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276results about "Fixed microstructural devices" patented technology

Method for producing a nanochannel

A method for producing a nanochannel (200) is described with the following steps a) depositing a nanochannel sacrificial layer (3) using an ALD process on a substrate (1), which defines the subsequent channel height at least at one point b) depositing a first covering layer (4) on the nanochannel sacrificial layer (3) c) At least partially structuring and / or etching the nanochannel sacrificial layer (3) and the first cover layer (4) so ​​that a first exposed region (10) is formed d) At least partial etching of the now exposed nanochannel sacrificial layer (3) with an etching rate < 100nm / min, preferably <10nm / min, and particularly preferably <5nm / min and even more preferably <2nm / min, so that an under-etched second exposed region (20) is formed which defines the channel width e) depositing a second cover layer (5) onto the first cover layer (4) and the first exposed region (10) so that the second exposed region (20) is sealed and forms a nanochannel (200).
Owner:ROBERT BOSCH GMBH

Microneedle mold manufacturing method, microneedle manufacturing method, microneedle mold and microneedle

The invention provides a microneedle mold manufacturing method, a microneedle manufacturing method, a microneedle mold and a microneedle, relates to the technical field of microneedles, and can improve the manufacturing efficiency of the microneedle mold. The method comprises the following steps: providing a glass substrate, wherein the surface of the glass substrate is provided with at least one target area; a laser beam is used for modifying the target area in the thickness direction of the glass substrate, so that an inverted-cone-shaped modified area is formed on the glass substrate; the modified area is subjected to etching treatment through etching liquid to form an inverted-cone-shaped hole, the microneedle mold is obtained, and the microneedle mold is used for manufacturing a microneedle.
Owner:GLASSMICRO (CHONGQING) SEMICONDUCTOR TECHNOLOGY CO LTD

Method for manufacturing a micromirror element and micro-electro-mechanical system

The invention relates to a method for producing at least one micromirror element (200) as it can be used in micro-electro-mechanical systems (100), in particular for use in semiconductor technology equipment (1), and to a micro-electro-mechanical system (100) comprising corresponding micromirror elements (200). The process includes the following steps: - Providing a flat, two-sided mirror substrate (210); - Incorporating a predetermined shape at least on the side (215) of the provided mirror substrate (210) intended to be reflective; and - Applying a reflective coating (220) at least to the side (215) of the provided mirror substrate (210) intended to be reflective.
Owner:CARL ZEISS SMT GMBH

Inertial pumps

The present disclosure is drawn to inertial pumps. An inertial pump can include a microfluidic channel, a fluid actuator located in the microfluidic channel, and a check valve located in the microfluidic channel. The check valve can include a moveable valve element, a narrowed channel segment located upstream of the moveable valve element, and a blocking element formed in the microfluidic channel downstream of the moveable valve element. The narrowed channel segment can have a width less than a width of the moveable valve element so that the moveable valve element can block fluid flow through the check valve when the moveable valve element is positioned in the narrowed channel segment. The blocking element can be configured such that the blocking element constrains the moveable valve element within the check valve while also allowing fluid flow when the moveable valve element is positioned against the blocking element.
Owner:HEWLETT PACKARD DEVELOPMENT COMPANY LP

Antirelaxation Coatings for Vapor Cells

In a general aspect, antirelaxation coatings are disclosed for coating the interior surfaces of vapor cells. In certain aspects, a vapor cell includes a dielectric body having interior and exterior surfaces. The interior surface defines a cavity in the dielectric body, and the exterior surface defines an opening to the cavity. The vapor cell also includes an antirelaxation coating that is disposed on the interior surface of the dielectric body and includes an organosilane material. The vapor cell additionally includes a vapor or a source of vapor residing in the cavity as well as an optical window that covers the opening to the cavity. The optical window has a surface bonded to the exterior surface of the dielectric body to form a seal around the opening. The vapor or the source of vapor includes alkali metal atoms.
Owner:QUANTUM VALLEY IDEAS LAB

