The invention discloses a
semiconductor device, a preparation method, a
chip and
electronic equipment, and relates to the technical field of semiconductors, the
semiconductor device comprises a plurality of high-
electron-mobility transistors and isolation grooves, the isolation grooves are arranged between adjacent first high-
electron-mobility transistors and second high-
electron-mobility transistors, and the first high-electron-mobility transistors and the second high-electron-mobility transistors are adjacent to the first high-electron-mobility transistors and the second high-electron-mobility transistors. The isolation groove at least penetrates through the layer where the
ohmic contact layers of the high-electron-mobility transistors are located, the
ohmic contact layers of the first high-electron-mobility
transistor and the second high-electron-mobility
transistor are separated, and
electrical isolation is achieved. Moreover, a film layer is arranged between the bottom wall of the isolation groove and the substrate, the film layer is also arranged between the
barrier layer and the substrate, the film layer below the isolation groove comprises an
ion implantation region, and the
ohmic contact layer is further electrically isolated. Therefore, the isolation groove and the
ion implantation region are mutually combined to realize
electrical isolation, the isolation difficulty of a subsequent device is effectively reduced, isolation high-temperature failure is avoided, and the isolation stability of the device is improved.