Pendulum valve assembly

a technology of pendulum valves and assembly parts, which is applied in the direction of valve member-seat contacts, mechanical devices, valve operating means/releasing devices, etc., can solve the problem of poor flow control (conductance) in this operating range of the valv

Inactive Publication Date: 2004-08-17
MKS INSTR INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

The present invention provides a new and improved valve assembly including a housing having an interior space and an opening through which fluid can enter and exit the interior space, a valve body movable within the interior space between a completely opened position allowing fluid flow through the opening and a completely closed position preventing fluid flow through the opening, and a sleeve movable longitudinally along, and rotatably about

Problems solved by technology

Thus, the overall conductance includes very little change in flow followed by a very rapid change in flow (and vice v

Method used

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Examples

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Embodiment Construction

Referring to FIG. 1, an exemplary embodiment of a pendulum valve assembly 10 constructed in accordance with the present invention generally includes a housing 12 defining an interior space 14 containing a pendulum valve 16 and having a pair of opposing openings 18, 20 through which gas can enter and exit the interior space. Valve seats 22, 24 are provided in the interior 14 of the housing 12 around edges of the openings 18, 20. As shown, the pendulum valve 16 includes a valve body 26 which is moved between a completely opened position allowing fluid flow through the opening 18, as shown in broken lines, and a completely closed position preventing fluid flow through the opening 18, as shown in solid lines.

As also shown, the first of the openings 18 of the pendulum valve assembly 10 can, for example, be connected to a process chamber and a second of the openings 20 can be connected to a vacuum pump to form a portion of a high purity gas delivery system, such as those used in semicondu...

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Abstract

A valve assembly including a housing having an opening defined by a valve seat, a valve body movable within the housing between a completely opened position disengaged from the valve seat and a completely closed position engaging the valve seat, and a sleeve movable longitudinally along, and rotatably about, a longitudinal axis. The sleeve is connected to the valve body so that the valve body can rotate and move longitudinally with the sleeve. One of the housing and the sleeve includes a cam surface, and the other of the housing and the sleeve includes a cam follower received by the cam surface. A rotatable shaft is in threaded engagement with the sleeve so that rotation of the shaft causes at least one of rotation and longitudinal movement of the sleeve against the cam follower.

Description

FIELD OF THE INVENTIONThe present invention relates generally to pendulum or gate valve assemblies, and more particularly to a pendulum valve assembly including a new and improved arrangement providing both rotary and axial motion to a flapper of the pendulum valve assembly.BACKGROUND OF THE INVENTIONA pendulum valve assembly generally includes a housing containing a pendulum valve and including an interior space and a pair of openings through which gaseous fluid can enter and exit the interior space. Pendulum valve assemblies are particularly useful in high purity gas delivery systems, such as those used in semiconductor manufacturing or other thin film coating processes. As its name implies, a pendulum valve pivots between open and closed positions, and includes a valve body, which is usually provided as a disk or flapper, connected to a rotatably shaft by a pivot arm. In a completely opened position the disk of the pendulum valve is moved out of the flow path defined by the openi...

Claims

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Application Information

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IPC IPC(8): F16K51/02F16K1/00F16K1/24
CPCF16K51/02F16K3/10F16K1/24F16K3/04F16K3/06
Inventor LUCAS, PAUL D.
Owner MKS INSTR INC
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