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320results about "Fixed microstructural devices" patented technology
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Flexible palladium film hydrogen sensor and preparation method thereof
PendingCN120594608ASemi-permeable membranesVolume/mass flow by thermal effectsThin membraneConfined space
The invention provides a flexible palladium film hydrogen sensor and a preparation method thereof, the flexible palladium film hydrogen sensor is sequentially provided with a flexible substrate, a hydrogen sensitive sensing layer and a contact connection layer from bottom to top, and the contact connection layer is connected with a resistance measurement unit; and the hydrogen-sensitive sensing layer is a palladium or palladium alloy film with a conical micro-nano structure. The palladium or palladium alloy thin film with the conical micro-nano structure provides a hydrogen sensor conical surface micro-nano structure with a high specific surface area for the flexible palladium thin film hydrogen sensor, and the process that hydrogen is adsorbed, dissolved and diffused into the palladium or palladium alloy thin film is accelerated, so that the response speed of the sensor is increased; according to the hydrogen sensor, the flexible substrate is adopted, so that the hydrogen sensor can be conveniently arranged in various narrow spaces, and the applicability of the hydrogen sensor in various scenes is improved.
Owner:STATE GRID ANHUI ELECTRIC POWER CO LTD ELECTRIC POWER SCI RES INST +1
Device and method for continuously generating liquid drops
ActiveCN120571655ATelevision system detailsVolume/mass flow by thermal effectsMechanical engineeringLiquid drop
The invention provides a liquid drop continuous generation device which comprises a first flow channel and a second flow channel, the first flow channel and the second flow channel comprise first positions which are tightly attached to each other, and each first position comprises a through hole communicating with the first flow channel and the second flow channel; the first flow channel and the second flow channel are used for introducing a first liquid and a second liquid respectively; the special ultrasonic device can act on the first liquid in the first flow channel, when the special ultrasonic device is driven in a first power period, an acoustic beam current facing the through hole is generated in the first liquid, the acoustic beam current enters the second liquid through the through hole, and liquid drops formed by the first liquid are formed in the second liquid. The invention also correspondingly provides a method for continuously generating liquid drops. The liquid drop generation mode is more flexible, the controllability is higher, and the cost is lower.
Owner:CONVERGENCY (TIANJIN) BIOTECH LTD
Heterogenous socket contact for electrical and mechanical performance scaling in a microelectronic package
A microelectronic socket structure and a method of forming the same. The socket structure comprises: a socket structure housing defining a cavity therein; and an interconnection structure including: a contact element disposed at least in part within the cavity, and configured to be electrically coupled to a corresponding microelectronic package, the contact element corresponding to one of a signal contact element or a ground contact element; and a conductive structure disposed at least in part within the cavity, electrically coupled to the contact element, and having an outer contour that is non-conformal with respect to an outer contour of the contact element.
Owner:INTEL CORP
Method for producing a nanochannel
PendingDE102024203436A1Volume/mass flow by thermal effectsFixed microstructural devicesChannel widthNanotechnology
A method for producing a nanochannel (200) is described with the following steps a) depositing a nanochannel sacrificial layer (3) using an ALD process on a substrate (1), which defines the subsequent channel height at least at one point b) depositing a first covering layer (4) on the nanochannel sacrificial layer (3) c) At least partially structuring and / or etching the nanochannel sacrificial layer (3) and the first cover layer (4) so that a first exposed region (10) is formed d) At least partial etching of the now exposed nanochannel sacrificial layer (3) with an etching rate < 100nm / min, preferably <10nm / min, and particularly preferably <5nm / min and even more preferably <2nm / min, so that an under-etched second exposed region (20) is formed which defines the channel width e) depositing a second cover layer (5) onto the first cover layer (4) and the first exposed region (10) so that the second exposed region (20) is sealed and forms a nanochannel (200).
