159results about "Fixed microstructural devices" patented technology

The invention relates to a method for producing at least one micromirror element (200) as it can be used in micro-electro-mechanical systems (100), in particular for use in semiconductor technology equipment (1), and to a micro-electro-mechanical system (100) comprising corresponding micromirror elements (200). The process includes the following steps: - Providing a flat, two-sided mirror substrate (210); - Incorporating a predetermined shape at least on the side (215) of the provided mirror substrate (210) intended to be reflective; and - Applying a reflective coating (220) at least to the side (215) of the provided mirror substrate (210) intended to be reflective.

In a general aspect, antirelaxation coatings are disclosed for coating the interior surfaces of vapor cells. In certain aspects, a vapor cell includes a dielectric body having interior and exterior surfaces. The interior surface defines a cavity in the dielectric body, and the exterior surface defines an opening to the cavity. The vapor cell also includes an antirelaxation coating that is disposed on the interior surface of the dielectric body and includes an organosilane material. The vapor cell additionally includes a vapor or a source of vapor residing in the cavity as well as an optical window that covers the opening to the cavity. The optical window has a surface bonded to the exterior surface of the dielectric body to form a seal around the opening. The vapor or the source of vapor includes alkali metal atoms.

The invention provides a packaging front plate, a preparation method thereof and a photovoltaic module. The packaging front plate comprises a body which is of a transparent structure; the radiation cooling layer is arranged on the surface of one side of the body, the radiation cooling layer has light transmittance, and the face, away from the body, of the radiation cooling layer is provided with a lotus leaf surface imitating micro-nano structure. The radiation cooling layer can radiate heat to the external space, so that the working temperature of the photovoltaic module is effectively reduced, the photoelectric conversion efficiency can be improved, the photovoltaic module can be prevented from running at a high temperature, and the service life of the photovoltaic module can be prolonged; furthermore, a micro-nano structure imitating the lotus leaf surface is designed on the radiation cooling layer, attachment of water drops or dirt on the surface of the radiation cooling layer can be reduced, and therefore the surface of the radiation cooling layer is kept clean and dry, the problem that the power generation efficiency is reduced due to pollution can be avoided, the cleaning frequency can be reduced, and the power generation efficiency is improved. And therefore, the maintenance cost can be reduced.

Procedure (100; 300), comprising: Providing (110) a machined substrate arrangement (10; 70) comprising a machined semiconductor substrate (12) and a metallization layer structure (14) on a major surface (16) of the machined semiconductor substrate (12), and Release etching (120) from an area of ​​the metallization layer structure (14) towards the processed semiconductor substrate (12) to create a cut (22) in the metallization layer structure (14) at a separation region (25) in the processed semiconductor substrate (12), wherein the separation region (25) defines a boundary between a die region (27; 34a-b) of the processed substrate arrangement (10; 70) and at least a second region of the processed substrate arrangement (10; 70); where the release etching (120) further includes: Exposure of a MEMS functional element (18) arranged on the machined semiconductor substrate (12), wherein the MEMS functional element is a MEMS sensor and / or comprises a silicon material.

In a general aspect, methods for manufacturing vapor cells are disclosed. In certain aspects, a method of manufacturing a vapor cell includes obtaining a dielectric body that has interior and exterior surfaces. The interior surface defines a cavity in the dielectric body, and the exterior surface defines an opening to the cavity. The method includes forming an antirelaxation coating on the interior surface of the dielectric body. The antirelaxation coating comprising an organosilane material. The method additionally includes disposing a vapor or a source of vapor in the cavity and obtaining an optical window that comprises a surface. The vapor or the source of vapor includes alkali metal atoms. The method also includes bonding the surface of the optical window to the exterior surface of the dielectric body to form a seal around the opening to the cavity.

To provide a micro flow channel chip capable of removing air bubbles generated inside a micro flow channel, while preventing elution of an adhesive component into the flow channel to suppress a reaction inhibition of a solution inside the flow channel, and also to provide a manufacturing method thereof.SOLUTION: A micro flow channel chip 1 includes: a substrate 10; a partition layer 11 forming a flow channel on the substrate 10; and a top cover layer 12 formed on a surface at a side opposite to the substrate 10 of the partition layer 11 and configured to be served as a lid of a flow channel part 3. The top cover layer 12 includes an air bubble removal part 7 being part of the top cover layer 12 and configured to remove air bubbles generated in the flow channel part 3. No adhesive layer is formed between the partition layer 11 and the top cover layer 12.SELECTED DRAWING: Figure 1

A microchip for liquid sample analysis having a flow path and a liquid reservoir therein, comprising: a substrate having a bonding surface provided with a groove forming the flow path, a depression provided in a part of the groove and serving as a liquid reservoir storing a liquid, and a wall part provided between the groove and the depression to block the outflow of the liquid from the liquid reservoir to the flow path; and a film bonded to the bonding surface of the substrate, covering the groove to form the flow path and the liquid reservoir, wherein among the bonded areas of the substrate and the film, the bonded portion between an end face of the wall part of the substrate and the film has a first bonding strength such that it peels off upon application of pressure of 30 kPa or more and less than 100 kPa, and the other bonded areas have a bonding strength stronger than the first bonding strength.

