An interferometric
microscope (200, 300) comprising: a sample holder (207) configured to hold a sample; a
light source (201) arranged to illuminate the sample in the sample holder; an
optical detector (210) arranged to capture images of light scattered by a feature of the sample; an optical
system comprising a plurality of optical elements (202, 203, 204, 206) arranged to direct an illumination beam of light from the
light source to the sample holder and to collect light reflected by the sample and by the sample holder to form an image beam directed to the
detector; an optical component (212, 313) arranged in the path of the image beam and configured to divide the light in the image beam into a plurality of beam portions, wherein the beam portions are propagating along a common
optical beam path, wherein the beam portions interfere at the
detector; and a
processing unit (211) configured to determine, from a plurality of images captured by the
detector, a parameter indicative of the absolute value of the
optical field of the light scattered by the feature