Owner:ROBERT BOSCH GMBH
Microneedle mold manufacturing method, microneedle manufacturing method, microneedle mold and microneedle
PendingCN121225885ASemi-permeable membranesVolume/mass flow by thermal effectsEngineeringLaser beams
The invention provides a microneedle mold manufacturing method, a microneedle manufacturing method, a microneedle mold and a microneedle, relates to the technical field of microneedles, and can improve the manufacturing efficiency of the microneedle mold. The method comprises the following steps: providing a glass substrate, wherein the surface of the glass substrate is provided with at least one target area; a laser beam is used for modifying the target area in the thickness direction of the glass substrate, so that an inverted-cone-shaped modified area is formed on the glass substrate; the modified area is subjected to etching treatment through etching liquid to form an inverted-cone-shaped hole, the microneedle mold is obtained, and the microneedle mold is used for manufacturing a microneedle.
Owner:GLASSMICRO (CHONGQING) SEMICONDUCTOR TECHNOLOGY CO LTD
Method for manufacturing a micromirror element and micro-electro-mechanical system
PendingDE102024207651A1MirrorsVolume/mass flow by thermal effectsMicro electrical mechanical systemsMechanical engineering
The invention relates to a method for producing at least one micromirror element (200) as it can be used in micro-electro-mechanical systems (100), in particular for use in semiconductor technology equipment (1), and to a micro-electro-mechanical system (100) comprising corresponding micromirror elements (200). The process includes the following steps: - Providing a flat, two-sided mirror substrate (210); - Incorporating a predetermined shape at least on the side (215) of the provided mirror substrate (210) intended to be reflective; and - Applying a reflective coating (220) at least to the side (215) of the provided mirror substrate (210) intended to be reflective.
Owner:CARL ZEISS SMT GMBH
Inertial pumps
ActiveUS12480532B2Volume/mass flow by thermal effectsFixed microstructural devicesActuatorCheck valve
The present disclosure is drawn to inertial pumps. An inertial pump can include a microfluidic channel, a fluid actuator located in the microfluidic channel, and a check valve located in the microfluidic channel. The check valve can include a moveable valve element, a narrowed channel segment located upstream of the moveable valve element, and a blocking element formed in the microfluidic channel downstream of the moveable valve element. The narrowed channel segment can have a width less than a width of the moveable valve element so that the moveable valve element can block fluid flow through the check valve when the moveable valve element is positioned in the narrowed channel segment. The blocking element can be configured such that the blocking element constrains the moveable valve element within the check valve while also allowing fluid flow when the moveable valve element is positioned against the blocking element.
Owner:HEWLETT PACKARD DEVELOPMENT COMPANY LP
Antirelaxation Coatings for Vapor Cells
PendingUS20260100716A1Pulse automatic controlApparatus using atomic clocksEngineeringMaterials science
In a general aspect, antirelaxation coatings are disclosed for coating the interior surfaces of vapor cells. In certain aspects, a vapor cell includes a dielectric body having interior and exterior surfaces. The interior surface defines a cavity in the dielectric body, and the exterior surface defines an opening to the cavity. The vapor cell also includes an antirelaxation coating that is disposed on the interior surface of the dielectric body and includes an organosilane material. The vapor cell additionally includes a vapor or a source of vapor residing in the cavity as well as an optical window that covers the opening to the cavity. The optical window has a surface bonded to the exterior surface of the dielectric body to form a seal around the opening. The vapor or the source of vapor includes alkali metal atoms.
Owner:QUANTUM VALLEY IDEAS LAB
Packaging front plate and preparation method thereof, and photovoltaic module
PendingCN121772414ASemi-permeable membranesVolume/mass flow by thermal effectsNano structuringEngineering
The invention provides a packaging front plate, a preparation method thereof and a photovoltaic module. The packaging front plate comprises a body which is of a transparent structure; the radiation cooling layer is arranged on the surface of one side of the body, the radiation cooling layer has light transmittance, and the face, away from the body, of the radiation cooling layer is provided with a lotus leaf surface imitating micro-nano structure. The radiation cooling layer can radiate heat to the external space, so that the working temperature of the photovoltaic module is effectively reduced, the photoelectric conversion efficiency can be improved, the photovoltaic module can be prevented from running at a high temperature, and the service life of the photovoltaic module can be prolonged; furthermore, a micro-nano structure imitating the lotus leaf surface is designed on the radiation cooling layer, attachment of water drops or dirt on the surface of the radiation cooling layer can be reduced, and therefore the surface of the radiation cooling layer is kept clean and dry, the problem that the power generation efficiency is reduced due to pollution can be avoided, the cleaning frequency can be reduced, and the power generation efficiency is improved. And therefore, the maintenance cost can be reduced.
