2467results about "Valve member-seat contacts" patented technology

A substrate processing apparatus includes a processing vessel provided with a stage holding thereon a substrate to be processed and evacuated at an evacuation port, and a source gas supplying system that supplies plural source gases to the processing vessel separately in the form of a laminar flow, wherein the evacuation port has a slit-form shape extending in a direction generally intersecting perpendicularly to a direction of the laminar flow, the evacuation port is engaged with a valve having a valve body formed with a slit-form opening corresponding to the slit-form shape of the evacuation port, the slit-form opening being provided so as to cause a displacement with respect to the evacuation port in a direction generally intersecting perpendicularly to an extending direction of the evacuation port, the valve changing a degree of valve opening thereof via displacement of said slit-form opening.

A through hole tapered from an opening to the in-depth direction is formed in a semiconductor substrate provided with an integrated circuit. An insulating material is supplied to the through hole through the opening so as to form an insulating layer on the inner surface of the through hole. A conductive material is supplied through the opening to the through hole provided with the insulating layer so as to form a conductive portion inside the insulating layer.

The present invention provides multi-layered microfluidic devices comprising an interface layer between every two substrate layers. The interface layer simplifies the manufacturing process of the multi-layered devices because the interface may comprise a material suitable for etching whereby manufacturing of these devices is simplified to a great extent.

The invention also provides methods of manufacturing the multi-layered devices wherein the devices may comprise substrates composed of non-similar materials that are bonded together by anodic bonding.

A reagent dispensing valve particularly adapted for dispensing precise microfluidic quantities of fluids. The valve includes a valve portion and a solenoid actuator that are in fluid isolation from one another. The valve portion includes a plunger and seat combination and the actuator is substantially decoupled from the fluid path through the valve. The fluid path through the valve is substantially non-tortuous, thereby minimizing localized fluid pressure drops, and hence undesirable gaseous bubble precipitation within the fluid. The valve is also configured to substantially prevent bubble accumulation. The valve can further include a bubble trap for trapping and removing bubbles.

A valve seat at least partially formed of a ceramic material for use in a fracturing pump includes a first body and a second body. The first body is configured to be inserted into a fluid passageway of the fracturing pump. The first body has an outer diameter, D1. The second body extends radially from the first body and has an outer diameter, D2, greater than the outer diameter, D1, of the first body. The second body is at least partially formed of the ceramic material.

This invention relates to valve assemblies having a valve seat body having an axial bore therethrough; wherein the valve seat body has an inclined seat surface located on an upper end of the seat body. The valve assemblies further include a valve member having a valve body such that the valve body is positioned within the axial bore of the valve seat body. A seal is disposed between the seat surface of the seat body and an annular seal surface of the valve member such that the seal prevents contact between the seat surface of the seat body and the valve member.

Rotary sequencing valve comprising a rotor having a rotor face rotatable about an axis perpendicular to the rotor face, wherein the rotor face has a plurality of openings, one or more of which are disposed at a selected radial distance from the axis, and wherein the rotor includes at least one passage connecting at least one pair of the plurality of openings. The valve includes a flexible port plate having a first side and a second side, wherein the first side faces the rotor and engages the rotor such that the flexible port plate can be rotated coaxially by the rotor and can move axially with respect to the rotor, wherein the flexible port plate has a plurality of ports between the first and second sides, which ports are aligned with the openings in the rotor face. The valve also includes a stator having a stator face disposed coaxially with the rotor and the flexible port plate, wherein the second side of the flexible port plate is in sealable, slidable rotary contact with the stator face, wherein the stator face has a plurality of openings, some of which are disposed at the selected radial distance from the axis, and wherein the plurality of openings extend as passages through the stator. The valve may be used in pressure or temperature swing adsorption systems.

A gating apparatus for controlling the gap between two surfaces that includes an upper structure having a polished central region portion, an elastically deformable fulcrum structure, and an elastically deformable lever region. The upper structure can be fabricated from silicon using microelectromechanical system (MEMS) fabrication techniques. The gating apparatus also includes a lower structure coupled to the upper structure at the elastically deformable fulcrum structure. The upper structure, in response to a force, can bend about the fulcrum structure, thereby forming a variable gap between the polished central region portion and the lower structure. The variable gap can be used as a filter to filter fluids and mixed phase fluids. The structures can be made from a wide variety of materials including silicon, glass, ceramic, metal, and plastic.