Packaging front plate and preparation method thereof, and photovoltaic module

The invention provides a packaging front plate, a preparation method thereof and a photovoltaic module. The packaging front plate comprises a body which is of a transparent structure; the radiation cooling layer is arranged on the surface of one side of the body, the radiation cooling layer has light transmittance, and the face, away from the body, of the radiation cooling layer is provided with a lotus leaf surface imitating micro-nano structure. The radiation cooling layer can radiate heat to the external space, so that the working temperature of the photovoltaic module is effectively reduced, the photoelectric conversion efficiency can be improved, the photovoltaic module can be prevented from running at a high temperature, and the service life of the photovoltaic module can be prolonged; furthermore, a micro-nano structure imitating the lotus leaf surface is designed on the radiation cooling layer, attachment of water drops or dirt on the surface of the radiation cooling layer can be reduced, and therefore the surface of the radiation cooling layer is kept clean and dry, the problem that the power generation efficiency is reduced due to pollution can be avoided, the cleaning frequency can be reduced, and the power generation efficiency is improved. And therefore, the maintenance cost can be reduced.
Owner:SHENZHEN HELLO TECH ENERGY CO LTD

A microfluidic device to dispense a metabolic indicator

In accordance with the present disclosure, an example non-transitory computer readable medium may store instructions that when executed cause a computing device to dispense, using a first fluid ejector of a microfluidic device, a biologic sample to a region of a substrate, dispense, using a second fluid ejector of the microfluidic device, a reagent to the region of the substrate, and dispense, using a third fluid ejector of the microfluidic device, a metabolic indicator to the region of the substrate, wherein the metabolic indicator provides a visual indication in response to reaction with the biologic sample.
Owner:HEWLETT PACKARD DEVELOPMENT COMPANY LP

Sample liquid concentration device, sample liquid analysis auxiliary device, method for producing same, and sample liquid concentration method

In order to increase the efficiency with which an analysis using an enhanced electric field based on a microstructure is made, an embodiment of the present disclosure provides a plate-shaped sample liquid concentration device (10) that is to be used being placed over a microstructure substrate which has disposed on the surface thereof a microstructure capable of generating an enhanced electric field with respect to incident light. The sample liquid concentration device includes a first surface and a second surface that defines a thickness together with the first surface, and has formed therein a plurality of passage parts connecting the first surface and the second surface. The passage parts each have a first opening and a second opening formed respectively in the first surface and the second surface and are each defined by an inner surface connecting the first opening and the second opening. With the first surface disposed in proximity to the surface of the microstructure substrate, the first opening can be positioned corresponding to the position of the microstructure. The second opening can receive a sample liquid that contains a detection target object.
Owner:RIKEN CO LTD

A microfluidic biointerconnected neural network chip and its preparation method

The present invention discloses a microfluidic bio-interconnected neural network chip and a preparation method thereof. The chip consists of a microelectrode array, a microfluidic structure, and a cell culture ring structure. The microelectrode array can detect and stimulate the activity of neurons; the microfluidic structure limits the growth direction of axons between cell culture partitions by setting cell culture partitions, microfluidic channel dimensions, microfluidic channel shapes, and fillet distribution, thereby achieving controllable low-power transmission of neuronal electrical information; the cell culture ring structure provides nutrients for cells in the cell culture chamber. The present invention provides a method for manufacturing a microfluidic bio-interconnected neural network chip, using fully exposed positive photoresist as a sacrificial layer for microfluidic structure peeling, thereby solving the problem of difficult demolding of thin-film microfluidic structures. The chip can be used to explore the response characteristics of neuronal networks to external stimuli, study the internal information transmission mode of neuronal networks, and other fields.
Owner:AEROSPACE INFORMATION RES INST CAS

Semiconductor element and method for manufacturing this

Procedure (100; 300), comprising: Providing (110) a machined substrate arrangement (10; 70) comprising a machined semiconductor substrate (12) and a metallization layer structure (14) on a major surface (16) of the machined semiconductor substrate (12), and Release etching (120) from an area of ​​the metallization layer structure (14) towards the processed semiconductor substrate (12) to create a cut (22) in the metallization layer structure (14) at a separation region (25) in the processed semiconductor substrate (12), wherein the separation region (25) defines a boundary between a die region (27; 34a-b) of the processed substrate arrangement (10; 70) and at least a second region of the processed substrate arrangement (10; 70); where the release etching (120) further includes: Exposure of a MEMS functional element (18) arranged on the machined semiconductor substrate (12), wherein the MEMS functional element is a MEMS sensor and / or comprises a silicon material.
Owner:INFINEON TECHNOLOGIES AG