The present invention relates to a fluid tip (1) comprising a body (2), a main inlet (5), and at least one secondary inlet (6) not coaxial with the main inlet (5), wherein each main inlet (5) and secondary inlet (6) is intended to receive a substance and an outlet (7), the main inlet (5) is connected to the outlet (7) by a main channel (8) having a substantially straight portion defining the central axis Z of the fluid tip (1), and the secondary inlet is also connected to the outlet (7) by a secondary channel (9). According to the present invention, the secondary channel (9) is divided into at least two secondary ducts (11) of the same size that merge with the main channel (8) into a circular injection duct that is evenly distributed around the central axis Z.

(Task) Provision of a composite body of a vibratory plate consisting of a high-strength ceramic and a support substrate, wherein the composite body has the structure to maintain the strength of the vibratory plate and to prevent peeling and cracking of the vibratory plate. (Solution) A vibratory plate composite body 5 comprises a silicon support substrate 3, a vibratory plate 1A made of a high-strength ceramic with a thickness of 100 µm or less, and a bonding layer 2 between the support substrate 3 and the vibratory plate 1A, which contacts a bonding surface 1a of the vibratory plate 1A and is made of α-Si. The arithmetic mean roughness Ra of the bonding surface 1a of the vibratory plate 1A is 0.01 nm or more and 10.0 nm or less, and the pit density of the bonding surface 1a of the vibratory plate 1A is 10 counts or more per 100 µm. 2 .

To provide a specimen analysis cartridge and the like with increased liquid leakage durability.SOLUTION: A specimen analysis cartridge includes a first substrate having a microfluidic channel formed on at least one surface thereof, a second substrate arranged opposite the surface on which the microfluidic channel is formed on the first substrate, and a photocurable resin layer by which the first substrate and the second substrate are bonded together. The first and second substrates include at least one of a cyclo-olefin polymer and a cyclo-olefin copolymer.SELECTED DRAWING: Figure 1

A uniform flow distribution device including a single substrate provided having flow channels connecting one inlet and a plurality of outlets. The flow channels include a flow distribution section configured to distribute a liquid introduced into the inlet of the substrate into a plurality of branch flow channels that connect to the outlets, and a flow resistance section that is located downstream of the flow distribution section and configured to provide flow resistance to each of the branch flow channels.

In a general aspect, gettering elements are disclosed for absorbing gas species from a cavity of a vapor cell. In certain aspects, a vapor cell includes a dielectric body having interior and exterior surfaces. The interior surface defines a cavity in the dielectric body, and the exterior surface defines an opening to the cavity. The dielectric body also includes a channel having a porous layer that is configured to absorb a gas species from the cavity. The vapor cell also includes a vapor or a source of vapor residing in the cavity as well as an optical window that covers the opening to the cavity. The optical window has a surface bonded to the exterior surface of the dielectric body to form a bonded interface of the vapor cell. The bonded interface includes a seal around the opening, and the vapor or the source of vapor includes alkali metal atoms.

In a channel chip that enables fluid measurement and analysis by forming a channel on a substrate and introducing a fluid into the channel, the present invention provides a channel chip that prevents fluid branching due to residual fluid in the channel, even when the fluid is continuously reciprocating. [Solution] A flow channel chip having a fluid flow path formed therein, the flow channel chip having a connecting passage formed to extend in the vertical direction, wherein the cross-sectional area of ​​the lower end of the connecting passage is formed to be larger than the cross-sectional area of ​​other parts of the connecting passage.

The present invention provides a nanotube array manufacturing method, a nanotube array, and a device, the method comprising the steps of: manufacturing a bilayer two-dimensional material having a relative include angle of lattice orientation on a substrate as a template; determining a chiral parameter of the nanotubes to be manufactured corresponding to the relative include angle of the lattice orientation of the bilayer two-dimensional material; determining a nanoribbon orientation and nanoribbon width based on the determined chiral parameter; determining a pitch between nanoribbons based on the density and nanoribbon width of the nanotubes to be manufactured; etching the bilayer two-dimensional material based on the determined nanoribbon orientation, nanoribbon width, and pitch between nanoribbons to obtain a nanoribbon array of the bilayer two-dimensional material; and thermally exciting the obtained nanotube array made of the bilayer two-dimensional material to obtain a nanotube array. The present invention can manufacture a nanotube array with controllable density, orientation, and chirality.

