnormity determination on a diaphragm valve based on a specific numerical value of the to-be-verified amplitude, and confirming an abnormal diaphragm valve. The specific accuracy of amplitude verification in the subsequent movement process is facilitated, the abnormal influence caused by signal fluctuation can be effectively reduced, and the specific accuracy in the valve abnormality determination process is improved.

The invention relates to the field of fluid control devices in semiconductor liquid paths, and provides a precise control on-off valve for a semiconductor liquid path and an assembling method thereof, and the precise control on-off valve comprises a valve seat, a cylinder assembly combined on the valve seat, a diaphragm valve plate accommodated in the valve seat, and an adjusting wheel arranged on an upper cover of the cylinder. The air cylinder assembly comprises an air cylinder upper cover and an air cylinder body which are connected through a rotary lock catch structure, and a piston assembly and a limiting rod set are assembled in the air cylinder assembly. And the diaphragm valve plate is driven by the cylinder assembly to seal or separate from the valve port of the valve seat. The adjusting wheel is connected with the limiting rod set and used for adjusting lifting of the limiting lead screw, and then the maximum upward moving position of the piston assembly and the opening degree of the valve are precisely limited. The valve breaks through the bottleneck that a traditional mechanical valve is prone to abrasion and leakage, achieves the effect of precise fine adjustment of flow, and meanwhile greatly improves the flow stability of long-term operation and the clean safety of an ultra-pure fluid system.

The invention relates to the field of diaphragm valve control mechanisms, in particular to a valve actuator and a using method thereof.The valve actuator comprises a valve body and a valve deck fixed to the top of the valve body and further comprises an actuator mechanism, and the actuator mechanism comprises a lower cylinder cover, a cylinder body and an upper cylinder cover which are vertically communicated in sequence; a piston rod penetrating out of the valve deck downwards is arranged in the middle of the upper cylinder cover in a penetrating mode, and the cylinder body is divided into an upper air chamber and a lower air chamber by a piston disc outside the piston rod. The rotatable sliding ring is arranged to be communicated with the upper air pipe connector and the lower air pipe connector, two-degree-of-freedom flexible adjustment of the circumferential position and the rotation direction of the air pipe connector is achieved, and the problem of installation adaptation caused by the fact that the position of an existing actuator air pipe connector is fixed is solved; the sliding ring is unlocked by squeezing the two sets of elastic pieces to be close to the supporting ring, the air pipe connector is driven to adjust the circumferential distribution position so as to adapt to different circumferential layouts of external air path connectors, and operation is convenient and fast.