Forming Antirelaxation Coatings on Interior Surfaces of Vapor Cells

In a general aspect, methods for manufacturing vapor cells are disclosed. In certain aspects, a method of manufacturing a vapor cell includes obtaining a dielectric body that has interior and exterior surfaces. The interior surface defines a cavity in the dielectric body, and the exterior surface defines an opening to the cavity. The method includes forming an antirelaxation coating on the interior surface of the dielectric body. The antirelaxation coating comprising an organosilane material. The method additionally includes disposing a vapor or a source of vapor in the cavity and obtaining an optical window that comprises a surface. The vapor or the source of vapor includes alkali metal atoms. The method also includes bonding the surface of the optical window to the exterior surface of the dielectric body to form a seal around the opening to the cavity.
Owner:QUANTUM VALLEY IDEAS LAB

Microfluidic chip and method for manufacturing a microfluidic chip

To provide a micro flow channel chip capable of removing air bubbles generated inside a micro flow channel, while preventing elution of an adhesive component into the flow channel to suppress a reaction inhibition of a solution inside the flow channel, and also to provide a manufacturing method thereof.SOLUTION: A micro flow channel chip 1 includes: a substrate 10; a partition layer 11 forming a flow channel on the substrate 10; and a top cover layer 12 formed on a surface at a side opposite to the substrate 10 of the partition layer 11 and configured to be served as a lid of a flow channel part 3. The top cover layer 12 includes an air bubble removal part 7 being part of the top cover layer 12 and configured to remove air bubbles generated in the flow channel part 3. No adhesive layer is formed between the partition layer 11 and the top cover layer 12.SELECTED DRAWING: Figure 1
Owner:TOPPAN HOLDINGS INC

Isotachophoresis for purification of nucleic acids

The present disclosure relates to fluidic systems and devices for processing, extracting, or purifying one or more analytes. These systems and devices can be used for processing samples and extracting nucleic acids, for example by isotachophoresis. In particular, the systems and related methods can allow for extraction of nucleic acids, including non-crosslinked nucleic acids, from samples such as tissue or cells. The systems and devices can also be used for multiplex parallel sample processing.
Owner:PURIGEN BIOSYSTEMS INC

Fluid chip and cell encapsulation system

The present invention relates to a fluid tip (1) comprising a body (2), a main inlet (5), and at least one secondary inlet (6) not coaxial with the main inlet (5), wherein each main inlet (5) and secondary inlet (6) is intended to receive a substance and an outlet (7), the main inlet (5) is connected to the outlet (7) by a main channel (8) having a substantially straight portion defining the central axis Z of the fluid tip (1), and the secondary inlet is also connected to the outlet (7) by a secondary channel (9). According to the present invention, the secondary channel (9) is divided into at least two secondary ducts (11) of the same size that merge with the main channel (8) into a circular injection duct that is evenly distributed around the central axis Z.
Owner:TREEFROG THERAPEUTICS

Vibration plate composite body

(Task) Provision of a composite body of a vibratory plate consisting of a high-strength ceramic and a support substrate, wherein the composite body has the structure to maintain the strength of the vibratory plate and to prevent peeling and cracking of the vibratory plate. (Solution) A vibratory plate composite body 5 comprises a silicon support substrate 3, a vibratory plate 1A made of a high-strength ceramic with a thickness of 100 µm or less, and a bonding layer 2 between the support substrate 3 and the vibratory plate 1A, which contacts a bonding surface 1a of the vibratory plate 1A and is made of α-Si. The arithmetic mean roughness Ra of the bonding surface 1a of the vibratory plate 1A is 0.01 nm or more and 10.0 nm or less, and the pit density of the bonding surface 1a of the vibratory plate 1A is 10 counts or more per 100 µm. 2 .
Owner:NGK INSULATORS LTD

Preparation method and application of silicon nanopore array

The invention discloses a preparation method and application of a silicon nanopore array, and relates to the field of nanopore array manufacturing. The method comprises the following steps: taking an AAO film as a nano template, and transferring the AAO film to the surface of a silicon substrate; depositing a silver nanoparticle array on the AAO thin film to form large-area ordered silver nanoparticle arrangement; and removing the AAO thin film to obtain a silver nanoparticle array on the silicon substrate, immersing the silicon substrate containing silver nanoparticles into an etching solution for reaction, and forming the silicon nanopore array by taking the silver nanoparticles as a metal catalyst. Compared with the prior art, the method has the advantages that the geometrical shape of the nanopore can be accurately controlled, and the method has the characteristics of low cost, high adaptability and repeatability and is suitable for large-scale production to meet diversified requirements in different fields.
Owner:GUANGDONG UNIV OF TECH

