38550results about How to "Good repeatability" patented technology

The present invention describes a method and apparatus for forming a uniform silicon containing film in a single wafer reactor. According to the present invention, a silicon containing film is deposited in a resistively heated single wafer chamber utilizing a process gas having a silicon source gas and which provides an activation energy less than 0.5 eV at a temperature between 750° C.-550° C.

The invention generally provides a ground shield for use in a physical vapor deposition (PVD) chamber. In one embodiment, a ground shield includes a generally cylindrical body comprising an outer wall, an inner upper wall, an inner lower wall having a diameter less than a diameter of the inner upper wall and a reentrant feature coupling the upper and inner lower walls. The reentrant feature advantageously prevents arching between the shield and target, which promotes greater process uniformity and repeatability along with longer chamber component service life.

The invention discloses a trajectory tracking control method used for an automatic driving robot of a vehicle, which relates to electronic control technologies of vehicles. The desired trajectory of a vehicle is described in a data point mode to obtain the current position information of the vehicle; humanoid driving is carried out according to the current driving direction at the current vehicle position to preview a distance ahead; the position obtained by previewing is compared with the desired trajectory to determine the lateral position deviation, the angle deviation and the vehicle speed deviation of the coordinate position obtained by previewing relative to the desired trajectory; then, the vehicle direction is jointly controlled by a trajectory tracking and speed controller according to position deviation and direction deviation; and according to vehicle speed deviation, the control quantities of an accelerator pedal and a brake pedal are determined with a fuzzy control method. The trajectory tracking control method is suitable for controlling the trajectory tracking of any trajectory, various vehicle types and various working conditions, and an automatic driving robot performs the control. The trajectory tracking control method has high precision and good repeatability and has an important meaning for guaranteeing the quality of vehicle reliability experiments and improving experiment safety.

The invention discloses a carbon/silicon/carbon nano composite structure cathode material and a preparation method thereof, belonging to the technical field of electrochemical power supply technologies. The cathode material consists of a carbon-based conductive substrate, nano silicon and a nano carbon coating layer, wherein the nano silicon is uniformly distributed on the carbon-based conductive substrate; the nano carbon coating layer is arranged on the surface of the nano silicon; the carbon-based conductive substrate is porous carbon, a carbon nanotube or graphene; the nano silicon exists in the state of nanoparticles or nano films; the weight percentage of the nano silicon in the cathode material is 10-90 percent; and the thickness of the nano carbon coating layer is 0.1-10 nanometers. The preparation method comprises the following steps of: depositing nano silicon on the carbon substrate in a reaction space in oxygen-free atmosphere by adopting a chemical vapor deposition process; and coating nano carbon on the surface of the nano silicon by adopting the chemical vapor deposition process. In the obtained carbon/silicon/carbon composite cathode material, the volume change of a silicon electrode material is controlled effectively in the charging and discharging processes, the electrode structure is kept complete, the circulation volume is large, the circulation service life is long, and the electrochemical performance is high.

The invention discloses a film deposition method which comprises the following steps: placing a first electrode plate used as an anode and a second electrode plate used as a cathode in parallel in a reaction chamber, wherein the surface of the second electrode plate facing to the first electrode plate is provided with a sacrificial layer; putting a substrate on the surface of the first electrode plate facing to the sacrificial layer; leading etching gas into the reaction chamber; grounding the first electrode plate, and applying DC negative voltage to the second electrode plate; ionizing the etching gas into a plasma so as to etch the sacrificial layer, and depositing a film on the surface of the substrate. The film deposition method can improve the performance, particularly the stability of the film and the uniformity of large-area film deposition.

The present invention relates generally to semiconductor fabrication and particularly to fabricating magnetic tunnel junction devices. In particular, this invention relates to a method for using the dielectric layer in tunnel junctions as an etch stop layer to eliminate electrical shorting that can result from the patterning process.

A plasma processing apparatus has a liquid storage vessel which is formed outside of a dielectric window and in which a plasma-exciting coil or electrode is placed inside and moreover in which an electrically insulative liquid is stored in the inside of the liquid storage vessel, as well as a cooling unit and a heating unit for the liquid. Temperature of the liquid stored in the liquid storage portion is adjusted, by which temperature of the plasma-exciting coil or electrode and the dielectric window is controlled via the liquid.

A graphical password authentication arrangement and method display a grid on a display upon a user's request to access a restricted resource. The graphical password authentication arrangement requires the user to enter his or her access password by selecting one or more intersections on the grid on the display with an input device. A processing means determines whether to grant the user to access the restricted resource by comparing the access password entered with a corresponding file password for the user, which is stored in a storage means.

The invention relates to a catalyst for dehydrogenating propane to prepare propone, which uses thermal-resistant oxide as carrier, uses palladium-group metal as main catalyst, uses IV A group metal and rare-earth metal as agents, uses halogen as modifier, and uses inorganic oxide with high temperature resistance as adhesive. The inventive catalyst under high temperature and low pressure has higher propane transfer rate, propone selectivity and reaction stability. And the preparation comprises that at 60-100Deg. C, immerging thermal-resistant oxide with rare-earth metal water solution for 2-10h, at 60-180Deg. C baking for 2-10h, at 400-600Deg. C baking for 3-10h, immerging said carrier and the water solution which contains palladium metal and IVA metal at 60-100Deg. C for 2-10h, and baking for 2-10h at 60-180Deg. C, adding adhesive, protruding agent and acid gel solvent, protruding and shaping, baking for 2-10h at 60-180Deg. C, activating for 3-10h at 400-600Deg. C, and reducing for 2-10h in hydrogen flow at 400-600Deg. C.