A valve body and seal assembly comprising a top-stem-guided valve body having at least one cast-in-place elastomeric seal insert in a peripheral seal retention groove and a cast-in-place top guide stem sleeve is made by pouring and curing liquid elastomer in at least one mold comprising the peripheral seal retention groove and the top guide stem. Mold surfaces contacting the poured elastomer are adhesion-inhibiting surfaces which reduce or eliminate background elastomer stress due to shrinkage during curing of the elastomer, and which allow limited relative movement of cast-in-place elastomer with respect to the valve body. Serrations on each of the opposing walls of the seal retention groove are offset to moderate differing stress concentrations in the groove walls.

A valve assembly including a housing having an opening defined by a valve seat, a valve body movable within the housing between a completely opened position disengaged from the valve seat and a completely closed position engaging the valve seat, and a sleeve movable longitudinally along, and rotatably about, a longitudinal axis. The sleeve is connected to the valve body so that the valve body can rotate and move longitudinally with the sleeve. One of the housing and the sleeve includes a cam surface, and the other of the housing and the sleeve includes a cam follower received by the cam surface. A rotatable shaft is in threaded engagement with the sleeve so that rotation of the shaft causes at least one of rotation and longitudinal movement of the sleeve against the cam follower.

A valve achieves a high-vacuum seal and opens and closes with no sliding or otherwise abrading contact between the sealing plate and the valve seat, while maintaining pressure of the plate against the valve seat in the event of a failure in the valve actuation mechanism. These results are attained by use of a composite valve plate that includes a sealing plate joined to a support block through a retractable resilient connector. During retraction, the sealing plate is drawing close to the block by a pneumatic actuator internal to the composite valve plate, the actuator arranged to oppose and overcome a mechanical resilient element also contained within the valve plate that urges the sealing plate outward from the support block to effect the seal when the actuator is not engaged.

A readily adjustable flow rate control device having a movable flow control member which includes a plurality of spaced-apart flow restrictors which are adapted to be selectively positioned intermediate a fluid flow path extending between a fluid supply line and a fluid delivery line. The flow restrictors can take the form of porous rate control frits which can be selectively moved into index with the fluid flow path or microbores formed in a rotatable member which can be rotated to selectively move the microbores into index with the fluid flow path.

A pressure barrier apparatus 2 for providing a removable pressure barrier in a borehole is described. The apparatus comprises a housing 6, 8 defining a central bore 10 having a first part 20 and a second part 22 separated by an erodeable pressure barrier member 18. The housing also defines a second fluid flow passage 12 for connecting the first part to the second part, and a plurality of conduits 24 for directing fluid onto the barrier member. A sleeve 30 has a first condition in which fluid communication between the first part 20 and the second fluid flow passage 12 is prevented, and a second condition in which fluid is permitted to flow from the first part to the second fluid flow passage to cause erosion of the barrier member.

A gate valve has a transfer chamber-side valve element and a process chamber-side valve element connected to a single shaft actuated with a single three-position air cylinder to selectively close a process chamber opening and a transfer chamber opening or fully open both the openings to allow an object to pass therethrough. A lever member is secured to the single shaft. A roller supported by the lever member is kept in engagement with a cam groove of a cam member. A cam support member for supporting the cam member is connected to the piston rod of the three-position air cylinder. A spring is interposed between the lever member and the cam support member. When the piston rod is in the first (lower extremity) position, both the transfer chamber-side valve element and the process chamber-side valve element fully open the transfer chamber opening and the process chamber opening, respectively. As the piston rod shifts from the first position to the second position, the roller shifts from engagement with an upper position of the cam groove to engagement with an intermediate position, causing the process chamber-side valve element to close the process chamber opening. As the piston rod shifts from the second position to the third (upper extremity) position, the roller shifts from the engagement with the intermediate position to engagement with a lower position of the cam groove, causing the transfer chamber-side valve element to close the transfer chamber opening.

A luer activated device includes an inlet adapted to receive a male luer, an outlet associable with a fluid flow system, and a flow path defined therebetween. The inlet receives a resealable valve element having an aperture adapted to receive the male luer. The valve element is adapted such that a male luer inserted into the aperture will open fluid flow through the inlet without causing a substantial change in fluid displacement.