Top notch slit profile for MEMS device

Various embodiments of the present disclosure are directed towards a microelectromechanical systems (MEMS) device in which a slit at a movable mass of the MEMS device has a top notch slit profile. The MEMS device may, for example, be a speaker, an actuator, or the like. The slit extends through the movable mass, from top to bottom, and has a width that is uniform, or substantially uniform, from the bottom of the movable mass to proximate the top of movable mass. Further, in accordance with the top notch slit profile, top corner portions of the MEMS substrate in the slit are notched, such that a width of the slit bulges at the top of the movable mass. The top notch slit profile may, for example, increase the process window for removing an adhesive from the slit while forming the MEMS device.
Owner:TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD

Sample analysis cartridge and method for manufacturing the same

To provide a specimen analysis cartridge and the like with increased liquid leakage durability.SOLUTION: A specimen analysis cartridge includes a first substrate having a microfluidic channel formed on at least one surface thereof, a second substrate arranged opposite the surface on which the microfluidic channel is formed on the first substrate, and a photocurable resin layer by which the first substrate and the second substrate are bonded together. The first and second substrates include at least one of a cyclo-olefin polymer and a cyclo-olefin copolymer.SELECTED DRAWING: Figure 1
Owner:SYSMEX CORP +2

Nerve cell culture chip

Providing a nerve cell culture chip that can increase the probability that neurites grown from cultured nerve cells are introduced into a microchannel. A nerve cell culture chip comprises: a bottom plate, a main body part firmly in contact with an upper surface of the bottom plate, a first recess and a second recess formed at positions spaced apart in a first direction parallel to a main surface of the main body part to penetrate the main body part and expose the bottom plate, a microchannel connecting the first recess to the second recess in the first direction in a region overlapping the main body part in a second direction orthogonal to the main surface of the main body part, and a first groove formed in a part of a bottom part of the first recess and connected to an end portion of the microchannel in the first direction.
Owner:ZEON CORP

Absorbing gas species from a cavity of a vapor cell

In a general aspect, gettering elements are disclosed for absorbing gas species from a cavity of a vapor cell. In certain aspects, a vapor cell includes a dielectric body having interior and exterior surfaces. The interior surface defines a cavity in the dielectric body, and the exterior surface defines an opening to the cavity. The dielectric body also includes a channel having a porous layer that is configured to absorb a gas species from the cavity. The vapor cell also includes a vapor or a source of vapor residing in the cavity as well as an optical window that covers the opening to the cavity. The optical window has a surface bonded to the exterior surface of the dielectric body to form a bonded interface of the vapor cell. The bonded interface includes a seal around the opening, and the vapor or the source of vapor includes alkali metal atoms.
Owner:QUANTUM VALLEY IDEAS LAB

Flow channel chip and method for manufacturing a flow channel chip

In a channel chip that enables fluid measurement and analysis by forming a channel on a substrate and introducing a fluid into the channel, the present invention provides a channel chip that prevents fluid branching due to residual fluid in the channel, even when the fluid is continuously reciprocating. [Solution] A flow channel chip having a fluid flow path formed therein, the flow channel chip having a connecting passage formed to extend in the vertical direction, wherein the cross-sectional area of ​​the lower end of the connecting passage is formed to be larger than the cross-sectional area of ​​other parts of the connecting passage.
Owner:SEIKOH GIKEN

Nanotube array manufacturing method, nanotube array and device

The present invention provides a nanotube array manufacturing method, a nanotube array, and a device, the method comprising the steps of: manufacturing a bilayer two-dimensional material having a relative include angle of lattice orientation on a substrate as a template; determining a chiral parameter of the nanotubes to be manufactured corresponding to the relative include angle of the lattice orientation of the bilayer two-dimensional material; determining a nanoribbon orientation and nanoribbon width based on the determined chiral parameter; determining a pitch between nanoribbons based on the density and nanoribbon width of the nanotubes to be manufactured; etching the bilayer two-dimensional material based on the determined nanoribbon orientation, nanoribbon width, and pitch between nanoribbons to obtain a nanoribbon array of the bilayer two-dimensional material; and thermally exciting the obtained nanotube array made of the bilayer two-dimensional material to obtain a nanotube array. The present invention can manufacture a nanotube array with controllable density, orientation, and chirality.
Owner:ZHEJIANG UNIV +1