A dry test strip assembly includes: a carrier base having a test port and a well adapted for receiving a dry test strip element, and a cover having a sample opening. The cover can be snapped onto the base with the sample opening aligned over the test port and with a test strip element compressed between the base and cover. A maximum dry test strip compression stop controls the maximum compression on the dry test strip, and a minimum dry test strip compression stop controls the minimum compression on the dry test strip. A rib between two test ports prevents fluid flow in the dry test strip element from one side of the rib to another, thereby separating the test strip element into a plurality of separate fluid compartments. A manufacturing system efficiently assembles the dry test strip assembly without handling by humans.

This invention incorporates the techniques of geophysical technology into medical imaging. Ultrasound waves are generated from multiple, simultaneous sources tuned for maximum penetration, resolution, and image quality. Digitally recorded reflections from throughout the body are combined into a file available for automated interpretation and wavelet attribute analyses. Unique points within the object are imaged from multiple positions for signal-to-noise enhancement and wavelet velocity determinations. This system describes gaining critical efficiencies by reducing equation variables to known quantities. Sources and receivers are locked in invariant, known positions. Statistically valid measurements of densities and wavelet velocities are combined with object models and initial parameter assumptions. This makes possible three-dimensional images for viewing manipulation, mathematical analyses, and detailed interpretation, even of the body in motion. The invention imposes a Cartesian coordinate system on the image of the object. This makes reference to any structure within the object repeatable and precise. Finally, the invention teaches how the recording and storing of the received signals from a whole body analysis makes a subsequent search for structures and details within the object possible without reexamining the object.

A surface inspection system and method is provided which detects defects such as particles or pits on the surface of a workpiece, such as a silicon wafer, and also distinguishes between pit defects and particle defects. The surface inspection system comprises an inspection station for receiving a workpiece and a scanner positioned and arranged to scan a surface of the workpiece at the inspection station. The scanner includes a light source arranged to project a beam of P-polarized light and a scanner positioned to scan the P-polarized light beam across the surface of the workpiece. The system further provides for detecting differences in the angular distribution of the light scattered from the workpiece and for distinguishing particle defects from pit defects based upon these differences.

Methods of fabricating devices for collecting a sample of physiological and for measuring a characteristic, e.g., an analyte concentration, of the sampled physiological sample. The devices are in the form of a test strip which include a biosensor and at least one skin-piercing element which is a planar extension of a portion of the biosensor. The fabrication methods provide various or forming the test strip and the skin-piercing element.

A pharmaceutical formulation for delayed release of the active ingredient 3-(3-dimethylamino-1-ethyl-2-methylpropyl)phenol or a pharmaceutically acceptable salt thereof in a matrix containing between 1 and 80 wt. % of at least one pharmaceutically acceptable hydrophilic or hydrophobic polymer as a matrix forming agent and exhibiting in vivo the following release rate: 3 to 35% by weight (based on 100% by weight active ingredient) 3-(3-dimethylamino-1-ethyl-2-methyl-propyl)phenol released after 0.5 hours; 5 to 50% by weight 3-(3-dimethylamino-1-ethyl-2-methyl-propyl)phenol released after 1 hour; 10 to 75% by weight 3-(3-dimethylamino-1-ethyl-2-methyl-propyl)phenol released after 2 hours; 15 to 82% by weight 3-(3-dimethylamino-1-ethyl-2-methyl-propyl)phenol released after 3 hours; 30 to 97% by weight 3-(3-dimethylamino-1-ethyl-2-methyl-propyl)phenol released after 6 hours; more than 50% by weight 3-(3-dimethylamino-1-ethyl-2-methyl-propyl)phenol released after 12 hours; more than 70% by weight 3-(3-dimethylamino-1-ethyl-2-methyl-propyl)phenol released after 18 hours, and more than 80% by weight 3-(3-dimethylamino-1-ethyl-2-methyl-propyl)phenol released after 24 hours.

This invention concerns the method of extracting salvianolic acid A from Chinese crude drug: danshen root, and the quality control methods and drug combinations, and the application of this drug. It can be used in the preparation of the prevention drugs for cardiovascular disease, liver damage, liver fibrosis, pulmonary fibrosis and other.

The invention discloses a method for grafting a polymer ona surface of graphene. The method comprises the following steps: adding 1 part by weight of graphene or graphene oxide, 10-1000 parts by weight of solvent and 10-1000 parts by weight of vinyl monomer, and adding 0.01-10 parts by weight of initiator under introduction of nitrogen; heating to 55-90 DEG C, and carrying out reaction for 1.5-60hours; and precipitating, centrifugating, washing, and drying, thus obtaining a product of polymer-grafted graphene. The method is convenient and simple in process, can be used for the large-scale production, is the universal method and ensures that a variety of polymers can be grated onto the graphene. The obtained functionalized graphene has good solubility and good solution processability, is conducive and has extensive application value in micro-nano electronics, machinery, chemical industry, high-performance materials and other fields.