Owner:SHENZHEN HELLO TECH ENERGY CO LTD
A microfluidic device to dispense a metabolic indicator
In accordance with the present disclosure, an example non-transitory computer readable medium may store instructions that when executed cause a computing device to dispense, using a first fluid ejector of a microfluidic device, a biologic sample to a region of a substrate, dispense, using a second fluid ejector of the microfluidic device, a reagent to the region of the substrate, and dispense, using a third fluid ejector of the microfluidic device, a metabolic indicator to the region of the substrate, wherein the metabolic indicator provides a visual indication in response to reaction with the biologic sample.
Owner:HEWLETT PACKARD DEVELOPMENT COMPANY LP
Film forming apparatus and film forming method
Owner:ビージーアイ ハンチョウ サイクロンエスイーキュー テクノロジー カンパニー リミテッド
Sample liquid concentration device, sample liquid analysis auxiliary device, method for producing same, and sample liquid concentration method
PCT designated stageWO2025258353A1Volume/mass flow by thermal effectsFixed microstructural devicesMaterials scienceElectric field
In order to increase the efficiency with which an analysis using an enhanced electric field based on a microstructure is made, an embodiment of the present disclosure provides a plate-shaped sample liquid concentration device (10) that is to be used being placed over a microstructure substrate which has disposed on the surface thereof a microstructure capable of generating an enhanced electric field with respect to incident light. The sample liquid concentration device includes a first surface and a second surface that defines a thickness together with the first surface, and has formed therein a plurality of passage parts connecting the first surface and the second surface. The passage parts each have a first opening and a second opening formed respectively in the first surface and the second surface and are each defined by an inner surface connecting the first opening and the second opening. With the first surface disposed in proximity to the surface of the microstructure substrate, the first opening can be positioned corresponding to the position of the microstructure. The second opening can receive a sample liquid that contains a detection target object.
Owner:RIKEN CO LTD
Mixing device for microchannel and microchannel device
Owner:TOYOHASHI UNIVERSITY OF TECHNOLOGY
A microfluidic biointerconnected neural network chip and its preparation method
ActiveCN118222398BVolume/mass flow by thermal effectsFixed microstructural devicesPhotoresistNeural network nn
The present invention discloses a microfluidic bio-interconnected neural network chip and a preparation method thereof. The chip consists of a microelectrode array, a microfluidic structure, and a cell culture ring structure. The microelectrode array can detect and stimulate the activity of neurons; the microfluidic structure limits the growth direction of axons between cell culture partitions by setting cell culture partitions, microfluidic channel dimensions, microfluidic channel shapes, and fillet distribution, thereby achieving controllable low-power transmission of neuronal electrical information; the cell culture ring structure provides nutrients for cells in the cell culture chamber. The present invention provides a method for manufacturing a microfluidic bio-interconnected neural network chip, using fully exposed positive photoresist as a sacrificial layer for microfluidic structure peeling, thereby solving the problem of difficult demolding of thin-film microfluidic structures. The chip can be used to explore the response characteristics of neuronal networks to external stimuli, study the internal information transmission mode of neuronal networks, and other fields.