The application provides a screening device and method and application of small molecules for inducing or inhibiting protein polymerization, adopts a solid-state quartz nanopore as a core detection device, drives target proteins or complexes of the target proteins and small molecules to pass through a nanoscale pore, records ion current changes caused by each time of perforation event in real time, analyzes peak current and residence time characteristic values of each event, and can identify whether the proteins are in monomer, oligomer, aggregation or LLPS state. Meanwhile, the nanopore sensing is combined with small molecule processing, a mapping relationship between current signal changes and aggregation state regulation is established, and screening of small molecules for inducing or destroying protein aggregation behavior is realized. The technology has multiple advantages of label-free, single molecule, real-time monitoring and adaptation to multiple protein aggregation states, and breaks through the bottleneck of throughput and resolution capacity of existing methods.

The application discloses a bandgap thin film structure device and a preparation method thereof. The bandgap thin film structure device comprises a substrate, a sacrifice layer formed on a first surface of the substrate, a first silicon nitride layer formed on the sacrifice layer and parallel to the substrate, and the first silicon nitride layer has a continuous and stepless plane. The first silicon nitride layer comprises a bandgap thin film area and a peripheral part surrounding the bandgap thin film area, the surface of the first silicon nitride layer has bandgap holes arranged periodically, each bandgap hole has a release hole around it, the bandgap holes and the release holes are distributed in the bandgap thin film area, the bandgap holes and the release holes are used for etching the sacrifice layer between the substrate and the bandgap thin film area, the central area of the bandgap thin film area has a defect area, and the defect area does not have the bandgap holes. A second silicon nitride layer is formed on a second surface of the substrate opposite to the first surface. A cavity in which the bandgap thin film area is suspended is formed between the bandgap thin film area of the first silicon nitride layer and the first surface, and the peripheral part is supported by the unetched part of the sacrifice layer.

The invention belongs to the technical field of nanowires and microscope probes. The invention discloses a preparation method of a shape-programmable pinpoint type nanowire, which can accurately control the diameter of the nanowire, the cantilever type (single cantilever or double cantilevers) and the included angle between the double cantilevers by adjusting the step angle and the structure of a guide channel. The morphology programmability enables the AFM probe to be customized according to specific application requirements. The double-cantilever design can also realize multi-modal imaging, such as simultaneous measurement of mechanical and electrical properties of a sample, so that the functional range of the AFM is expanded. The morphology programmability not only improves the adaptability of the probe, but also provides possibility for the application of the probe in a complex environment.

Disclosed herein are methods, devices, and systems including embolic particles for treating tumor cells. An embolic particle may include an inner core and an outer layer. The inner core may have a volume in which a radioisotope may be received, the inner core may include a surface on which a layer may be disposed. An outer layer may have a thickness that may accommodate a therapeutic agent therein, the outer layer may be disposed on a surface of the inner core. The inner core and outer layer may have a combined density sufficient to cause the embolic particles to move along a path with fluid flow, while the embolic particles include dimensions sufficiently large to engage the path to limit fluid flow to tumor cells.

The invention belongs to the technical field of semiconductor testing, and provides a surface acoustic wave force sensor embedded radio frequency probe and a preparation method thereof.The radio frequency probe comprises a probe base body and a surface acoustic wave force sensing unit, and the preparation method comprises the steps that the probe base body is formed through a UV-LIGA technology; and the insulating layer, the piezoelectric film and the interdigital transducer are sequentially prepared on the probe substrate by adopting a micro-nano processing technology. The radio frequency probe obtained by the preparation method realizes miniaturization and integration. According to the invention, real-time monitoring of micro-Newton level contact force is realized by detecting the frequency change of the surface acoustic wave signal, and meanwhile, the high-frequency signal transmission capability is maintained. The probe supports various surface acoustic wave unit configurations such as a single port and double ports, and a differential measurement system can be constructed. The probe solves the problems of parameter misalignment and chip test damage caused by improper contact force in wafer test, realizes synchronous acquisition of contact force and electrical performance parameters, and remarkably improves test precision and yield.

