The invention discloses a room-temperature MEMS
carbon monoxide sensor based on an Nb-TiO2 / WO3
heterojunction powder material and a preparation method of the room-temperature MEMS
carbon monoxide sensor, and relates to the technical field of
carbon monoxide gas detection. The preparation method comprises the following steps: S1, preparing an Nb-TiO2 / WO3
heterojunction powder material by a two-step hydrothermal method; s2, 0.5 g of the Nb-TiO2 / WO3
heterojunction powder material, the aluminum
oxide dispersion liquid and
glycerol are mixed and subjected to ball milling, and
slurry needed by the MEMS carbon
monoxide sensor is obtained; s3, dispensing the
slurry onto an MEMS gas sensor substrate with an
electrode; according to the room-temperature MEMS carbon
monoxide sensor provided by the invention, the sensitivity and selectivity of TiO2 to carbon
monoxide can be improved through Nb
doping and WO3 modification, the combination of the Nb-doped and WO3-modified
semiconductor gas-sensitive material and the MEMS device can utilize the characteristics of
miniaturization, easy integration, low
power consumption, good stability and the like of the MEMS device, and the gas-sensitive gas-sensitive material can be used as a gas-sensitive gas-sensitive material for the room-temperature MEMS carbon monoxide sensor. The response and working consistency of the TiO2 gas-sensitive material to CO at
room temperature is greatly improved, and the method has important practical application value for further promoting the development of
semiconductor gas-sensitive devices.