Owner:AEROSPACE INFORMATION RES INST CAS
Semiconductor element and method for manufacturing this
ActiveDE102015203393B4Television system detailsFixed microstructural devicesMems sensorsCondensed matter physics
Procedure (100; 300), comprising: Providing (110) a machined substrate arrangement (10; 70) comprising a machined semiconductor substrate (12) and a metallization layer structure (14) on a major surface (16) of the machined semiconductor substrate (12), and Release etching (120) from an area of the metallization layer structure (14) towards the processed semiconductor substrate (12) to create a cut (22) in the metallization layer structure (14) at a separation region (25) in the processed semiconductor substrate (12), wherein the separation region (25) defines a boundary between a die region (27; 34a-b) of the processed substrate arrangement (10; 70) and at least a second region of the processed substrate arrangement (10; 70); where the release etching (120) further includes: Exposure of a MEMS functional element (18) arranged on the machined semiconductor substrate (12), wherein the MEMS functional element is a MEMS sensor and / or comprises a silicon material.
Owner:INFINEON TECHNOLOGIES AG
Forming Antirelaxation Coatings on Interior Surfaces of Vapor Cells
PendingUS20260099125A1Apparatus using atomic clocksVolume/mass flow by thermal effectsAlkali metalDielectric body
In a general aspect, methods for manufacturing vapor cells are disclosed. In certain aspects, a method of manufacturing a vapor cell includes obtaining a dielectric body that has interior and exterior surfaces. The interior surface defines a cavity in the dielectric body, and the exterior surface defines an opening to the cavity. The method includes forming an antirelaxation coating on the interior surface of the dielectric body. The antirelaxation coating comprising an organosilane material. The method additionally includes disposing a vapor or a source of vapor in the cavity and obtaining an optical window that comprises a surface. The vapor or the source of vapor includes alkali metal atoms. The method also includes bonding the surface of the optical window to the exterior surface of the dielectric body to form a seal around the opening to the cavity.
Owner:QUANTUM VALLEY IDEAS LAB
Microfluidic chip and method for manufacturing a microfluidic chip
To provide a micro flow channel chip capable of removing air bubbles generated inside a micro flow channel, while preventing elution of an adhesive component into the flow channel to suppress a reaction inhibition of a solution inside the flow channel, and also to provide a manufacturing method thereof.SOLUTION: A micro flow channel chip 1 includes: a substrate 10; a partition layer 11 forming a flow channel on the substrate 10; and a top cover layer 12 formed on a surface at a side opposite to the substrate 10 of the partition layer 11 and configured to be served as a lid of a flow channel part 3. The top cover layer 12 includes an air bubble removal part 7 being part of the top cover layer 12 and configured to remove air bubbles generated in the flow channel part 3. No adhesive layer is formed between the partition layer 11 and the top cover layer 12.SELECTED DRAWING: Figure 1
Owner:TOPPAN HOLDINGS INC
Fluid element, package, drug delivery device, biomolecular testing device, and method for forming a fluid channel.
PendingJP2026516548ASemi-permeable membranesVolume/mass flow by thermal effectsPharmacy medicinePharmaceutical drug
Owner:OKINAWA INST OF SCI & TECH SCHOOL
Microfluidic device and preparation method therefor, and microfluidic system
A microfluidic device and a preparation method therefor, and a microfluidic system. The preparation method comprises: S1, providing a mold having a groove; S2, injecting a liquid metal into the groove, and solidifying the liquid metal to obtain a solid metal; S3, separating the solid metal from the mold, and providing an electrode on the solid metal; S4, forming a coating layer on a surface of the solid metal having the electrode, so that the solid metal is wrapped in the coating layer, and the electrode at least partially protruding out of the coating layer, so as to obtain a prefabricated device; and S5, placing the prefabricated device in a substrate, melting the solid metal and making the electrode at least partially protrude out of the substrate, so as to obtain a microfluidic device (a). The preparation method is simple, the packaging has good performance, the device is highly integrated and is easy for industrialization, the microfluidic device obtained by means of this preparation method is good in molding, excellent in performance, can be widely used, and can be integrated with a power supply, a signal transmitter and a signal receiver to form a microfluidic system.