The invention provides a preparation method of a miniature electrochemical three-electrode test chip, which comprises the following steps of: 1, preparing a substrate, depositing a first insulating layer on the surface of the substrate, sputtering a metal lead layer on the first insulating layer, and photoetching and etching the metal lead layer; 2, depositing a second insulating layer on the metal lead layer, and respectively depositing a first metal electrode layer and a second metal electrode layer which are communicated with the working electrode metal lead layer and the counter electrode metal lead layer on the second insulating layer; 3, depositing a third insulating layer on the first metal electrode layer and the second metal electrode layer, and depositing a third metal electrode layer communicated with the reference electrode metal lead layer; 4, patterning the third metal electrode layer to form a circular site; and depositing a fourth insulating layer on the third metal electrode layer, and forming a through hole in the fourth insulating layer to expose the conductive surfaces of the first metal electrode layer, the second metal electrode layer and the third metal electrode layer.

A micro flow passage device in which a flow passage wall has high hydrophobicity and high cracking resistance is provided. In the micro flow passage device, a flow passage interposed between a flow passage wall is formed in the interior of a porous substrate, a flow-passage-wall-forming material constituting the flow passage wall contains a thermoplastic resin and a wax, X < Y where an abundance ratio of the wax in the flow passage wall on the surface side of the porous substrate is denoted by X, and an abundance ratio of the wax present in a pore in the interior of the porous substrate is denoted by Y, a content of the wax in the total flow-passage-wall-forming material is 13.1% by mass or more and 70.0% by mass or less, and SP(B) - SP(W) ≥ 0.6 where an SP value of the wax is denoted by SP(W) [cal / cm3]1 / 2, and an SP value of the thermoplastic resin is denoted by SP(B) [cal / cm3]1 / 2.

The present invention relates to a microstructure including a biocompatible polymer or an adhesive and to a method for manufacturing the same. The present inventors optimized the aspect ratio according to the type of each microstructure, thereby ensuring the optimal tip angle and the diameter range for skin penetration. Especially, the B-type to D-type microstructures of the present invention minimize the penetration resistance due to skin elasticity at the time of skin attachment, thereby increasing the penetration rate of the structures (60% or higher) and the absorption rate of useful ingredients into the skin. In addition, the D-type microstructure of the present invention maximizes the mechanical strength of the structure by applying a triple structure, and thus can easily penetrate the skin. When the plurality of microstructures are arranged in a hexagonal arrangement type, a uniform pressure can be transmitted to the whole microstructures on the skin.

In a general aspect, gettering elements are disclosed for absorbing gas species from a cavity of a vapor cell. In certain aspects, a vapor cell includes a dielectric body having interior and exterior surfaces. The interior surface defines a cavity in the dielectric body, and the exterior surface defines an opening to the cavity. The dielectric body also includes a channel having a porous layer that is configured to absorb a gas species from the cavity. The vapor cell also includes a vapor or a source of vapor residing in the cavity as well as an optical window that covers the opening to the cavity. The optical window has a surface bonded to the exterior surface of the dielectric body to form a bonded interface of the vapor cell. The bonded interface includes a seal around the opening, and the vapor or the source of vapor includes alkali metal atoms.

A method for manufacturing a sensor element for a potentiometric sensor includes: forming a glass layer made of an electrically insulating glass on a surface of a base body, in particular a base body made from an electrically insulating material; arranging a substrate made of copper or a copper-based alloy having a mass fraction of at least 60% copper on the glass layer; covering the substrate arranged on the glass layer with a glass body, for example a glass plate, made of an ion-selective, in particular pH-selective, glass; and subsequently controlling the temperature of the arrangement of the base body, substrate and glass body thus formed in such a way that the substrate is integrally bonded to the glass body made of the ion-selective glass and the glass layer on the surface of the base body.

The invention discloses a manufacturing method of an integrated bionic multi-mode wearable sweat sensor, belongs to the technical field of flexible electronic and biological sensing manufacturing, and aims to solve the problems of poor module integration compatibility, poor stability and low sensitivity in the prior art. According to the method, a mold with bionic spindle-shaped bulges is prepared through photocuring 3D printing, and a polyimide flexible substrate with through micro-channels is formed by utilizing spin coating and stepped thermal imidization processes. Preparing a piezoelectric film on the back surface of the substrate through electrostatic spinning; and a graphene electrochemical sensor and a piezoelectric film electrode are formed on the front surface of the substrate by adopting a laser engraving technology. Finally, micro-channel packaging is achieved through polyamide acid spin coating and thermal imidization. Through the integrated manufacturing process, the effects of good integration compatibility of the motion sensing module and the sweat sensing module, firm interface combination and no signal crosstalk are achieved, and unification of high sensitivity, high stability and good wearing comfort of the sensor is achieved.