Owner:INST OF FLEXIBLE ELECTRONICS TECH OF THU ZHEJIANG +1
Microchip for analyzing liquid sample
A microchip for liquid sample analysis having a flow path and a liquid reservoir therein, comprising: a substrate having a bonding surface provided with a groove forming the flow path, a depression provided in a part of the groove and serving as a liquid reservoir storing a liquid, and a wall part provided between the groove and the depression to block the outflow of the liquid from the liquid reservoir to the flow path; and a film bonded to the bonding surface of the substrate, covering the groove to form the flow path and the liquid reservoir, wherein among the bonded areas of the substrate and the film, the bonded portion between an end face of the wall part of the substrate and the film has a first bonding strength such that it peels off upon application of pressure of 30 kPa or more and less than 100 kPa, and the other bonded areas have a bonding strength stronger than the first bonding strength.
Owner:ZACROS CORP
Microfluidic chip
To provide a micro flow channel chip which causes less air bubbles and has less residual air bubbles during liquid feeding to a flow channel groove and storage after the liquid feeding.SOLUTION: A micro flow channel chip comprises: a resin substrate having a flow channel groove formed in at least one surface; and a resin film having a base material layer and an adhesive layer, and joined to the resin substrate via the adhesive layer so as to cover the flow channel groove. When a thickness of the base material layer of the resin film is represented by X(μm) and a thickness of the adhesive layer is represented by Y(μm), X and Y satisfy all of relational expression (1): Y≥0.4X-25, relational expression (2): 50≥Y≥3 and relational expression (3): X≥40.SELECTED DRAWING: Figure 1
Owner:SUMITOMO BAKELITE CO LTD
Isotachophoresis for purification of nucleic acids
ActiveUS12428635B2Volume/mass flow by thermal effectsFixed microstructural devicesMultiplexIsotachophoresis
The present disclosure relates to fluidic systems and devices for processing, extracting, or purifying one or more analytes. These systems and devices can be used for processing samples and extracting nucleic acids, for example by isotachophoresis. In particular, the systems and related methods can allow for extraction of nucleic acids, including non-crosslinked nucleic acids, from samples such as tissue or cells. The systems and devices can also be used for multiplex parallel sample processing.
Owner:PURIGEN BIOSYSTEMS INC
Fluid chip and cell encapsulation system
The present invention relates to a fluid tip (1) comprising a body (2), a main inlet (5), and at least one secondary inlet (6) not coaxial with the main inlet (5), wherein each main inlet (5) and secondary inlet (6) is intended to receive a substance and an outlet (7), the main inlet (5) is connected to the outlet (7) by a main channel (8) having a substantially straight portion defining the central axis Z of the fluid tip (1), and the secondary inlet is also connected to the outlet (7) by a secondary channel (9). According to the present invention, the secondary channel (9) is divided into at least two secondary ducts (11) of the same size that merge with the main channel (8) into a circular injection duct that is evenly distributed around the central axis Z.
Owner:TREEFROG THERAPEUTICS
A preparation method of a double-layer microstructure array and a multi-primary color LED packaging structure
ActiveCN118738237BSemi-permeable membranesVolume/mass flow by thermal effectsEngineeringPolymer thin films
The present invention discloses a method for preparing a double-layer microstructure array. This method uses microdroplets formed by active cooling as a template for imprinting the microstructure array. A double-layer polymer film is used as a sacrificial layer, and the droplet array is introduced through active cooling. The upper and lower double-layer polymer films are introduced, and the microstructures are imprinted on the upper and lower surfaces of the second polymer film simultaneously, thereby achieving a double-layer microstructure array with controllable morphology on both surfaces of the second polymer film. The present invention also discloses a multi-primary color LED package structure, comprising a package substrate, several LED chips of different primary colors, a die-bonding layer, leads, a primary optical lens, a reflective layer, and a polymer film with a double-layer microstructure array. Compared to traditional package structures, the double-layer microstructure array can effectively mix and scatter light of different colors. Its application in multi-primary color LED packages significantly improves the spatial color uniformity (ACU) of the light source.
Owner:NANCHANG UNIV +2
Microfluidic devices
Owner:PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO LTD
Vibration plate composite body
ActiveDE112020001781B4Semi-permeable membranesVolume/mass flow by thermal effectsUltimate tensile strengthMechanical engineering
(Task) Provision of a composite body of a vibratory plate consisting of a high-strength ceramic and a support substrate, wherein the composite body has the structure to maintain the strength of the vibratory plate and to prevent peeling and cracking of the vibratory plate. (Solution) A vibratory plate composite body 5 comprises a silicon support substrate 3, a vibratory plate 1A made of a high-strength ceramic with a thickness of 100 µm or less, and a bonding layer 2 between the support substrate 3 and the vibratory plate 1A, which contacts a bonding surface 1a of the vibratory plate 1A and is made of α-Si. The arithmetic mean roughness Ra of the bonding surface 1a of the vibratory plate 1A is 0.01 nm or more and 10.0 nm or less, and the pit density of the bonding surface 1a of the vibratory plate 1A is 10 counts or more per 100 µm. 2 .
Owner:NGK INSULATORS LTD
Preparation method and application of silicon nanopore array
PendingCN120964715ASemi-permeable membranesVolume/mass flow by thermal effectsPtru catalystThin membrane
The invention discloses a preparation method and application of a silicon nanopore array, and relates to the field of nanopore array manufacturing. The method comprises the following steps: taking an AAO film as a nano template, and transferring the AAO film to the surface of a silicon substrate; depositing a silver nanoparticle array on the AAO thin film to form large-area ordered silver nanoparticle arrangement; and removing the AAO thin film to obtain a silver nanoparticle array on the silicon substrate, immersing the silicon substrate containing silver nanoparticles into an etching solution for reaction, and forming the silicon nanopore array by taking the silver nanoparticles as a metal catalyst. Compared with the prior art, the method has the advantages that the geometrical shape of the nanopore can be accurately controlled, and the method has the characteristics of low cost, high adaptability and repeatability and is suitable for large-scale production to meet diversified requirements in different fields.
Owner:GUANGDONG UNIV OF TECH
Top notch slit profile for MEMS device
PendingUS20250317694A1Fixed microstructural devicesDecorative surface effectsAdhesiveMicroelectromechanical systems
Various embodiments of the present disclosure are directed towards a microelectromechanical systems (MEMS) device in which a slit at a movable mass of the MEMS device has a top notch slit profile. The MEMS device may, for example, be a speaker, an actuator, or the like. The slit extends through the movable mass, from top to bottom, and has a width that is uniform, or substantially uniform, from the bottom of the movable mass to proximate the top of movable mass. Further, in accordance with the top notch slit profile, top corner portions of the MEMS substrate in the slit are notched, such that a width of the slit bulges at the top of the movable mass. The top notch slit profile may, for example, increase the process window for removing an adhesive from the slit while forming the MEMS device.
Owner:TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
Sample analysis cartridge and method for manufacturing the same
ActiveJP7873983B2Volume/mass flow by thermal effectsFixed microstructural devicesStructural engineeringMechanical engineering
To provide a specimen analysis cartridge and the like with increased liquid leakage durability.SOLUTION: A specimen analysis cartridge includes a first substrate having a microfluidic channel formed on at least one surface thereof, a second substrate arranged opposite the surface on which the microfluidic channel is formed on the first substrate, and a photocurable resin layer by which the first substrate and the second substrate are bonded together. The first and second substrates include at least one of a cyclo-olefin polymer and a cyclo-olefin copolymer.SELECTED DRAWING: Figure 1
Owner:SYSMEX CORP +2
Uniform flow dividing device and fluid system
A uniform flow distribution device including a single substrate provided having flow channels connecting one inlet and a plurality of outlets. The flow channels include a flow distribution section configured to distribute a liquid introduced into the inlet of the substrate into a plurality of branch flow channels that connect to the outlets, and a flow resistance section that is located downstream of the flow distribution section and configured to provide flow resistance to each of the branch flow channels.
Owner:IMT TAIWAN CO LTD +1